低能电子束曝光中的Monte Carlo方法及沉积能分布

建立一个低能电子在多元多层介质中散射Ｍｏｎｔｅ Ｃａｒｌｏ模拟计算方法，低能在多元介质中弹性散射用Ｍｏｔｔ截面描述并应用作者提出的平均散射截面方法进行模拟计算；给出多元介质中修正的Ｂｅｔｈｅ方程计算低能电子非弹性散射能量损失。计算了低能电子在电子束曝光胶中能量沉积分布。     

低能电子在固体表面背散射系数的直接Monte Carlo方法模拟

应用单次碰撞的直接Monte Carlo方法计算能量范围从100 eV~10 keV的电子在固体Al,Si,Au表面的背散射系数,其中低能电子在固体中的弹性散射和非弹性散射截面分别应用Mott散射截面和Born近似下的广义振子强度计算模型得到.通过与压缩历史Monte Carlo方法的模拟计算结果及实验值的比较,结果表明,对于100 eV~10 keV范围的低能区电子,采用直接方法计算得到的电子背散射系数与实验值符合较好,直接方法比压缩历史方法更适合于能量在10 keV以下的电子输运计算.     

Monte Carlo方法模拟低能电子在Al中的散射

基于文献[1]的工作,电子在固体中的弹性散射用Mott微分截面计算;非弹性散射分为单电子激发和等离子激发并由Streitwolf、Gryzinski及Quinn的截面描述.模拟了低能电子在Al块样及薄膜中的散射过程,对不同能量低能电子作用下Al的背散射系统、能谱又透射系数作了计算,结果与实验符合较好.也对背散射电子、低能损背散射电子表面分布作了计算,结果表明低能损背散射电子具有较好的空间分辨率.     

低能束作用下衬底上超薄膜背散射电子发射

应用MonteCarlo方法模拟千电子伏低能束作用下,不同衬底上不同薄膜背散射电子发射.应用Mott散射截面和Joy方法修正的Bethe方程描述和计算低能电子在固体中弹性和非弹性散射,引入边界方程,修正穿越薄膜与衬底界面的电子散射路径.计算分析了薄膜背散射系数η随薄膜厚度D的变化和规律,以及不同情况下ηD线性区范围的分布及其定量结果Dmax.计算了背散射电子角分布和空间密度分布. 关键词： 背散射电子 MonteCarlo方法 超薄膜     

低能电子非弹性散射阻止本领

电子在固体中的弹性散射用Mot截面描述,提出一个简化的壳层电子激发计算方法将文献[5]中对电子非弹性散射的模拟拓展到重元素,用MonteCarlo方法模拟低能电子在Al、Cu、Au中的散射过程,计算的背散射系数、薄膜透射系数与实验一致.由此,计算得低能电子非弹性散射阻止本领并与Love、Rao-SahibWittry以及Joy的修正Bethe阻止本领作比较分析.     

Monte Carlo方法计算低能电子作用下固体背散射电子发射及空间分布

应用Monte Carlo方法,对能量E₀≤5keV低能电子作用下固体Al、Cu、Ag、Au的背散射电子发射及表面空间分布作了计算.模型应用Mott散射截面及修正的Bethe方程分别描述低能电子在固体中的弹性和非弹性散射.计算了背散射电子能量分布、表面空间分布、深度分布和角分布规律及特征,还计算分析了背散射电子角分布与深度分布、表面空间分布及能量分布之间的关系,系统地描述了背散射电子的发射及分布规律.     

