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1.
电子束蒸发制备HfO2高k薄膜的结构特性   总被引:7,自引:0,他引:7       下载免费PDF全文
阎志军  王印月  徐闰  蒋最敏 《物理学报》2004,53(8):2771-2774
使用高真空电子束蒸发在p型Si(100)衬底上制备了高k HfO2薄膜.俄歇电子能谱证实薄膜组分符合化学配比;x射线衍射测量表明刚沉积的薄膜是近非晶的,高温退火后发生部分晶化;原子力显微镜和扫描电子显微镜检测显示在高温退火前后薄膜均具有相当平整的表面,表明薄膜具有优良的热稳定性;椭偏测得在600?nm处薄膜折射率为2.09;电容电压测试得到的薄膜介电常数为19.这些特性表明高真空电子束蒸发是一种很有希望的制备作为栅介质的HfO2薄膜的方法. 关键词: 高k薄膜 HfO2 电子束蒸发  相似文献   

2.
For the purpose of defining null plane charges, densities transforming as tensors under the Lorentz group are classified as very good, good, bad and very bad. In the general case of nonconserved tensors in a theory with interaction, it is argued that, in the presence of a mass gap, null plane integrals of members of the first two classes are expected to define symmetric charge operators on dense sets of states; for the last two classes they are not. The existence of null plane charges depends on the asymptotic behavior of off mass shell scattering amplitudes. It is shown that s 1n s behavior is the maximal growth consistent with the existence of null plane charges associated with currents.Supported in part by the U.S.-Israel Binational Science Foundation (B.S.F.), Jerusalem, Israel.  相似文献   

3.
The thermal conductivity of amorphous silicon thin films is measured in one dimension steady state condition. The experimental method is based on heating the sample front surface and monitoring the temperatures at its two sides. The experiments were carried out in conditions ensuring one-direction heat flow from top to bottom throughout the sample thickness. Sputtered a-Si:H films prepared with different conditions are used in order to investigate the dependence of thermal conductivity on material properties (i.e. hydrogen content and microstructure). The results show that, firstly, amorphous silicon is a very bad thermal conductor material. Secondly, the disorder in the film network plays an important role in thermal conduction. The highly disordered film exhibits the lowest thermal conductivity.  相似文献   

4.
实验和数值模拟超导绕组的机械特性   总被引:4,自引:0,他引:4  
为了减少环氧浸渍的超导磁体的锻炼和退化效应,基于实验和数值模拟研究了在热应力的电磁力的条件下超导绕组的机械特性;研究的基本目的是决定超导复合线圈基本的材料特性,其中复合超导绕组的杨氏模量和热收缩系数是基本的参数,使用这些参数我们可以用有限元方法精确地研究超导磁体的机械特性,通过分析各种超导磁体的设计,判断好的和坏的磁体设计,从而发展新的超导磁体的设计标准,形成超导磁体的设计和建造的基本方法,本中我们将通过实验和FEA模拟研究复合绕组的基本参数和应用特性。  相似文献   

5.
使用高真空电子束蒸发在p型Si(1 0 0 )衬底上制备了高kHfO2 薄膜 .俄歇电子能谱证实薄膜组分符合化学配比 ;x射线衍射测量表明刚沉积的薄膜是近非晶的 ,高温退火后发生部分晶化 ;原子力显微镜和扫描电子显微镜检测显示在高温退火前后薄膜均具有相当平整的表面 ,表明薄膜具有优良的热稳定性 ;椭偏测得在 6 0 0nm处薄膜折射率为 2 0 9;电容 电压测试得到的薄膜介电常数为 1 9.这些特性表明高真空电子束蒸发是一种很有希望的制备作为栅介质的HfO2 薄膜的方法  相似文献   

6.
When performing in-field tests on thermal barrier coatings (TBCs) deposited on gas turbine blades, the main problem encountered is the difficulty to correctly interpret the experimental data. The coating thickness changes, which are not regarded as anomalies, are one of the most common sources of false alarms. They are very challenging to recognize because, unlike stains, eroded areas and optical property variations, they are not detectable in the visible band. Furthermore, their thermal signal is similar to the one produced by an adhesion defect. In this paper, a procedure to reliably discriminate thickness changes and real defects is proposed. The approach is based on the analysis of the apparent effusivity profile. Preliminary results are presented and discussed.  相似文献   

