Experimental investigation of a modified Beckmann-Kirchhoff scattering theory for the in-process optical measurement of surface quality

An experimental investigation of a modified Beckmann-Kirchhoff scattering theory applied in an in-process optical measurement of surface quality is described. The proposed theory describes the scattered light intensity distribution from a surface with the additional layers, and can be employed to analyze the surface characteristics in in-process measurement. Based on light scattering principle and machine vision method, the surface roughness is extracted to testify the correction of the modified Beckmann-Kirchhoff scattering theory. The experimental apparatus consists of a collimated laser diode, a beam splitter, a screen, a measuring lens and a camera. Test specimens with different surface roughness are studied. The results obtained demonstrate the feasibility of in-process optical measurement of surface quality using the modified model.     

自动测量超光滑光学表面积分散射的积分散射仪

介绍了一种能自动测量超光滑光学表面积分散射率的积分散射仪。它既能测量光学膜片,同时也能测量光学基片的积分散射。核心部件是一个光学积分球,其作用是收集散射光。对积分散射理论以及仪器原理、关键技术和系统性能等进行了阐述。相对测量精度为±11%,灵敏度为2.3×10-6。     

Multichannel Raman spectroscopy of unroughened noble metal and non-noble metal films and tunnel junctions

We demonstrate that multichannel optical detectors provide the capability of observing Raman Scattering from molecular monolayers in solid-air and solid-solid interfaces in the absence of the conditions considered essential for surface enhanced Raman scattering. We present spectra of adsorbates on smooth Ag films, air-oxidized smooth Al films and Al gratings. Finally, we demonstrate a new configuration for surface enhanced Raman scattering which need not involve noble metals. Raman scattering from a doped Al/AlOx/Sn tunnel junction provides a specific example of such a configuration.     

表面粗糙度对固体内部超声背散射的影响

超声背散射法可通过多晶体金属内部的空间方差信号,实现微观结构参数的无损评价,但表面粗糙度对评价模型的精度及实用性存在显著影响.基于高斯声束理论推导垂直入射粗糙界面的纵波声场,以此研究声能的Wigner分布规律;在超声的波长远大于粗糙度的前提下,构造表面粗糙度修正系数,并建立粗糙界面的单次散射响应模型,揭示粗糙度对超声波背向散射的影响规律.用304不锈钢制备轮廓均方根值为0.159μm的光滑试块和25.722μm的粗糙试块开展超声背散射实验,结果表明模型在粗糙度修正前后均可实现光滑试块的晶粒尺寸有效评价,但未经修正的传统模型对粗糙试块的晶粒尺寸评价结果与金相法结果的相对误差高达-21.35%,而本模型的评价结果与金相法结果符合得很好,相对误差仅为1.35%.可见,本模型能有效补偿粗糙度引起的超声背散射信号衰减,从而提高晶粒尺寸无损评价的精度.     

Surface roughness investigation of semi-conductor wafers

Conventionally, surface roughness is predominantly determined through the use of stylus instruments. However, there are certain limitations involved in the method, particularly when a test specimen, such as a silicon wafer, has a smooth mirror-like surface. Hence, it is necessary to explore alternative non-contact techniques. Light scattering has recently been gaining popularity as an optical technique to provide prompt and precise inspection of surface roughness. In this paper, the total integrated scattering (TIS) model is modified to retrieve parameters on surface micro-topography through light scattering. The applicability of the proposed modified TIS model is studied and compared with an atomic force microscope. Experimental results obtained show that the proposed technique is highly accurate for measuring surface roughness in the nanometer range.     

基于双向反射分布函数的空间卫星紫外动态特性研究

根据目标所处的背景辐射环境,对空间卫星的紫外散射特性进行建模方法研究。依据目标表面材料属性与表面状况对目标表面进行区域分解与网格划分。基于辐射理论引入双向反射分布函数模型来描述目标表面网格单元的光散射特性,将目标各个表面所有网格单元散射分量叠加建立了目标紫外散射特性的数学模型。利用给定的目标几何结构尺寸和物性参数仿真获得了目标在轨动态光学特性。在某一观测角度下太阳帆板在探测光学系统入瞳产生的辐照度值与卫星本体接近,最大量级为10-11W/m2。仿真结果表明太阳帆板在目标特性分析时不可忽略。     

