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1.
The metal-ferroelectric-semiconductor (MFS) heterostructure has been fabricated using Bi3.25La0.75Ti3O12 (BLT) as a ferroelectric layer by sol-gel processing. The effect of annealing temperature on phase formation and electrical characteristics of Ag/BLT/p-Si heterostructure were investigated. The BLT thin films annealed at from 500°C to 650°C are polycrystalline, with no pyrochlore or other second phases. The C-V curves of Ag/BLT/p-Si heterostructure annealed at 600°C show a clockwise C-V ferroelectric hysteresis loops and obtain good electrical properties with low current density of below 2×10−8 A/cm2 within ±4 V, a memory window of over 0.7 V for a thickness of 400 nm BLT films. The memory window enlarges and the current density reduces with the increase of annealing temperature, but a annealing temperature over 600°C is disadvantageous for good electrical properties.  相似文献   

2.
Thin films of ZnO were grown by the sol–gel method using spin-coating technique on (0001) sapphire substrates. The effect of doping under Ar/H2 atmosphere on the structural and electrical properties of ZnO was investigated by means of X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), I–V characterization, Hall effect and micro-photoluminescence. The films that were annealed at 600 °C in Ar/H2 (95/5) % atmosphere showed (002) a predominant orientation. The crystalline nature of 2 mol.  % of Li doped films were better when compared to 1 mol.  % of Li doped films. The incorporation of Li in ZnO lattice was confirmed by X-ray photoelectron spectroscopy, and micro-photoluminescence. Hall effect measurements and I–V characterization of the Li doped ZnO thin films exhibited a better p-type behavior.  相似文献   

3.
Low temperature lithium titanate compounds (i.e., Li4Ti5O12 and Li2TiO3) with nanocrystalline and mesoporous structure were prepared by a straightforward aqueous particulate sol–gel route. The effect of Li:Ti molar ratio was studied on crystallisation behaviour of lithium titanates. X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FTIR) revealed that the powders were crystallised at the low temperature of 500 °C and the short annealing time of 1 h. Moreover, it was found that Li:Ti molar ratio and annealing temperature influence the preferable orientation growth of the lithium titanate compounds. Transmission electron microscope (TEM) images showed that the average crystallite size of the powders annealed at 400 °C was in the range 2–4 nm and a gradual increase occurred up to 10 nm by heat treatment at 800 °C. Field emission scanning electron microscope (FE-SEM) analysis revealed that the deposited thin films had mesoporous and nanocrystalline structure with the average grain size of 21–28 nm at 600 °C and 49–62 nm at 800 °C depending upon the Li:Ti molar ratio. Moreover, atomic force microscope (AFM) images confirmed that the lithium titanate films had columnar like morphology at 600 °C, whereas they showed hill-valley like morphology at 800 °C. Based on Brunauer–Emmett–Taylor (BET) analysis, the synthesized powders showed mesoporous structure containing pores with needle and plate shapes. The surface area of the powders was enhanced by increasing Li:Ti molar ratio and reached as high as 77 m2/g for the ratio of Li:Ti = 75:25 at 500 °C. This is one of the smallest crystallite size and the highest surface areas reported in the literature, and the materials could be used in many applications such as rechargeable lithium batteries and tritium breeding materials.  相似文献   

4.
Pure BiFeO3 (BFO), Ce and Ti individual doping and co-doping BiFeO3 thin films were fabricated via sol–gel process on Pt/Ti/SiO2/Si substrates. The microstructure, surface morphology, ferroelectric and dielectric properties of BFO and doped thin films were investigated in detail. X-ray diffraction reveal that all thin films are confirmed the formation of the distorted rhombohedral perovskite structure. No impure phase is identified in all the films. The Ce and Ti co-doping BiFeO3 (BCFTO) thin films exhibited the enhanced ferroelectricity with a large remnant polarization (2P r) of 130 μC/cm2, and low leakage current density of 9.10 × 10?6 A/cm2 which is more than two orders of magnitude lower than that of pure BFO films at 100 kV/cm. The dielectric constant (364 at 1 kHz) of the BCFTO thin films is much larger than that of pure BFO thin films. These results suggest that the introductions of Ce and Ti provides an effective route for improving the ferroelectric, dielectric and leakage properties of BFO thin films.  相似文献   

