Plasma Characteristics and Antenna Electrical Characteristics of an Internal Linear Inductively Coupled Plasma Source with a Multi-Polar Magnetic Field

The development of a large-area plasma source with high density plasmas is desired for a variety of plasma processes from microelectronics fabrication to flat panel display device fabrication. In this study, a novel internal-type linear inductive antenna referred to as “double comb-type antenna” was used for a large-area plasma source with the substrate area of 880 mm × 660 mm and the effect of plasma confinement by applying multi-polar magnetic field was investigated. High density plasmas on the order of 3.2 × 10¹¹ cm^?3 which is 50% higher than that obtained for the source without the magnetic field could be obtained at the pressure of 15 mTorr Ar and at the inductive power of 5,000 W with good plasma stability. The plasma uniformity <3% could be also obtained within the substrate area. When SiO₂ film was etched using the double comb-type antenna, the average etch rate of about 2,100 Å/min could be obtained with the etch uniformity of 5.4% on the substrate area using 15 mTorr SF₆, 5,000 W of rf power, and ?34 V of dc-bias voltage. The higher plasma density with an excellent uniformity and a lower rf antenna voltage obtained by the application of the magnetic field are related to the electron confinement in a direction normal to the antenna line.     

Plasma Characteristics of a Ni–Zn Ferrite Enhanced Internal-Type Inductively Coupled Plasma Source Operated at 2 and 13.56 MHz

Plasma and electrical characteristics of an internal-type inductively coupled plasma source with a Ni–Zn ferrite module installed near the antenna were investigated for different rf power frequencies of 2 and 13.56 MHz. Due to the lower heating of the Ni–Zn ferrite module on the antenna for the operation at 2 MHz compared to the operation at 13.56 MHz, higher plasma density and lower rf rms antenna voltage were resulted for the operation at 2 MHz in addition to more stable plasma characteristics. By the application of 500 W of rf power to the source, a high plasma density of 8 × 10¹¹ cm⁻³ which is about four times higher than that with 13.56 MHz could be obtained at the pressure of 10 mTorr Ar. When photoresist etch uniformity was measured for the operation with 2 MHz by etching photoresist on a 300 mm diameter substrate using 10 mTorr Ar/O₂ (9:1) mixture, the etch uniformity of about 5.5% could be obtained.     

Study of Internal Linear Inductively Coupled Plasma Source for Ultra Large-Scale Flat Panel Display Processing

An internal-type linear inductive antenna, which is referred to as “double comb-type antenna”, was used as a large-area inductively coupled plasma (ICP) source with a substrate area of 2,300 mm × 2,000 mm. The characteristics of the ICP source were investigated for potential applications to flat panel display (FPD) processing. The source showed higher power transfer efficiency at higher RF power and higher operating pressures. The power transfer efficiency was approximately 88.1% at 9 kW of RF power and a pressure of 20 mTorr Ar. This source showed increasing plasma density and improved plasma uniformity with increasing RF power at a given operating pressure. A plasma density >1.5 × 10¹¹/cm³ and a plasma uniformity of approximately 11% was obtained at 9 kW of RF power and 15 mTor Ar using this internal ICP source, which is applicable to FPD processing.     

Distance-of-Flight Mass Spectrometry with IonCCD Detection and an Inductively Coupled Plasma Source

Distance-of-flight mass spectrometry (DOFMS) is demonstrated for the first time with a commercially available ion detector—the IonCCD camera. Because DOFMS is a velocity-based MS technique that provides spatially dispersive, simultaneous mass spectrometry, a position-sensitive ion detector is needed for mass-spectral collection. The IonCCD camera is a 5.1-cm long, 1-D array that is capable of simultaneous, multichannel ion detection along a focal plane, which makes it an attractive option for DOFMS. In the current study, the IonCCD camera is evaluated for DOFMS with an inductively coupled plasma (ICP) ionization source over a relatively short field-free mass-separation distance of 25.3–30.4 cm. The combination of ICP-DOFMS and the IonCCD detector results in a mass-spectral resolving power (FWHM) of approximately 900 and isotope-ratio precision equivalent to or slightly better than current ICP-TOFMS systems. The measured isotope-ratio precision in % relative standard deviation (%RSD) was ≥0.008%RSD for nonconsecutive isotopes at 10-ppm concentration (near the ion-signal saturation point) and ≥0.02%RSD for all isotopes at 1-ppm. Results of DOFMS with the IonCCD camera are also compared with those of two previously characterized detection setups.

