Embedded birefringent computer-generated holograms fabricated by femtosecond laser pulses

Birefringent computer-generated holograms are fabricated in bulk fused silica by tight focusing of infrared femtosecond laser pulses. The polarization properties of the elliptically polarized diffracted light are in excellent agreement with the theoretical model. We experimentally demonstrate that for such birefringent structures the signal-to-noise ratio increases by approximately 9 dB when polarization filtering is used to suppress the undiffracted beam.     

高厚度薄膜-泡沫平面调制靶的飞秒激光微加工

 利用数值孔径为0.14的显微物镜聚焦中心波长800 nm、脉宽120 fs、重复频率1 kHz的飞秒激光,采用焦点逐线扫描等距下移方式,选取的入射平均功率为30 mW,加工速度为300 μm/s,对瑞利-泰勒(R-T)不稳定性实验靶用的厚度1.5 mm聚苯乙烯（PS）薄膜-聚4-甲基-1-戊烯（PMP）泡沫双层复合长条块体样品进行精确切割成型,并与纳秒激光切割情形对比。结果表明：利用飞秒激光微加工有效控制了切割区变形和材料分层,获得了整齐的切割边缘和平坦的切割面,样品最大切割深度超过800 μm。     

高厚度薄膜-泡沫平面调制靶的飞秒激光微加工

利用数值孔径为0.14的显微物镜聚焦中心波长800 nm、脉宽120 fs、重复频率1 kHz的飞秒激光,采用焦点逐线扫描等距下移方式,选取的入射平均功率为30 mW,加工速度为300 μm/s,对瑞利-泰勒(R-T)不稳定性实验靶用的厚度1.5 mm聚苯乙烯（PS）薄膜-聚4-甲基-1-戊烯（PMP）泡沫双层复合长条块体样品进行精确切割成型,并与纳秒激光切割情形对比。结果表明：利用飞秒激光微加工有效控制了切割区变形和材料分层,获得了整齐的切割边缘和平坦的切割面,样品最大切割深度超过800 μm。     

Titanium micromachining by femtosecond laser

The ultimate goal of this research was to characterize the ablation depth with respect to pulse energy, translation speed, and consecutive passes in order to obtain the parameters to have smooth microchannel surfaces. A logarithmic dependence of the channel depth on the laser pulse energy was observed with two different distinct ablation regimes. Although the same fluence values were used with two different lens sizes, the slopes of these ablation regimes were quite different. 100 mm lens has a small optical penetration length with steeper ablation slope in the first regime, whereas the 15 mm lens has the opposite. In the second part of the ablation regime, the slope was lower for 100 mm lens as compared to 15 mm lens. Furthermore, spike formation has been seen in 100 mm lens study at 0.308, 0.370, 0.431, and 0.493 J/cm² fluence values yet no spike formations have been seen in 15 mm lens study.     

A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.     

Second harmonic generation in a high-Q lithium niobate microresonator fabricated by femtosecond laser micromachining

We report on second harmonic generation(SHG) in on-chip high-Q(105) lithium niobate(Li Nb O3, LN) microresonators fabricated by femtosecond laser micromachining. We examine the efficiency of SHG with either a continuous-wave(CW) or an ultrashort pulsed pump laser. The normalized conversion efficiencies of SHG obtained with the CW and pulsed pump lasers are measured to be 1.35×10?5 m W?1 and 2.30×10?6 m W?1, respectively.     

Rapid fabrication of optical volume gratings in Foturan glass by femtosecond laser micromachining

We report on rapid fabrication of optical volume gratings in Foturan glass using a modulated femtosecond laser focused with cylindrical lenses. An optical volume grating with an area of 2 mm ×3 mm and ∼2 mm thickness can be achieved within 10 min by use of this method. Optical micrography confirms the volume nature of the gratings and shows that they consist of 10 μm-thickness planes with a period of 15 μm. The diffraction efficiency is examined to be ∼56%. The limitations and future implementations of the fabricated volume gratings are discussed.     