解相对论Dirac方程计算低能电子弹性散射截面的分波法

本文给出一个基于解相对论Dirac方程计算低能电子弹性散射截面的方法,比较Thomas-Fermi-Dirac(TFD)势及Hartree-Fock(HF)势对散射截面计算的影响,计算了C、Al、Cu、Ag、Au等多种元素在0.01~10keV能量范围的弹性散射截面,比较分析Mott模型、Pendry模型以及屏蔽的Rutherford截面之间的差异。     

低能电子与Kr、Xe弹性碰撞截面的计算

本文利用原子的解析波函数,导出了电子与第四,五周期元素原子相互作用势的解析形式,并用文献提出的物理模型与计算方法,对低能电子被Kr和Xe散射的截面进行了计算,得到了入射电子能量从0.01eV到100eV范围内弹性散射总截面,动量转移截面和微分散射截面的大量数据。计算结果与实验符合得很好。同时利用计算的结果,对低能电子被惰性气体原子散射的规律性进行了探讨。     

Monte Carlo方法模拟低能电子在多元介质中散射——基于平均散射截面方法

应用基于平均散射截面低能电子在多元介质中散射Monte Carlo方法,模拟E≤5eV低能电子在多种多元介质中散射。计算了电子背散射系数,背散射电子能谱、角分布,入射电子、背散射电子在介质中的作用范围、沉积能分布,并与确定散射中心方法的结果比较。两种方法计算结果广泛一致,进一步证明基于平均散射截面方法的有效性和可靠性。入射电子能量较低,介质平均原子序数较大时,计算的背散射电子角分析不服从余弦分布律。     

Monte Carlo方法模拟低能电子在多元介质中散射：基于平均散射截面 …

应用基于平均散射截面低能电子在多元介质中散射Ｍｏｎｔｅ Ｃａｒｌｏ方法,模拟Ｅ０≤５ｋｅＶ低能电子在多种多元介质同中散。计算了电子背散射系数,背散射电子能谱、角分布、入射电子,背散射电子在介质中的作用范围、沉积能分布,并与确定散射中心方法的结果比较。两种方法计算结果广泛一致,进上步证明基于平均散射截面方法的有效性和可靠性。入射电子能量较低,介质平均原子序数较大时,计算的背散射电子角分布不服从余弦分     

A New Simulation of Track Structure of Low-Energy Electrons in Liquid Water:Considering the Condensed-Phase Effect on Electron Elastic Scattering

A new Monte Carlo simulation of the trade structure of low-energy electrons(10keV) in liquid water is presented.The feature of the simulation is taken into consideration of the condensed-phase effect of liquid water on electron elastic scattering with the use of the Champion model,while the dielectric response formalism incorporating the optical-data model developed by Emfietzoglou et al.is applied for calculating the electron inelastic scattering.The spatial distributions of energy deposition and inelastic scattering events of low-energy electrons with different primary energies in liquid water are calculated and compared with other theoretical evaluations.The present work shows that the condensed-phase effect of liquid water on electron elastic scattering may be of the influence on the fraction of absorbed energy and distribution of inelastic scattering events at lower primary energies,which also indicate potential effects on the DNA damage induced by low-energy electrons.     

Low-energy electron diffraction and resonances in DNA and other helical macromolecules

We propose a framework to calculate the intermolecular multiple elastic scattering of low-energy electrons from helical macromolecules and indicate how it affects the resonant capture cross section. Using a model of DNA, an appreciable enhancement of the elastic and resonant capture cross sections is predicted at incident energies below 15 eV. These results may qualitatively explain the observed prominence of low-energy resonances in strand breaking of plasmid DNA.     

Model differential cross section of elastic scattering of electrons by atoms in the Monte Carlo simulation of the passage of electrons in a substance

A new model differential cross section is proposed for describing elastic scattering of electrons in simulating the passage of electrons through a substance by the Monte Carlo method. This differential cross section correctly describes the first and second transport scattering cross sections, but is characterized by the total elastic scattering cross section much smaller than the actual value of the total elastic scattering cross section. The application of this differential cross section makes it possible to considerably reduce the number of elastic collisions in the Monte Carlo simulation of passage of electrons in a substance and to model the passage of high-energy electrons using the individual collision model.     

