多孔BiFeO3薄膜的光伏效应研究

采用溶胶-凝胶法,在不同退火温度下在FTO/玻璃衬底上制备了多孔 BiFeO3薄膜并对薄膜的光伏特性进行了研究.结果表明,在450 ～600℃退火的薄膜,均呈高度(100)择优取向;所有薄膜均为多孔薄膜,450℃、500℃、550℃和600℃退火的薄膜的孔径大小分别为2 μm,2μm,6 μm和lμm.孔隙的出现与加入乙醇胺的量直接相关,同时能够增强对光的吸收.450℃、500℃、550℃和600℃退火的薄膜的光学带隙分别为2.31 eV,2.50 eV,2.51 eV,和2.62 eV,所有光学带隙显著低于通常报道的结果.450℃与500℃退火的BiFeO3薄膜具有较强的光电导效应,而600℃退火的BiFeO3薄膜具有较强的体光伏效应.BiFeO3薄膜中的体光伏效应来自铁电极化产生的内建电场.     

单晶硅外延生长晶化硅薄膜的研究

采用P型单晶硅片为衬底,并经混合酸溶液腐蚀抛光、清洗后,利用射频磁控溅射镀膜系统在其表面制备非晶硅薄膜;再结合快速光热退火工艺,于N2气氛下480℃退火30 min,得到晶化硅薄膜;利用光学金相显微镜、XRD衍射仪和拉曼散射光谱(Raman)仪对单晶硅衬底和晶化硅薄膜进行结构和性能表征.研究了混合酸溶液对单晶硅表面腐蚀效果、籽晶诱导外延生长晶化硅薄膜的物相结构和薄膜带隙.结果表明:采用混合酸溶液腐蚀后得到表面平整、光滑的单晶硅衬底;非晶硅薄膜经过快速退火后受籽晶诱导生成晶化硅薄膜,其晶相沿单晶硅衬底取向择优生长;随着非晶硅薄膜厚度从80 nm增加到280 nm,晶化后硅薄膜的表面粗糙度逐渐减小,晶化率从90.0;逐渐降低到37.0;;晶粒尺寸从6.65 nm逐渐减小到1.71 nm;带隙从1.18 eV逐渐升高到1.52 eV.     

射频磁控溅射制备纳米TiO2薄膜的表征和亲水性能

采用射频磁控溅射TiO2陶瓷靶的方法在硅和石英衬底上制备纳米TiO2薄膜,并经950℃退火1h.通过X射线衍射(XRD)、原子力显微镜(AFM)、紫外可见光谱(UV-Vis)和接触角仪对薄膜相结构、表面形貌、光学性能和亲水性能进行表征.结果表明,与950℃退火1h相比,未退火薄膜是无定形结构并呈现较高的光致亲水性能.退火薄膜是锐钛矿和金红石混合相,其中锐钛矿相质量分数是11.34％.未退火和950℃退火1h的薄膜样品的能隙分别是3.03 eV和3.11 eV.未退火薄膜具有较高的光致亲水性能主要归因于其较低的光学能隙.退火薄膜的热致亲水性能与其相结构、表面清洁度和粗糙度有关.     

衬底温度对Cu2O薄膜结构和性能的影响

采用射频磁控溅射技术在石英衬底上制备了Cu2O薄膜。系统研究了衬底温度对薄膜结构、光学和电学性能的影响。XRD的结果显示,在所有衬底温度条件下均可得到单相的Cu2O结构,而且随着衬底温度由500 K升至800 K,薄膜表现出(111)择优取向的生长特点。电学和光学测试结果表明,室温电导率和光学带隙随着衬底温度的升高而增加,800 K制备的薄膜的带隙值最高约为2.58 eV。     

