位相光栅的衍射级次

用矢量衍射理认讨论了位相光栅衍射级次的有限性及其与入射角的关系，得出的吉论与用光程方法得出的结果一致，作出了在不同入射角条件下各衍射级次的分布图，给出了求解各级衍射波方向的公式。     

Nanostructured gradient-index antireflection diffractive optics

We describe the fabrication and characterization of a nanostructured diffractive element with near-zero reflection losses. In this element, subwavelength nanostructures emulating adiabatic index matching are integrated on the surface of a diffractive microstructure to suppress reflected diffraction orders. The fabricated silicon grating exhibits reflected efficiencies that are suppressed by 2 orders of magnitude over broad wavelength bands and wide incident angles. Theoretical models of the fabricated structure based on rigorous coupled-wave analysis and effective medium theory are in agreement with the experimental data. The proposed principles can be applied to improve the performance of any diffractive structures, potentially leading to more efficient Fresnel lenses, holographic elements, and integrated optical systems.     

基于高次谐波产生的极紫外偏振涡旋光

突破传统涡旋光场束缚,发展短波极紫外涡旋光场是实现阿秒脉冲偏振控制的有效途径.本研究利用自制的平场光栅光谱仪和超快时间保持的单色仪,以800 nm,35 fs高斯或具有偏振奇点的涡旋光脉冲驱动诱导氩原子产生高次谐波,分别获得相应的高次谐波光谱以及谐波谱单阶光源的分布.实验结果表明,基于高次谐波产生实现近红外波段的涡旋光束特性转移到极紫外波段,优化后的极紫外涡旋可以实现每秒108光子数输出.同时发现极紫外波段的涡旋场和高斯场高次谐波产生具有相似相位匹配机制.基于高次谐波产生的极紫外波段的偏振涡旋光为探究和操控原子分子量子态的含时演化动力学以及形成阿秒矢量光束提供了重要的方法和技术手段.     

Studying Diffractive Orders of the Phase Grating

Abstract

The finiteness of diffractive orders of the phase grating and the relations between the diffractive orders and the incident angle are discussed in this article. The distribution of each diffractive order is illustrated at different incident angles, and the diffractive direction of each diffraction wave is given. It is pointed out that while only the zero-order reflection wave and the zero-order transmit exist in the free-space layer, the diffraction waves of higher diffractive orders may exist in the substrate layer.     

Polarizing diffraction-grating triplicators

We report experimental results with a reflective continuous anisotropic polarizing diffraction-grating beam splitter that produces three diffraction orders. The diffraction efficiencies and polarizations of the diffracted orders are controlled through the incoming polarization state and by use of a wave plate with arbitrary orientation located between the grating and a mirror. In particular, we show experimental evidence of a diffraction triplicator-a 100% efficiency diffractive device that generates three orders with equal power.     

等腰闪耀光栅的相位补偿设计

设计了一种新型同面相位补偿型等腰闪耀光栅。等腰设计保证了正负衍射级对称分布在光栅法线两侧;通过优化设计同面相位补偿槽的大小,可使衍射能量向中间级次转移,只保留两个衍射极大值方向,抑制0级和高衍射级能量分布,避免能量的浪费．而且降低了高衍射级次光线因刻线阻挡导致的散射噪声,解决了加工对准与多次衍射的难题。通过理论建模和计算机仿真．分析了与反面相位补偿等腰闪耀光栅的差异,绘制了典型的衍射光强分布图。另外,还探讨了这种新型等腰闪耀光栅的灰度掩模二元光学加工方法。     

Modulation Transfer Function of Blazed Diffractive Optics Produced by Diamond Turning

In blazed diffractive optics produced by the diamond turning process, the finite size of the tool determines the decrease in diffraction efficiency of the desired order. Diffracted light of other orders degrades the image quality. To analyze the influence of the tool, we evaluate diffraction efficiency and phase of periodic gratings based on the electromagnetic theory and calculate modulation transfer function using a linear system approach.     