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有机试剂雾化进样电感耦合等离子体原子发射光谱特性的研究

利用流动注射技术对有机试剂雾化进样情况下电感耦合等离子体（ＩＣＰ）的特性进行了研究。考察了有机试剂对ＩＣＰ放电外观的影响。对ＩＣＰ的局部热平衡状态作了判定。由Ｍｇ２７８．３０ｎｍ和Ｍｇ３３３．６７ｎｍ二线法对有机试剂负载和水负载情况下ＩＣＰ的激发温度分别作了计算。讨论了试剂分子裂解产物的光谱干扰问题。     

电荷注入检测器电感耦合等离子体光谱仪测定铂族元素的性能

研究了用电荷注入检测器等离子体光谱仪测定铂族元素的分析性能。结果表明铂族元素有较好的检出限和10^4以上的线性动态范围，铂族元素间光谱干扰很少，在元素浓度＞1mg/L时测量精度可优于1％，钠对铂族元素的影响是轻微的。     

端视等离子体原子发射光谱法中内标法校正钠基体干扰

端视电感耦合等离子体原子发射光谱在分析过程中易电离元素引起的非光谱干扰 ,常常使分析结果产生偏差。就不同浓度Na基体对分析谱线产生的干扰进行了实验和研究 ,并用Y作为内标元素来补偿钠基体的干扰。得出在Robust条件 ,即高功率和低载气流速条件下 ,选择合适的离子线 ,并且离子线的总能量大于 10eV下 ,用内标Y 4 37.4 94nm可以很好的补偿不同Na含量的干扰。     

电感耦合等离子体光谱和质谱法分析贻贝标准物质

采用电感耦合等离子体光谱和质谱法分析了贻贝标准物质,光谱法测定Ｋ、Ｎａ、Ｃａ、Ｍｇ、Ｐ、Ａｌ、Ｆｅ、Ｚｎ、Ｍｎ和Ｓｒ,质谱法测定Ａｓ、Ｂ、Ｃｄ、Ｃｏ、Ｃｒ、ＣｕＧａ、Ｇｅ、Ｍｎ、Ｍｏ、Ｎｉ、Ｐｂ、Ｓｅ、Ｓｒ、Ｕ和Ｖ。在优化的工作条件下,测定了来自基体元素Ｋ、Ｎａ、Ｃａ、Ｐ、Ｃｌ的Ｃ的多原子离子＾３９Ｋ＾１６Ｏ、＾３９Ｋ２、＾４０Ａｒ＾２３Ｎａ、＾４３Ｃａ＾１６Ｏ、＾４２Ｃａ＾１６Ｏ、＾３１Ｐ＾１６     

Synthesis of Carbon Nanohorns by Inductively Coupled Plasma

We demonstrate a new pathway for the synthesis of carbon nanohorns (CNHs) in a reactor by using inductively coupled plasma (ICP) and gaseous precursors. Thermal plasma synthesis allows the formation of different carbon allotropes such as carbon nanoflakes, hybrid forms of flakes and nanotubules, CNHs embryos, seed-like CNHs and onion-like polyhedral graphitic nanocapsules. In this study, pressure has the greatest impact on the selectivity of carbon nanostructures: pressure below 53.3 kPa favors the growth of carbon nanoflakes and higher pressures, 66.7 kPa and above, promotes the formation of CNHs. The ratio between methane and hydrogen as well as the global concentration of CH₄?+?H₂ inside the plasma flame are also crucial to the reaction. CNHs are formed preferentially by injection of a 1:2 ratio of H₂ to CH₄ at 82.7 kPa with a production rate of 20 g/h. The synthesis pathway is easily scalable and could be made continuous, which offers an interesting alternative compared to methods based on laser-, arc- or induction-based vaporization of graphite rods.

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氢化物发生-电感耦合等离子体质谱联用技术研究

运用自制的接口，实现了氢化物发生与电感耦合等离子体质谱的联用。考察了连续流动氢化物发生器、气动型断流式氢化物发生器及气动型流动注射氢化物发生器与电感耦合等离子体质谱仪的联用性能。确定了仪器的最佳参数，研究了系统的分析性能，实现了能生成氢化物的8种元素的定量测定。     

电感耦合等离子体质谱中的基质效应

电感耦合等离子体质谱(Inductively coupled plasma mass spectrometry,ICP-MS)是痕量元素分析中最常用的检测技术,尽管ICP-MS在元素分析中表现出诸多优势,但其在检测复杂基质样品时,仍会遇到许多问题。复杂基质所引起的基质效应通常会导致分析物信号的抑制或者增强。基质效应影响程度取决于基质成分的绝对浓度,还与基质的种类、分析物的物理和化学性质以及仪器条件有关。该文介绍了ICP-MS中几种常见的基质效应及其影响因素,包括元素基质、含碳基质、酸基质和仪器条件等,探究了基质效应产生的可能原因,对国内外去除基质效应的方法,如样品前处理方法、样品引入系统、优化仪器参数和校准法等进行了系统的归纳和总结,并对基质效应的研究进行了展望。     

试样粒子在电感耦合等离子体通道中蒸发的研究

本文在计算恒温下蒸发球形试样粒子时，发现每单位时间蒸发缩小的半径相等。测定了ＩＣＰ和ＩＣＰ－电弧光源中通道的宽度和气体的温度。计算和比较了两光源对试样粒子的蒸发能力，表明因蒸发导致粒子半径减小的速度，ＩＣＰ－电弧比ＩＣＰ快２．８倍。     

Capillary Electrophoresis Coupled On-Line with Inductively Coupled Plasma Atomic Emission Spectrometry for Elemental Speciation

Capillary electrophoresis (CE) has become a powerful analytical technique for the separation of a variety of analytes ranging from small inorganic ions to large biomolecules such as proteins and nucleic acids. A selective and sensitive detector for CE has been one of the most important and challenging prerequisites for the growth of CE. On-column UV-Vis detectors are commonly used to determine the analytes separated by CE. However, these detectors are often not very selective. Other detection techniques such as mass spectrometry, laser induced fluorescence, amperometry, and inductively coupled plasma spectrometry have been investigated to provide a more sensitive and selective detection for the target analytes. However, relatively few studies have been published on the use of inductively coupled plasma atomic emission spectrometry (ICP-AES) as a means of detection in CE separation.     