衬底温度对含硅量子点的SiCx薄膜结构及其光学特性的影响

采用磁控共溅射沉积法,以Si靶和SiC靶为靶材,单晶Si(100)和石英为衬底,在不同衬底温度下沉积了富硅SiCx薄膜.在氮气氛下于1100 ℃退火,得到包含硅量子点的SiCx薄膜.采用傅立叶变换红外吸收光谱、拉曼光谱、掠入射X射线衍射和吸收谱对退火后的SiCx薄膜进行了表征.结果表明:当衬底温度从室温(25℃)升至300℃时,薄膜的晶化率增至71.3;,硅量子点尺寸增至8.9 nm,而光学带隙则减至2.42 eV;随着衬底温度进一步升高,薄膜的晶化率降至63.1;,硅量子点尺寸减小至7.3 nm,而光学带隙却增加至2.57 eV;当衬底温度从室温(25℃)升至400℃时,薄膜的吸收系数呈先增大后减小趋势.在本实验条件下,最佳衬底温度为300℃.     

退火温度对TiO2薄膜结构、组分和光学性能的影响

利用射频磁控溅射,在硅和石英基底上制备了厚度为150 nm的TiO2薄膜.利用X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)、紫外可见分光光度计(UV-vis)和光致发光谱(PL)等多种测试分析技术,研究退火温度对TiO2薄膜结构、组分及光学性能的影响.研究结果表明,未退火薄膜为无定型结构;随着退火温度的升高薄膜的金红石相含量逐渐增加,并沿(110)晶面择优取向.能隙也由退火前的3.03 eV逐渐增加到900℃退火后的3.18eV.对于TiO2薄膜催化活性最优的退火温度应为800℃.     

CuAlSe2光伏吸收层薄膜的制备

用同族元素Al和Fe取代CulnGaSe2薄膜中的In和Ga元素.采用粉末冶金工艺制备CuAlSe2和CuAlSe2∶Fe光伏吸收层薄膜.依次对薄膜样品进行了表面形貌、化学成分、薄膜厚度、晶体结构和光学特性测试分析.结果表明,退火温度为450℃、500℃、550℃时薄膜的生长特性较好,薄膜较为致密,结晶度较高.薄膜主要为黄铜矿结构,并沿(112)晶相择优生长.CuAlSe2薄膜和CuAlSe2∶Fe薄膜样品的光学吸收系数达到105 cm-1,且随着掺Fe比例增加而增加.未掺杂的薄膜的光学带隙约为1.6 eV,掺Fe薄膜的禁带宽度接近1.8 eV.     

热蒸发制备CdSe薄膜及其光电特性研究

采用真空热蒸发法技术制备CdSe薄膜,通过XRD、SEM、Hall效应和分光光度计测试了薄膜的结构、表面形貌、I-V特性和光学透过率。结果表明:CdSe薄膜(100)晶面的面间距为0.369 nm,晶粒大小约为10.2 nm,薄膜表面晶粒分布较为均匀;CdSe薄膜与锡和银的肖特基势垒高度分别为0.76 V和0.69 V;CdSe薄膜的光透过率在远红外区较高,且呈上升趋势;折射率随波长增加按指数规律减小;根据Tauc关系和Urbach规则,获得能量带隙为1.79 eV和Urbach能量为0.217 eV。     

溶胶-凝胶法制备Mg掺杂ZnO薄膜的微结构与光学性质

采用溶胶-凝胶技术在Si(111)和石英玻璃衬底上制备了Mg掺杂ZnO薄膜.用X射线衍射仪(XRD)、原子力显微镜(AFM)、扫描电镜(SEM)和紫外-可见(UV-Vis)分光光度计测试薄膜的微结构、表面形貌和光学性质.结果表明:所得Mg掺杂ZnO薄膜仍为六角纤锌矿型结构,呈c轴方向择优生长,随着退火温度升高,薄膜的晶格常数c由0.5288 nm减小到0.5278 nm,粗糙度从3.8 nm增大到6.5 nm,光学带隙由3.26 eV增大到3.31 eV.     