BeCl_2分子的低能电子弹性散射研究

基于R矩阵理论方法,通过构建BeCl_2分子的静态交换势模型(SE),静态交换加极化势模型(SEP)和密耦合模型(CC),在0-10 eV能量范围内首次研究了低能电子与BeCl_2分子的散射动力学过程,预测了弹性散射积分截面,并在三种模型中分别发现一个来自B_(2u)和B_(3u)对称性贡献的势形共振态.讨论了这些共振态随着极化效应的变化,获得了收敛的截面和共振态结果.进一步使用POLYDCS程序首次计算了电子与BeCl_2分子的散射微分截面(DCS)以及动量转移截面(MTCS).当前研究结果将为天体物理和等离子体物理提供重要的截面数据.     

Influence of vacuum energy on scattering

We deal with photon-electron scattering which occurs between two uncharged conducting parallel plates moving away from each other at a constant velocity. The electromagnetic vacuum field between two plates is defined by the configuration of space and also interacts with the electrons. We show the relevant operators for both the electron and photon fields and the computation of the corresponding Feynman propagator,S-matrix, and scattering cross section, taking into account the influence of the changeable vacuum field. Correction terms in the computedS-matrix and scattering cross section manifest the influence of the changeable vacuum field. We analyze an example for low-energy scattering of the influence of the changeable vacuum field upon the scattering cross section.     

Photon-electron scattering taking vacuum energy into account

We deal with photon-electron scattering between the two uncharged conducting parallel plates. The electromagnetic vacuum field between the two plates is defined by the configuration of space and also interacts with the electrons. We first deal with the relevant operators for the electron and photon fields and with the Feynman propagator. We compute theS-matrix for photon-electron scattering, taking into account the influence of the vacuum field. The computed photon-electron scattering cross section also manifests the influence of the vacuum field. We give an example for low-energy scattering of the influence of the vacuum field upon the scattering cross section.     

Excitation of electron-hole pairs in low-energy electron scattering from surfaces

We calculate the Distorted Wave Born Aprroximation differential cross section for the inelastic scattering of low-energy electrons reflected from metallic surfaces via the dynamically screened Coulomb potential, and in particular the excitation of low-energy electron-hole pairs. We discuss the angular and energy dependence of the loss spectra, and the application of this method to study the spectrum of the electron-hole excitations at surfaces.     

The second Born approximation in electron-helium scattering in a Nd-YAG laser field

The dynamics of laser-assisted elastic collisions in helium is studied using the second-order Born approximation. Detailed calculations of the scattering amplitudes are performed by using the Sturmian basis expansion. Differential cross sections for elastic scattering with the net absorption/emission of up to two photons are calculated for collision energies of 5 eV, 10 eV, and 20 eV. We discuss the influence of the low-energy electrons on the differential cross section (DCS) as a function of the scattering angle for selected choices of the laser frequency and the number of photons exchanged between the external field and electron-helium system.     

低能电子致DNA链断裂的纳剂量蒙特卡罗模拟

为了对DNA损伤进行纳剂量蒙特卡罗模拟,先根据D.Emfietzoglou给出的介电响应理论和Born修正模型计算了低能电子与液态水的非弹性反应截面,在Geant4-DNA的基础上建立了纳剂量蒙特卡罗程序的物理模块,同时参照国际纳剂量蒙特卡罗程序使用的模型参数建立了纳剂量蒙特卡罗程序的前化学模块、化学模块、DNA几何模块及DNA损伤模块。利用本程序,采用H. Nikjoo给出的对电子均匀照射DNA情形的模拟方法,还模拟计算了不同能量电子均匀照射DNA所导致的DNA链断裂产额,并与已公布的实验数据进行比对,二者符合良好。     

The role of Frenkel excitons in low-energy-electron diffraction theory for molecular crystals

In this paper a low-energy-electron diffraction theory for molecular crystals is established. The possibility of creating Frenkel excitons by the incident low-energy electrons is taken into account. The whole formalism is based on a set of diagram rules, which facilitates the evaluation of the differential scattering cross section. The influence of the bulk and surface excitons on the LEED intensities will be discussed in a series of subsequent papers.