Preparation of Microporous ORMOSILs by Thermal Degradation of Organically Modified Siloxane Resin

Silicon containing materials have traditionally been used in microelectronic fabrication. Semi-conductor devices often have one or more arrays of patterned interconnect levels that serve to electrically couple the individual circuit elements forming an integrated circuit. These interconnect levels are typically separated by an insulating or dielectric film. Previously, a silicon oxide film was the most commonly used material for such dielectric films having dielectric constants (k) near 4.0. However, as the feature size is continuously scaling down, the relatively high k of such silicon oxide films became inadequate to provide efficient electrical insulation. As such, there has been an increasing market demand for materials with even lower dielectric constant for Interlayer Dielectric (ILD) applications, yet retaining thermal and mechanical integrity. We wish to report here our investigations on the preparation of ultra-low k ILD materials using a sacrificial approach whereby organic groups are burnt out to generate low k porous ORMOSIL films. We have been able to prepare a variety of organically modified silicone resins leading to highly microporous thin films, exhibiting ultra-low k from 1.80 to 2.87, and good to high modulus, 1.5 to 5.5 GPa. Structure property influences on porosity, dielectric constant and modulus will be discussed.     

Analysis of Low-k Organosilicon and Low-Density Silica Films Deposited in HMDSO Plasmas

Low-dielectric constant (low-k) films have been prepared by plasma-enhanced chemical vapor deposition from hexamethyldisiloxane (HMDSO). The films are analyzed by ellipsometry, infrared absorption spectroscopy while their electrical properties are deduced from C–V and I–V measurements performed on metal/insulator/silicon structures. First, it is shown that the carbon-containing silicon oxide films deposited in HMDSO and HMDSO/Ar plasmas have a dielectric constant equal to 3.0 ± 0.1 and are thermally stable at 400°C. The leakage current densities measured for an electric field of 1 MV/cm are less than 10^–9 A/cm² and the breakdown fields are in the range of 6–7 MV/cm. Then, a low-density silica film was obtained by exposing a film deposited in an HMDSO plasma to an O₂ plasma. The dielectric constant of this low-density silica film is 3.5 and its breakdown field is close to 6 MV/cm.     

Core‐shell structured poly(glycidyl methacrylate)/BaTiO3 nanocomposites prepared by surface‐initiated atom transfer radical polymerization: A novel material for high energy density dielectric storage

Core‐shell structured barium titanate‐poly(glycidyl methacrylate) (BaTiO₃‐PGMA) nanocomposites were prepared by surface‐initiated atom transfer radical polymerization of GMA from the surface of BaTiO₃ nanoparticles. Fourier transform infrared spectroscopy confirmed the grafting of the PGMA shell on the surface of the BaTiO₃ nanoparticles cores. Transmission Electron Microscopy results revealed that BaTiO₃ nanoparticles are covered by thin brushes (～20 nm) of PGMA forming a core‐shell structure and thermogravimetric analysis results showed that the grafted BaTiO₃‐PGMA nanoparticles consist of ～13.7% PGMA by weight. Upon incorporating these grafted nanoparticles into 20 μm‐thick films, the resultant BaTiO₃‐PGMA nanocomposites have shown an improved dielectric constant (ε = 54), a high breakdown field strength (～3 MV/cm) and high‐energy storage density ～21.51 J/cm³. AC conductivity measurements were in good agreement with Jonscher's universal power law and low leakage current behavior was observed before the electrical breakdown field of the films. Improved dielectric and electrical properties of core‐shell structured BaTiO₃‐PGMA nanocomposite were attributed to good nanoparticle dispersion and enhanced interfacial polarization. Furthermore, only the surface grafted BaTiO₃ yielded homogenous films that were mechanically stable. © 2014 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2015 , 53, 719–728     

Preparation and dielectric properties of polyimide/silica nanocomposite films prepared from sol–gel and blending process

Using poly(amic acid) (PAA) as a precursor followed by thermal imidization, the polyimide/silica nanocomposite films were prepared via an improved sol–gel process and a blending process, respectively. FT‐IR, TEM and TGA measurements were used to characterize the structure and properties of the obtained films. The results confirmed that the introduction of silica did not yield negative effects on the conversion of the PAA precursor to the polyimide. With the increase of silica content, the aggregation of silica appeared in the polyimide matrix, and the thermal stability decreased slightly for both kinds of films. The dielectric constant (ε) of both films increased slowly with the increase of the silica concentration. The dielectric constant of the obtained polyimide/silica nanocomposite films displayed good stability within a wide range of temperatures or frequency. Based on modeling relation between ε and silica content, the difference in dielectric properties for two kinds of nanocomposites are discussed. Copyright © 2007 John Wiley & Sons, Ltd.     

