等离子体鞘层附近尘埃颗粒特性的数值模拟

为了研究尘埃等离子体中尘埃颗粒以及鞘层中粒子密度分布等特性,对尘埃颗粒存在条件下等离子体鞘层结构的采取数值模拟.采用稳态无碰撞的尘埃等离子体鞘层模型,对玻姆判据、尘埃颗粒的荷电性质、平板鞘层区域的电势分布及鞘层内粒子分布特性进行了系统的数值模拟研究.计算结果显示,鞘层边缘尘埃颗粒数密度的增加、尘埃温度的升高,将引起孤立尘埃颗粒对电子吸附能力的减弱,集体效应也受到一定程度的影响;二者同时对离子玻姆速度以及鞘层厚度的增加都有着极大的促进作用.鞘层电势在靠近下极区处降落迅速,主要聚集在接近阴极极板的鞘层区域,各种微粒数密度的空间分布满足准中性条件.     

尘埃颗粒在射频等离子体鞘层中的非线性共振现象的理论研究

一种自洽的理论模型用于研究尘埃颗粒在射频鞘层中垂直方向的非线性共振现象.利用射频鞘层动力学模型，研究了鞘层电场和尘埃颗粒的充电过程.考虑作用在尘埃颗粒上的各种作用力(如重力、电场力、离子拖拽力、中性气体摩擦力及探针的扰动力)，并通过数值求解颗粒运动方程，模拟了该尘埃颗粒在探针扰动下的非线性振荡过程.所得结果不仅很好地再现了最近的实验观察，同时还发现这种非线性振动过程与等离子体参数、施加的射频偏压的功率、探针的扰动电位和位置等有着密切的联系. 关键词： 射频鞘层 尘埃颗粒 尘埃充电 非线性共振 迟滞     

碰撞对尘埃等离子体鞘层中尘埃颗粒影响

在一维平板鞘层中应用流体模型研究了尘埃等离子体鞘层中碰撞对尘埃颗粒密度和带电量的影响。 研究所涉及的碰撞主要有电离碰撞,电子、离子分别与中性粒子的碰撞,以及电子、离子分别与尘埃颗粒的碰撞。通过采用四阶龙格库塔法,得到了数值解。结果表明,随着电离碰撞或者电子、离子分别与中性粒子碰撞的频率 增加,都将导致鞘层中尘埃颗粒的数密度增大,数密度的极值位置向鞘边位置靠近,尘埃颗粒带电量增多。电子、离子与尘埃颗粒的碰撞,使得尘埃带电量减小。此外,从研究的结果来看,由离子产生的碰撞要比电子产生的碰 撞对尘埃颗粒的影响明显得多。     

非均匀磁场尘埃等离子体中颗粒的复杂运动

本文研究了在非均匀磁场尘埃等离子体中不规则尘埃颗粒的复杂运动, 包括圆滚运动、尖头圆滚运动、圆周运动以及波浪运动等. 放置在电极上的圆柱形磁铁的主要作用是改变鞘层的径向分布, 进而对颗粒产生径向约束, 使尘埃颗粒悬浮于圆柱形磁铁周围, 其磁场并不足以磁化颗粒使其做圆滚运动. 通过与球形尘埃颗粒的对比实验发现, 圆滚运动是不规则尘埃颗粒在等离子体中特有的一种运动. 我们提出了一种新的机理: 由于不规则颗粒的自旋而引起的横向反Magnus力对颗粒的圆滚运动起了重要的作用. 文中通过受力分析定性地对实验中观察到的非球形颗粒的各种运动给出了合理的解释.     

气体放电阴极鞘层氩离子的自洽蒙特卡罗模拟

建立了气体放电阴极鞘层离子的自洽蒙特卡罗模拟模型,考虑了离子与中性原子的电荷交换碰撞和弹性散射,用到了精确依赖于离子能量的电荷交换和动量输运截面。模拟了氩离子在阴极鞘层中的运动,得到了不同气压下自治电场分布,离子的能量分布和角分布,发现:离子由鞘层边界向阴极运动过程中,离子能量分布的高能部分逐渐增大,角分布向小角度部分压缩,鞘层中的强电场加速和聚焦了离子;在鞘层边界附近的电场呈非线性。     

