In situ surface topography measurement method of granite base in scanning wafer stage with laser interferometer

Topography of a granite surface has an effect on the vertical positioning of a wafer stage in a lithographic tool, when the wafer stage moves on the granite. The inaccurate measurement of the topography results in a bad leveling and focusing performance. In this paper, an in situ method to measure the topography of a granite surface with high accuracy is present. In this method, a high-order polynomial is set up to express the topography of the granite surface. Two double-frequency laser interferometers are used to measure the tilts of the wafer stage in the X- and Y-directions. From the sampling tilts information, the coefficients of the high-order polynomial can be obtained by a special algorithm. Experiment results shows that the measurement reproducibility of the method is better than 10 nm.     

线性调频半导体激光器实现大尺寸静态、动态测距

提高大型机电设备的加工水平，动态在线测量是关键。将线性调频半导体激光器应用于动态测量，对目标的位置及移动的速度、加速度等实现准实时测量，可对加工过程实现动态补偿；依靠系统的自校准，消除半导体激光器的老化对激光波长的影响，使得测量精度得以保证，进而使其实用化成为可能；待测的参数是拍频的频率，即测量精度与半导体激光器的输出光功率无关，加之频率是数字量，便于和微机相连组成自动测控系统。系统静态相对测量精度为３×１０－４。整个测量系统体积小、结构简单，便于实现生产和现场安装，可广泛应用于大型机电设备的静态、动态测量。     

Dynamic Modeling of the Feed Drive System of a CNC Metal Cutting Machine

Studying the vibrational behavior of feed drive systems is important for enhancing the structural performance of computer numerical control (CNC) machines. The preload on the screw and nut position have a great influence on the vibration characteristics of the feed drive as two very important operational conditions. Rotational acceleration of the screw also affects the performance of the CNC feed drive when machining small parts. This paper investigates the influence of preload and nut position on the vibration characteristics of the feed drive system of a CNC metal cutting machine in order to be able to eliminate an observed resonance occurred at high rotational speeds of the screw, corresponding to high feed rates. Additionally, rational structural parameters of the feed drive system are selected in order to increase the rotational acceleration for improving the performance of the CNC machine. Experiments and analyses showed that by selecting specific parameters of feed drive system and simultaneously applying a certain value of preload, a 97% increase in rotational acceleration and 30% time reduction considering the vibration resistance at high rotational speeds can be achieved.     

Simultaneous estimation of the temperature and heat rate distributions within the combustion region by a new inverse radiation analysis

A new inverse radiation analysis is presented for estimating the heat rate and temperature distributions in the combustion region from the information of the temperature and heat flux profiles of wall elements in the system. The Monte Carlo method is employed to solve the radiative heat transfer equation. The inverse radiation problem is posed as a minimization problem of the least squares criterion, which is solved by the conjugate gradient method. The performance of the present technique of inverse analysis is evaluated and the effects of the errors of the absorption coefficient, emissivity and convective heat transfer coefficient on the inverse analysis are investigated. The results show that the present technique is robust and yields accurate estimation even with noisy measurement.     

Development of a laser-based Raman scattering system for identifying and quantifying major gas species

The construction of a laser-based Raman scattering system for identifying major gas species and quantifying their partial pressures is described. The system incorporates a pulsed laser to minimize the background luminescence. The results obtained at room temperature for N₂ at (365·80·5) nm and for O₂ at (355·80·5) nm are presented.     