复杂目标光学散射截面数值仿真方法

研究复杂目标的几何建模、光学面元消隐和目标表面的光学散射特性.针对任意构型的目标,提出采用均匀光照明仿真图像进行光学散射截面（OCS）数值计算方法.通过自适应Z缓存方法,实现目标光学消隐面的计算,将这部分消隐面面积从目标OCS的数值积分中去除.研究近似镜面材料的空间模板褶皱表面的光学散射数值模拟方法,以及基于激光主动探测系统实验测量数据的目标OCS实验分析方法.根据某缩比例空间目标相对探测系统不同方位、俯仰角情况的OCS实验结果,校正OCS数值仿真参数.仿真结果与实验结果的图像比较和OCS曲线趋势大略一致,考虑到表面褶皱的随机性、姿态的测量误差和仿真模型有限的校准能力等因素,本文提出的数值仿真方法能够在一定程度上描述目标的OCS值.     

银薄膜对光学基底表面粗糙度及光散射的影响

为了研究金属银薄膜与光学基底表面粗糙度和光散射的关系,提出了通过对光学薄膜矢量散射公式积分来获得界面粗糙度完全相关模型和完全非相关模型下其表面的总反射散射的方法.理论计算了光学基底上两种模型在不同厚度银膜下的总反射散射和双向反射分布函数.结果表明,当沉积在光学基底上的银薄膜的厚度大于80 nm后,两种模型下计算的银薄膜的表面总反射散射都等于基底的总积分散射,银薄膜能较好地复现出基底的粗糙度轮廓.实验研究表明为了复现基底的粗糙度,银薄膜的最佳厚度应在80~160 nm之间.     

空间目标可见光散射特性建模方法研究

针对空间目标的可见光散射特性提出一种建模方法.在分析空间目标所处的背景辐射环境基础上建立了空间目标背景辐射物理模型.对目标表面进行面元划分后,基于辐射理论引入双向反射分布函数模型来描述目标表面面元的光散射特性,将目标各个表面所有面元散射分量叠加建立了目标可见光散射特性的数学模型.建立目标本体坐标系,通过坐标变换确定目标、背景辐射源与探测器的相对位置关系,利用矢量坐标法确定目标对观测系统的“可视表面”.根据给定的目标几何结构尺寸和物性参量仿真获得了目标在轨光学特性.计算结果验证了建模的有效性.     

The dynamic angle-limited integrated scattering (DALIS) method for measuring scattering of light from optical surfaces with random roughness

A new and simple dynamic angle limited integrated scattering (DALIS) method is developed to examine optically smooth reflective surfaces with defined surface form. Our experimental results from two systems show advantages over conventional angle resolved scattering measurement (ARS) methods. By collecting scattered light in a given solid angle, our methods do not require a detection unit with an extremely large dynamic range. Unlike in the common ARS measurement method, here we use a simple linear translation stage to scan scattered light. The power spectrum density function and the autocorrelation function of the surface roughness can be recovered from the measured scattering pattern. This method can be applied to in-workshop inspection of optical polishing processes.     

A high-speed particle-detection in a large area using line-laser light scattering

We study the optical characteristics of a home-built line-laser surface light scattering system that detects sub-micron scale irregularities on a large area in high speeds. The sensitivity of the detection system, i.e. signal to noise (STN) ratio, is found to depend strongly on the detection angle. We find an optimal detection angle at 30°, at which STN ratio is maximized for 2500 nm silica particles on wafer surface. Experimental results of scattering intensity measurements from a smooth surface and from surfaces with spherical irregularities are in excellent agreement with corresponding theoretical model calculations. The line scan speed can be as high as ∼17 mm/s, while identifying the presence of a particle as small as 700 nm in a pixel area (∼15 μm × ∼17 μm). The presence of irregularities found by the line scan system is confirmed by confocal laser-scanning microscopy imaging. Due to unique advantages such as non-disruptiveness, high-speed over large area, and high sensitivity, this line scan system may be used as a surface inspection system that meets the requirements of recent flat panel display manufacturing environments.     