磁场对直流辉光放电阴极鞘层中电子输运过程的影响

采用MonteCarlo模拟方法研究了磁场对直流辉光放电阴极鞘层中电子输运过程的影响.磁场垂直于阴极鞘层中电场的方问.模型中,电子与中性粒子的碰撞过程有三种(弹性碰撞;激发碰撞和电离碰撞).电子的自由飞行步长由电子与中性粒子的碰撞频率来决定.计算了电子的密度分布,电子与中性粒子的非弹性碰撞速率,以及电子能量和电子通量分布等.结果表明,横向磁场能在一定程度上改变直流放电中电子的输运过程.磁场中电子与中性粒于的非弹性碰撞速率被增强,这一结果与实验结果符合较好.     

N+2离子在氮直流辉光放电中碰撞离解的作用

采用氮辉光放电等离子体快电子和各种重粒子（N＋２，N＋，Nf）的混合Monte Carlo模型，从不同放电条件的离解碰撞率，快原子态粒子（N+，Nf）在阴极鞘层区的输运过程及轰击阴极的能量及角分布三个方面研究了 N＋２+N２→N+＋N+N2f反应在氮气直流辉光放电中的作用.该过程在电压较高时为阴极鞘层区的重要离解过程， 且主要发生在阴极附近，其碰撞率随电压和气压增加而增加；阴极表面附近的活性粒子（N＋，Nf）主要由该离解过程产生（而不是e--N2离解电离过程），而且这些粒子具有中等的平均能量且小角入射，是 关键词： 氮直流辉光放电 Monte Carlo模拟 N＋２-N２碰撞离解     

基于晶格-Boltzmann方法的纳米流体流动和传热模型

纳米流体是由流体与纳米粒子组成的悬浮体.悬浮在流体中的纳米粒子会受到运动阻力、布朗力、扩散力和重力等作用力的影响,因而其运动规律极其复杂.本文运用晶格-Boltzmann(LB)方法,建立纳米流体流动和传热模型模型,对纳米流体的流型结构和温度场进行了模拟和分析.     

圆形复合式磁控溅射阴极设计及其放电特性模拟研究

基于二维有限元算法使用COMSOL软件对圆形复合式磁控溅射阴极的磁场进行了计算,结合Matlab优化工具箱分别采用遗传算法和模拟退火算法对圆形复合式磁控溅射阴极的结构进行优化,得到靶材利用率达到最大的最优结构.对得到的最优化磁控阴极,基于自洽粒子模拟方法,使用VSim软件对不同工况下的放电特性进行了模拟.研究发现随着磁场非平衡度的增加,阴极表面电势降落最大的位置和等离子体聚集的位置,沿着阴极表面外沿不断向阴极中心移动,阴极表面磁场的强度不断减小.随着磁场非平衡度的增加,等离子体密度先增加后减小,鞘层厚度先减小后增加,等离子体的密度和鞘层厚度不仅与磁场非平衡度有关,而且与磁场强度有关.最后根据粒子模拟的结果,对复合式磁控阴极的靶材刻蚀深度进行了研究.研究发现,在优化前后靶材的刻蚀范围从60 mm扩展至整个靶面,极大地提高了靶材利用率.     

重粒子在阴极鞘层中输运的理论模型

建立了重粒子在阴极鞘层中输运的理论模型,推导出离子、中性粒子入射阴极表面速度分布 函数和到达阴极的离子流、中性粒子流的解析表达式.理论结果与蒙特-卡罗模拟相一致. 关键词： 阴极鞘层 重粒子输运 理论模型     

Levitation and dynamics of a collection of dust particles in afully ionized plasma sheath

