电荷收集法测量低温等离子体密度

利用电荷收集法,在正(135 V)、负(-117 V)偏置和低真空背景(0.5 Pa)三种不同收集条件下,测量了用于等离子体断路开关的电缆等离子体枪产生的低温等离子体的密度和漂移速率,测量值分别为8.3×1014,1.2×1015,4.8×1014 cm-3;2.5,2.0 cm·μs-1。测量结果表明:三种收集条件下测得的等离子体漂移速率相近;在相同测量点处,负偏置收集条件下测得的等离子体密度大于正偏置和低真空背景收集条件下的测量值,而低真空背景收集条件下的测量值最小。     

Simulating the stopping dynamics of highly charged ions in an ultra-cold, strongly coupled plasma

We introduce a method for stopping highly charged ions (HCIs) in a laser-cooled one-component plasma (OCP) of ²⁴Mg⁺ ions and present results on stopping times derived from realistic molecular dynamics simulations of the complete stopping process. This stopping scheme can provide ultra-cold highly charged ions for future in-trap precision mass measurements. The choice of an ultra-cold ion plasma as a stopping medium is governed by the almost negligible charge exchange of the HCI with the laser-cooled ions and the very low temperatures which can be reached. In our analysis we focus on the stability and fast recooling of the plasma – two features essential for the experimental realization of this stopping scheme.      

高频离子源等离子体的光谱诊断

 采用发射光谱法研究了高频离子源的等离子体性质。该离子源应用于ZF-200keV中子发生器中，是一种电感耦合型无极环形放电高频离子源。实验采用绝对定标后的光学多道分析系统测定了离子源等离子体在不同阶段氢原子巴耳末谱线系中前三条谱线的强度，并采用部分局部热力学平衡状态的理论，计算出了相应阶段高频离子源等离子体的电子温度、氢原子浓度、氢离子浓度等参数，并进行了简要分析。     

两间隙毛细管等离子体射流发生器主放电数值模拟

 消融放电毛细管等离子体发生器产生的等离子体射流具有密度高和温度相对低的特性,在许多领域都具有潜在的应用前景。利用1维流体模型对两间隙毛细管等离子体射流发生器的主放电特性进行了模拟计算分析。模型考虑了焦耳热效应和管壁烧蚀对放电特性的影响。在管壁消融这种反馈稳定机制作用下,毛细管放电处于准稳态,其产生的等离子体温度在放电期间保持恒定。在放电能量为1 kJ的条件下,聚乙烯毛细管等离子体温度可达3 eV,电子密度可达1025 m-3量级,射流速度接近10 km/s。改变放电输入的焦耳热功率密度,等离子体温度和速度变化较小,但气压、质量密度以及等离子体电子密度等特性参数均可以获得较大幅度的改变。     

Simulation study of the sheath region of a processing plasma with two-temperature electrons and charged nanoparticles

A four-fluid model is used to investigate the structure of a dusty plasma sheath with two species of electrons, i.e., cold and hot electrons. Numerical results show that, in the presence of hot electrons, regular fluctuations are developed in the spatial profiles of the sheath potential and number densities of the plasma and dust nanoparticles. The amplitude and spatial period of the fluctuations depend on the hot electron parameters. The sheath width shows a non-monotonic dependence on the temperature and number density of the hot electrons, as well as the density and Mach number of the nanoparticles.     

直流非转移弧热等离子体喷枪加热效率分析

利用计算机模拟技术,采用有限容积方法,针对自制的低能耗、高效率内送粉等离子喷涂设备,对喷枪内部影响喷涂热效率的因素进行了分析。研究结果表明通过适当提高进气流量、提高混合气体中的氮气或氢气含量和减少喷枪通道长度,均能提高等离子喷枪热效率。而电流的大小以及喷枪的通道直径对热效率无显著影响。     

相对论激光在Maxwell分布等离子体中产生的高次谐波

 研究了强激光与具有初始速度分布的等离子体作用产生的高次谐波。结果表明，对于Maxwell速度分布的等离子体，由于电子初始时刻的无规则热运动，在一定程度上抹平了辐射功率在谐波谱上的分布，使得高次谐波的辐射增强，低次谐波的辐射有所减弱，有利于高次谐波的产生。     

等离子体辅助甲烷聚合物制备及分析

在氢气和甲烷环境下,利用辉光等离子体放电制备了聚合物。该聚合物的外观特征为白色、略发黄、柔软、丝状,易碎为粉末状。聚合物中含有–CH3,–CH2,C–O,–C=C–,–OH等官能团且不存在单质形态的碳。有机溶剂溶解分析发现,常温下该聚合物在各种有机溶剂中的溶解性极小、小于0.1mg.ml^-1,几乎不溶于甲苯中,在不同有机溶剂中的溶解度大小依次为,S丙酮>S三氯甲烷>S乙醇>S环己醇>S甲苯。低温等离子体的离化率越高、中性气体被极化时的极化半径越大、环境温度越低以及介电常数越小,聚合物的生成能力越强。     