小F数衍射微透镜阵列光学性能研究

本文基于小光点扫描,在国内首次提出了一种测试小F数衍射微透镜阵列光学性能的方法.利用光通信用半导体激光器和探测器建立了一套测试系统,并对所研制的大阵列,小单元尺寸的多相位菲涅耳衍射微透镜阵列的衍射效率和点扩散函数进行了测试.结果表明,衍射微透镜实际衍射光斑比理论衍射受限光斑扩展不大,8相位和16相位石英微透镜的衍射效率分别高达80.2%和87.5%,说明本实验室对多相位的设计理论和制作工艺已基本掌握,满足应用的要求.     

Focusing light with a reflection photon sieve

An advanced type of diffractive optical element is presented that combines the concept of the photon sieve with an off-axis, off-normal incidence reflection geometry. Compared to transmission optical elements, the signal-to-background ratio is significantly increased by separating the first from other diffraction orders without drastically reducing the size of the smallest diffractive element. The reflection photon sieve produces sharp foci at maximum contrast and offers the advantages of effective heat dissipation and a large working space above the focal plane. Experimental results for a device working at a photon energy of 100 eV are presented and compared to theory.     

Wavelength separation from extreme ultraviolet mirrors using phaseshift reflection

A generic design and fabrication scheme of Mo/Si multilayer-grating phaseshift reflector systems is reported. Close to optimized extreme ultraviolet (EUV, λ=13.5 nm) reflectance values up to 64% are demonstrated, while the diffractive properties can be exploited in spectral filtering applications. The results can contribute to a wavelength-unspecific solution for the suppression of λ>100 nm out-of-band radiation in EUV lithography.     

Analytical study of disturbing diffraction orders in in-line computer generated holograms for aspheric testing

The effect of spurious diffraction orders due to an in-line diffractive compensator for the measurement of aspheric surfaces is analytically studied. The use of a filtering aperture to isolate the measurement diffraction order from the stray orders introduces additional spurious fields that must be analyzed for a correct evaluation of surface defects. In this work the influence of the additional diffraction orders is studied and an analytical expression for the disturbing field on the detector is obtained.     

基于光谱合束技术的透射光栅模拟设计

半导体激光器光谱合束技术能够实现近衍射极限的高功率激光输出,已成为当前研究热点。衍射光栅的性能直接决定光谱合束的激光输出效果。模拟设计了一种针对940 nm波长、熔融石英材料的亚波长透射光栅。基于严格耦合波理论对光栅结构进行初步设计,运用Rsoft软件依次对光栅占空比、脊高和周期等参数进行优化确定,同时分析了各个参数对光栅衍射效率的影响。所设计的透射式光栅实现第-1级衍射级次的波分复用功能,衍射效率达到91.2%(TE模式),同时压缩其他衍射级次,使其衍射效率降到1.2%以下。同时在光栅入射角度59°±3°范围内保持90%以上的衍射效率,实现高功率激光输出的同时具有较高的误差容错率,易于调节,满足光谱合束技术的要求。     

Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5 16.0-nm wavelength region

The efficiency of an ion-etched laminar holographic grating was measured at near-normal incidence in the 14.5-16.0-nm wavelength range. The grating had an electron-beam-evaporated Mo/Si multilayer coating matched to the grating groove depth. The efficiency peaked at 16.3% in the first inside order at 15.12 nm and 15.0% in the first outside order at 14.94 nm. These are believed to be the highest efficiencies obtained to date from a multilayer-coated laminar grating at near-normal incidence in the EUV (lambda<30.0nm) . Zero and even orders were almost completely suppressed. The grating groove efficiency in the first order approached the theoretical limit of 40.5%.     

Chromatic-distortion compensation in splitting and focusing of femtosecond pulses by use of a pair of diffractive optical elements

We propose a simple optical system to compensate for chromatic distortion that occurs during fan-out of femtosecond pulses by diffractive optics. The proposed system comprises a pair of diffractive elements, one for splitting an incoming pulse and the other for focusing the split pulses. With an appropriate separation between the elements, chromatic distortion resulting from the spectral bandwidth of a femtosecond pulse is removed, and an array of focused pulses with the same dimensions can be obtained. The theory has been verified through optical and processing experiments with 100-fs, 800-nm pulses.     

