10-2～105 Pa气压范围的氦等离子体光谱分析

采用三种实验装置(介质阻挡放电装置、空心阴极放电装置和彭宁放电装置)分别测量了不同压强范围内氦等离子体的发射光谱.通过对氦等离子体发射光谱的分析,已观察到一个共同的特点,就是在三种放电条件下产生的氦等离子体中31P1→21S0的谱线强度总是最强,可以推测亚稳态氦原子的含量相当显著,但不同的装置也有不同的特点,介质阻挡放电装置能够产生准辉光放电,谱线中氦原子的谱线强度很低,而空心阴极放电与彭宁放电装置能够产生稳定均匀的等离子体,且发射足够强的光辐射.我们已对所拍摄的光谱的谱线都进行了辨认,所有结果表明原子发射光谱分析法是研究不同条件下氦等离子体状态的一种十分有效的手段.     

Optical characteristics of the plasma of a transverse volume discharge in Cl2 and He/Cl2 mixtures

Results are presented from a study of UV and VUV emission from the plasma of a transverse volume discharge in chlorine and a He/Cl₂ mixture. In the wavelength range Δλ=140–300 nm, the Cl₂(D′-A′) band with an edge at 258 nm and the Cl ₂ ^* band with edge at λ=195 nm are found to be dominant. It is shown that, in the pressure range [Cl₂]=0.1–2.0 kPa, the intensity of emission with λ≤195 nm is higher than the intensity of the Cl₂(D′-A′) band. At [Cl₂]≥2 kPa, emission in the 258-nm band is dominant.     

Characteristics of an atmospheric‐pressure radio frequency‐driven Ar/H2 plasma discharge with copper wire in tube

This paper investigates a plasma discharge driven by a 13.56 MHz radio frequency (RF) power supply at atmospheric pressure, in which a copper wire is inserted in the discharge tube for the deposition of Cu films. The results show that the jet plasma formation originates from the discharge between the copper wire and induction coil because of its electrostatic field. The axial distribution of the plasma parameters in the RF plasma jet, namely the gas temperature, excitation temperature, and electron number density, is determined by diatomic molecule OH fitting, Boltzmann slope, and H_β Stark broadening, respectively. The discharge current significantly declines when a small amount of hydrogen is added to the argon as the plasma‐forming gas, and the gas temperature of discharge plasma increases considerably.     

激光诱导荧光方法对SiH4／N2混合气体放电等离子体的研究

用激光诱导荧光方法对SiH_4/N_2混合气体射频放电等离子体进行了研究,实验上首次检测到SiH_4分子射频放电离解过程的中间产物Si_2.     

Experimental investigation of nanosecond discharge plasma aerodynamic actuation

In this paper we report on an experimental study of the characteristics of nanosecond pulsed discharge plasma aerodynamic actuation. The N 2 (C 3 Π u ) rotational and vibrational temperatures are around 430 K and 0.24 eV, respectively. The emission intensity ratio between the first negative system and the second positive system of N 2 , as a rough indicator of the temporally and spatially averaged electron energy, has a minor dependence on applied voltage amplitude. The induced flow direction is not parallel, but vertical to the dielectric layer surface, as shown by measurements of body force, velocity, and vorticity. Nanosecond discharge plasma aerodynamic actuation is effective in airfoil flow separation control at freestream speeds up to 100 m/s.     