Dielectric properties of poly(4‐vinylphenol) with embedded PbO nanoparticles

An organic/inorganic nanocomposite film was synthesized using poly(4‐vinylphenol) (PVPh) as an organic insulating polymer and PbO nanoparticles as a high‐k inorganic material to serve as an organic insulator with enhanced dielectric properties. PbO nanoparticles were dispersed into propylene glycol monomethyl ether acetate, and a solution of PbO/PVPh nanocomposite was prepared by adding a crosslinker. The PbO nanoparticle content within the PVPh polymer matrix was varied, and the effects of this variation upon the properties of the resulting nanocomposite films were studied, including the properties of surface morphology, surface bonding state and dielectric characteristic. The dielectric constant increased with increasing PbO content, reaching 9.2 at 1 MHz and with dielectric loss below 0.09 for the PbO content of 6 vol%. Furthermore, the leakage current increased to only 1.3 × 10^?8 A cm^?1 at the highest nanoparticle loadings, compared to the 7.2 × 10^?9 of pristine PVPh. The addition of PbO nanoparticles was found to effectively suppress the absorption of moisture on the surface of PbO/PVPh nanocomposite, although it also increased surface roughness, owing to the agglomeration and particulation of PVPh arising from an anchoring effect of the PbO nanoparticles. Copyright © 2015 John Wiley & Sons, Ltd.     

One-step fabrication of ultralow dielectric polyimide films consisting of size-controlled mesoporous nanoparticles

Dielectric materials with ultralow dielectric constants (<2.0) are desiderated in the integrated circuits (ICs). In this work, we fabricated polyimide (PI) films consisting of mesoporous nanoparticles (MPNPs-PF) through a one-step solvent evaporation induced self-assembly method. Poly(amic acid) was selected as the polymer matrix; and the commercial triblock copolymer F127 was adopted as the mesoporous template as well as the nanoparticle morphology controller, respectively. After imidization and template removal, the dense films consisting of closed-packed PI nanoparticles with an average diameter less than 50 nm were obtained. Since the nanoparticles were fully composed of worm-like mesopores, the dielectric constant (k value) of the resultant porous PI films can reach as low as 1.92. When the reactive end-capper of maleic anhydride (MA) was blended into poly(amic acid), k value decreased even lower to 1.86. Meanwhile, the modulus of the resultant porous PI films was higher than 1 GPa.     

Crystal growth in alumina/poly(ethylene terephthalate) nanocomposite films

The crystal growth and morphology in 150‐nm‐thick PET nanocomposite thin films with alumina (Al₂O₃) nanoparticle fillers (38 nm size) were investigated for nanoparticle loadings from 0 to 5 wt %. Transmission electron microscopy of the films showed that at 1 wt % Al₂O₃, the nanoparticles were well dispersed in the film and the average size was close to the reported 38 nm. Above 2 wt % Al₂O₃, the nanoparticles started to agglomerate. The crystal growth and morphological evolution in the PET nanocomposite films kept at an isothermal temperature of 217 °C were monitored as a function of the holding time using in situ atomic force microscopy. It was found that the crystal nucleation and growth of PET was strongly dependent on the dispersed particles in the films. At 1 wt % Al₂O₃, the overall crystal growth rate of PET lamellae was slower than that of the PET homopolymer films. Above 2 wt % Al₂O₃, the crystal growth rate increased with nanoparticle loading because of heterogeneous nucleation. In addition, in these PET nanocomposite thin films, the Al₂O₃ nanoparticles induced preferentially oriented edge‐on lamellae with respect to the surface, which was not the case in unfilled PET as determined by grazing‐incidence X‐ray diffraction. © 2007 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 45: 747–757, 2007     

The origin of DC electrical conduction and dielectric relaxation in pristine and doped poly(3‐hexylthiophene) films

We present here the evidence for the origin of dc electrical conduction and dielectric relaxation in pristine and doped poly(3‐hexylthiophene) (P3HT) films. P3HT has been synthesized and purified to obtain pristine P3HT polymer films. P3HT films are chemically doped to make conducting P3HT films with different conductivity level. Temperature (77–350 K) dependent dc conductivity (σ_dc) and dielectric constant (ε′(ω)) measurements on pristine and doped P3HT films have been conducted to evaluate dc and ac electrical conduction parameters. The relaxation frequency (f_R) and static dielectric constant (ε₀) have been estimated from dielectric constant measurements. A correlation between dc electrical conduction and dielectric relaxation data indicates that both dc and ac electrical conductions originate from the same hopping process in this system. © 2010 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 48: 1047–1053, 2010     

