基于法布里-珀罗腔产生飞秒激光脉冲串在硅表面诱导高质量亚波长周期条纹(特邀)EI北大核心CSCD

为了制备高质量表面周期结构,利用法布里-珀罗腔对飞秒激光进行时域整形,输出子脉冲间隔在1~300 ps内灵活可调的飞秒激光脉冲串,在硅表面诱导亚波长周期条纹。实验结果显示,利用飞秒激光脉冲串诱导得到的亚波长周期条纹明显优于原始高斯光诱导的亚波长周期条纹。利用子脉冲间隔为100 ps的脉冲串诱导的亚波长条纹最佳,条纹周期为1008 nm,结构取向角为2.8°,边缘粗糙度为3.9 nm,可达到光刻工艺的标准。     

线性、径向和环向偏振飞秒激光诱导非晶合金周期性表面结构

研究在复杂偏振条件下,飞秒激光诱导非晶合金Zr44Ti11 Cu10Ni10Be25(at％)表面周期性结构的形成机理.实验采用波长800 nm、脉宽120 fs的超短脉冲激光,分别在线性、径向、环向偏振条件下,诱导非晶合金表面生成复杂的周期性表面结构.表面结构由周期为652～723 nm的低频条纹和周期为1 304～1 765 nm的微型条纹组成.通过有限差分时域法仿真分析,发现微型条纹由粗糙表面引起的定向调制的表面散射电磁波与入射激光干涉形成.仿真结果与实验结果一致,验证了微型条纹形成机理的有效性.     

不同气压环境对飞秒激光在铬膜表面诱导周期性条纹结构的影响

实验研究了蓝色飞秒激光(1kHz,50fs,400nm)在105 Pa(标准气压)和10-3 Pa两种不同气压环境下,在单晶硅衬底的金属铬膜表面形成亚波长(~250nm)一维周期性条纹结构的情况,分析比较了入射激光能流、样品扫描速度、样品薄膜厚度等参数对表面条纹结构的影响.结果表明,10-3 Pa的真空环境可以有效改善铬膜表面亚波长条纹结构的形成质量;随着铬膜厚度的减小(100~25nm),表面条纹质量逐渐提高,但当铬膜太薄(≤25nm)时材料表面易出现烧蚀不均匀现象;另外,随着飞秒激光能流密度的降低或扫描速度的增大,条纹结构的空间周期将会减小,此时条纹之间的沟槽内逐渐出现纳米线分布.     

表面等离激元量子信息应用研究进展

近年来表面等离激元得到了越来越多的关注和研究,得益于其能把电磁场束缚在金属-介质界面附近的亚波长尺度范围内.本文回顾了近年来表面等离激元在量子信息领域中的理论和实验研究,包括表面等离激元的基本量子性质、表面等离激元量子回路、在量子尺度下与物质的相互作用及其潜在应用.量子表面等离激元开辟了对表面等离激元基本物理性质研究的新方向,可以应用于高度集成化的量子集成光学回路,同时也可以用来增强光与量子发光体的相互作用.     

飞秒激光诱导金属钨表面周期性自组织结构的研究EI北大核心CSCD

飞秒激光诱导金属表面周期性自组织微纳米条纹结构,在调控热辐射源、摩擦、超亲水性、超疏水性和打标等方面具有广泛的应用前景.研究了800nm飞秒激光诱导金属钨表面周期性自组织结构的形成规律和形成机理.采用Sipe干涉模型和有限时域差分法,仿真了第1个飞秒激光脉冲刻蚀后随机粗糙表面引起的激光电磁场能量表面分布和第20个脉冲后低空间频率条纹结构引起的激光电磁场能量表面分布.揭示了低空间频率条纹与高空间频率条纹的形成机理,考察了表面微观形貌的演化和条纹周期随着脉冲增多而递减的现象.     