溶胶-凝胶法制备高Mg含量Zn1-x MgxO薄膜

采用溶胶-凝胶法在石英玻璃基板上制备了ZB1-xMgxO薄膜,研究退火温度对高Mg含量Zn0.5Mg0.5O薄膜的相组成、相偏析及紫外-可见透过光谱中吸收边移动的影响,当退火温度≤500℃时,Zn0.5Mg0.5O薄膜未发生相偏析现象,且400℃退火处理制备的Zn0.5Mg0.5O薄膜的紫外-可见透过光谱中吸收边蓝移最大.因此,对于高Mg含量Zn0.5Mg0.5O薄膜,退火温度是影响Mg2+在ZnO中固溶度的关键因素,且400℃是其理想的退火温度.在此条件下研究了不同Mg含量对Zn1-xMgO(x=0～0.8)薄膜带隙调节的影响,随着Mg含量的增加,其紫外-可见透过光谱中紫外光区吸收边呈现规律性蓝移,光学带隙值Eg从纯ZnO的3.3 eV调节至4.2 eV.     

Influence of Rapid Thermal Processing on the Orientation Properties of PbTiO3 Thin Film

Rapid thermal processing (RTP) has developed in fabrication of ferroelectric (FE) thin films because it can reduce processing temperature and time. It also improves the properties of FE thin films compatible with semiconductor devices. The thin film samples used were prepared by a multi-ion-beam reactive cosputtering system (MIBRECS) at room temperature. The samples were then subjected to a post-deposition annealing in a RTP system. It was found that PbTiO₃ (PT) thin film can grow on amorphous or polycrystalline interfacial layer and the PT thin films annealed by RTP showed the prefered [110] and [100] textures.     

Characterization of GaN using thermally stimulated current and photocurrent spectroscopies and its application to UV detectors

Deep levels in insulating GaN grown by metalorganic vapor phase epitaxy (MOVPE) have been studied using thermally stimulated current (TSC) and photocurrent (PC) spectroscopies. Five main levels (0.11, 0.24, 0.36, 0.53 and 0.62 eV) were observed by TSC measurements in the as-grown undoped GaN. PC measurements showed three deep levels located within bandgap at 1.32, 1.70 and 2.36 eV, respectively. We found that three of the levels, located at 0.24, 0.36 and 0.53 eV, were eliminated by annealing at 1000°C under N₂ for six hours, whereas the 0.62 eV level density increased after annealing. In addition, both the responsivity and on/off times of GaN metal-semiconductor-metal (M---S---M) detectors degrade with increasing concentration of the 0.62 eV trap. We have also found that this trap can be effectively reduced by increasing the ammonia flow rate during the MOVPE growth. Accordingly, a high responsivity ( 3200 A/W) UV detector with an improved response time, from 8 to 0.4 ms, was fabricated on GaN grown under the optimized conditions.     

价态和结构对VO2薄膜热致相变光电性能的影响

本文通过合理控制真空还原时间和真空还原温度,利用真空还原V2O5的方法制备出具有优良热致相变性能的VO2薄膜;通过研究不同真空还原时间及真空退火温度对VO2薄膜结构和热致相变过程中光电性能的影响,得到最佳真空还原参数;制备的薄膜高／低温电阻变化最大达3个数量级;900nm波长光透过率在相变前后改变了40％左右,光学特性相变响应参数较大,热致相变性能优良,利用XPS,XRD对不同条件制备薄膜的化学状态和结晶状态进行了研究,结果表明较低温度退火有利于V^5 离子的还原,而升高退火温度可改善结晶状态,退火时间对VO2中结晶状况和V离子价态有显著影响,讨论了离子价态和样品结晶状态对VO2薄膜热相变过程中热滞回线的宽度,相变温度点的影响。     