7.
We discuss how the nuclear superfluidity affects the thermalisation time of the inner crust of neutron star in the case of a rapid cooling process. The thermal response of the inner crust matter is calculated supposing two pairing scenarios: one corresponding to the BCS approximation and the other to many-body techniques including polarisation effects. It is shown that these two pairing scenarios, which reflect the present uncertainty in the pairing properties of infinite neutron matter, give very different values for the thermalisation time of the crust.  相似文献   

8.
Information on the thermal properties of materials is very important both in fundamental physical research and in engineering applications. The development of materials with desirable heat transport properties requires methods for their experimental determination. In this paper basic concepts of the measurement of parameters describing the heat transport in solids are discussed. Attention is paid to methods utilizing nonstationary temperature fields, especially to photothermal methods in which the temperature disturbance in the investigated sample is generated through light absorption. Exemplary photothermal measuring techniques, which can be realized using common experimental equipment, are described in detail. It is shown that using these techniques it is possible to determine the thermal diffusivity of bulk transparent samples, opaque and semi-transparent plate-form samples, and the thermal conductivity of thin films deposited on thick substrates. Results of the investigation of thermal diffusivity of the ground in the polar region, which is based on the analysis of the propagation of the thermal wave generated by sun-light, are also presented. Based on chosen examples one can state that photothermal techniques can be used for determination of the thermal properties of very different materials.  相似文献   

9.
彭保进  张敏  廖延彪  赖淑蓉  匡武  贺晓霞 《光子学报》2005,34(10):1501-1505
报导了用光纤布喇格光栅(FBG)传感器测量军工用的一新型材料的新方法.实验结果表明,此方法可在恶劣环境下可靠检测热膨胀系数,FBG在低至-50℃和高至+150℃大范围下仍能正常工作.文中给出了相应理论及实验结果.  相似文献   

10.
星载遥感器的挡光环优化设计与分析   总被引:1,自引:0,他引:1  
空间光学系统的工作环境非常恶劣, 特别是在卫星本地时间的白天。太空中的太阳光、地气光以及各种热辐射构成了严重的背景噪声, 威胁着空间光学系统的成像质量, 甚至导致空间光学系统因无法成像而失去探测能力。挡光环的出现大大改善了背景噪声带来的不良影响, 可以直接阻挡视场外杂光, 从而影响着系统的杂光抑制能力。然而, 由于挡光环的尺寸较小, 当光线入射到挡光环的边缘时就会产生严重的衍射效应, 这种衍射效应对改善表面材料的散射特性起了反作用。因此, 怎样设计结构合理的挡光环成为了遮光罩设计中的重要环节。本文将机械设计中的聚焦组合创新方法应用到空间光学系统的挡光环优化设计中, 提出了新型结构的挡光环。通过与已有挡光环的结构形式做比较, 经计算机仿真, 验证了该新型结构挡光环的抑制杂散光的优越性, 为我国星载遥感器的挡光环设计提供一种新的方法。  相似文献   

11.
Mechanical oscillators can be sensitive to very small forces. Low frequency effects are up-converted to higher frequency by rotating the oscillator. We show that for 2-dimensional oscillators rotating at frequency much higher than the signal the thermal noise force due to internal losses and competing with it is abated as the square root of the rotation frequency. We also show that rotation at frequency much higher than the natural one is possible if the oscillator has 2 degrees of freedom, and describe how this property applies also to torsion balances. In addition, in the 2D oscillator the signal is up-converted above resonance without being attenuated as in the 1D case, thus relaxing requirements on the read out. This work indicates that proof masses weakly coupled in 2D and rapidly rotating can play a major role in very small force physics experiments.  相似文献   

12.
采用真空热蒸发法在石英玻璃基片上制备了具有特殊微柱状结构的碘化铯闪烁薄膜。运用扫描电子显微镜、X射线衍射仪和荧光光谱仪分别对碘化铯薄膜的形貌、结构及发光性能等进行了表征与分析。结果表明:在基片温度为260 ℃、沉积速率为3 nm·s-1时,所生长的碘化铯薄膜具有理想的微柱形貌、沿(110)晶面的择优取向和良好的透射性能;紫外光激发下,发射主峰为 438 nm,X射线激发下,发射主峰为315 nm,说明短波段发射峰需要的激发能量较高,而长波段发射峰对紫外光激发更为敏感。  相似文献   