融石英表面高质量亚波长光栅结构的飞秒激光加工EI北大核心CSCD

采用钛蓝宝石飞秒激光加工系统在融石英表面诱导表面周期性微纳结构,研究了激光诱导表面周期结构的形成过程以及激光能量密度、脉冲数、光斑大小和脉冲的空间间隔对融石英表面激光诱导表面周期结构的形貌的影响。实验结果表明,飞秒激光在融石英表面可以诱导出周期性的亚波长结构,主要以垂直于激光偏振方向的光栅状结构为主,其周期在百纳米量级且具有更好的可复现性。在激光光斑控制在1μm附近时,所得到的形貌具有较高的规则性。根据实验结果设计了聚焦高斯光斑低通量的加工方式。所制备的光栅结构具有200~300 nm的周期,平均深度约为300 nm。     

飞秒激光诱导金属钨表面周期性自组织结构的研究

飞秒激光诱导金属表面周期性自组织微纳米条纹结构,在调控热辐射源、摩擦、超亲水性、超疏水性和打标等方面具有广泛的应用前景.研究了800nm飞秒激光诱导金属钨表面周期性自组织结构的形成规律和形成机理.采用Sipe干涉模型和有限时域差分法,仿真了第1个飞秒激光脉冲刻蚀后随机粗糙表面引起的激光电磁场能量表面分布和第20个脉冲后低空间频率条纹结构引起的激光电磁场能量表面分布.揭示了低空间频率条纹与高空间频率条纹的形成机理,考察了表面微观形貌的演化和条纹周期随着脉冲增多而递减的现象.     

线性、径向和环向偏振飞秒激光诱导非晶合金周期性表面结构（英文）

研究在复杂偏振条件下,飞秒激光诱导非晶合金Zr_(44)Ti_(11)Cu_(10)Ni_(10)Be_(25)(at%)表面周期性结构的形成机理.实验采用波长800 nm、脉宽120 fs的超短脉冲激光,分别在线性、径向、环向偏振条件下,诱导非晶合金表面生成复杂的周期性表面结构.表面结构由周期为652~723 nm的低频条纹和周期为1 304~1 765 nm的微型条纹组成.通过有限差分时域法仿真分析,发现微型条纹由粗糙表面引起的定向调制的表面散射电磁波与入射激光干涉形成.仿真结果与实验结果一致,验证了微型条纹形成机理的有效性.     

金膜上亚波长小孔阵列表面等离激元颜色滤波器偏振性质

金属薄膜上制备的表面等离激元颜色滤波器具有很强的颜色可调性. 在200 nm厚的金膜上, 通过聚焦离子束刻蚀, 制备一系列周期逐渐变化的圆形、方形、矩形亚波长尺寸小孔方阵列表面等离激元颜色滤波器, 改变入射光的偏振方向, 观察其超透射滤波现象. 研究发现: 对于矩形小孔阵列, 其透射光颜色随入射光偏振方向的变化而改变; 而对于圆形、方形的小孔阵列, 其透射光颜色对入射光的偏振方向并不敏感. 分析表明, 对于金膜上刻蚀的小孔结构, 虽然结构的周期性导致的表面等离激元极化子会对透射光的颜色变化产生一定影响, 但是随小孔形状变化的局域表面等离激元共振才是影响透射光颜色的决定性因素. 如果入射光没有在小孔中激发出局域表面等离激元, 则表面等离激元极化子对透射光的影响也会消失. 根据不同形状小孔周期结构透射光颜色随入射光的偏振变化特点, 制备出了包含两种小孔形状的复合周期结构. 随着入射光偏振方向的改变, 该结构会显示出不同的颜色图案. 关键词： 表面等离激元极化子 局域表面等离激元 颜色滤波器 亚波长小孔阵列     

飞秒激光烧蚀硅材料表面形成周期波纹形貌研究

基于Sipe-Drude模型和表面等离子体激元(SPP)的干涉理论分别对单脉冲飞秒激光诱导硅表面形成低频率周期性波纹进行分析研究.探究了波长800 nm、脉宽150 fs的单个飞秒激光烧蚀硅造成不同激发水平下波纹形貌的变化,考虑到材料的光学性质变化(由Drude模型得到的介电常数变化),引入包含双温方程的电子数密度模型.计算结果表明,Sipe-Drude和SPP理论都适用于分析和解释高激发态下周期性波纹,但Sipe-Drude理论更适合分析更为广泛的周期性波纹结构.同时,波纹延伸方向总是垂直于入射激光偏振方向,其空间周期略小于激光波长,并受到入射激光通量的影响.在激光通量为0.38 J/cm~2时,波纹周期达到最小值.另外,还得到了不同入射角度的波纹周期变化情况,并在不同偏振态下随入射角度增大时波纹周期呈现相反的变化趋势.该研究对于理解飞秒激光造成硅表面形成周期结构及其在加工硅材料领域具有重要参考意义.     