X-ray emission from femtosecond laser micromachining

We characterize the spectral properties of X-rays generated from selected metal and semiconductor targets when 120-fs laser pulses are focused to intensities of∼10¹⁴–3×10¹⁵ W/cm² during laser micromachining in air. High fluxes of multi-keV-energy X-rays could be obtained with 280-μJ pulses at a 1 kHz repetition rate. The yield and spectral composition of the X-rays are found to depend sensitively on the processing conditions, and thus the X-ray emission is expected to be a novel indicator of optimal laser machining. Received: 17 July 2000 / Accepted: 27 October 2000 / Published online: 28 February 2001     

100-kHz diffraction-limited femtosecond laser micromachining

We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to /15 peak–valley and /100 rms. Clean 1.7-m diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining. PACS 87.80.Mj; 42.60.Jf; 42.65.Re     

Computer-generated true-color rainbow holograms

A new method of calculating computer-generated true-color rainbow holograms (CGTCRH) is proposed. This technique allows the true-color object reconstruction. The main idea of the presented work is based on the additive properties of holographic wavefront reconstruction such that the resulting hologram is a superposition of three (or more) holograms, with each of them producing different color reconstruction of the same object. White light and monochromatic light reconstruction results are discussed.     

整形飞秒激光金属材料精细加工

实验通过二极管记录透射光信号随脉冲个数变化关系以及观测样品烧蚀形貌来研究不同实验条件对激光烧蚀的影响。使用的样品是厚度为50 m铝箔。实验中通过研究不同变量:激光焦点与样品的相对位置、激光的能量、背景气体压强以及脉冲形状对烧蚀加工过程和结果的影响,从而获得较好烧蚀效果的条件,达到控制烧蚀加工过程的目的。特别是通过使用不同形状的脉冲和具有一定规律的脉冲序列对样品进行烧蚀,发现某些形状的整形脉冲烧蚀结果明显优于变换极限脉冲。说明脉冲整形作为一种新的技术可以在激光精细钻孔领域得到更深入的研究和应用。     

Sapphire surface patterning using femtosecond laser micromachining

This study presents an alternative method for micron-resolution patterning of a sapphire surface utilizing the characteristic of an ultra-short pulse (10^?15 s) from ytterbium (Yb) femtosecond laser (FS-laser) irradiation. Conventional processes often involve several steps, such as wet chemical or dry etching, for surface structuring of sapphire. In this study, two-dimensional array patterns on the sapphire surface with an area of 5×5 mm² and a depth of 1.2±0.1 μm can be directly and easily fabricated by a single step of the FS-laser process, which involves 350-fs laser pulses with a wavelength of 517 nm at a repetition rate of 100 kHz. The measured ablation depths on the sapphire surface display that the proposed process can be under well-controlled conditions. Based on the design changes for being quickly implemented in the micromachining process, a FS laser can be a promising and competitive tool for patterning sapphire with an acceptable quality for industrial usage.     

飞秒激光刻蚀非平行壁光纤微腔Mach-Zehnder干涉仪特性及其流体传感研究

实验发现,飞秒激光微加工光纤微腔时,两个侧壁与纤芯轴向并不完全垂直, 刻蚀的非平行壁光纤微腔Mach-Zehnder干涉仪出现光程差随波长增大而线性减小、 微腔总损耗随波长增大呈递减变化等反常现象.对此,提出非平行壁光纤微腔Mach-Zehnder 干涉仪新模型并初步建立了分析理论,采用新模型及分析理论对新型微腔干涉仪特性进行了研究. 数值分析了微腔底角、深度等参数对谱峰波长位置的影响,理论研究了微腔的光波传输损耗、 吸收损耗、插入损耗、材料红外吸收损耗以及对干涉条纹对比度的影响, 理论分析与实验结果相符.实验获得水溶液干涉条纹对比度高达35 dB的非平行壁光纤微腔Mach-Zehnder干涉仪, 将新型光纤微腔干涉仪用于流体传感,其蔗糖水溶液折射率传感灵敏度高达-12937.31 nm/RIU.     