5.
80%Pb(Zn1/3Nb2/3)O3–20%PbTiO3 (PZN–PT) thin films have been prepared on Pt/Ti/SiO2/Si substrates using a modified sol–gel method. In our method, niobium pentaoxide is used as a substitution instead of niobium ethoxide which is moisture-sensitivity and much more expensive. Microstructure and electrical properties of PZN–PT thin films have been investigated. X-ray diffraction analysis shows that proper annealing temperature of PZN–PT thin films is 600 °C. The PZN–PT thin films annealed at 600 °C are polycrystalline with (111)-preferential orientations. Field-emissiom scanning electron microscope analysis revealed PZN–PT thin films possess well-defined and crack-free microstructure. The thickness of thin films is 290 nm. The Pt/PZN–PT/Pt capacitors have been fabricated and it presents ferroelectric nature. The remanent polarization (Pr), spontaneous polarization (Ps), and the coercive electric field (Ec) are 8.71 μC/cm2, 43.06 μC/cm2, and 109 kV/cm at 1 MHz, respectively. The dielectric constant (εr) and the dissipation factor (tan δ) are about 500.3 and 0.1 at 1 kHz, respectively.  相似文献   

6.
Highly transparent In-Ga-Zn oxide (IGZO) thin films were fabricated by spin coating using acetate- and chlorate-based precursors, and thin film transistors (TFTs) were further fabricated employing these IGZO films as the active channel layer. The impact of the post-annealing temperature on the physical properties of IGZO films and performance of IGZO TFTs were investigated. Compared to the nitrate-based IGZO precursor, the chlorate-based precursor increases the phase change temperature of IGZO thin films. The IGZO films changed from amorphous to nanocrystalline phase in an annealing temperature range of 600–700 °C. The transparency is more than 90% in the visible region for IGZO films annealed with temperatures higher than 600 °C. With the increase of post-annealing temperature, the carrier concentration of IGZO film decreases, while the sheet resistance increases firstly and then saturates. The bottom-gate TFT with IGZO channel annealed at 600 °C in oxygen showed the best performance, which was operated in n-type enhancement mode with a field effect mobility of 1.30 cm2/V s, a threshold voltage of 10 V, and a drain current on/off ratio of 2.5 × 104.  相似文献   

7.
Nanostructured TiO2–SnO2 thin films and powders were prepared by a facile aqueous particulate sol–gel route. The prepared sols showed a narrow particle size distribution with hydrodynamic diameter in the range 17.2–19.3 nm. Moreover, the sols were stable over 5 months, since the constant zeta potential was measured during this period. The effect of Sn:Ti molar ratio was studied on the crystallisation behaviour of the products. X-ray diffraction analysis revealed that the powders were crystallised at the low temperature of 400 °C containing anatase-TiO2, rutile-TiO2 and cassiterite-SnO2 phases, depending on annealing temperature and Sn:Ti molar ratio. Furthermore, it was found that SnO2 retarded the anatase to rutile transformation up to 800 °C. The activation energy of crystallite growth was calculated in the range 0.96–6.87 kJ/mol. Transmission electron microscope image showed that one of the smallest crystallite sizes was obtained for TiO2–SnO2 binary mixed oxide, being 3 nm at 600 °C. Field emission scanning electron microscope analysis revealed that the deposited thin films had nanostructured morphology with the average grain size in the range 20–40 nm at 600 °C. Thin films produced under optimized conditions showed excellent microstructural properties for gas sensing applications. They exhibited a remarkable response towards low concentrations of CO gas at low operating temperature of 200 °C, resulting in increased thermal stability of sensing films as well as a decrease in their power consumption.  相似文献   

8.
Bi-layered ferroelectric Bi3TiTaO9 (BTT) thin films with different thickness (ranging from 100 to 400 nm) were successfully fabricated on Pt(111)/TiO2/SiO2/(100)Si substrates using chemical solution deposition (CSD) technique at different annealing temperatures. The c-axis orientation of the films was affected by film thickness and process temperature. The thinner the film and the higher the process temperature, the higher the c-axis orientation. With the increase of film thickness, the stress decreased but the film roughness increased, which led to the decrease of c-axis orientation of films. BTT films annealed at 800°C were found to have much improved remament polarization (P r ) than that of films annealed at 650 and 750°C. The P r and coercive field (E c ) values were measured to be 2 μC/cm2 and 100 kV/cm, respectively. BTT films showed well-defined ferroelectric properties with grain size larger than 100 nm.  相似文献   