Comparative Plasma Chemical Reaction Studies of CH4/Ar and C2Hm/Ar (m = 2,4,6) Gas Mixtures in a Dielectric Barrier Discharge

Plasma chemical reactions in CH4/Ar and C₂H_m/Ar (m = 2, 4, 6) gas mixtures in a dielectric barrier discharge at medium pressure (300 mbar) have been investigated. From mass spectrometry the production of H₂ and formation of larger hydrocarbons such as C_nH_m with up to n = 12 is inferred. Hydrogen release is most pronounced for CH₄ and C₂H₆ gas mixtures. Fourier Transform InfraRed (FTIR) spectroscopy reveals the formation of substituted alkane (sp³), alkene (sp²), and alkyne (sp) groups from the individual gases which are used in this work. Abundant formation of acetylene occurs from C₂H₄ and to a lesser extent from C₂H₆ and CH₄ precursor gases. The main reaction pathway of acetylene leads to the formation of large molecules via C₄H₂ and, eventually, to nano‐size particles. The experimental results are in reasonable agreement with simulations which predict a pronounced electron temperature and gas pressure dependency. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Atmospheric pressure plasma jet utilizing Ar and Ar/H_2O mixtures and its applications to bacteria inactivation

An atmospheric pressure plasma jet generated with Ar with H2O vapor is characterized and applied to inactivation of Bacillus subtilis spores. The emission spectra obtained from Ar/H2O plasma shows a higher intensity of OH radicals compared to pure argon at a specified H2O concentration. The gas temperature is estimated by comparing the simulated spectra of the OH band with experimental spectra. The excitation electron temperature is determined from the Boltzmann’s plots and Stark broadening of the hydrogen Balmer Hβline is applied to measure the electron density. The gas temperature, excitation electron temperature, and electron density of the plasma jet decrease with the increase of water vapor concentration at a fixed input voltage. The bacteria inactivation rate increases with the increase of OH generation reaching a maximum reduction at 2.6%(v/v) water vapor. Our results also show that the OH radicals generated by the Ar/H2O plasma jet only makes a limited contribution to spore inactivation and the shape change of the spores before and after plasma irradiation is discussed.     

Chemiluminescent GeCl4 + O2 + Ar/He/Reactions

A chemiluminescent flame was produced in the reaction between GeCl₄ and an excited mixture of argon or helium with oxygen. Spectra of the reaction products were recorded and studied. Relative populations of the products in analyzed electronic, vibrational and rotational states corresponded to different temperatures.     

射频功率对辉光放电H2/C4H8等离子状态的影响

采用辉光放电技术和等离子体质谱诊断技术,研究了H₂/C₄H₈混合气体等离子体中正离子成分及主要正离子能量随射频功率的变化规律,并分析了H₂/C₄H₈混合气体主要的离解机理和形成过程.研究表明:随着射频功率的增加,碳氢碎片离子的浓度增加,在20 W时达到最大值,25 W后有所减小.当射频功率小于10 W时,H₂/C₄H₈混合气体等离子体中C₄H₉⁺相对浓度最大,当功率大于或等于10 W时,C₃H₃⁺相对浓度最大.随着射频功率的增大,碳氢碎片离子的能量逐渐增加.对H₂/C₄H₈混合气体等离子体的组成与能量进行的定性分析,将为H₂/C₄H₈混合气体辉光放电聚合物涂层工艺参数优化提供参考.     

Ar/H2O大气压等离子体射流放电特性

为了研究水蒸气体积分数对大气压等离子体射流放电机理及放电效率的影响,进而产生高活性低温等离子体并优化其效率。通过对大气压氩水等离子体射流的电压电流波形和Lissajous图形等电气特性的测量及发射光谱和发光图像等光学特性诊断,研究了不同水蒸气体积分数时,等离子体射流的放电特性。通过计算放电功率、传输电荷量、电子激发温度、分子振动温度和分子转动温度等主要放电参量,研究了它们随水蒸气体积分数的变化趋势,并结合放电机理对所得实验结果进行分析。结果表明,Ar/H2O等离子体射流除了产生N2和Ar,还有OH和O,气体温度在525~720 K之间变化,为典型的低温等离子体;随着水蒸气体积分数的增加,等离子体羽喷出管口的长度减小,放电功率减小,发光强度减弱,转动温度和振动温度增加;相同功率下,水蒸气体积分数为0.5%时,产生的OH达到最大。     