Examines the dynamics of a collection of charged dust particles in the plasma sheath above a large body in a fully ionized space plasma when the radius of the large body is much larger than the sheath thickness. The dust particles are charged by the plasma, and the forces on the dust particles are assumed to be from the electric field in the sheath and from gravitation only. These forces will often act in opposite directions and may balance, making dust suspension and collection possible. The dust particles are supplied by injection or by electrostatic levitation. The ability of the sheath to collect dust particles, will be optimal for a certain combination of gravitation and plasma and dust particle parameters. In a dense dust sheath, the charges on the dust particles contribute significantly to the total space charge, and collective effects become important. These effects will reduce the magnitude of the sheath electric field strength and the charge on the dust particles. As dust particles are collected, the dust sheath is stretched and the largest dust particles may drop out, because the sheath is no longer able to suspend them. In a tenuous dust sheath, the inner layer, from the surface and about one Debye length thick, will be unstable for dust particle motion, and dust will not collect there. In a dense dust sheath, collective effects will decrease the thickness of this inner dust-free layer, making dust collection closer to the surface possible. By linearization of the force and current equations, the necessary and sufficient conditions for a stable dust sheath are found. The authors consider conditions which resemble those of planetary system bodies, but the results may also be of relevance to some laboratory plasmas     

等离子体鞘层中尘埃粒子的分布特性

采用柱槽状电极的流体模型，数值模拟了等离子体鞘层及鞘层中尘埃粒子的分布结构. 研究了尘埃粒子数、粒子大小、电极尺寸等因素对尘埃分布结构的影响. 研究表明：当等离子体密度较高时，鞘层较薄，反之鞘层较厚；当尘埃粒子数少时，尘埃分布形成一层结构，反之则形成多层结构；随电极尺寸的不同，尘埃粒子形成一些复杂而又有趣的结构. 关键词： 尘埃粒子 等离子体鞘层 电极     

Dust charging and levitating in a sheath of plasma containing energetic particles

The structure of the sheath in the presence of energetic particles is investigated in the multi-fluid framework. Based on the orbital motion limited(OML) theory, the dust grain charging inside the sheath of plasma containing energetic particles is examined for the carbon wall, and then the effect of the energetic particles on the stationary dust particle inside the sheath is discussed through the trapping potential energy. It is found that with the increase of energetic ion concentration or energy,the size of dust staying in levitation equilibrium decreases and the levitating position is much closer to the wall. In the case of deuterium ions as energetic ions, the bigger dust particle can be trapped by the sheath than in the case of hydrogen ions as energetic ions. When the energetic electron component is present, the levitating position of dust particle in the sheath depends strongly on the energetic electron. The levitating dust particle is closer to the wall as the energetic electron energy or concentration is increased. In addition, with the increase of temperature of thermal background ion, the size of dust particle trapped by the sheath decreases and the levitating positions of dust particles with the same size radius inside the sheath move toward the wall. Our results can be helpful in investigating the property of the sheath where the energetic particle component is present.     

Characteristics of Dust Plasma Sheath in an Oblique Magnetic Field

The characteristics of dust plasma sheath in an oblique magnetic field are investigated with a fluid model. Hot electrons, cold ions, neutral particles, and dust grains are taken into account in this system. We perform a numerical simulation of the sheath. The results reveal that the magnetic field has significant effects on the sheath structure, and it also makes the suspension position of dust shift away from the wall.     

Instability and melting of a crystal of microscopic particles in a radio-frequency discharge plasma

The development of instability, heating, and melting of a two-layer crystal of dust particles in the sheath of a radio-frequency discharge has been studied by the method of Langevin molecular dynamics. The interaction forces between particles are determined in terms of a model developed earlier, in which the ion clouds under the upper particles are replaced by effective point charges. Both a pure Coulomb interaction and a screened interaction are considered. Various regimes of particle motion in the crystal are discussed. The experimental and calculated results for the mean energy of particles and the number of defects in the crystals are compared. Zh. éksp. Teor. Fiz. 114, 1672–1690 (November 1998)     

A particle-in-cell simulation of dust charging and shielding in lowpressure glow discharges

The transport of particles (“dust”) in low pressure electrical glow discharges is being studied in regard to its role in contaminating silicon wafers during plasma etching and deposition. Particles (10 s nm-μm) negatively charge in glow discharges and, to first order, appear to be massively large negative ions around which sheaths develop. The forces on particles in plasmas include electrostatic (drift of charged particles in electric fields) and viscous ion drag. The latter force is momentum transfer from ions to particles by either collisions or orbital motion. This force critically depends on the charge on the particle and the shape of the sheath surrounding the particle. In this work, we report on a pseudoparticle-in-cell (PIC) simulation of the transport of electrons and ions in the vicinity of dust particles in low pressure glow discharges. The simulation produces the electrical charge on the dust particle, the sheath structure around the dust particle and the orbital dynamics of the ions. A companion molecular dynamics simulation uses these parameters to produce ion-dust and electron-dust particle cross sections for momentum transfer and collection. Results will be discussed for charge, sheath thickness, cross sections and viscous ion drag forces on dust particles as a function of radius and plasma parameters     