紫外衍射微透镜阵列的设计与制备

为了提高紫外焦平面阵列的填充因子,可以通过微透镜阵列与紫外焦平面阵列的集成,以改善紫外焦平面阵列的探测性能。根据标量衍射理论设计了用于日盲型紫外焦平面阵列的128×128衍射微透镜阵列,其工作中心波长为350nm,单元透镜F数为F/3.56。采用组合多层镀膜与剥离的工艺方法制备了128×128衍射微透镜阵列,对具体的工艺流程和制备误差进行了分析,测量了衍射微透镜阵列的光学性能。实验结果表明:衍射微透镜阵列的衍射效率为88%,与理论值95%有偏差,制备误差主要来自对准误差和线宽误差。紫外衍射微透镜阵列具有均匀的焦斑分布,与紫外焦平面阵列单片集成能较好地改善器件的整体性能。     

一种近似矢量衍射模型在衍射微光学元件分析中的应用

标量衍射理论形式简洁，有很高实用性，但是在衍射微光学元件分析中显得模型粗糙，准确度下降。严格矢量衍射理论由于计算复杂，非常耗费时间和资源，因此也不是一种很有效的设计工具。 我们在本文中运用了一种简单的近似矢量衍射模型分析了几种典型衍射微光学元件衍射性能，此衍射模型采用了标量衍射理论和近似近场模型的结合。 TE和TM两种偏振模式均运用此近似矢量衍射模型进行了分析，我们发现此衍射模型可以得到比标量衍射理论更准确的结果，而与严格电磁场理论相比，它占用很少的计算时间。     

Circular Dammann grating

A circular Dammann grating that can produce circular equal intensities at various orders in the far field is described. A set of parameters such as order, circular number, uniformity, and diffraction efficiency has been defined to describe the novel diffractive phase elements. Numerical solutions of binary-phase (0, pi) circular Dammann gratings are given. The results of experiments with a four-order circular Dammann grating made by a lithographic technique are presented. This novel diffractive optical element should be highly interesting in a wide variety of practical applications.     

超表面上表面等离激元波的光栅衍射行为研究

本文利用严格数值仿真研究了550~700 nm波段的可见光通过金属光栅耦合方式激发的表面等离激元(SPP)波在金属表面的光栅衍射行为与现象。研究结果表明:SPP波在金属表面的衍射行为与自由空间光相比有极大不同,由于SPP波的近场属性,经金属光栅衍射后在近场可表现出明显的光栅分光现象,但经过一段传输距离后则分光现象消失而表现为不同级次的光合为同一束光;在近场衍射情况下,其情况与自由空间光衍射行为类似,对SPP亚波长金属光栅来说同样只有零级透射光;而当金属光栅周期大于SPP波长时,高级衍射级次则开始出现。研究结果对下一步在金属表面上实现微米级片光谱仪器具有重要借鉴意义。     

Generation of extreme ultraviolet vortex beams using computer generated holograms

We fabricate computer generated holograms for the generation of phase singularities at extreme ultraviolet (EUV) wavelengths using electron beam lithography and demonstrate their ability to generate optical vortices in the nonzero diffraction orders. To this end, we observe the characteristic intensity distribution of the vortex beam and verify the helical phase structure interferometrically. The presented method forms the basis for further studies on singular light fields in the EUV frequency range, i.e., in EUV interference lithography. Since the method is purely achromatic, it may also find applications in various fields of x ray optics.     

基于单次傅里叶变换的分段衍射算法

针对单次傅里叶变换算法(S-FFT算法)受到采样定理的约束,衍射面画幅尺寸和有效内容像素数无法灵活控制,很容易出现衍射面画幅尺寸大小与衍射距离不匹配的情况,本文提出了一种分段衍射算法。首先,在采样数、光的波长、初始衍射面大小确定的情况下,利用拆分的衍射距离比控制最终衍射面画幅尺寸。然后,对单次衍射计算结果与分段衍射计算结果进行了图像相似度对比。实验表明,分段衍射算法可在画面强度分布不变的情况下,提高有效像素数目,数据量增加了2~3个数量级。此外,文章分析了造成误差的一个主要原因来自有效数据分辨率提高后,细节分布与低分辨率像素值之间的差别。在图像细节较丰富时,其差别较大。因此这种差别应视为优于直接计算的一种结果。本算法能够获得更加清晰的图像细节,灵活调整衍射面画幅尺寸,使得S-FFT算法在大衍射距离问题计算中能发挥其算法优势。