具有双应变梁的硅微机械倾角传感器结构设计

提出了一种能抗侧向耦合干扰的微机械硅倾角传感器的敏感结构设计,它由两个不同大小的质量块和连接它们的两个相互平行的硅应变梁组成.文中通过推导给出了硅应变梁上所受的应变与倾角及位置的解析关系,并计算了在两个不同质量块作用下硅梁上的应力分布,最后提出了制作该结构的工艺设计.     

具有双应变梁的硅微机械倾角传感器结构设计

提出了一种能抗侧向耦合干扰的微机械硅倾角传感器的敏感结构设计 ,它由两个不同大小的质量块和连接它们的两个相互平行的硅应变梁组成。文中通过推导给出了硅应变梁上所受的应变与倾角及位置的解析关系 ,并计算了在两个不同质量块作用下硅梁上的应力分布 ,最后提出了制作该结构的工艺设计     

硅微机械二维倾角传感器结构设计

提出了一种结构简单,制造工艺容易实现的硅微机械二维倾角传感器结构设计,它由蝶形质量块和连接它们的四个成十字形的硅应变梁以及具有过载限位保护功能的硼硅玻璃衬底构成.传感器能同时检测出绕两轴的倾角变化.分析了硅应变梁的受力情况,得到了与倾角的解析关系,并用有限元方法验证了结果,理论灵敏度为0.75 mV/ °.     

硅微电容式加速度传感器结构设计

通过建立传感器的力学模型,对硅微电容式加速度传感器的特性作了详细的分析与讨论,为系统结构的优化设计提供了理论基础。     

集成硅微机械光压力传感器

介绍了一种新颖的集成硅微机械光压力传感器的结构、工作原理、制造工艺和实验结果。该传感器是利用半导体集成电路微细加工技术和各向异性腐蚀相结合的方法，将传输、获取信息的光波导，敏感弹性硅膜和光电探测器集成在一块三维硅基片上得到的。它具有灵敏度高、抗干扰能力强、自身无需电源、防爆、成本低和可靠性高等优点。     

硅微加速度传感器的对称梁岛结构设计

采用有限元方法，针对硅微加速度传感器的对称梁岛结构进行了力学特性分析，通过分析得出了该结构的尺寸对其位移量、谐振频率及模态振型的影响规律，为此类加速度传感器的设计提供参考。     

硅传感器使机械传感器相形见绌

硅传感器使机械传感器相形见绌在大批量汽车市场的强劲需求推动下，传感器已从昨天的笨重机械结构发展成用传统半导体加工技术制作的集成智能器件。由于这种器件能确保安全面可靠的运作，因而基于硅的传感器不仅广泛应用于汽车领域而且也用于实验室和医疗仪器、过程控制系...     

新结构的硅一体化微加速度传感器

本文介绍了一种新结构的硅一体化微加速度传感器，理论和实验结果表明，这种传感器与传统硅微机械结构加速度传感器相经具有温度特性好，工艺简单和成品率高等优点，这种结构特别适合制作谐振传感器。     

硅微机械惯性传感器技术及其应用

本文简述了MEMS技术及微机械传感器的技术含义，着重对硅微机械惯性传感器原理及研制硅微机械惯性传感器的关键技术进行描述，为开展硅微机械惯性传感器研究及应用作技术准备及必要的思考。     

微硅加速度传感器的发展

本文介绍了微硅加速度传感器自六、七十代发展至今,其代表产品的特点,对微硅加速度计三种典型代表形式进行了分析、指出其优缺点,并对目前微硅加速度计的发展趋势－检测空间加速度的三维加速度计进行了重点讨论。     

Defect analysis of n-type silicon strained layers

The structural and electrical properties of n-type silicon strained layers, sandwiched between Si_1−xGe_x layers, with x=0.15, 0.20 and 0.30 have been investigated using a combination of analytical techniques. Here, the focus is on the application of deep level transient spectroscopy (DLTS) on p–n junction structures, to assess non-radiative generation-recombination centres. It will be demonstrated that successful analysis can only be applied if the edges of the devices are chemically passivated. Finally, it is shown that for low-leakage diodes, the quantum-well properties can, in principle, be extracted from the combined DLTS and capacitance–voltage/capacitance–temperature characteristics.     