Theoretical analysis of ion kinetic energies and DLC film deposition by CH4＋ Ar （He） dielectric barrier discharge plasmas

The kinetic energy of ions in dielectric barrier discharge plasmas are analysed theoretically using the model of binary collisions between ions and gas molecules. Langevin equation for ions in other gases, Blanc law for ions in mixed gases, and the two-temperature model for ions at higher reduced field are used to determine the ion mobility. The kinetic energies of ions in CH4 ＋ Ar（He） dielectric barrier discharge plasma at a fixed total gas pressure and various Ar （He） concentrations are calculated. It is found that with increasing Ar （He） concentration in CH4 ＋ Ar （He） from 20% to 83%, the CH4＋ kinetic energy increases from 69.6 （43.9） to 92.1 （128.5）eV, while the Ar＋ （He＋） kinetic energy decreases from 97 （145.2） to 78.8 （75.5）eV. The increase of CH4＋ kinetic energy is responsible for the increase of hardness of diamond-like carbon films deposited by CH4 ＋ Ar （He） dielectric barrier discharge without bias voltage over substrates.     

Study of the Cl(He,p)Ar reaction

Angular distributions of protons from the ³⁵Cl(³He, p)³⁷Ar reaction have been measured at bombarding energies between 9 and 14 MeV. The 14 MeV data are compared with DWBA calculations based on various sets of shell-model wave functions.     

The production of excimer molecules and excited atoms in a positive corona discharge in He/Xe(Kr)/SF6/CCl4 mixtures

Electrical and optical characteristics of a positive corona discharge in He/Xe(Kr)/SF₆/CCl₄ mixtures, which are of interest for the use in multiwavelength excimer radiation sources, are studied in the needle-grid electrode configuration. The length of the discharge, which is usually used to pump repetitive high-pressure multiwavelength radiation sources, is equal to the length of the electrodes of an excimer laser or lamp pumped by a transverse electric discharge. The discharge current-voltage and frequency characteristics, panoramic emission spectra, and the dependences of the relative emission intensity from the halogenides and excited noble gas atoms on the corona discharge current are investigated. The main processes resulting in the production of halogenides, as well as xenon and krypton excited atoms, in the generation regions of a corona discharge are studied.     

CH4/H2和CH4/He体系等离子体发射光谱分析

 在CH₄/H₂和CH₄/He和CH₄/He两种系统中,利用光学发射谱技术对螺旋波放电产生低压甲烷等离子体内活性粒子的光学发射特征进行了原位诊断。在实验中,两种体系下同时都测得的主要荷电粒子为CH,Ha,Hb,Hg以及H2等。研究了各实验参数对这些活性粒子CH, Ha,Hb以及Hg的发射光谱强度的影响。结果表明：在CH₄/H₂体系下,随着射频功率的增大,Ha,Hb,Hg以及CH基团的相对强度都随着增加,而当放电气压变化时它们都呈现先增大而后减小的趋势。在CH₄/He体系下,随射频功率的增加,Ha,Hb,Hg以及CH相对强度变化的总体趋势也都是先增加而后减小,当工作气压增加时,Ha,Hb以及Hg的相对强度变化也是呈现先增大而后减小,但CH基团的相对强度却是逐渐减小的;这些结果为等离子体沉积各种薄膜过程的理解及制备工艺参数的调整提供了参考。     

Heterogeneous sono-Fenton-like process using nanostructured pyrite prepared by Ar glow discharge plasma for treatment of a textile dye