Study of dispersion and absorption of an ensemble of spherical particles inside an optical cavity and new possibilities of predicting the optical characteristics of biological media by intracavity laser spectroscopy

Optical characteristics, namely, dispersion and absorption spectra of an ensemble of spherical particles randomly oriented inside an optical cavity are investigated. The study is based on the self-consistent matching of new data from the inhomogeneous optical cavity with data from the scattering of an ensemble of spherical particles of different size, randomly oriented in free space. As a result, a new model, which self-consistently accounts for multiple scattering in the optical cavity, has been developed to predict absorption and dispersion of ensembles of spherical particles. This model is supposed to enhance potentiality of the intracavity method for plotting wavelength dependences of optical characteristics of media. A specific calculation of dispersion and absorption dependences on the wavelength shows that this method can be used for investigation of biological media consisting of spherical particles, in particular, erythrocyte suspension.     

气体-表面相互作用的分子动力学模拟研究

采用分子动力学模拟方法研究了气体分子Ar在光滑和粗糙Pt表面上的散射规律.提出了一种速度抽样方法,计算了不同温度条件下气体分子对光滑和粗糙表面的切向动量适应系数和吸附概率.结果显示：光滑表面条件下,气体分子的切向动量系数和吸附概率都随着温度的升高而降低;粗糙度对气体分子切向动量与表面的适应具有极大的促进作用,当粗糙度足够大时,切向动量适应系数的大小趋近于1.0,对温度的敏感性也逐渐降低.采用粒子束方法对气体分子在光滑和粗糙表面上的散射规律进行了定量分析.总结了散射过程中气体分子的典型轨迹和动量变化规律,将气体分子在光滑表面的散射分为两种类型：单次碰撞后散射和多次碰撞后散射.单次碰撞后散射的气体分子平均切向动量有所减小,而经过多次碰撞后散射的气体分子则倾向于保持原有的平均切向动量.对于粗糙表面,粗糙度的存在使气体分子与表面间的动量和能量适应更加充分,导致气体分子在较粗糙表面上散射后的平均切向动量大幅减小并接近于0,且气体分子在表面上经历的碰撞次数越多,其散射后的能量损失越严重.     

Determination of optical characteristics of biological tissues by temporal distribution of an ultrashort laser pulse passed through homogeneous scattering layer

The determination of optical characteristics of biological tissues by the temporal distribution of an ultrashort laser pulse passed through a homogeneous scattering layer is considered. Four nonstationary models used to describe passing of laser pulses through a highly scattering medium are compared for the first time. The domains of applicability for the diffusion models are determined. It has been shown that the determination of optical characteristics of highly scattering media by experimental temporal distributions leads to different numerical values depending on the used model. Nevertheless, any of these models can be used because the performed study does not permit one to give preference to any of them. However, in determining optical characteristics of the scattering samples, it is necessary to specify the used model, as well as the conditions under which the initial experimental data (in particular, the thickness of the layer of a studied sample) are obtained.     

Light scattering by large Saharan dust particles: Comparison of modeling and experimental data for two samples

Light scattering by large mineral-dust particles with small-scale surface roughness is investigated by comparing model simulations with laboratory-measured scattering matrices of two distinct dust samples collected from the Sahara desert. The samples have been chosen on the basis of their large effective radii, and the simulations are based on their measured size distributions. Size parameters larger than about 30 are modeled using a modified ray-optics model RODS (Ray optics with diffuse and specular interactions), while smaller particles are simulated with a T-matrix model. RODS allows us to mimic the surface roughness of large dust particles by covering the particle surface by a thin layer of external scatterers with specific single-scattering properties. The Gaussian-random-sphere geometry is used for the shapes of large dust particles. Small particles are modeled as an axial-ratio distribution of spheroids with smooth surfaces. One of the samples consists wholly of large particles and its scattering matrix can be reproduced very well by the RODS model, except for the phase function. The incorporation of wavelength-scale roughness is, however, necessary for good fits. The other sample, consisting of both small and large particles, proves more challenging to match with simulations. The analysis indicates, however, that the difficulties arise at least partially from the small-particle contribution, while RODS results are consistent with the measurements. Further, the results imply that the agreement with measurements would improve if roughness could also be accounted for in the small-particle simulations. Overall, the RODS method seems promising for modeling the optical properties of mineral-dust particles much larger than the wavelength.     