Determination of sheath parameters by test particles upon local electrode bias and plasma switching

Equilibrating gravitation by electric forces, microparticles can be confined in the plasma sheath above suitably biased local electrodes. Their position depends on the detailed structure of the plasma sheath and on the charge that the particles acquire in the surrounding plasma, that is by the electron and ion currents towards it. Bias switching experiments reveal how the charge and equilibrium position of the microparticle change upon altered sheath conditions. Above a critical bias, the particle is subject to an additional downward acceleration that cannot be explained solely by gravity and ion drag. This acceleration can be attributed to a positive charging of the particle induced by extreme out-of-equilibrium conditions of the plasma sheath in its surroundings: locally the plasma sheath can be completely deprived of electrons by means of the bias. We observe similar particle behaviors also in the afterglow of the discharge for a persisting bias voltage on the electrode: damped oscillation into a new equilibrium or (accelerated) fall according to the bias. The observed particle dynamics in locally tailored plasma sheath environments directly monitors changes in electric field structures and plasma density profiles.     

Modeling and simulation of the agglomeration of carbonaceous dust in a radio frequency discharge using the Monte Carlo technique

The dust particle growth in plasmas is of major concern for safety issues in fusion reactors, and conversely has important industrial impacts. Dusty plasmas produced in laboratory, fusion, and in astrophysical environments have been therefore widely studied for many years to better understand the involved physical phenomena. In this work, we have investigated modeling and simulation (Ghabbouri et al. in Int Rev Phys 4(3):104–109, 2010; Samir et al. in Chin J Phys 46(2), 2008; Louafi et al. in Int Rev Phys 6(3):297–302, 2012) a new dust-growing mechanism in capacitive radio-frequency plasma of argon/acetylene mixture (Ariskin et al. in Appl Phys 105:063305, 2009). Principally we studied the Brownian agglomeration in the plasma sheath by Monte Carlo simulation. We have developed a FORTRAN code enabling complex numeric investigations of dust particles levitating above the electrode in RF sheath. Charges, forces, balancing radii and other quantities concerning dust particles are analyzed in dependence on plasma state, position within the sheath and applied mathematical models. Commentaries and analysis of numerical results have been made.     

光电反馈式静电悬浮与静电悬浮力测定

本文提出光电反馈式静电悬浮的新方法,简要讨论静电悬浮的原理、装置及其光电反馈控制过程.采用铝片和CD光盘作为悬浮体,测定了不同静电电压和不同悬浮间距时的静电悬浮力,揭示了它们之间的相互关系.结果显示这两种悬浮体均可获得足够的静电悬浮力,证明了静电悬浮的可行性.静电悬浮方法的显着特点是既适用于导电体与非导电体的悬浮,又适用于磁性体与非磁性体的悬浮,克服了传统磁悬浮技术仅适用于磁性体的局限性,可广泛应用于精密元器件的悬浮与非接触无损操作.     

The influence of surface forces on shear-induced tracer diffusion in mono and bidisperse suspensions

The shear-induced self-diffusivity of tracer particles of radius a _t = λa in a suspension of particles having a radius, a , is calculated by Stokesian dynamics for different values of the size ratio, λ , both in 2 and 3 dimensions in the binary-collision regime. The self-diffusion is found to decrease strongly when the size ratio becomes quite different from unity. On the other hand, for the same average distance of contact between two spheres, the presence of a soft force always increases greatly the diffusion compared to the effect of a hard shell which is used to model the roughness. This is particularly true for tracer particles smaller than the bath particles, where the shear-induced diffusion can be increased by many order of magnitudes in the presence of a soft force. For suspensions of monodisperse particles we show that, for low volume fraction, the diffusion coefficient is much smaller than the one predicted by the binary collision model, due to the existence of a layered structure. On the contrary at higher volume fraction, many-body collisions strongly enhance the diffusion and it appears that the value of the diffusion is quite sensitive to the presence of clusters of particles which are themselves determined by the range of interparticle forces.