占空比对微球a-C:H薄膜制备的影响

采用低压等离子体化学气相沉积方法（LPPCVD）,以反式二丁烯（T₂B）和氢气（H₂）为工作气体,利用间歇跳动模式在微球表面制备30 μm厚a-C:H涂层.利用原子力显微镜（AFM）和X射线照相技术对涂层表面形貌及壁厚均匀性进行表征,结果表明：随占空比减小,制备出的微球a-C:H薄膜表面粗糙度呈下降趋势,而壁厚均匀性随占空比的减小变化不明显;当占空比为1/5时,在直径为（280±50） μm 的聚乙烯醇-聚苯乙烯（PVA-PS）双层球表面制备出30 μm厚的a-C:H涂层,表面均方根粗糙度（RMS）低于30 nm;占空比为1/7时,不能维持微球的稳定跳动. 关键词： 微球 a-C:H薄膜 粗糙度 壁厚均匀性     

工作压强对空心玻璃微球表面形貌和性能的影响

采用化学气相沉积-氧化烧结法,在不同工作压强条件下,制备了惯性约束聚变靶用空心玻璃微球(HGM)。利用扫描电子显微镜、原子力显微镜、VMR显微镜系统和能谱仪对HGM的表面形貌、球形度、壁厚均匀性以及成分进行了表征。分析了工作压强对HGM表面形貌、球形度、壁厚均匀性和成分的影响以及相互关系。研究表明:HGM的表面形貌随工作压强的增大而变得平滑致密,表面均方根粗糙度逐渐减小。随工作压强增大,HGM的球形度没有发生明显变化,而壁厚均匀性得到不断提高,微球中C元素浓度逐渐降低,Si元素浓度不断升高,O元素浓度基本保持不变。     

筛网盘对聚α-甲基苯乙烯微球弹跳性能的影响

 介绍了利用筛网设计制作出的一种新型的反弹盘,并用于聚α-甲基苯乙烯（PAMS）微球的弹跳实验。分析了筛网盘与玻璃盘之间的差别和由此带来的对PAMS微球弹跳性能影响。通过实验分别研究了筛网盘相关的参数对微球表面粗糙度的影响。结果表明：采用筛网盘与玻璃盘相比,PAMS微球的弹跳性能的改善非常明显;筛网盘的使用较好地解决了在无等离子体的镀膜环境下（如热蒸发的方法制备PAMS微球表面聚酰亚胺涂层）PAMS微球的弹跳问题;为降低微球表面粗糙度,反弹盘应采用间歇振动的模式。     

液滴法制备高尺度比玻璃微球壳的研究

 定量给出了液滴法制备玻璃微球壳（HGM）的直径与壁厚之间的依存关系,确定了制备大直径薄壁HGM的液滴炉温度分布、抽气速率、溶液浓度和液滴发生器操作参数等工艺条件,制备出直径为300～450μm、壁厚为0.7～1.2μm、尺度比为300～700的HGM,表面粗糙度优于10nm,球形度和同心度均优于97%,耐外压能力大于0.91MPa,耐内压能力至少大于0.43MPa。     

聚酰亚胺薄膜表面粗糙度的影响因素

 采用热蒸发气相沉积聚合方法（VDP）制备了聚酰亚胺(PI)薄膜,研究了设备、衬底温度、升温过程和单体配比因素对PI薄膜表面形貌的影响。利用干涉显微镜和扫描电镜对薄膜表面形貌进行了分析;利用原子力显微镜测定了薄膜表面粗糙度。结果表明：设定蒸发源-衬底距离为74 cm时可成连续膜;蒸发源采用一段升温和多段升温时,膜表面均方根粗糙度分别为291.23 nm和61.99 nm;采用细筛网可防止原料的喷溅;均苯四甲酸二酐和4,4′-二氨基二苯醚（PMDA和ODA）单体沉积速率比值为0.9∶1时,膜表面均方根粗糙度值可减小至3.30 nm;沉积衬底温度保持30 ℃左右时,膜表面均方根粗糙度为4.01 nm, 随温度的上升,膜表面质量会逐渐变差。     

二乙烯基苯泡沫空心球微流体成型技术

基于微流体成型技术,设计开发了一套用于微胶囊制备的T型微通道乳粒发生器,并利用该装置实现了二乙烯基苯空心泡沫微球的连续制备。以二乙烯基苯的邻苯二甲酸二丁酯溶液为油相,以聚乙烯醇的水溶液为外水相,去离子水为内水相,成功制备出二乙烯基苯双重微乳液,并采用水平旋转加热装置使其凝胶固化,再经过溶剂交换、CO2超临界干燥等过程,制备出直径700～1200μm、壁厚60～100μm、密度90～120mg.cm-3的二乙烯基苯空心泡沫微球。利用光学显微镜、扫描电镜和X-透射显微镜表征,结果显示:微胶囊球形度、同心度和壁厚均匀性较好,成活率较高,直径单分散性较好,外表面较粗糙。     