飞秒激光诱导图案独立显示研究

介绍了采用中心波长为800nm的飞秒激光在不锈钢(316L)表面诱导产生独立显示图案的研究。结果表明,当扫描速率为15mm/s,扫描行距为20μm,能量密度为1.1J/cm2时,飞秒激光能够在不锈钢表面形成均匀的周期为540nm的亚波长条纹结构。利用条纹结构的方向与激光光波偏振方向严格垂直的特性,通过改变激光偏振,可以在金属表面形成不同方向的条纹图案。在照明白光的辐照下,改变样品的方位角,形成的图案能够以彩色方式显示出来。此外,对使图案彩色显示的坐标区域与图案色彩能够覆盖的可见光谱范围进行了研究,并对其可能的应用进行分析。     

Er:Yb-doped waveguide laser fabricated by femtosecond laser pulses

Laser action is demonstrated in a 20-mm-long waveguide fabricated on an Er:Yb-doped phosphate glass by femtosecond laser pulses. An output power of 1.7 mW with approximately 300 mW of pump power coupled into the waveguide is obtained at 1533.5 nm. Waveguides are manufactured with the 520-nm radiation from a frequency-doubled, diode-pumped, cavity-dumped Yb:glass laser operating at a 166-KHz repetition rate, with a 300-fs pulse duration.     

飞秒激光诱导图案独立显示研究

介绍了采用中心波长为800 nm的飞秒激光在不锈钢(316L)表面诱导产生独立显示图案的研究。结果表明,当扫描速率为15 mm/s,扫描行距为20 m,能量密度为1.1 J/cm2时,飞秒激光能够在不锈钢表面形成均匀的周期为540 nm的亚波长条纹结构。利用条纹结构的方向与激光光波偏振方向严格垂直的特性,通过改变激光偏振,可以在金属表面形成不同方向的条纹图案。在照明白光的辐照下,改变样品的方位角,形成的图案能够以彩色方式显示出来。此外,对使图案彩色显示的坐标区域与图案色彩能够覆盖的可见光谱范围进行了研究,并对其可能的应用进行分析。     

Computer-generated circular carrier Fourier holograms

The introduction of a circular carrier in computer-generated holography is investigated. Fourier holograms are produced using a point oriented concept. An on-axis reconstruction results from illumination with a conical wave.     

Direct patterning of microelectrode arrays using femtosecond laser micromachining

Micron-resolution microelectrodes and microelectrode arrays are commonly used in Lab-on-a-chip applications, typically for particle and fluidic sensing or pumping applications. The common method of fabricating such structures is to use conventional photolithography, which involves several steps, any of which can affect the quality and dimension of the final structure. Here we present an alternative method of creating microelectrodes using direct laser patterning. This is a significantly simpler and faster fabrication route requiring a single patterning step, and which also allows design changes to be implemented quickly, without having to re-manufacture a photolithographic mask. To confirm the suitability of this approach to fabricating microelectrodes, a complex multielectrode array design for neuron stimulation was directly laser-patterned.     

基于飞秒激光微加工的介质膜损伤修复研究

针对波长1053 nm, 0°高反介质膜元件, 采用有限时域差分法, 模拟分析了损伤修复点边缘与法线的夹角对膜层内电场强度分布的影响, 该角度越小, 修复点的损伤阈值越高. 通过优化飞秒激光微加工过程中的焦斑尺寸、脉冲能量、扫描步长和扫描次数等参数, 获得了夹角为25°、深度为14 μm的修复点. 该修复点典型的损伤阈值为21 J/cm², 是修复前的2.3倍, 50个修复点的测试结果表明该修复参数具有非常好的可重复性. 修复点的测试结果还验证了修复点边缘与法线的夹角大小与其损伤阈值的关系, 45°的电场强度最大值约为25°的2.5倍, 而45°的损伤阈值约为25°的1/2, 模拟和实验结果一致性较好. 同时, 实验验证了微加工的激光脉宽对修复点损伤阈值的影响, 在只改变脉宽的情况下, 脉宽越长, 损伤阈值越低.