ֱ��˫����绡������������ֵģ��

为了提高等离子体废物处理效率,根据磁流体动力学理论,利用计算流体力学软件FLUENT,采用磁矢量势的方法对直流双阳极非转移型电弧等离子体炬进行了二维轴对称数值模拟。计算中采用了SIMPLE算法。数值模拟得到了等离子体的温度、速度等分布。结果表明,等离子体的温度随着轴向距离的增加而减小,随弧电流增加而增加;其速度随着轴向距离的增加而先增大后减小,随弧电流增加而增加;等离子体炬出口处的温度和速度随着径向距离的增加而减小。这些结果与实验结果基本相符。     

小功率等离子体射流的流特性

采用焓探针对小功率(5kW)热喷涂等离子体射流的焓、温度和速度进行了测量和计算。研究了气体成分、流量、电弧电压和电流对等离子流体的焓、温度和速度分布的影响。结果表明,对于单一氩气等离子体,当使用新喷嘴时,增大氩气流量能够使喷嘴内部电弧弧根向出口方向移动,从而增加等离子体射流的焓、温度和速度。对于Ar-N2等离子体,增加气体中氮气的含量,会提高等离子电弧电压,在同样的输入功率下,改变等离子电流和电压对等离子体的焓、温度和速度影响较小。对于Ar-N2等离子体,增加氢气含量会明显地提高等离子射流的速度和热传递。     

Measurement of optical signals as a plasma propagation in the atmospheric pressure plasma jet columns

The propagation of plasma jets with argon gas is characterized in terms of two factors, the effect of electric field distribution along the tube and the effect of voltage polarity, from the observed results of optical signals along the entire column of plasma. The optical signal of plasma propagates from the high electric-field region of high-voltage electrode toward the low field region of the open air-space, regardless of the polarity of the voltage. The optical intensity and the propagation velocity are higher for the positive voltage than for the negative voltage. Moreover, the length of plasma plume exited from the end of the glass tube into the open air is shorter for the negative voltage. When the optical intensity is strong enough, a secondary peak signal follows the primary peak. In the plasma column on the inside of the glass tube, the optical intensity and the propagation velocity depend on the strength of the electric field; they are both high at the high-field region of voltage terminal and decay toward the end of the tube. The velocity is as fast as 10⁴ m/s at the high-field region and slows down to 10³ m/s at the low-field region of the glass-tube end. However, the plasma accelerates drastically to be (10⁴–10⁵) m/s after exiting the glass tube toward open air, even though the electric field is a quite low and thus the optical signal decays low before fading out. The experimental observations present in this report are explained with the propagation of the plasma diffusion waves.     

Recent research using the Oxford electron beam ion trap

The presence of the σ-phase in Fe-Cr alloys (eg. Stainless steel) is important in industrial applications and from an academic point of view. The presence of the σ-phase in these alloys drastically affects their mechanical properties and their resistance to various corrosive media. In the present investigation Fe-Cr alloys containing different amounts of Mo were prepared and the transformation to the σ-phase was carried out by isothermally annealing the samples for various periods in an argon atmosphere. It will be shown that the presence of Mo has a dramatic accelerating effect on the rate of the σ-phase formation in these alloys. This revised version was published online in August 2006 with corrections to the Cover Date.     

激光等离子体极紫外光刻光源

研究并讨论了下一代光刻的核心技术之一—激光等离子体极紫外光刻光源。简要介绍了欧美和日本等国极紫外光刻技术的发展概况,分析了新兴的下一代13.5 nm极紫外光刻光源的现状,特别讨论了国内外激光等离子体极紫外光刻光源的现状,指出目前其存在的主要问题是如何提高光源的转化效率和减少光源的碎屑。文中同时概述了6.x nm（6.5～6.7 nm）极紫外光刻光源的最新研究工作。最后,介绍了作者所在研究小组近年来在极紫外光源和极紫外光刻掩模缺陷检测方面开展的研究工作。     

Fokker-Planck modeling for particle slowing down and thermalization in a Maxwellian plasma