Glass transition temperature of polymer nanocomposites: Prediction from the continuous‐multilayer model

The continuous‐multilayer model introduced in our previous study for the T_g behavior of thin films is adapted to nanocomposite systems. T_g enhancement in both thin films and nanocomposites with attractive interfacial interactions can be explained by the same model. Various shapes of nanoparticles are proposed to rationalize the adaptation of the one‐dimensional model for the T_g behavior of thin film to three‐dimensional system such as nanocomposite. The tendency of predicted T_g enhancements in poly(methyl methacrylate) and P2VP nanocomposites with silica particles are qualitatively fit to experimental data in literatures. For the further quantitative fitting, the model is partially modified with the consideration for other factors affecting T_g deviation in nanocomposite. © 2009 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 47: 2281–2287, 2009     

Preparation and characterization of polymer/silica nanocomposites via double in situ miniemulsion polymerization

Polymer/SiO₂ nanocomposite microspheres were prepared by double in situ miniemulsion polymerization in the presence of methyl methacrylate, butyl acrylate, γ‐methacryloxy(propyl) trimethoxysilane, and tetraethoxysilane (TEOS). By taking full advantage of phase separation between the growing polymer particles and TEOS, inorganic/polymer microspheres were fabricated successfully in a one‐step process with the formation of SiO₂ particles and the polymerization of organic monomers taking place simultaneously. The morphology of nanocomposite microspheres and the microstructure, mechanical properties, thermal properties, and optical properties of the nanocomposite films were characterized and discussed. The results showed that hybrid microspheres had a raspberry‐like structure with silica nanoparticles on the shells of polymer. The silica particles of about 20 nm were highly dispersed within the nanocomposite films without aggregations. The transmittance of nanocomposite film was comparable to that of the copolymer film at around 70–80% from 400 to 800 nm. The mechanical properties and the fire‐retardant behavior of the polymer matrix were improved by the incorporation of silica nanoparticles. © 2010 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 48: 3128–3134, 2010     

Pore size distributions in low‐k dielectric thin films from X‐ray porosimetry

X‐ray reflectivity has been used to determine the mass uptake of probe molecules in porous thin films supported on thick silicon wafers. The adsorption occurs by capillary condensation when the films are exposed to probe vapor at controlled partial vapor pressures. The probe solvent partial pressure was varied by mixing saturated air and dry air at constant temperature or by changing sample temperature at a constant vapor concentration. Pore size distribution in the films can be calculated from the probe uptake with typical porosimetric approaches such as the application of the Kelvin equation to convert partial pressure into pore size. For illustration, the pore size distribution of three different nanoporous thin films, the primary candidate of ultra‐low‐k interlevel dielectrics in the next generation of integrated circuit chips, was determined with this technique. These samples represent different generations of low‐k dielectrics developed by industry. © 2002 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 40: 2170–2177, 2002     

PMMA-SiO<Subscript>2</Subscript> organic–inorganic hybrid films: determination of dielectric characteristics

Organic–inorganic hybrid thin films have been prepared by a modified sol–gel route using tetraethyl orthosilicate as the inorganic (silica) source, methyl methacrylate (MMA) as the organic source, and 3-trimetoxysilylpropyl methacrylate as the coupling agent. The films were prepared by spin coating on Si (100) p-type substrates and subsequently heat-treated at 90 °C. Fourier transform infrared results reveal a set of absorption bands associated with the formation of both PMMA and SiO₂ phases in the hybrid films. Capacitance–voltage (C–V) characterization was carried out on metal-insulator-metal (MIM) and metal-insulator-semiconductor (MIS) structures, with the hybrid films as the insulator layer to evaluate the electrical properties. We present a detailed comparative analysis of the dielectric constant obtained from C–V characterization in the frequency range of 1 kHz–1 MHz. For the PMMA-SiO₂ hybrid material the dielectric constant values obtained were around 9.5 at 1 MHz which is superior to the values reported for thermally grown SiO₂ and pure PMMA materials. The interface state density for PMMA-SiO₂ on Si was approximately 10¹⁰ cm⁻², which is comparable to the standard SiO₂/Si structures. Due to the electrical behavior and low processing temperatures this hybrid dielectric is a very promising candidate for flexible electronic devices and its subsequent implementation does not require complex equipment.     