Measurement of the structure coefficient of refractive index fluctuations in a turbulent premixed butane-air flame by means of a laser-based interferometer technique

With a view to measuring the structure coefficient of refractive index fluctuations in a turbulent premixed butane-air flame, a thin laser beam is sent into the flame perpendicular to the flow direction. The laser beam generally undergoes fluctuations of direction, phase, and amplitude. Only the random deflections of the laser beam may be taken into account. After having traversed the flame, the perturbed laser beam enters into an interferometric system. Materials and experimental procedure are described. In the unperturbed interference pattern, the zones only sensitive to fluctuations of the angle-of-arrival of the laser beam are detected. From the random displacements of the central bright fringe, the structure coefficient of refractive index fluctuations in the flame is measured. To prove that the method of measurement is satisfactory, the result obtained is applied for computing the power spectral density of the angle-of-arrival of the laser beam from the formula of correlations of the laser beam deflection angles which we have demonstrated in previous works. This computed power spectral density is compared to that measured from the effective position of the detector. A good agreement is observed between the two results.     

最小二乘支持向量机和内标法的乐果农药含量LIBS检测

利用共线双脉冲激光诱导击穿光谱 (LIBS)对溶液中的乐果含量进行定量检测。采用圆柱形桐木木片对农药乐果进行富集,然后利用双通道高精度光谱仪获取样本在206.28~481.77 nm波段范围的LIBS光谱。选用4条磷元素谱线(P Ⅰ 213.618 nm,P Ⅰ 214.91 nm,P Ⅰ 253.56 nm,P Ⅰ 255.325 nm)为分析线,碳元素谱线(C Ⅰ 247.856 nm)为内标线,应用单变量线性拟合及最小二乘支持向量机(LSSVM)方法分别建立溶液中乐果含量的单变量定标模型、LSSVM定标模型及基于内标法的LSSVM定标模型,并进行比较。三个定标模型中,基于内标法的LSSVM定标模型性能最优,LSSVM定标模型性能次之,而单变量定标模型性能最差。结果表明,共线双脉冲LIBS技术结合LSSVM及内标法可以用于溶液中的乐果含量定量检测,所建立的定标模型的决定系数为0.999 7,训练集和验证集的平均相对误差分别为11.24%及12.01%。LSSVM方法及内标法均能在一定程度上改善定标模型的性能,提高预测精度。     

Linear method for evaluation of radius of spherical surface from discrete set of data points

Our work deals with the problem of evaluation of the spherical surface parameters from the discrete set of measured data points. We propose a new linear method for determination of the center and the radius of curvature of the measured spherical surface. Such method can be used for evaluation of the measurements obtained from both contact and noncontact 3D coordinate measuring machines. We perform an analysis of the proposed sphere fitting method and we verify that the obtained results are comparable to results calculated using existing techniques. Finally, the proposed algorithm is implemented for evaluation of real measurements of spherical optical surfaces using the designed scanning chromatic confocal system.     

酥梨货架期的高光谱成像无损检测模型研究

水果新鲜度是反映水果是否新鲜、饱满的重要品质指标,为了探讨水果不同货架期的预测和判别方法,以酥梨为研究对象,利用高光谱成像技术,结合偏最小二乘判别法（PLS-DA）和偏最小二乘支持向量机（LS-SVM）算法对酥梨货架期进行判别。由光源、成像光谱仪、电控位移平台和计算机等构成的高光谱成像装置采集样品光谱,装置光源采用额定功率为200 W四个溴钨灯泡成梯形结构设计,光谱范围为1 000～2 500 nm,分别率为10 nm。选取优质酥梨30个,货架期设置为1, 5和10 d,对30个样品完成3次光谱图像的采集,并矫正原始图像。实验结果表明：基于图像的酥梨货架期定性分析时,对不同货架期样品的原始图像进行PCA压缩,得到三种不同货架期的权重系数数据,PC1图像提取特征波长点为1 280,1 390,1 800,1 880和2 300 nm,以特征图像的平均灰度值作为自变量且以货架期作为因变量建立定性判别模型,建模集68个,预测集22个。最小二乘支持向量机以RBF为核函数时,预测集中样品的误判个数为1,误判率为4.5%。而当采用lin核函数时,样品的误判个数为0,误判率为0。PLS-DA定性分析时RMSEC为1.24,R_c为0.93。RMSEP为1,R_p为0.96,预测集误判率为0。特征图像对酥梨货架期判别LS-SVM中的lin核函数所建立的模型结果较好,优于RBF核函数的建模效果,也优于PLS-DA判别模型。ENVI软件提取实验样品光谱后建立LS-SVM和PLS-DA判别模型,LS-SVM利用RBF和lin核函数误判率分别为4.5%和0。与RBF核函数相比,lin核函数所建立的模型预测酥梨货架期的效果更好。PLS-DA方法主成分因子数为12,RMSEC和RMSEP分别为0.48和0.78,R_c和R_p分别为0.99和0.97,建模集与预测集的误判率均为零。LS-SVM中的lin核函数所建立的模型结果较好,依然优于PLS所建立的检测模型。酥梨的光谱信息结合LS-SVM可以实现对酥梨货架期的检测和判别。基于图像建立酥梨的货架期预测模型与光谱相比,都实现了酥梨货架期的判别,而特征图像法,选择区域较少流失部分信息,计算量小,建模结果相对略差。酥梨货架期的高光谱成像检测模型研究为消费者正确评价水果新鲜度提供了理论指导, 也为后期果水果货架期检测仪器的开发提供了技术支持。     