相移干涉法测量ICF微球内表面粗糙度

 通过分析光线通过微球壳层后各界面的相位分布,讨论了相移干涉法测量微球内表面粗糙度的基本原理,研究了微球上部壳层对内表面粗糙度测量的影响,得到了聚苯乙烯,聚a甲基苯乙烯微球的内表面形貌特征图像,测量数据与原子力显微镜测量数据在同一量级。以微球壳层对超光滑碳化硅及单晶硅片表面形貌的调制作用为研究对象,讨论了微球的外表面粗糙度以及微球壁厚对内表面粗糙度测量结果的影响,确定了相移干涉法测量微球内表面粗糙度的不确定度,实验结果表明：对于表面粗糙度小于30 nm、厚度小于9 mm的微球,测量不确定度小于0.4 nm。     

充气温度对PS-PVA-CH塑料微球性能的影响

 主要研究了PS-PVA-CH空心塑料微球充气时，充气平衡温度对微球强度、球形度和表面形貌的影响。对PS，PVA和CH材料的热重分析结果表明，PS和PVA具有较高的分解温度，而PS-PVA双层球和PS-PVA-CH塑料微球升温后的耐外压实验表明，温度升高后双层球耐外压强度降低很快，不能满足充Ar气需要；而3层球在100~120℃仍有很高强度，在该温度下，可以实现充Ar气。微球表面形貌分析结果显示，高温充气后，3层球表面粗糙度升高。     

激光惯性约束聚变靶靶丸制备与表征

激光惯性约束聚变的核心思想是利用球形内爆技术对聚变燃料进行增压,使热核燃料达到高温、高密度的等离子体状态,进而实现聚变点火。基于对称压缩、流体界面不稳定性和实验诊断的考虑,ICF实验对作为热核燃料容器的空心微球的品质在球形度、壁厚均匀性、表面粗糙度以及掺杂水平等方面提出了严格的要求。为满足这些要求,陆续发展了乳液微封装技术、降解芯轴技术、低压等离子体聚合/掺杂技术、干凝胶玻璃微球制备技术等用于多层塑料微球和空心玻璃微球的研制。另一方面,针对ICF靶丸量小、质轻以及表面要求高的特点,发展了相应的非破坏性靶丸参数表征技术,如X光照相技术、4π形貌表征技术、微球掺杂水平测量技术以及微球内燃料负载水平快速测试技术。基于这些制备与表征技术,初步实现了多层塑料微球、玻璃微球、聚-!-甲基苯乙烯芯轴微球、梯度掺杂CH微球的研制,满足了"神光Ⅱ"、"神光Ⅲ原型"及"神光Ⅲ主机"上开展的一系列内爆物理实验的要求,同时为未来点火物理实验用靶丸的研制提供了技术支撑。     

微封装法制备聚苯乙烯空心微球的改进

 主要介绍了密度匹配微封装技术，利用此项技术制备的聚苯乙烯空心微球 球形度好于99%，同心度好于98%。另外还对球壳内壁气泡问题及大直径球壳的制备进 行了讨论。     

不同工作压强下辉光放电聚合物薄膜的表面形貌与光学性质

利用低压等离子体聚合技术在不同工作压强下制备了辉光放电聚合物(GDP)薄膜。利用原子力显微镜、傅里叶红外光谱仪、元素分析仪和紫外-可见光谱仪对GDP薄膜的表面形貌、化学结构、碳氢原子数比以及光学性质进行了表征。分析了工作压强对薄膜表面形貌、化学结构、碳氢原子比和光学性质的影响以及相互关系。结果表明:GDP薄膜的表面形貌随工作压强的增大而变得平整光滑,均方根粗糙度逐渐减小。随工作压强增大,GDP薄膜的化学结构的相互交联化程度减弱,C=C双键含量不断减小,碳氢原子数比不断减小,氢元素含量逐渐增大,薄膜的光学透过率截止波长发生"蓝移",光学间隙不断增加。     

Electrostatic powder spraying process for the fabrication of stable superhydrophobic surfaces

Nano-sized Al₂O₃ particles were modified by heptadecafluorodecyl trimethoxysilane and 2,3-epoxy propoxy propyl trimethoxysilicane to make it both hydrophobic and reactive. The reactive nano-particles were mixed with polyester resin containing curing agents and electrostatic sprayed on stainless steel substrates to obtain stable superhydrophobic coatings after curing. The water contact angle (WCA) on the hybrid coating is influenced by the content of Al₂O₃ particles in the coating. As the Al₂O₃ concentration in the coating was increased from 0% to 8%, WCA increased from 68° to 165°. Surface topography of the coatings was examined using scanning electron microscopy (SEM). Nano-particles covered on the coating surface formed continuous film with greatly enhanced roughness, which was found to be responsible for the superhydrophobicity. The method is simple and cost effective and can be used for preparing self-cleaning superhydrophobic coating on large areas.     

