Laser Induced Surface Morphology of Molybdenum Correlated with Breakdown Spectroscopy

Surface modifications of laser irradiated molybdenum have been correlated with plasma parameters. Nd:YAG laser (1064 nm, 10 ns) was employed at various laser irradiances ranging from 6 to 50 GW/cm² under argon environment. The ablation efficiency has been investigated by measuring the crater depth using surface profilometry analysis. Scanning electron microscope (SEM) analysis reveals the formation of coarse grains along with cracked boundaries, cavities and cones at the central ablated areas. Whereas, uplifted re-solidified material, cavities, ridges, droplets and cones were observed at boundary regions. Laser Induced Breakdown Spectroscopy (LIBS) analysis has been performed to evaluate electron temperature and number density of molybdenum plasma. Electron temperature and electron density varies from 6670 to 9305 K and 0.62 × 10¹⁸ to 0.72 × 10¹⁸ cm^?3 respectively. Both the parameters showed similar trend in variation with laser irradiance i.e. an initial increase from 13 to 19 GW/cm² followed by a decrease from 19 to 25 GW/cm² and then a saturation from 25 to 50 GW/cm². The initial increasing trend is attributed to the enhanced excited vapor content of the ablated material, confinement effects of the surrounding argon and absorption of laser energy into the molybdenum vapor plasma during the trailing part of laser pulse leading to ignition of laser supported combustion (LSW) waves. The decreasing trend is attributed to the shielding effect and saturation is explainable on the basis of the formation of a self-regulating regime. Surface modifications of laser irradiated molybdenum were correlated with the plasma parameters.     

Spectroscopic and shadowgraphic analysis of laser induced plasmas in the orthogonal double pulse pre-ablation configuration

This work focuses on the study of the plumes obtained in the double pulse orthogonal Laser Induced Breakdown Spectroscopy (LIBS) in the pre-ablation configuration using both spectroscopic and shadowgraphic approaches. Single and double pulse LIBS experiments were carried out on a brass sample in air. Both the distance of the air plasma from the target surface and the interpulse delay were varied (respectively in the range 0.1–4.2 mm and up to 50 μs) revealing a significant variation of the plasma emission and of the plume-shock wave dynamical expansion in different cases. The intensity of both atomic and ionized zinc lines was measured in all the cases, allowing the calculation of the spatially averaged temperature and electron density and an estimation of the ablated mass. The line intensities and the thermodynamic parameters obtained by the spectroscopic measurements were discussed bearing in mind the dynamical expansion characteristics obtained from the shadowgraphic approach. All the data seem to be consistent with the model previously proposed for the double pulse collinear configuration where the line enhancement is mainly attributed to the ambient gas rarefaction produced by the first laser pulse, which causes a less effective shielding of the second laser pulse.     

Early phase laser induced plasma diagnostics and mass removal during single-pulse laser ablation of silicon

The electron number density and temperature during the early phase (<300 ns) of laser-induced plasmas from silicon using a 266-nm, 3-ns Nd:YAG laser were deduced via spectroscopic methods. These parameters were measured as a function of delay time vs. irradiance in the range of 2–80 GW/cm², and compared with crater volume measurements. A dramatic change in plasma characteristics (electron number density, temperature, and degree of ionization) as well as a sharp increase of mass removal was observed when the irradiance was increased beyond a threshold of 20 GW/cm². Possible mechanisms such as inverse bremsstrahlung and self-regulation were used to describe these data in the low irradiance region. Laser self-focusing and critical temperature are discussed to explain the dramatic changes after the irradiance reaches the threshold.     