最小二乘支持向量机方法对冬小麦叶面积指数反演的普适性研究

冬小麦叶面积指数(leaf area index, LAI)是进行作物长势判断和产量估测的重要农学指标之一,高光谱遥感技术为大面积、快速监测植被LAI提供了有效途径。在探讨利用最小二乘支持向量机(least squares support vector machines, LS-SVM)方法和高光谱数据对不同条件下冬小麦LAI的估算能力。在用主成分分析法(principal component analysis, PCA)对PHI航空数据降维的基础上,利用实测LAI数据和高光谱反射率数据,构建LS-SVM模型,采用独立变量法,分别估算不同株型品种、不同生育时期、不同氮素和水分处理条件下的冬小麦LAI,并与传统NDVI模型反演结果对比。结果显示,每种条件下的LS-SVM 模型都具有比NDVI模型更高的决定系数和更低的均方根误差值, 即反演精度高于相应的NDVI模型。NDVI模型对不同株型品种、不同氮素和水分条件下冬小麦LAI估算精度不稳定,LS-SVM则表现出较好的稳定性。表明LS-SVM 方法利用高光谱反射率数据对于不同条件下的冬小麦LAI反演具有良好的学习能力和普适性。     

Classification of diabetes and measurement of blood glucose concentration noninvasively using near infrared spectroscopy

Developing noninvasive blood glucose monitoring method is an to immense need to alleviate the pain and suffering of diabetics associated with the frequent pricking of skin for taking blood sample. A hybrid algorithm for multivariate calibration is proposed to improve the prediction performance of classification of diabetes and measurement of blood glucose concentration by near infrared (NIR) spectroscopy noninvasively. The algorithm is based on wavelet prism modified uninformative variable elimination approach (WP-mUVE) combined with least squares support vector machine (LSSVM), named as WP-mUVE-LSSVM. The method is successfully applied to diabetic classification experiment (in vivo) and blood glucose concentration measurement experiment (in vivo) respectively. Human tongue is selected as the measuring site in this study. To evaluate effectiveness of pretreatment method and quality of calibration models, several usually used pretreatment methods and kernel functions of LSSVM are introduced comparing with our method. Higher quality data is obtained by our pretreatment method owing to the elimination of varying background and noise of spectra data simultaneously. Better prediction accuracy and adaptability are obtained by LSSVM model with radial basis kernel function. The results indicate that WP-mUVE-LSSVM holds promise for the classification of diabetes and measurement of blood glucose concentration noninvasively based on human tongue using NIR spectroscopy.     

Development of a stereo-TV system for recording and measurement

The development and use of a stereo-TV system to observe, record and measure spatial coordinates is described.     