The plasma-treated pyrite (PTP) nanostructures were prepared from natural pyrite (NP) utilizing argon plasma due to its sputtering and cleaning effects resulting in more active surface area. The NP and PTP were characterized using X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FT-IR), Brunauer–Emmett–Teller (BET) and scanning electron microscopy (SEM) methods. The performance of the PTP was greater than NP for treatment of Reactive Red 84 (RR84) by the heterogeneous sono-Fenton process. The optimum amounts of main operational parameters were obtained as PTP of 4 g/L, initial dye concentration of 10 mg/L, pH of 5, and ultrasonic power of 300 W after 120 min of reaction time. Also, the effects of enhancers, and inorganic salts and t-butanol as hydroxyl radical scavengers on the degradation efficiency were investigated. Gas chromatography–mass spectroscopy analysis (GC–MS) was applied for detection of some degradation intermediates. Environmentally friendly plasma modification of the NP, in situ production of H₂O₂ and OH radicals, low leached iron concentration and repeated reusability at the milder pH are the significant benefits of the PTP utilization.     

脉冲电压上升沿对He大气压等离子体射流管内放电发展演化特性的影响

通过仿真和实验相结合的手段,以直流脉冲电压驱动的双环电极结构He大气压等离子体射流为例,研究了电压上升沿时间对管内放电等离子体发展演化特性的影响.随着电压上升沿的改变,管内介质阻挡放电(dielectric barrier discharge, DBD)区出现空心和实心两种放电模式.上升沿为纳秒和亚微秒量级时,以空心模式发展,上升沿持续增加后转变为实心模式.放电模式本质上受鞘层厚度、管内电场和表面电荷密度分布的影响,鞘层厚度小于1.8 mm时等离子体通常以空心模式传播,等于1.8 mm时等离子体的径向传播范围有限而转变为实心传播.管内DBD区,电场以轴向分量为主时,等离子体以放电起始时的模式传播;而在地电极内部,由于外施电场方向发生径向偏转,同时管壁沉积的正电荷形成径向自建电场,两者叠加形成的强径向电场致使放电以空心模式传播.     

常压双频驱动Ar/CCl4等离子体射流制备碳薄膜的研究

在大气压下双频Ar/CCl4 等离子体射流的驱动下,固定低频功率,通过改变射频功率在硅基底上制备了非晶态碳薄膜,并且通过程序进行相应的数值模拟计算。结果给出了不同功率下电子与离子的密度、温度、电场、电势、角度分布等参数对碳材料样品形貌的影响;样品变化趋势的预测及其原因的分析,以及与实验结果的对比。结果表明,对于双频大气压等离子体,射频可以独立控制等离子体的能量和反应强度,可以相对地控制产物。这为制备薄膜材料的形貌提供重要的实验基础。     

工作压强对射频辉光放电H2/C4H8等离子状态的影响

利用辉光放电技术采用等离子体质谱诊断的方法研究了不同工作 压强下H₂/C₄H₈混合气体等离子体中 主要正离子成分及其能量的变化规律, 并分析了压强对H₂/C₄H₈混合气体的离解机理以及主要正离子形成过程的影响. 结果表明: 随着工作压强的增加, 碳氢碎片离子的浓度和能量均逐渐减小. 当工作压强为5 Pa时, H₂/C₄H₈混合气体等离子体中C₃H₅⁺相对浓度最大; 压强为10 Pa时, C₃H₃⁺相对浓度最大; 压强为15, 20 Pa时, C₂H₅⁺相对浓度最大; 压强为25 Pa时, C₄H₉⁺相对浓度最大. 对H₂/C₄H₈等离子体中的主要组分及其能量分布所进行的定性分析, 将为H₂/C₄H₈混合气体辉光放电聚合物涂层的工艺参数优化提供参考技术基础. 关键词： 辉光放电技术 等离子体质谱诊断 工作压强     

平面激光诱导荧光技术在交错电极介质阻挡放电等离子体研究中的初步应用

利用平面激光诱导荧光技术对交错电极介质阻挡放电过程中产生的痕量组分NO进行了检测. 通过数值模拟对实验结果进行了分析说明,并对介质阻挡放电等离子体流动控制原理进行了简要分析. 此外还通过平面激光诱导荧光技术对等离子体诱导流动进行了直观显示. 关键词： 平面激光诱导荧光 等离子体 介质阻挡放电