Quantification of Aluminum Gallium Arsenide (AlGaAs) Wafer Plasma Using Calibration-Free Laser-Induced Breakdown Spectroscopy (CF-LIBS)

In this work, we report the results of the compositional analysis of an aluminum gallium arsenide (AlGaAs) sample using the calibration-free laser-induced breakdown spectroscopy (CF-LIBS) technique. The AlGaAs sample was doped with three various concentrations of gallium (Ga), arsenic (As), and aluminum (Al), as reported by the manufacturer, and the CF-LIBS technique was employed to identify the doping concentration. A pulsed Q-switched Nd: YAG laser capable of delivering 200 and 400 mJ energy at 532 and 1064 nm, respectively, was focused on the target sample for ablation, and the resulting emission spectra were captured using a LIBS 2000+ spectrometer covering the spectral range from 200 to 720 nm. The emission spectra of the AlGaAs sample yielded spectral lines of Ga, As, and Al. These lines were further used to calculate the plasma parameters, including electron temperature and electron number density. The Boltzmann plot method was used to calculate the electron temperature, and the average electron temperature was found to be 5744 ± 500 K. Furthermore, the electron number density was calculated from the Stark-broadened line profile method, and the average number density was calculated to be 6.5 × 10¹⁷ cm⁻³. It is further observed that the plasma parameters including electron temperature and electron number density have an increasing trend with laser irradiance and a decreasing trend along the plume length up to 2 mm. Finally, the elemental concentrations in terms of weight percentage using the CF-LIBS method were calculated to be Ga: 94%, Al: 4.77% and As: 1.23% for sample-1; Ga: 95.63%, Al: 1.15% and As: 3.22% for sample-2; and Ga: 97.32%, Al: 0.69% and As: 1.99% for sample-3. The certified concentrations were Ga: 95%, Al: 3% and As: 2% for sample-1; Ga: 96.05%, Al: 1% and As: 2.95% for sample-2; and Ga: 97.32%, Al: 0.69% and As: 1.99% for sample-3. The concentrations measured by CF-LIBS showed good agreement with the certified values reported by the manufacturer. These findings suggest that the CF-LIBS technique opens up an avenue for the industrial application of LIBS, where quantitative/qualitative analysis of the material is highly desirable.     

The calculation of electron density and temperature in Ar spectroscopic plasmas from continuum and line spectra

The measurement of electron temperature and electron density from line and continuum radiation in Ar plasmas used for spectroscopic purposes is discussed. The correct equations for the calculation of these parameters from experimentally observable quantities are identified. Such expressions yield the theoretical spectral irradiance expected from line and continuum radiation. To aid calculations, grouped constants from these equations are calculated using SI units of measure. The sources of accurate values for the parameters and correction factors appearing in the irradiance equations are listed. In addition the approximations made in order to simplify electron temperature and electron density determinations are reviewed. Practical aspects of making accurate measurements of these parameters in Ar plasmas are considered. Theoretical plots of line to continuum emission ratio vs electron temperature and of continuum irradiance vs electron density are presented as an illustration using parameters appropriate for Ar emission at 430 nm and the spectrally adjacent continuum.     

Deposition of a Continuous and Conformal Copper Seed Layer by a Large-Area Electron Cyclotron Resonance Plasma Source with Embedded Lisitano Antenna

To deposit copper seed layer on ultra large scale integration devices, a large-area (Ø 378 mm) electron cyclotron resonance plasma has been generated by using permanent magnets-embedded Lisitano antenna. The plasma source operates in the pressure range of 0.2–1.5 mTorr with microwave power range of 500–2,000 W. By using a Langmuir probe, the electron density and temperature have been measured near the DC sputter target position. Measurements indicate argon plasmas having electron densities of ~5 × 10¹⁰/cm and electron temperatures of 5 eV with 750 W microwave power at gas pressures of 0.5 mTorr. Using this plasma source and a DC sputter, we obtained excellent conformal copper seed layer with high aspect ratios of 12:1. This is in contrast with conventional methods using magnetron sputter, which has aspect ratios of 2–3:1. Also, improvements are observed in the smoothness (root mean square roughness of 1.345 nm), uniformity (2.5 % at 300 mm wafer), and sidewall symmetricity (more than 95 %) of the copper seed layer.     