弹簧/扭转试验机微机控制检测系统的设计

对用于实验教学的旧式弹簧试验机和扭转试验机进行了数字化改造，设计了二者共用的硬件采集接口。提高了测量精度．以微机为核心，编写了功能灵活的软件系统，方便了实验操作．改造兼顾了性能指标、功能指标及成本花费．     

A Method for Removing the Effect of the Camera Radiance on the Infrared Image

The radiance coming from the interior of an uncooled infrared camera has significant effect on the quality of an infrared image. The classical two-point-correction (TPC) method fails to remove this effect where no TPC data is collected. To overcome this deficit, this paper presents a three-phase scheme. First, from a set of samples and through least squares fitting, how the TPC datum varies with the interior temperature of the camera is determined. On this basis, all the necessary TPC data are calculated. Finally, the collected infrared image is corrected with the TPC method. Theoretical analysis and experimental results show that, for a proper interior temperature of the camera, the scheme can remove the effect effectively.     

PSO-LSSVM对LIBS定量分析精度的提高

针对土壤定量分析受基体效应影响大,LIBS定量分析精度不佳等问题,采用粒子群算法对LSSVM进行优化,提高模型的精确度。选取Pb Ⅰ 405.78 nm和Cr Ⅰ 425.44 nm作为分析谱线进行分析。采集十二个不同浓度样品的特征光谱,每个浓度样品在不同点采集20组数据,将其中17组数据设为训练集,3组数据设为预测集,用LSSVM和PSO-LSSVM两种方法建立定标模型。对比两种模型的拟合相关系数（R2）、训练集均方根误差（RMSEC）和预测集均方根误差(RMSEP)。由于自吸收效应的影响,随着浓度的增加,预测值逐渐低于实际值,LSSVM定标模型的拟合程度较低,无法达到实验要求,模型性能有待提高。利用粒子群算法对LSSVM的模型参数惩罚系数和核函数参数进行优化,得到最佳的参数组合,Pb元素为(8 096.8, 138.865 7),Cr元素为(4 908.6, 393.563 5),用最佳的参数组合构建LSSVM的定标模型。相比于LSSVM,PSO-LSSVM定标模型的精确度更高,Pb和Cr元素的R2提高到了0.982 8和0.985 0,拟合效果明显提升。Pb和Cr元素的训练集均方根误差由0.026 0 Wt%和0.027 2 Wt%下降到0.022 4 Wt%和0.019 1 Wt%,预测集均方根误差由0.101 8 Wt%和0.078 8 Wt% 下降到0.045 8 Wt%和0.042 0 Wt%,模型的稳定性进一步提高。说明PSO-LSSVM算法能够更好地降低土壤基体效应和自吸收效应带来的影响,提高分析结果的精确度与稳定性。     