Optical absorption in amorphous InN thin films

Amorphous indium nitride (a-InN) thin films were deposited onto different substrates at temperatures <325 K using RF magnetron sputtering at a rate 0.3–0.4 Å/s. X-ray diffraction patterns reveal that the films grown on the substrates are amorphous. The optical absorption edge, ‘bandgap’ energy, E_g, of a-InN has been determined by spectroscopic ellipsometry over the energy range 0.88–4.1 eV. The absorption coefficient was obtained by the analysis of the measured ellipsometric spectra with the Tauc–Lorentz model. The E_g was determined using the modified Tauc and Cody extrapolations. The corresponding Tauc and Cody optical bandgaps were found to be 1.75 and 1.72 eV, respectively. These values are in excellent agreement with the values of the bandgap energy obtained as fitting parameters in the Tauc–Lorentz model: 1.72 ± 0.006 eV as well as by using spectrophotometry (1.74 eV) and photoluminescence (1.6 eV). The spectral dependence of the polarized absorptivities was also investigated. We found that there was a higher absorptivity for wavelengths <725 nm. This wavelength, ∼725 nm, therefore indicates that the absorption edge for a-InN is about 1.70 eV. Thus, the average value of the measured optical absorption of a-InN film is approximately 1.68 ± 0.071 eV.     

Gd3+、Co3+共掺杂铁酸铋薄膜多铁性增强及带隙调谐

多铁功能材料在现代生产生活中有举足轻重的作用。本文采用溶胶-凝胶法以硝酸铁、硝酸铋、硝酸钆、硝酸钴为原料,乙二醇甲醚为溶剂,柠檬酸作螯合剂制成前驱体溶液,通过旋涂法在Pt/Ti/SiO₂/Si及ITO衬底上合成Bi_0.85Gd_0.15Fe_1-xCo_xO₃ (x=0, 0.04, 0.08, 0.12)薄膜,研究了Gd³⁺、Co³⁺共掺杂对薄膜铁电性能、磁学性能及光学带隙的影响。XRD结果表明所有薄膜均呈(111)方向的菱形结构,SEM结果表明共掺杂可以细化晶粒。根据铁电性和漏电流测试分析结果可知在Co³⁺掺杂量为8%时最大剩余极化值达到2P_r=15.71 μC/cm²,所有样品的漏电流传导机制均为欧姆传导机制。根据磁学性能测试分析结果可知,共掺杂可以有效增强薄膜的饱和磁化强度,且在Co³⁺掺杂量为8%时最大饱和磁化强度达到37.78 emu/cm³。根据吸收光谱及Tauc公式拟合结果可知共掺杂可以有效减小薄膜的光学带隙且随着掺杂量的增加光学带隙逐渐减小,在Co³⁺掺杂量为12%时光学带隙减小到1.96 eV。     

Low-temperature metal-induced crystallization of Mn-containing amorphous Ge thin films

This work focuses on the crystallization of amorphous germanium (a-Ge) thin films induced by manganese species. A series of Mn-containing a-Ge films ([Mn] ~ 0?3.7 at.% range) was deposited at 150 °C by the cosputtering technique. After deposition, all films were submitted to isochronal thermal annealing treatments up to 600 °C and analyzed by Raman scattering, optical transmission spectroscopy and electrical resistivity measurements. The experimental results indicate that: (a) Mn impurity lowers the crystallization temperature of a-Ge in ~ 100 °C, as confirmed by the Raman analyses, (b) the optical properties of the films are affected by both the insertion of Mn and the temperature of thermal treatment, with the optical bandgap staying in the range of ~ 0.7?1 eV, and (c) the electrical resistivity of the samples is also influenced by the Mn concentration and by the temperature of annealing, varying between ~ 1.0×10¹ and 1.6×10⁴ Ω cm. These experimental observations were systematically studied and the possible reasons associated to them are presented and discussed.     

Morphology,composition, structure and optical properties of thermally annealed Cu2O thin films prepared by reactive DC sputtering method

Abstract

Thin films copper oxides are perspective materials for many optoelectronic applications, including photovoltaics. The samples were deposited on glass and silicon substrates by magnetron sputtering method using Modular Platform PREVAC. After deposition the samples were thermally treated by annealing in oxygen atmosphere for 60?min at 450?°C. Morphology confirms that all the films have crystalline structure. Optical measurements show that the films have wide band gap within the range 2.20÷2.48?eV before and 2.03÷2.40?eV after annealing. The article presents the discussion about the influence of annealing on Cu₂O thin film parameters.