Surface modification of pure titanium by hydroxyapatite-containing composite coatings

Micro-arc oxidation (MAO) is commonly applied to modify the surface of titanium (Ti)-based medical implants with a bioactive and porous Ti oxide (TiO₂) coating. The study reports a new method of incorporating hydroxyapatite (HA) within the TiO₂ coating by MAO and alkali heat treatment (AHT) in the solution containing Ca ion and P ion. The morphology, composition and phase composition of the coatings were analyzed with scanning electron microscopy with energy-dispersive X-ray spectrometer and X-ray diffraction. Surface topography and roughness of the coatings were investigated by atomic force microscopy operated in the tapping mode. The results showed that TiO₂-based coatings were obtained on pure Ti by MAO with an electrolyte containing Ca ion and P ion; the prepared MAO coatings were mainly composed of Ca, P, O and Ti. AHT transformed Ca and P to HA crystals. In conclusion, the TiO₂/HA composite coatings can be obtained on the surface of pure Ti by MAO and AHT, and the addition of Ca ion and P ion to the AHT solution contributed to the formation of HA.     

Effects of roughness on interfacial performances of silica glass and non-polar polyarylacetylene resin composites

The influence of roughness on interfacial performances of silica glass/polyarylacetylene resin composites was investigated. In order to obtain different roughness, silica glass surface was abraded by different grits of abrasives and its topography was observed by scanning electron microscopy and atomic force microscopy. At the same time, the failure mechanisms of composites were analyzed by fracture morphologies and the interfacial adhesion was evaluated by shear strength test. The results indicated that shear strength of silica glass/polyarylacetylene resin composites firstly increased and then decreased with the surface roughness of silica glass increased. The best surface roughness range of silica glass was 40-60 nm. The main mechanism for the improvement of the interfacial adhesion was physical interlocking at the interface.     

Influence of superalloy substrate roughness on adhesion and oxidation behavior of magnetron-sputtered NiCoCrAlY coatings

The present study has been conducted in order to determine the influence of superalloy substrate roughness on adhesion and oxidation behavior of magnetron-sputtered NiCoCrAlY coatings. Six types of coating samples with different substrate roughness were tested. The surface roughness and real surface area of both the substrates and coatings were studied by atomic force microscopy (AFM) techniques. The scratch tests performed at progressive loads were employed to evaluate the adhesion of the coatings. Cyclic oxidation tests were performed at 1100 °C in air for 50 cycles, each cycle consisting of 1 h heating in the tube furnace followed by 15 min cooling in the open air. The AFM measurements exhibit that the surface roughness of the sputtered NiCoCrAlY coating increases with the increasing of the superalloy substrate roughness. The NiCoCrAlY coatings present slightly lower roughness than the corresponding superalloy substrate. The scratch adhesion tests indicate that the coatings on substrates with a smoother surface possess better adhesion than on those with a rougher surface. Both the real surface area and oxidation weight gain of the coatings decrease with the decreasing of the superalloy substrate roughness. The NiCoCrAlY coating sputtered on the superalloy substrate with lower roughness provides relatively higher antioxidant protection than that provided by the coating with rougher substrate.     

Effect of cathodic arc PVD parameters on roughness of TiN coating on steel substrate

Titanium nitride which is widely used as a hard coating material was coated on tool steel, by physical vapor deposition method. Surface roughness was investigated as a function of deposition rate, substrate bias and temperature, nitrogen flow rate and metal ion etching. The study showed that increase in surface roughness mainly depends on the condition of sample preparation, surface treatment, macro-droplets, pitting defects, rise in compressive stress at higher coating thickness, growth defects and to a lesser extent selection of surface under testing. It was observed that chromium ion etching significantly reduced the surface roughness compared to titanium ion etching.     

Modeling and simulating of V-shaped piezoelectric micro-cantilevers using MCS theory considering the various surface geometries

Atomic force microscopy (AFM) is widely used as a tool in studying surfaces and mechanical properties of materials at nanoscale. This paper deals with mechanical and vibration analysis of AFM vibration in the non-contact and tapping modes for V-shaped piezoelectric micro-cantilever (MC) with geometric discontinuities and cross section variation in the air ambient. In the vibration analysis, Euler-Bernoulli beam theory based on modified couple stress (MCS) theory has been used. The governing equation of motion has been derived by using Hamilton's principle. By adopting finite element method (FEM), the MC differential equation has been solved. Damping matrix was considered in the modal space. Frequency response was obtained by using Laplace transform, and it has been compared with experimental results. Newmark algorithm has been used based on constant average acceleration to analyze time response of MC, and then time response results in the vibration mode, far from the sample surface have been compared with experimental data. In vicinity of sample surface, MC is influenced by various nonlinear forces between the probe tip and sample surface, including van der Waals, contact, and capillary forces. Time response was examined at different distances between MC base and sample surface, and the best distance was selected for topography. Topography results of different types of roughness showed that piezoelectric MC has been improved in the air ambient. Topography showed more accurate forms of roughness, when MC passes through sample surface at higher frequencies. The surface topography investigation for tapping and non-contact modes showed that using of these two modes are suitable for topography.