9.
In this study, in order to develop a new photosensitive gel film, Nb2O5 gel films including a chelate ring were prepared by the sol?Cgel method. Photosensitive and patterning properties of the gel films were investigated. Properties such as refractive index for annealed films were also evaluated. In the electronic absorption spectra of the gel films, the absorption peak assigned a chelate ring was observed at 353?nm, this peak intensity decreased by UV irradiation. From this result, the obtained gel films exhibit photosensitivity. Fine patterns (minimal width of about 2???m) could be fabricated. It was found that the value of refractive index reaches a maximum of 2.25 for the film heat-treated at 800?°C.  相似文献   

10.
Chemical solution deposited (CSD) complex oxide thin films attract considerable interest in various emerging fields as for example, fuel cells, ferroelectric random access memories or coated conductors. In the present paper the results of soft-X-ray spectroscopy between 280 and 560 eV on the amorphous to crystalline phase transition of ferroelectric Pb(Zr0.3Ti0.7)O3 (PZT) thin films are presented. Five CSD samples derived from the same wafer coated with a PZT film pyrolyzed at 350 °C were heat treated at different temperatures between 400 and 700 °C. At first the samples were morphologically and electrically characterized. Subsequently the soft-X-ray absorption and emission experiments were performed at the undulator beamline 8.0 of the Advanced Light Source of the Lawrence Berkeley National Laboratory. Soft-X-ray absorption spectra were acquired for the Ti L 2,3-, O K-, and C K-edge thresholds by using simultaneously the total electron yield (TEY) and total fluorescence yield (TFY) detection methods. For two samples, annealed at 400 and 700 °C, respectively, the resonant inelastic soft-X-ray spectroscopy (RIXS) was applied for various excitation energies near the Ti L-, O K-edges. We observed clear evidence of a rutile phase at untypically low temperatures. This rutile phase transforms into the perovskite phase upon increasing annealing temperature. These results are discussed in the framework of current microscopic models of the PZT (111) texture selection.  相似文献   

11.
The 0.2Bi(Zn1/2Ti1/2)O3–0.8PbTiO3 (0.2BZT–0.8PT) ferroelectric thin film was successfully fabricated on Pt(111)/Ti/SiO2/Si substrates by a sol–gel method. The result indicates that the film exhibits the (100) preferred orientation and has a relatively dense and uniform microstructure with a thickness of ~230 nm. The formation mechanism of the oriented films was ascribed to the growth of the (100) oriented PbO layer at ~450 °C during a layer-by-layer crystallization process. Temperature-dependent electrical properties of the 0.2BZT–0.8PT films were investigated, showing that the film has a potential for high temperature applications.  相似文献   

12.
Mesoporous WO3–TiO2 composite films were prepared by a sol gel based two stage dip coating method and subsequent annealing at 450, 500 and 600 °C. An organically modified silicate based templating strategy was adopted in order to obtain a mesoporous structure. The composite films were prepared on ITO coated glass substrates. The porosity, morphology, and microstructures of the resultant products were characterized by scanning electron microscopy, N2 adsorption–desorption measurements, μ-Raman spectroscopy and X-ray diffraction. Calcination of the films at 450, and 500 °C resulted in mixed hexagonal (h) plus monoclinic phases, and pure monoclinic (m) phase of WO3, respectively. The degree of crystallization of TiO2 present in these composite films was not evident. The composite films annealed at 600 °C, however, consist of orthorhombic (o) WO3 and anatase TiO2. It was found that the o-WO3 phase was stabilized by nanocrystalline anatase TiO2. The thus obtained mesoporous WO3–TiO2 composite films were dye sensitized and applied for the construction of photochromic devices. The device constructed using dye sensitized WO3–TiO2 composite layer heat treated at 600 °C showed an optical modulation of 51 % in the NIR region, whereas the devices based on the composite layers heat treated at 450, and 500 °C showed only a moderate optical modulation of 24.9, and 38 %, respectively. This remarkable difference in the transmittance response is attributed to nanocrystalline anatase TiO2 embedded in the orthorhombic WO3 matrix of the WO3–TiO2 composite layer annealed at 600 °C.  相似文献   