In this paper the Fokker-Planck equation, which takes into account the medium absorption and the Maxwellian behavior of the field particles at low energy for Coulomb interactions is obtained. The analytical solution of the stationary distribution function is obtained in both angle and velocity variables. In particular the electron distribution for electron-ion collisions has been obtained using this diffusion approximation for beam and isotropic sources. If the absorption is neglected the solution recovers the classical stationary Maxwell distribution. For low absorption rates the solution shows a typical slowing down spectrum for high energy and a Maxwellian-like distribution at thermal energy. For moderate and high absorption rates the test particles do not reach the thermal equilibrium and the Maxwell distribution at low energies does not appear.Received: 1 December 2003, Published online: 16 March 2004PACS: 51.10. + y Kinetic and transport theory of gases - 41.75.-i Charged-particle beams - 52.65.Ff Fokker-Planck and Vlasov equation     

Performance of a polarizer using synthetic mica crystal in the 12——25 nm wavelength range

To develop polarizer functioning in the extreme ultraviolet (EUV) and soft X-ray region, the polarization performance of synthetic mica has been investigated theoretically with a simulation code using Fresnel equations and optical constants from the Henke database. The reflectance of synthetic mica crystal for s and p polarization was measured to investigate its polarization performance in a home-made synchrotron radiation soft X-ray polarimeter at beamline 3W1B, Beijing Synchrotron Radiation Facility (BSRF). The reflectivity of the synthetic mica crystal at an angle of grazing incidence of 48° was obtained from the experimental data, which is about 4.8 × 10^-3 at 25 nm and 6.0 × 10^-4 at 12 nm, and the linear polarizance of the X-ray reflected by the synthetic mica crystal that we measured using an analyzer-rotating method increases from 80% to 96.6% in this EUV region, while higher than 98.2% in the simulation. The result indicates that this synthetic mica crystal works as a practical polarizer in this EUV region of 12--25 nm, and also in an extensive wavelength region higher than 25 nm.     

Dynamics of plasma channel in a parallel-plate plasma gun

Lumped parameter models for describing dynamics of the plasma channel in a parallel-plate plasma gun are compared with the experimental results obtained from two plasma guns with different rail geometries. Comparison between the experiments and the numerical calculations reveals that the lumped parameter models can be utilized to describe the dynamic motion of the plasma channel quite well. Parametric study shows that minimizing the line inductance and increasing the charging voltage on a capacitor as well as minimizing the gas injection time for reducing the mass of the plasma channel are the key factors to increase the flow velocity of the plasma jet ejected from the plasma gun.     

Enhancement of soft X-ray emission from a pinch plasma using a rotating plasma for pre-ionization

An experimental study on the enhancement of soft X-ray emission from a pinch plasma has been carried out by using a rotating plasma for pre-ionization. The rotating plasma is produced by a pulsed J×B cross-field discharge between coaxial electrodes, and subjected to a pinch discharge. Under an optimized discharge condition, it has been observed that UV emission of 251.6 nm (Ar III) soft X-ray intensity increases with increasing applied axial magnetic field B. At 400 G, the X-ray intensity is enhanced by a factor of 3 compared to that without the rotating plasma. It is considered that this result is due to the improved characteristics of the pre-ionization rotating plasma, which influences the uniformity and stability of subsequent pinch plasma.     

等离子体对高功率微波的防护

提出了用等离子体防护高功率微波破坏电子设备的方法。建立了“介质层-等离子体层-介质层-等离子体层”的反射/吸收模型,其中两层均匀非磁化等离子体厚度各为50mm,等离子体频率为30GHz,等离子碰撞频率为70GHz。计算了微波的透射功率、防护结构的最小防护距离。计算结果表明：对功率10GW、脉冲宽度100ns、天线100m² (效率50%)的微波源产生的微波,频率小于30GHz时,将被防护装置反射;频率为31～80GHz时,防护结构的最小防护距离约为5km。     

The fully relativistic dielectric tensor for electron cyclotron interaction in a Maxwellian plasma

Summary A thorough analytical and numerical study of the fully relativistic dielectric tensor relevant to the electron cyclotron propagation and absorption in a Maxwellian plasma is presented for arbitrary values of the wave refractive index parallel to the equilibrium magnetic field. Both the Hermitian and the anti-Hermitian part are calculated relativistically and, in particular, as for the anti-Hermitian part, the finite Larmor radius effects are accounted for to any order. Limiting forms are obtained along with a detailed numerical comparison with the nonrelativistic form.

---

Riassunto Si calcola, sia analiticamente che numericamente, il tensore dielettrico completamente relativistico di rilevanza nella propagazione e nell'assorbilnento ciclotronico elettronico in un plasma maxwelliano, per valori arbitrari dell'indice di rifrazione parallelo al campo magnetico di equilibrio. Si tien conto degli effetti relativistici sia nella parte Hermitiana che nella parte anti-Hermitiana, in questa ultima pure gli effetti di raggio di Larmor finito sono inclusi a tutti gli ordini. Si ottengono e si discutono limiti significativi e si presenta un dettagliato confronto numerico con la forma non relativistica del tensore dielettrico.