Enhanced laser-induced breakdown spectroscopy using the combination of fourth-harmonic and fundamental Nd:YAG laser pulses

We have studied the combination of fourth-harmonic (266 nm) and fundamental (1064 nm) Nd:YAG laser pulses of the same irradiance. On a metallic target (Al), a sequence of ultraviolet (UV) and near-infrared (NIR) pulses produces deeper craters and can lead under certain conditions to analyte signal enhancements larger than those obtained with a NIR–NIR sequence. Compared to a single NIR pulse, signal enhancements by factors of approximately 30 for the Si I 288.16-nm line and 100 for the Al II 281.62-nm line were observed with double pulses of the same total energy. This effect correlates with a substantial increase in plasma temperature, with ionic lines and lines having a higher excitation energy experiencing a larger enhancement. Moreover, the optimal pulse separation is found to be larger for ionic than for neutral lines (∼3 compared to ∼0.1 μs). Another finding of this study concerns the combination of two different wavelengths (266 and 1064 nm) in a single ‘mixed-wavelength’ pulse, a scheme that also leads to an enhanced laser-induced breakdown spectroscopy (LIBS) sensitivity. It is proposed that the double-pulse and mixed-wavelength approaches are both capable of temperature and signal enhancement for the same reason: a larger portion of laser energy is absorbed in the plasma region containing the analyte atoms, instead of being absorbed at the sample surface or in the atmosphere.     

Hydrogen Balmer α line behavior in Laser-Induced Breakdown Spectroscopy depth scans of Au,Cu, Mn,Pb targets in air

The behavior of hydrogen spectral emission of the plasmas obtained by Laser-Induced Breakdown Spectroscopy (LIBS) measurement of four metal targets (Au, Cu, Mn, Pb) in air was investigated. The plasma was produced by a pulsed Nd:YAG laser emitting in the fundamental wavelength. A systematic study of the spatial-integrated plasma emission obtained by an in-depth scanning of the target was performed for each metal, both in single pulse and collinear double-pulse configurations. Further, a spatial-resolved analysis of the emission of plasma produced on the Al target by a single laser pulse was performed, in order to describe the spatial distribution of emitters deriving from the target and air elements. The line intensities of the main plasma components (target metal, nitrogen, oxygen and hydrogen) were measured in both experimental conditions. Results show that the hydrogen line intensity varies greatly as a function of the metal considered, and exhibits a marked decrease after the first laser shots. However, differently from emission lines due to surface impurities, the hydrogen line intensity reaches a constant level deep inside the target. The spatial-resolved measurements indicate that hydrogen atoms in the plasma mainly derive from the target surface and, only at a minor extent, from the dissociation of molecular hydrogen present in the surrounding air. These findings show that the calculation of plasma electron number density through the measurement of the Stark broadening of hydrogen Balmer α line is possible also in depth scanning measurements.     

Optical emission spectroscopy and modeling of plasma produced by laser ablation of titanium oxides

In the present study, the time evolution of electron number density, of electron, atom and ion temperatures, of plasma produced by KrF excimer laser ablation of titanium dioxide and monoxide targets, are investigated by temporally and spatially resolved optical emission spectroscopy over a wide range of laser fluence from 1.7 to 6 J cm⁻², oxygen pressures of 10⁻²–10⁻¹ torr and in a vacuum. A state-to-state collisional radiative model is proposed for the first time to interpret the experimental results at a distance of 0.6 mm from the target surface, in vacuum and for a time delay from 100 to 300 ns from the beginning of the laser pulse. In particular, we concentrate our attention on problems concerning the existence of the local thermodynamic conditions in the laser-induced plasma and deviation from them, as observed in our experiment. The numerical model proposed for calculating the electron number density and the population densities of atoms and ions in excited states give good quantitative agreement with the experimental results of the optical emission spectroscopy measurements.     

Fast Imaging of Laser-induced Plasma Emission from a ZnO Target

The spatio-temporal evolution of plasma plume laser ablation zinc oxide target was investigated by ICCD camera fast imaging. The plasma was created by a KrF excimer laser of 248 nm wavelength and 25 ns pulse. The laser fluence was set at 2 J/cm². This study was performed under vacuum and oxygen atmosphere at a pressure range of 10^− 6 to 10 mbar.Free expansion, splitting and stopping of the plume were observed at different pressures and time delays following the laser pulse. Moreover, depending on the gas pressures, the photography shows some turbulence for given time delays in the front edge of the plasma while at 5 and 10 mbar the whole plasma edge is perturbed. Rayleigh–Taylor instability is proposed as an explanation to this observed effect. A time integrated emission spectroscopy diagnostic has been also used to identify plasma species. A plasma emission spectrum shows the presence of Zn⁺, Zn and O emission lines both in vacuum and in O₂ atmosphere. As the distance from the target surface increases the Zn⁺ emission line disappears.     