Fabrication of ultra-thin strained silicon on insulator

A bond and etch back technique for the fabrication of 13-nm-thick, strained silicon directly on insulator has been developed. The use of a double etch stop allows the transfer of a thin strained silicon layer with across-wafer thickness uniformity comparable to the as-grown epitaxial layers. Surface roughness of less than 1 nm was achieved. Raman analysis confirms strain remains in the thin silicon layers after the removal of the SiGe that induced the strain. Ultra-thin strained silicon-on-insulator (SSOI) substrates are promising for the fabrication of ultra-thin body and double-gate, strained Si metal-oxide semiconductor field-effect transistors (MOSFETs).     

Logic operations using a bistable etalon with two control beams

The theory and demonstration of a novel scheme for performing two-input binary logic operations with a bistable etalon are reported. The scheme employs two edge-injected CO laser beams to control the reflectivity of an InSb etalon. The control beams serve as the inputs to the logic device, while the output is provided by the reflected beam. The application of such a device to two-dimensional array processing is discussed.     

引入激光回馈的双光束干涉效应的研究

提出了一种引入He-Ne激光回馈的双光束干涉系统,并在理论和实验两方面进行了研究。实验中对系统中的干涉信号及激光器尾光功率变化同时进行探测。发现当干涉仪的主回馈镜移动时,激光器尾光信号是正弦形波形,而干涉仪输出的是以双峰为一个周期的信号,双峰中一峰总是高于另一峰,并且当主回馈镜移动方向改变时,同一周期中两峰出现的顺序也随之改变。对实验现象进行了理论分析,并模拟出干涉信号及激光自身功率的变化曲线。理论分析及模拟结果与实验结果完全吻合。讨论了利用发现的现象进行测量的可行性,所提出的测量方法易于实现。     

Piezoelectrically actuated four-bar mechanism with two flexible links for micromechanical flying insect thorax

In this paper, a piezoelectrically actuated four-bar mechanism with two flexible links is proposed to be used in a micromechanical flying insect robot wing thorax for stroke amplification. PZT-5H- and PZN-PT-based unimorph actuators are utilized at the input link of the four-bar for a compact and lightweight thorax transmission mechanism. The kinematics and dynamics of the proposed wing structure with two parallel four-bar mechanisms are analyzed, optimal four-bar link size selection method is introduced, and quasistatic forces generated at the wing are computed for evaluating the feasibility of the design. Using laser micromachining and folding techniques, prototype four-bar structures are constructed. In the experiments, for a 10/spl times/1/spl times/0.12 mm/sup 3/ PZT-5H actuator-based four-bar mechanism, the stroke amplification of around 20 - 25 is held, and an attached polyester wing is resonated at 29 Hz with around 90/spl deg/ flapping motion. These results match closely with the predicted theoretical values.     

Study of decay of elastically strained germanium film at the silicon surface

The results of studying the initial stage of the surface self-organization in a Ge/Si(001) heteroepitaxial system are reported; this stage begins with step bunching and ends with origination of three-dimensional irregularities. The force inducing the directional drift of germanium adatoms is calculated, and the smallest attainable island sizes are estimated taking into account the kinetic features of directional mass transport.     

MEMS传感器技术数字式倾角仪的设计应用

MEMS传感器技术中集结各种元件设备,能够有效对电路进行控制,特别是数字式倾角仪更能够让测量的数据更加精准。文章简单对MEMS传感器技术进行介绍,并对数字式倾角仪在不同程序设计中的应用进行分析,希望该项技术能够得到更大的应用。     

Acoustooptic interaction of two light beams in a paratellurite crystal

Double acoustooptic diffraction of light in a paratellurite crystal is investigated experimentally and theoretically. The anisotropic Bragg interaction with three diffraction maxima is considered in the case when two monochromatic light beams are incident on the crystal simultaneously. For each beam, double diffraction is realized, so that the propagation direction of one of the beams coincides with the propagation direction of the second-order diffracted ray for the other beam. It is shown that the diffraction pattern consists of three diffraction maxima: two of these are formed by the zero- and second-order diffracted rays, while the third maxima is formed by the first-order diffracted rays. The possibility of summation of the radiation intensities at the diffraction maxima is analyzed.