Generation of web-like structures and nanoparticles by femtosecond laser ablation of silicon target in ambient air

Silicon nanoparticles were produced by femtosecond laser ablation in ambient air. Obtained samples were studied using dark-field optical microscopy, scanning electron microscopy and Raman-scattering spectroscopy. Two groups of structures can be found: (1) branched amorphous structures with a minimum element size of about 10 nm and incorporations of nanocrystals (0.6–6.6 nm from Raman scattering analysis); (2) larger crystal particles with smooth surface and a typical size of 50–200 nm that provide directional visible light scattering (at dark-field optical microscopy observations). An influence of environment on resulting phase composition of silicon nanoparticles was investigated by numerical evaluation of nanoparticle’s cooling rate. The calculation shows that cooling in ambient air ensures cooling rate sufficient for crystallization.     

考虑地表反射类型的气溶胶散射偏振特性

采用逐次阶散射法求解矢量辐射传输方程来研究气溶胶在不同地表反射模型下的散射偏振特性.首先,选取单一地表反射模型和耦合地表反射模型两种地表反射模型.然后,根据地表反射模型计算得到相应的地表反射率,进而采用逐次阶散射法对矢量辐射传输方程进行求解,得到散射光的Stokes矢量.最后,由Stokes矢量计算得出散射光的偏振度.仿真结果表明,两种地表反射模型下气溶胶单次散射的散射辐射强度和线偏振度均相等;耦合地表反射模型的总散射辐射强度和线偏振度总是大于单一地表反射模型;单一地表反射模型的气溶胶单次散射相对总散射的贡献总是大于耦合地表反射模型.研究结果对气溶胶光学特性的反演具有一定意义.     

Scattering of Radiation of the Sun and the Sky from Two Dimensional Rough Sea Surfaces

The scattering of optical wave from two dimensional rough sea surfaces is studied first with method of facets. The sea surface is divided into many facets, and each facet is treated as a surface with small roughness instead of a smooth plane, therefore more practical and effective. In addition the shadowing function of sea surfaces for arbitrary incident and scattering angles is numerically calculated with the Z-BUFFER method, which applies to any kinks of rough surfaces compared with the methods available. Finally the spectral irradiance of the sun and the spectral radiance of the sky for different time at sea level with fine weather are obtained with the software of Lowtran7, and the scattering of the radiation of the sun and the sky from two dimensional rough sea surfaces for different time, waveband and wind speed is studied, which is of great reference value for reducing the interference to the infrared detector due to the scattering of the radiation of the sun and the sky from sea surfaces.     

散射光谱的目标材质及比例反演研究

研究了基于散射光谱的点目标在远距离条件下表面材质及比例反演方法,旨在为空间碎片探测及预报提供数据参考。首先根据散射光谱的远距离目标探测物理模型,建立了基于散射光谱的目标参数反演物理模型,给出了基于最小二范数理论方法的目标表面材质及比例信息的反演算法,结合光源照射特性、目标材料表面光学反射特性、入射、反射及探测角等信息,利用双向反射分布函数(BRDF)的多级融合模型,表征复杂材料表面的光学反射特性,将BRDF中对应的面积量作为待反演参数,给出了目标表面材质及比例信息的反演算法;其次进行了实验验证,搭建了室内散射光谱探测及采集系统,进行了单一材质及多种材质不同比例的目标散射光谱探测及数据采集,经过对散射光谱数据进行预处理,截取有效波长范围为400～800 nm;结合理论分析及反演算法,对于四种材质组合的样品,进行了相同和不同比例组合的材质及比例反演,等比例反演结果最小误差为0.8%。最大误差为13.6%,平均误差为4.9%;不等比例反演结果最小误差为6%,最大误为12%,平均误差为9.25%;综合以上测试结果可以得出,反演平均误差最大为9.25%,考虑到入射光源稳定性有2.89%的误差,反...     

表面粗糙样品的太赫兹光谱参数提取方法研究

很多物质在太赫兹波段内的光谱参数具有指纹特征,这是太赫兹技术在安检等众多领域有所应用的基础.但是,目前常用的太赫兹时域光谱(THz-TDS)技术提取物质光学参数的Duvillaret算法,要求样品上下表面平行且充分光滑.然而在很多有潜力的实际应用场合中,尤其是对于固体样品,表面粗糙度不可避免,并且不能使用模具压片等实验...