高光谱成像的土壤剖面水分含量反演及制图

传统土壤水分的获取方法仅可获得离散的土壤水分点位数据,难以获得剖面上精细且连续的水分含量分布图。研究了野外条件下利用近红外高光谱（882～1 709 nm）成像反演剖面土壤水分含量（SMC）,并实现精细制图的可行性。研究剖面位于江苏省东台市,我们利用近红外高光谱成像仪对剖面进行了5天原位连续观测,共采集了280个土样用于烘干法测定SMC。原始高光谱图像经数字量化值（DN）校正、黑白校正、拼接、几何校正、剪切和掩膜等一系列预处理后,提取各采样点的平均光谱反射率。提取光谱（Raw）经吸光度[LOG₁₀(1/R)],Savitzky-Golay平滑（SG）、一阶微分（FD）、二阶微分（SD）、多元散射校正（MSC）和标准正态变量（SNV）转换后,采用偏最小二乘回归（PLSR）和最小二乘支持向量机（LS-SVM）方法建立SMC预测模型,并对比分析不同光谱预处理方法与建模方法组合条件下SMC的预测精度。结果表明,光谱反射率随SMC增加逐渐降低,不同光谱预处理方法的预测精度有所差异,除MSC方法外,同一光谱预处理方法的LS-SVM模型预测精度均高于PLSR模型,并且基于LOG₁₀(1/R)光谱的LS-SVM模型对SMC预测精度最高,其建模集的决定系数（R2_c）和均方根误差（RMSE_c）分别为0.96和0.65%,预测集的决定系数（R2_p）、均方根误差（RMSE_p）和相对分析误差（RPD_p）分别为0.88,1.05%和2.88。利用最优模型进行剖面SMC的高空间分辨率精细制图,通过比较SMC反演图中提取的预测值与实测值关系发现预测精度较高（R2: 0.85～0.95, RMSE: 0.94%～1.02%）,且两者在剖面中的变化趋势基本一致,说明SMC反演图不仅能很好地反映出土壤水分在整个剖面中毫米级的含量分布信息,也可反映出同一位置处不同天数间的含量差异。因此,利用近红外高光谱成像结合优化的预测模型,能够实现土壤剖面SMC的定量预测及精细制图,有助于快速、有效监测田间剖面土壤水分状况。     

基于NI ELVIS的超声换能器参数测量系统设计

为了满足超声换能器快速筛选的要求,在对超声换能器参数导纳圆法测量原理进行分析的基础上,利用NI ELVIS平台搭建了一种结构简单的超声换能器参数测量系统。采用点频法实现高精度、快速的导纳测量,采用最小二乘法拟合得到导纳圆,进而完成超声换能器诸参数的计算。基于LabVIEW软件平台编写了相应的软件系统。针对40 kHz超声换能器的测试表明,所设计的超声换能器参数测量系统精度高、处理速度快,且结构简单、便于使用。     

Low frequency characteristic parameters measurement of vented-box loudspeaker system using total least squares method

I.IntroductiollThecomputeraideddesign(CAD)techniqueisanadvancedmethodforthedesignofvented-boxloudspeakersystemsI1l,whichisbasedontheThiele-Sma.llparametersofloudspeakersIa]andthefowfrequencycharpeteristicparametersofvelltedboxloudspeakersystems.TheThiele-Smallparametersofloudspeakersandsomeofthelowfrequellcycharacteristicparametersofvellted-boxloudspeakersystemshavebeendeterIIilnedbyfrequencyUomainmeth.dI3'4]foralongtime.Themaindisadwtagesofthismethodarecomplicatedandtimeconsuming.TheThi…     

New data-processing technique for measurement of metallic foil thickness with differential white-light interferometry

The thickness of metallic foil was measured by differential white-light interferometry (DWLI). Two tandem Michelson interferometers (MI), in which the reflective surfaces measured are the surfaces of the metallic foil, were used as a basic interferometry system to obtain interference fringes on a spectrometer. Therefore, the interference fringes depend only on the path differences caused by the thickness of the metallic foil. The interference fringes were analyzed using a modified extremum method based on the least root-mean-square (RMS) deviation. Experimental results for thickness measurements are presented. Measurement time is only 100 ms or less for a thickness of 1–80 μm.     

基于近红外光谱技术的人体血糖浓度无创检测系统的研制

开发了一种小型化人体血糖浓度无创检测系统,该系统可实现人体血糖浓度的快速、实时、无创检测,主要由嵌入式系统、夹具、光源系统和微型光栅光谱仪四部分组成。提出了一种光源稳压驱动电路方案,可满足多种光谱采集条件对光源的要求。同时提出了一种一体化夹具设计方案,不仅简化了系统的光学结构,而且提高了测量条件的可重复性。分别用小波去噪和核偏最小二乘法对采集的光谱数据进行预处理和数学建模,并对系统进行性能评价,血糖浓度预测值与标准值的相关系数为0.95,预测均方根误差为0.6mmol.L-1,系统的重复性较好。