高效液相色谱-电感耦合等离子体质谱技术测定海水中锡化学形态

建立了反相色谱-电感耦合等离子体质谱联用技术(HPLC-ICP-MS),用于测定海水中一丁基锡(MBT)、二丁基锡(DBT)、三丁基锡(TBT)和三苯基锡(TPhT)。分别使用两种不同色谱柱C18ACE和TC-C18,缓冲溶液V(acetonitrile)∶V(water)∶V(acetic acid)∶V(TEA)=65∶23∶12∶0.005%,在分别在流速0.2和0.4 mL/min下对4种不同形态的锡进行分离。所建立的方法在20μL进样量下,对DBT、MBT、TBT及TPhT的检出限分别为30、50、80及10 ng/L。对青岛沿岸海水分析的结果表明海水中DBT、TPT含量分别为35和20 ng/L,而MBT及TBT的含量则低于本方法的检出限。     

Inductively Coupled Plasma Mass Spectrometry with an Electrically Floating Sampling Interface

In conventional inductively coupled plasma mass spectrometry devices, the sampler and skimmer are grounded. In this work, modest DC voltages (+ 10 to + 50 Vl are applied to either (or both) sampler and skimmer. Alternatively, the skimmer is biased, and the sampler is merely left floating. The latter arrangement improves sensitivity for Co⁺ by sixfold, provides nearly the same molar sensitivity for CO⁺, Rh⁺, and Ho⁺, and extends the upper end of the linear dynamic range to approximately 100 ppm. These changes to the interface do not affect the background perceptibly. The relationship between applied potential and the potential actually measured on the sampler and skimmer is also discussed.     

电感耦合等离子体光谱/质谱联机同时测定多金属结核中常量、微量、痕量元素

采用电感耦合等离子体质谱(ICP-MS)与等离子体光谱(ICP-OES)联机同时测定多金属结核样品中常量、微量、痕量元素。样品经高压密封溶样弹消解后,一次气动雾化进样,ICP-OES测定常量和微量元素,ICP-MS测定微量和痕量元素。详细探讨了不同浓度范围元素的测定方式、元素分析信号的采集模式、多原子离子干扰的校正因子。采用ICP-MS与ICP-OES二种方式同时测定Co、Cu、Ni、Zn、V、Ba、Sr,分析结果表明具有较好的一致性。所建立的ICP-MS与ICP-OES联机检测技术用于多金属结核标准样品的分析(Nod-A-1,GSPN-1,GSPN-2,GSPN-3),分析结果与推荐值符合,相对标准偏差小于10％。     

电感耦合等离子体原子发射光谱分析研究进展

介绍了近年来国内在电感耦合等离子体原子发射光谱分析(ICP-AES)有关基础理论、仪器设备、进样技术和ICP-AES应用方面取得的研究进展。引用文献76篇。     

超级微波消解电感耦合等离子体质谱法 测定土壤中13种元素

建立了超级微波消解-电感耦合等离子体质谱（ICP-MS）测定多类型土壤基质中钒、铬、锰、钴、镍、铜、锌、砷、钼、锑、铊、铅和铀等13种元素含量的方法。采用超级微波消解法对样品进行前处理,比较了超级微波前处理与常规微波前处理消解效果,并优化了消解酸体系。在最优条件下,13种元素的的方法检出限（LOD）为0.0002~0.2 mg/kg,方法定量限（LOQ）范围为0.001~0.6mg/kg。在0~500 μg/L范围内线性回归系数（R2）在0.9996~1.0000,各元素加标回收率在76.3%~126%,此方法准确度可以满足复杂基体样品多元素同时测定的需求,一次样品前处理可实现18个样品的同时测定,相较于常规前处理方法大幅减少酸使用的同时更加安全、高效、不易污染样品,可为土壤重金属污染监测工作提供可靠的分析方法支撑。     

逆流色谱分离感应耦合等离子质谱在线测量超痕量钚

将逆流色谱（CCC）与感应耦合等离子质谱（ICP-MS）相联,研究了几种两相体系在CCC中的固定相保留率,从中选择1％TNOA-正庚烷作固定相,通过CCC富集分离钚并去除基体及干扰元素,通过研究在线分离条件及定量方法等,建成了CCC分离ICP—MS在线测量超痕量钚的方法。采用该方法分析得到实际土壤样品中^239Pu的含量与由传统的分离方法给出的结果相吻合。