Photocuring kinetics of UV‐initiated free‐radical photopolymerizations with and without silica nanoparticles

We used photodifferential scanning calorimetry to investigate the photocuring kinetics of UV‐initiated free‐radical photopolymerizations of acrylate systems with and without silica nanoparticles. Two kinetics parameters—the rate constant (k) and the order of the initiation reaction (m)—were determined for hybrid organic–inorganic nanocomposite systems containing different amounts of added silica nanoparticles (0–20 wt %) and at different isothermal temperatures (30–100 °C) using an autocatalytic kinetics model. The kinetic analysis revealed that the silica nanoparticles apparently accelerate the cure reaction and cure rate of the UV‐curable acrylate system, most probably due to the synergistic effect of silica nanoparticles during the photopolymerization process. However, a slight decrease in polymerization reactivity that occurred when the silica content increased beyond 15 wt % was attributed to aggregation between silica nanoparticles. We also observed that the addition of silica nanoparticles lowered the activation energy for the UV‐curable acrylate system, and that the collision factor for the system with silica nanoparticles was higher than that obtained for the system without silica nanoparticles, indicating that the reactivity of the former was greater than that of the latter. © 2004 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 43: 658–670, 2005     

High density polyethylene-grafted-maleic anhydride low-k porous films prepared via thermally induced phase separation

Low dielectric constant (low-k) porous films of high density polyethylene-grafted-maleic anhydride were prepared via thermally induced phase separation (TIPS) using di-n-octyl phthalate as the solvent and methanol as the extractant. The results show that, for the process of TIPS, cellular structures of spherical pores were obtained. Lower polymer concentration and lower cooling rate induced larger pores and higher porosity. For the dielectric constant, the introduction of pores considerably reduced the dielectric constant from 2.60 to 1.56 at most. Pore size showed little effect on dielectric constant in our experiment, but porosity was found to be the key influential factor. The relationship between dielectric constant and porosity was found to be best fit to Rayleigh model.     

Chemical solution processing and characterization of Ba(Zr,Ti)O<Subscript>3</Subscript>/LaNiO<Subscript>3</Subscript> layered thin films

Ba(Zr,Ti)O₃/LaNiO₃ layered thin films have been synthesized by chemical solution deposition (CSD) using metal-organic precursor solutions. Ba(Zr,Ti)O₃ thin films with smooth surface morphology and excellent dielectric properties were prepared on Pt/TiO _x /SiO₂/Si substrates by controlling the Zr/Ti ratios in Ba(Zr,Ti)O₃. Chemically derived LaNiO₃ thin films crystallized into the perovskite single phase and their conductivity was sufficiently high as a thin-film electrode. Ba(Zr,Ti)O₃/LaNiO₃ layered thin films of single phase perovskite were fabricated on SiO₂/Si and fused silica substrates. The dielectric constant of a Ba(Zr_0.2Ti_0.8)O₃ thin film prepared at 700°C on a LaNiO₃/fused silica substrate was found to be approximately 830 with a dielectric loss of 5% at 1 kHz and room temperature. Although the Ba(Zr_0.2Ti_0.8)O₃ thin film on the LaNiO₃/fused silica substrate showed a smaller dielectric constant than the Ba(Zr_0.2Ti_0.8)O₃ thin film on Pt/TiO _x /SiO₂/Si, small temperature dependence of dielectric constant was achieved over a wide temperature range. Furthermore, the fabrication of the Ba(Zr,Ti)O₃/LaNiO₃ films in alternate thin layers similar to a multilayer capacitor structure was performed by the same solution deposition process.     

Design and evaluation of polymer matrices for the encapsulation of CdSe/ZnS quantum dots in photonic nanocomposite thin films

A systematic approach and a new scheme for the evaluation of the as–is encapsulation of CdSe/ZnS core/shell quantum dots into polymer matrices is proposed, aiming to the implementation of thin film photonic integrated structures. Work focuses on quantum dots capped by hexadecylamine and trioctylphosphine oxide with no ligand exchange or other intermediate processing steps involved. The polymers studied include poly(methyl–methacrylate) (PMMA), polystyrene and acrylic polymers incorporating long alkyl chains, which are expected to promote the compatibility of the quantum dot ligands to that of the polymer chains. In this approach, the variation of photoluminescence properties of the nanocomposite thin films is measured versus increased concentration of the quantum dots, so as to evaluate the suitability of each polymer structure as an efficient host. Furthermore, the refractive index of the quantum dots/polymer nanocomposite thin films are also estimated using white light reflectance spectroscopy data, as appropriate for the integration of photonic devices. © 2015 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2016 , 54, 552–560     