13.
Mesoporous WO3–TiO2 composite films were prepared by a sol gel based two stage dip coating method and subsequent annealing at 450, 500 and 600 °C. An organically modified silicate based templating strategy was adopted in order to obtain a mesoporous structure. The composite films were prepared on ITO coated glass substrates. The porosity, morphology, and microstructures of the resultant products were characterized by scanning electron microscopy, N2 adsorption–desorption measurements, μ-Raman spectroscopy and X-ray diffraction. Calcination of the films at 450, and 500 °C resulted in mixed hexagonal (h) plus monoclinic phases, and pure monoclinic (m) phase of WO3, respectively. The degree of crystallization of TiO2 present in these composite films was not evident. The composite films annealed at 600 °C, however, consist of orthorhombic (o) WO3 and anatase TiO2. It was found that the o-WO3 phase was stabilized by nanocrystalline anatase TiO2. The thus obtained mesoporous WO3–TiO2 composite films were dye sensitized and applied for the construction of photochromic devices. The device constructed using dye sensitized WO3–TiO2 composite layer heat treated at 600 °C showed an optical modulation of 51 % in the NIR region, whereas the devices based on the composite layers heat treated at 450, and 500 °C showed only a moderate optical modulation of 24.9, and 38 %, respectively. This remarkable difference in the transmittance response is attributed to nanocrystalline anatase TiO2 embedded in the orthorhombic WO3 matrix of the WO3–TiO2 composite layer annealed at 600 °C.  相似文献   

14.
Bi1.5MgNb1.5O7 (BMN) thin films were fabricated on Au/Ti/SiO2/Si(100) substrates using a sol?Cgel spin coating process. Thermo decomposition of the BMN precursor gel was discussed. The structures, morphologies, dielectric properties and voltage tunable dielectric properties were investigated. The deposited films showed a cubic pyrochlore structure after annealing at 550?°C or higher temperatures. With the annealing temperature increased from 500 to 800?°C, the root-mean-square surface roughness of the films increased from 0.6 to 6.8?nm. Additional phase, MgNb2O6, emerged after annealing at 800?°C due to the volatilization of Bi element. The dielectric properties and tunability of the films were annealing temperature dependent. BMN thin films annealed at 750?°C had a high dielectric constant of 135 and low dielectric loss of 0.002 at 1?MHz. The high tunability of 31.3?% and figure of merit of 156.5 were obtained under an applied electric field of 1?MV/cm at room temperature.  相似文献   

15.
Effects of Tb and transition metal (TM = Ni, Mn and Ti) ions co-doping on the structural, electrical and ferroelectric properties of the BiFeO3 thin films prepared by using a chemical solution deposition method were reported. From X-ray diffraction and Raman scattering analyses, distorted rhombohedral perovskite structures were observed for all thin films. Improved electrical and ferroelectric properties were observed for the co-doped thin films. Among the thin films, the lowest leakage current density of 2.67 × 10?6 A/cm2 (at 100 kV/cm), large remnant polarization (2P r ) of 82.2 μC/cm2 and low coercive field (2Ec) of 680 kV/cm (at 1,036 kV/cm) were measured for the (Tb, Mn) co-doped thin film.  相似文献   

16.
Sol–gel processed Cu2ZnSnS4 (CZTS) thin films were fabricated without sulfurization for application as a photovoltaic absorber layer. The precursor solution was made from CuCl2, Zn(ac)2, SnCl2, thiourea, and 2-methoxyethanol and the spin-coated film was annealed at temperature above 500 °C under a N2 atmosphere. A homogeneous and compositionally uniform film with single CZTS phase was obtained. Film composition featuring larger grains, which is desirable in photovoltaic cells, was obtained with heat treatment at 540 °C. The grain size was up to 1 μm and the Cu/(Zn + Sn) and Zn/Sn ratios were 0.93 and 1.07, respectively and the band gap energy was 1.56 eV.  相似文献   