Femtosecond-laser nanofabrication onto silicon surface with near-field localization generated by plasmon polaritons in gold nanoparticles with oblique irradiation

Nanohole fabrication process with gold nanoparticles irradiated by femtosecond laser at different incident angles is investigated. Nanoparticles with diameter of 200 nm and laser irradiation with center wavelength of 800 nm are used in the present study. The analysis of the electromagnetic field distribution in the near-field zone of the particle is made by simulations based on finite-differential time domain (FDTD) method. It is shown that when gold nanoparticle is irradiated by laser pulse surface plasmon excitation can be induced, and associated with it, high-intensity near field is produced in a limited area around the particle. It is found that the change of the irradiation conditions by means of irradiation from various incident directions gives a possibility of laser nanoprocessing with tunable characteristics. Our results show that enhanced optical intensity is able to be induced on the substrate surface regardless of incident direction of the laser due to the image charge interaction with the substrate. Furthermore, the use of p-polarized laser irradiation at a certain angle gives a minimum of the spatial dimensions of the enhanced zone on the substrate which is about two times smaller than that obtained at normal incidence.     

Rapid laser prototyping of plasmonic components

Renewed and growing interest in the field of surface plasmon polaritons (SPPs) comes from a rapid advance of nanostructuring technologies. In this paper, we will report on the application of two-photon polymerization (2PP) technique for the fabrication of dielectric SPP-structures, which can be used for localization, guiding, and manipulation of SPPs on a subwavelength scale. This technology is based on nonlinear absorption of near-infrared femtosecond laser pulses. Resolutions down to 100 nm (and even better) are already achievable. Characterization of these structures is performed by leakage radiation microscopy. 2PP allows the fabrication of dielectric waveguides, splitters, and couplers directly on metal surfaces. The dielectric structures on metal films are demonstrated to be very efficient for the excitation of SPPs. Using these structures, one can achieve excitation and focusing of the resulting plasmon field. PACS 42.70.Gi; 42.70.Jk; 42.82.Cr; 71.36.+c; 78.20.-e     

Spectral modulation of ultra-broadband femtosecond laser pulses based on surface plasmon resonance

The surface plasmon resonance (SPR) for spectral modulation of the femtosecond laser pulses with 110 nm ultra-broad bandwidth is demonstrated on the basis of the development of ultrashort pulse laser sources which supports good spatial resolution and high peak intensity. Employing the femtosecond surface plasmon polariton pulses launched by a Kretschmann configuration, whose reflectivity curve has the characteristic of the ultra-broad bandwidth, we observe a frequency-dependent loss with greater attenuation at the peak of the spectrum profile than in the wings, which is very useful for adequate spectral modulation. The SPR for the spectral modulation is investigated in theoretical and experimental aspects. The arbitrary spectral modulation of the femtosecond laser pulses can be fulfilled by controlling and optimizing the SPR of the gold film. The experimental result agrees well with the calculation.     

Laser-fabricated dielectric optical components for surface plasmon polaritons

Fabrication of dielectric optical components for surface plasmon polaritons (SPPs) by two-photon polymerization (2PP) is studied. This direct-write femtosecond laser technology provides a low-cost and flexible method for the fabrication and investigation of plasmonic structures and optical components. Using the 2PP technique, we fabricated narrow dielectric ridges with dimensions as small as 150 nm on metal surfaces. SPP excitation with the laser-fabricated structures and guiding along them are demonstrated.     

Photoemission electron microscopy as a tool for the investigation of optical near fields

Photoemission electron microscopy was used to image the electrons photoemitted from specially tailored Ag nanoparticles deposited on a Si substrate (with its native oxide SiO(x)). Photoemission was induced by illumination with a Hg UV lamp (photon energy cutoff homega(UV) = 5.0 eV, wavelength lambda(UV) = 250 nm) and with a Ti:sapphire femtosecond laser (homega(l) = 3.1 eV, lambda(l) = 400 nm, pulse width below 200 fs), respectively. While homogeneous photoelectron emission from the metal is observed upon illumination at energies above the silver plasmon frequency, at lower photon energies the emission is localized at tips of the structure. This is interpreted as a signature of the local electrical field therefore providing a tool to map the optical near field with the resolution of emission electron microscopy.     