On the stoichiometry of mass transfer from solid to plasma during pulsed laser ablation of brass

We have performed spectroscopic analysis of the plasma produced by pulsed laser ablation of brass in a low pressure argon atmosphere. The intensities of several spectral lines of copper, zinc and lead were measured for succeeding laser pulses applied to the same irradiation site. The intensities and spectral shapes of the observed transitions were compared to the spectral radiance computed for plasma in local thermal equilibrium. At a delay of 600 ns after the laser pulse, the plasma is characterized by typical values of temperature and electron density of 1.1 × 10⁴ K and 1.2 × 10¹⁷ cm^− 3, respectively, and an elemental composition equal to that of the sample. Small changes of spectral line intensities were observed with increasing number of applied laser pulses. They were attributed to the alteration of the plume expansion dynamics as a consequence of crater formation on the sample surface. The results indicate that the mass transfer from the solid to the plasma is stoichiometric.     

Temporal behavior of neutral and ionic lines emitted from a laser induced plasma on an aqueous surface

The temporal behavior of spectral lines emitted from a laser induced plasma has been studied. The plasma was created by using a Nd:YAG pulsed laser in air at atmospheric pressure focused on the surface of an aqueous solution. This work is an extension of previous published work [J. Ben Ahmed, Z. Ben Lakhdar, G. Taieb, Kinetics of laser induced plasma on an aqueous surface, Laser chem. 20 (2002) 123–134.]. The time evolution of lines intensities emitted from Ca, Ca⁺, Mg and Mg⁺ has been experimentally observed and simulated using a simple theoretical approach based on electron–ion recombination. It was shown that the plasma temperature and electron density are correlated to the dynamics of plasma emission. Finally, the time evolution of the optical depth of Ca⁺ resonance line at 393.4 nm was also studied.     

Combination of the ionic-to-atomic line intensity ratios from two test elements for the diagnostic of plasma temperature and electron number density in Inductively Coupled Plasma Atomic Emission Spectroscopy

In Inductively Coupled Plasma-Atomic Emission Spectroscopy (ICP-AES) spectrochemical analysis, the MgII(280.270 nm)/MgI(285.213 nm) ionic to atomic line intensity ratio is commonly used as a monitor of the robustness of operating conditions. This approach is based on the univocal relationship existing between intensity ratio and plasma temperature, for a pure argon atmospheric ICP in thermodynamic equilibrium. In a multi-elemental plasma in the lower temperature range, the measurement of the intensity ratio may not be sufficient to characterize temperature and electron density. In such a range, the correct relationship between intensity ratio and plasma temperature can be calculated only when the complete plasma composition is known. We propose the combination of the line intensity ratios of two test elements (double ratio) as an effective diagnostic tool for a multi-elemental low temperature LTE plasma of unknown composition. In particular, the variation of the double ratio allows us discriminating changes in the plasma temperature from changes in the electron density. Thus, the effects on plasma excitation and ionization possibly caused by introduction of different samples and matrices in non-robust conditions can be more accurately interpreted. The method is illustrated by the measurement of plasma temperature and electron density in a specific analytic case.     

Stark broadening of Mg I and Mg II spectral lines and Debye shielding effect in laser induced plasma

We report Stark broadening parameters for three Mg I lines and one Mg II line in the electron number density range (0.67–1.09) · 10¹⁷ cm^− 3 and electron temperature interval (6200–6500) K. The electron density is determined from the half width of hydrogen impurity line, the H_α, while the electron temperature is measured from relative intensities of Mg I or Al II lines using Boltzmann plot technique. The plasma source was induced by Nd:YAG laser radiation at 1.06 μm having pulse width 15 ns and pulse energy 50 mJ. Laser induced plasma is generated in front of a solid state surface. High speed photography is used to determine time of plasma decay with good homogeneity and then applied line self-absorption test and Abel inversion procedure. The details of data acquisition and data processing are described and illustrated with typical examples. The experimental results are compared with two sets of semiclassical calculations and the results of this comparison for Mg I lines are not unambiguous while for Mg II 448.1 nm line, the results of Dimitrijević and Sahal-Bréchot calculations agree well with our and other experimental results in the temperature range (5000–12,000) K and these theoretical results are recommended for plasma diagnostic purposes. The study of line shapes within Mg I 383.53 nm multiplet shows that the use of Debye shielding correction improves the agreement between theoretical and experimental Stark broadening parameters.     