13.
A method to pattern infrared-absorbing gold black by conventional photolithography and lift-off is described. A photo-resist pattern is developed on a substrate by standard photolithography. Gold black is deposited over the whole by thermal evaporation in an inert gas at ∼1 Torr. SiO2 is then deposited as a protection layer by electron beam evaporation. Lift-off proceeds by dissolving the photoresist in acetone. The resulting sub-millimeter size gold black patterns that remain on the substrate retain high infrared absorption out to ∼5 μm wavelength and exhibit good mechanical stability. This technique allows selective application of gold black coatings to the pixels of thermal infrared imaging array detectors.  相似文献   

14.
大规模并行处理的发展要求并行应用程序具有良好的可扩展性.以二维电磁等离子体粒子云并行程序为例,描述了近优可扩展性分析的应用.在已知小规模系统性能的基础上,通过近优可扩展性分析,可以得到更大规模的系统在多少台处理机上运行更为"合理"的信息.  相似文献   

15.
随着卫星技术的发展和功能的多样化,星载固态存储器需要存储的数据量越来越大,存储速率越来越高,在轨寿命越来越长。基于NAND Flash的星载固态存储器的并行存储方案得到广泛应用。但是由于NAND Flash存在初始坏块,且Flash芯片中坏块分布离散性较大。当固态存储器存储速率较高,并行存储的Flash芯片数增多,坏块经叠加映射后,使固态存储器有效容量损失较大。针对高速固态存储器的坏块问题,提出了一种高效的坏块管理算法,通过对坏块进行地址映射和替换,使固态存储器初始有效容量与装机容量的比值在高速并行存储的情况下仍能保持在97%左右,提高了Flash芯片存储容量的利用率,延长了大容量星载高速固态存储器的使用寿命。  相似文献   

16.
采用真空热蒸发法在石英玻璃基片上制备了具有特殊微柱状结构的碘化铯闪烁薄膜。运用扫描电子显微镜、X射线衍射仪和荧光光谱仪分别对碘化铯薄膜的形貌、结构及发光性能等进行了表征与分析。结果表明:在基片温度为260℃、沉积速率为3 nm.s-1时,所生长的碘化铯薄膜具有理想的微柱形貌、沿(110)晶面的择优取向和良好的透射性能;紫外光激发下,发射主峰为438 nm,X射线激发下,发射主峰为315nm,说明短波段发射峰需要的激发能量较高,而长波段发射峰对紫外光激发更为敏感。  相似文献   

17.
We present some calculations of heat flow in an absorbing film deposited on a non-absorbing substrate. The energy source is a Gaussian laser beam. We analyse the effects of film thickness, thermal conductivity, spot radius and forced cooling on the temperature profile and, in a special case, the time evolution of that profile. The emphasis is on applications in optical bistability.  相似文献   

18.
The present work studies how the errors of infrared cameras propagate during the estimation of thermophysical parameters. The errors in the camera were determined experimentally, and varied with both position and temperature. The thermal conductivity and thermal capacity were estimated by comparing the experimental and computational temperature evolution as a gypsum plaster sample was left to cool naturally in the air. For each study, one of the parameters was varied until the simulated temperature curve was adjusted to the experimental curve using the Levenberg–Marquardt Algorithm. We concluded that for the thermal capacity, there is a strong correlation between the error in the camera and the error of the parameter, which was not so clear in the case of the thermal conductivity. Another important conclusion is that the variation of the thermal conductivity presents a better adjustment of the curves even though the error in the estimated parameter was higher, indicating that reasonable results in the minimization process do not necessarily assure a good estimation. As a final conclusion, we stress the importance of using calibrated cameras, since in the extreme cases a mean deviation of 1.46 °C in the camera represented an error of 15% on the thermal capacity and a mean deviation of 0.81 °C in the camera represented an error of 25% on the thermal conductivity.  相似文献   

19.
20.
葛四平  朱星  杨威生 《物理学报》2004,53(10):3447-3452
在异质纳米结构表面发生的新现象是当前研究的热点.最近发现,尽管甘氨酸在纯Ag表面只 能作物理吸附,蒸镀在Cu表面的单层Ag岛却能在Cu的帮助下,出现对甘氨酸作化学吸附的能力,这种现象是溢流效应的一种反映.蒸镀在Ag表面的Cu岛也能帮助附近裸露的Ag表面获得 化学吸附甘氨酸的能力,虽然这里已不是单原子层的银了.结果说明这种溢流现象来源于CuA g在表面的纳米结构共存,而不只是这种共存的某个结构所特有的.但是,由于Cu的表面能大 于Ag,所以即使是在室温下,Cu岛也会逐渐地被一单层Ag原子完全覆盖,从而失去溢 关键词: 溢流 甘氨酸 Cu Ag(111)  相似文献   

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