基于局域场加强的近场纳米加工技术

介绍了一种全新的基于飞秒激光局域场加强效应的纳米加工技术,通过使用了微焦级别脉宽为130 fs、波长800 nm的飞秒激光照射于原子力显微镜的探针针尖,利用其局域场加强效应在金薄膜表面加工出各种纳米图形。对加工参数对加工线宽的影响中,我们发现了随着加工能量的减小和加工速度的不断增大将导致加工线宽不断减小,最终达到了极限线宽(～10 nm)。这项技术可以广泛的应用与各种材料的加工中,尤其适合各种金属薄膜的加工,特别是结合了现有的自动化控制系统更是可以加工出任意复杂的二维纳米图形。     

Laser Fabrication of Nanostructures on a Pure Aluminum Surface in Air

We report on the fabrication of surface nanoparticles and micro/nanograting structures on bulk pure aluminum in air using a 150 fs, 775 nm femtosecond laser. We investigate the size of the generated surface nanoparticles under irradiation with different femtosecond laser pulses. Smaller nanoparticles can be induced by a larger number of laser pulses and a lower laser fluence. In addition, we observe the formation of micro/nanogratings when the laser focus is scanned across a pure aluminum surface in air. We obtain micro- and nano-grating composite structures on a pure aluminum surface by adjusting the laser fluence and scan velocity. Femtosecond laser surface ablation of bulk pure aluminum in air is potentially a promising technique for efficient fabrication of surface nanostructures.     

Direct fabrication of periodic patterns with hierarchical sub-wavelength structures on poly(3,4-ethylene dioxythiophene)-poly(styrene sulfonate) thin films using femtosecond laser interference patterning

A simple optical interference method for the fabrication of simply periodic and periodic with a substructure on poly(3,4-ethylene dioxythiophene)-poly(styrene sulfonate) using femtosecond laser interference patterns is demonstrated. The femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Homogeneous periodic arrays could be fabricated even using a single laser pulse. In addition, multipulse irradiation resulted in reproducible sub-wavelength ripples oriented perpendicularly to the laser polarization with spatial period from 170 to 220 nm (around one-fourth of the laser wavelength). In addition, the observed size of the spatial period was not affected by the number of incident laser pulses or accumulated energy density. Using high energy pulses it was possible to completely remove the PEDOT:PSS layer without inducing damage to the underneath substrate.     

Research progress of femtosecond surface plasmon polariton

As the combination of surface plasmon polariton and femtosecond laser pulse,femtosecond surface plasmon polariton has both nanoscale spatial resolution and femtosecond temporal resolution,and thus provides promising methods for light field manipulation and light-matter interaction in extreme small spatiotemporal scales.Nowadays,the research on femtosecond surface plasmon polariton is mainly concentrated on two aspects:one is investigation and characterization of excitation,propagation,and dispersion properties of femtosecond surface plasmon polariton in different structures or materials;the other one is developing new applications based on its unique properties in the fields of nonlinear enhancement,pulse shaping,spatiotemporal super-resolved imaging,and others.Here,we introduce the research progress of properties and applications of femtosecond surface plasmon polariton,and prospect its future research trends.With the further development of femtosecond surface plasmon polariton research,it will have a profound impact on nano-optoelectronics,molecular dynamics,biomedicine and other fields.     

Enhancement of resolution and quality of nano-hole structure on GaN substrates using the second-harmonic beam of near-infrared femtosecond laser

By using a second harmonic of near infrared femtosecond (fs) laser (λ=387 nm, 150 fs) with high NA objective lens, fabrication resolution has been greatly improved in nano-fabrication of wide band-gap semiconductor gallium nitride (GaN). We have carried out a wet-chemical-assisted fs laser ablation method, in which the laser beam is focused onto a single-crystal GaN substrate immersed in a concentrated hydrochloric (HCl) acid solution. A two-step processing involving irradiation with a fs laser beam in air followed by wet chemical treatment is also performed for comparison. In the wet-chemical-assisted ablation, theoretical diameters of ablation craters are calculated as a function of pulse energy by assuming that the reaction is based on two-photon absorption. In lower energy, the calculated curve is close to the experimental value, while the actual measured diameters in the region of higher energy are larger than calculated values. In the condition of the highest fabrication resolution, we obtained ablation craters smaller than 200 nm at full width at half maximum. We have also demonstrated the fabrication of two-dimensional (2D) periodic nanostructures on surface of a GaN substrate using the second harmonic single fs-laser pulse. Uniform ablation craters with the size as small as 410 nm in diameter are arranged with a periodicity of 1 μm. Such structures are applicable to 2D photonic crystals which improve the light extraction efficiency for blue LEDs in the near future.