Depth profiling of tin-coated glass by laser ablation inductively coupled plasma emission spectrometry with acoustic signal measurement

A pulsed, frequency-quadrupled Nd:YAG laser (266 nm, 10 Hz) coupled to an inductively coupled plasma atomic emission spectrometer (ICP-AES) was employed for depth profiling by ablation of a pyrolytically deposited Sn layer (300 nm) on float glass. The procedure consisted of performing individual ablation cycles (layer-by-layer). A raster with stroke distance of either 50 μm or 200 μm (the raster density) was used as an ablation pattern. The ablation was stopped after each cycle and the peak area of the resulting transient optical signal of the ICP discharge was plotted against the cycle number. The ablation rate of 90 to 20 nm per cycle at a low-energy pulse (6 mJ to 1 mJ) was determined by profilometry. A beam masking was employed to attenuate the laser shot energy and to eliminate the peripheral irregularity of the beam profile. Almost uniform removal of the square area (1 mm × 1 mm) of the coating by ablation was achieved by combining the fitted raster density, beam masking, focusing and beam energy. Different ablation processes were distinguished in cases of the tin coating and the uncoated glass surface. While the coating was mainly evaporated, the uncoated glass surface exhibited a crumbling associated with production of glass powder. This was confirmed by electron microscopy observations. The measured acoustic signal followed the behavior of the emission intensity of the Sn line and was supposed to be proportional to the amount of Sn vapors. The emission intensity depth profile of the Sn coating with graded structure was obtained, which qualitatively corresponded with the depth profile measured by secondary ion mass spectrometry.     

Analysis of glass and glass melts during the vitrification process of fly and bottom ashes by laser-induced plasma spectroscopy. Part I: Normalization and plasma diagnostics

For laser-induced plasma spectroscopy (LIPS) analysis of the main components (Si, Al, and Ca) in glasses utilized for vitrification of ashes from waste incineration, a normalization procedure for line ratios is presented. Even in homogeneous glass samples, considerable pulse-to-pulse variations of the plasma electronic excitation temperature and electron density were observed because of changes in the material–laser interaction. A normalization procedure is outlined using Saha–Boltzmann equilibrium relationships to include the electronic excitation temperature and density in the calibration model. As a result of the normalization, the variation of the line ratios is reduced and linear calibrations for LIPS intensity ratios versus concentration ratios are achieved. For samples with high aluminum concentrations, the analysis was hampered by self-reversal effects.     

Measurement of Reactive Hydroxyl Radical Species Inside the Biosolutions During Non-thermal Atmospheric Pressure Plasma Jet Bombardment onto the Solution

Non-thermal atmospheric pressure plasma jet could generate various kinds of radicals on biosolution surfaces as well as inside the biosolutions. The electron temperature and ion density for this non-thermal plasma jet have been measured to be about 0.8~1.0 eV and 1 × 10¹³ cm^?3 in this experiment, respectively, by atmospheric pressure collisional radiative model and ion collector current. In this context, the hydroxyl OH radical density inside the biosolutions has been also investigated experimentally by ultraviolet absorption spectroscopy when the Ar non-thermal plasma jet has been bombarded onto them. It is found that the emission and absorption profiles for the other reactive oxygen species such as NO (226 nm) and O₂*^? (245 nm) are shown to be very small inside the biosolution in comparison with those for the OH radical species. It is found that the densities of OH radical species inside the biosolutions are higher than those on the surface in this experiment. The densities of the OH radical species inside the deionized water, Dulbecco’s modified eagle medium, and phosphate buffered saline are measured to be about 2.1 × 10¹⁶, 1.1 × 10¹⁶, and 1.0 × 10¹⁶ cm^?3, respectively, at 2 mm downstream from the surface under optimized Ar gas flow of 200 sccm. It is also found that the critical hydroxyl OH radical density for the lung cancer H460 cells to experience an apoptosis is observed to be around 0.3 × 10¹⁶ cm^?3 under 1 min plasma exposure in this experiment.     