17.
Potassium tantalate (KT) thin films and powders of both K2Ta2O6 (KT pyrochlore) and KTaO3 (KT perovskite) structures were prepared by means of chemical solution deposition method using Si(111) with ZnO and MgO buffer layers as a substrate. The influence of reaction atmosphere on reaction pathway and phase composition for both KT powders, and KT thin films has been studied mainly by means of powder diffraction and infrared spectroscopy. When an oxygen flow instead of static air atmosphere has been used the process of pyrolysis in oxygen runs over much narrower temperature interval (200–300 °C), relatively to air atmosphere (200–600 °C) and almost no (in case of powders), or no (in case of thin films) pyrochlore intermediate phase has been detected in comparison with treatment in air, where the pyrochlore phase is stable at temperatures 500–600 °C (powders). KT perovskite phase starts to crystallize at temperatures 50° and 150 °C lower compared to air atmosphere in case of powders and thin films, respectively. Microstructure formed by near-columnar grains and small grains of equiaxed shape was observed in films treated in oxygen and air atmosphere, respectively.  相似文献   

18.
Lead-free (Na0.5K0.5)NbO3 (NKN) thin films were prepared on Pt/X/SiO2/Si substrates (with the adhesion promoters X = Ti, Cr) by a sol–gel process with and without post-annealing treatment. The effect of the diffusion of the adhesion layer elements Ti and Cr into the NKN film was analysed by secondary ion mass spectrometry, scanning electron microscopy pictures, X-ray diffraction (XRD), and leakage current measurements. It turned out that Cr diffuses into the films to a higher extent than Ti. The high amount of Cr diffusion led to the formation of a secondary phase, as seen in the XRD pattern, and to pore formation on the surface of the NKN films. In contrast, the films with Ti adhesion layer were single phase NKN without pore formation. Also, the leakage current measurements showed a strong influence of the Cr diffusion. The leakage current of the films with Cr adhesion layer was about four orders of magnitude higher than that of the films with Ti adhesion layer. The study shows the strong influence of the adhesion layer of the substrate on the properties of NKN films.  相似文献   

19.
Indium–zinc oxide (IZO) thin films were fabricated by spin coating using acetate- and nitrate-based precursors, and thin film transistors (TFTs) were further fabricated employing the IZO films as the active channel layer. The impact of the indium concentration on the properties of the solutions, the structure and optical transmittance properties of the IZO films and the IZO TFTs device properties were researched in this article. The IZO films with amorphous structure were obtained when the annealing temperature is 500 °C. The transmittance could reach ~90 % (including glass substrate) during the visible region of 400–760 nm. Higher indium concentration can improve the IZO TFTs’ filed effect mobility. A Ion–Ioff of 6.0 × 106 and a mobility of 0.13 cm2/Vs were obtained when the indium concentration is 60 %. IZO TFTs’ performance could deteriorate when the indium concentration more than 60 %.  相似文献   

20.
Tin oxide (SnOx) has been widely used for the fabrication of transparent and flexible devices because of its excellent optical and electronic properties. In this work, we established a methodology for the synthesis of SnOx thin films with p‐type and n‐type tunable conductivity by direct currecnt (DC) magnetron sputtering. The SnOx thin films changed from p‐type to n‐type by increasing the relative oxygen partial pressure (ppO2) from 4.8% to 18.5% and by varying the working pressure between 1.8 and 2.5 mTorr. The SnOx thin films were annealed at 160°C, 180°C, and 200°C for 30 min to promote the formation of the desired crystalline structures. At the annealing temperature of 180°C in air ambient, the SnOx thin films showed a tetragonal structure with Sn traces. Having found the optimal conditions, we deposited both types of SnOx thin films with the same tetragonal structure and similar chemical stoichiometry. Also, the conditions to obtain thin films with the highest mobility values for p‐type (1.10 cm2/Vs) and n‐type (22.20 cm2/Vs) were used for fabricating the device. Finally, the implementation of a SnOx‐based p–n diode was demonstrated using transparent SnOx thin films developed in this work, illustrating their potential use in transparent electronics.  相似文献   

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