Enhanced electrical properties of highly oriented poly(vinylidene fluoride) films prepared by solid‐state coextrusion

Oriented poly(vinylidene fluoride) (PVDF) films with β‐form crystals have been commonly prepared by cold drawing of a melt‐quenched film consisting of α‐form crystals. In this study, we have successfully produced highly oriented PVDF thin films (20 µm thick) with β‐crystals and a high crystallinity (55–76%), by solid‐state coextrusion of a gel film to eight times the original length at an established optimum extrusion temperature of 160°C, some 10°C below the melting temperature. The resultant drawn films had a highly oriented (orientation function f_c = 0.993) fibrous structure, showing high mechanical properties of an extensional elastic modulus of 8.3 GPa and tensile strength of 0.84 GPa, along the draw direction. Such highly oriented and crystalline films exhibited excellent ferroelectric and piezoelectric properties. The square hysteresis loop was significantly sharper than that of a conventional sample. The sharp switching transient yielded the remnant polarization P_r of 90 mC/m², and the electromechanical coupling factor k_t was 0.24 at room temperature. These values are about 1.5 times greater than those of a conventional β‐PVDF film. Thus, solid‐state coextrusion near the melting point was found to be a useful technique for the preparation of highly oriented and highly crystalline β‐PVDF films with superior mechanical and electrical properties. The morphology of the extrudate relevant to such properties is discussed. © 1999 John Wiley & Sons, Inc. J Polym Sci B: Polym Phys 37: 2549–2556, 1999     

Preparation and characterization of poly(l-lactic acid)/TiO2 nanoparticle nanocomposite films with high transparency and efficient photodegradability

Poly(l-lactic acid)-TiO₂ nanoparticle nanocomposite films were prepared by incorporating surface modified TiO₂ nanoparticles into polymer matrices. In the process of preparing the nanocomposite films, severe aggregation of TiO₂ nanoparticles could be reduced by surface modification by using carboxylic acid and long-chain alkyl amine. As a result, the nanocomposite films with high transparency, similar to pure PLA films, were obtained without depending on the amount of added TiO₂ nanoparticles. A TEM micrograph of the nanocomposite films suggests that the TiO₂ nanoparticles of 3-6 nm in diameter were uniformly dispersed in polymer matrices. Photodegradation of PLA-TiO₂ nanoparticle nanocomposite films was also investigated. The results showed that nanocomposite films could be efficiently photodegraded by UV irradiation in comparison with pure PLA.     

Multifunctional mesoporous silica nanoparticles in poly(ethylene‐co‐vinyl acetate) for transparent heat retention films

Transparent inorganic‐polymer nanocomposite films are of tremendous current interest inemerging solar coverings including photovoltaic encapsulants and commercial greenhouse plastics, but suffer from significant radiative heat loss. This work provides a new and simple approach for controlling this heat loss by using mesoporous silica/quantum dot nanoparticles in poly(ethylene‐co‐vinyl acetate) (EVA) films. Mesoporous silica shells were grown on CdS‐ZnS quantum dot (QDs) cores using a reverse microemulsion technique, controlling the shell thickness. These mesoporous silica nanoparticles (MSNs) were then melt‐mixed with EVA pellets using a mini twin‐screw extruder and pressed into thin films of concentration variable controlled thickness. The results demonstrate that the experimental MSNs showed improved infrared and thermal wavebands retention in the EVA transparent films compared to commercial silica additives, even at lower concentrations. It was also found MSNs enhanced the quantum yield and photostability of the QDs, providing high visible light transmission and blocking of UV transmission of interest for next generation solar coatings. © 2015 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2015 , 53, 851–859     

Electron Energy Structure and Electrical Properties of Poly(p-phenylene vinylene) (PPV) with Gold Metal Nanoparticles

The electron energy structures and electrical properties of poly(p–phenylene vinylene) (PPV) and PPV/Au nanocomposite films were investigated to identify an effect of Au metal nanoparticles on a conjugated polymer. The current density in PPV/Au nanocomposite films was enhanced from an increase in the electron affinity with increasing Au nanoparticle content. The roughness of surface morphology was also observed with incorporation of Au nanoparticles. Then, an enhanced applied field could be developed at the thinner region of the film and an increase in the surface area with a resulting increase of electron injection, leading to an extra enhancement of the current.