Double pulse laser ablation and laser induced breakdown spectroscopy: A modeling investigation

A numerical model, describing laser–solid interaction (i.e., metal target heating, melting and vaporization), vapor plume expansion, plasma formation and laser–plasma interaction, is applied to describe the effects of double pulse (DP) laser ablation and laser induced breakdown spectroscopy (LIBS). Because the model is limited to plume expansion times in the order of (a few) 100 ns in order to produce realistic results, the interpulse delay times are varied between 10 and 100 ns, and the results are compared to the behavior of a single pulse (SP) with the same total energy. It is found that the surface temperature at the maximum is a bit lower in the DP configuration, because of the lower irradiance of one laser pulse, but it remains high during a longer time, because it rises again upon the second laser pulse. Consequently, the target remains for a longer time in the molten state, which suggests that laser ablation in the DP configuration might be more efficient, through the mechanism of splashing of the molten target. The total laser absorption in the plasma is also calculated to be clearly lower in the DP configuration, so that more laser energy can reach the target and give rise to laser ablation. Finally, it is observed that the plume expansion dynamics is characterized by two separate waves, the first one originating from the first laser pulse, and the second (higher) one as a result of the second laser pulse. Initially, the plasma temperature and electron density are somewhat lower than in the SP case, due to the lower energy of one laser pulse. However, they rise again upon the second laser pulse, and after 200 ns, they are therefore somewhat higher than in the SP case. This is especially true for the longer interpulse delay times, and it is expected that these trends will be continued for longer delay times in the μs-range, which are most typically used in DP LIBS, resulting in more intense emission intensities.     

Curve of growth methodology applied to laser-induced plasma emission spectroscopy

The curve-of-growth (COG) method was applied to a laser-induced plasma. The plasma was produced by a Nd:YAG laser on the surface of steel samples containing 0.007–1.3% of Cr. The emission was collected from the top of the plasma by means of a 45° pierced mirror and aligned onto an intensified charge-coupled device (ICCD) with a gate width of 1 μs and a variable delay time. The resonance 425.4 nm Cr line was used for construction of the COG. The temperature of the plasma (∼8000 K at 5-μs delay) was determined from a Boltzmann plot. The damping constant a, proportional to the ratio of the Lorentzian to the Doppler line widths, was found from the best fit of a series of calculated COG to the experimental data points and was 0.20±0.05. The number density of neutral Cr atoms which corresponded to the transition between low and high optical densities, was ≈6.5·10¹² cm⁻³. The cross-section for broadening collisions of Cr atoms with atmospheric species (presumably N₂) was calculated to be (66±16) Å. The shape of the 425.4-nm Cr line was additionally checked by scanning an ultra-narrow cw Ti:Sapphire laser across the atomic transition and found to be in agreement with preliminary estimates. The potential of the COG method for laser breakdown spectroscopy is discussed.     

Effect of Sample Temperature on Radiation Characteristics of Nanosecond Laser-Induced Soil Plasma

An Nd:YAG single pulse nanosecond laser of 532 nm wavelength with an 8 ns pulse width was projected on the soil samples collected from the campus of Bengbu College under 1 standard atmospheric pressure. Laser-induced breakdown spectroscopy at different sample temperatures was achieved. The intensity and signal-to-noise ratio (SNR) changes of different characteristic spectral lines could be analyzed when the sample temperature changes. The evolution of plasma electron temperature and electron density with the sample temperature was analyzed through Boltzmann oblique line method and Stark broadening method. The cause of the radiation enhancement of laser-induced metal plasma was discussed. Experimental results demonstrated that the spectral intensity, SNR, the electron temperature and electron density of plasma are positively related to the sample temperature, and reach saturation at 100 ℃.