Ion implantation induced by Cu ablation at high laser fluence

High energy laser plasma-produced Cu ions have been implanted in silicon substrates placed at different distances and angles with respect to the normal to the surface of the ablated target. The implanted samples have been produced using the iodine high power Prague Asterix Laser System (PALS) using 438 nm wavelength irradiating in vacuum a Cu target. The high laser pulse energy (up to 230 J) and the short pulse duration (400 ps) produced a non-equilibrium plasma expanding mainly along the normal to the Cu target surface. Time-of-flight (TOF) technique was employed, through an electrostatic ion energy analyzer (IEA) placed along the target normal, in order to measure the ion energy, the ion charge state, the energy distribution and the charge state distribution. Ions had a Boltzmann energy distributions with an energy increasing with the charge state. At a laser fluence of the order of 6 × 10⁶ J/cm², the maximum ion energy was about 600 keV and the maximum charge state was about 27+.In order to investigate the implantation processes, Cu depth profiles have been performed with Rutherford backscattering spectrometry (RBS) of 1.5 MeV helium ions, Auger electron spectroscopy (AES) with 3 keV electron beam and 1 keV Ar sputtering ions in combination with scanning electron microscopy (SEM). Surface analysis results indicate that Cu ions are implanted within the first surface layers and that the ion penetration ranges are in agreement with the ion energy measured with IEA analysis.     

Simulation of ultrashort double-pulse laser ablation

In this paper, we study the mechanisms of femtosecond double-pulse laser ablation of metals. It was previously shown experimentally that the crater depth monotonically drops when the delay between two successive pulses increases. For delays longer than the time of electron-ion relaxation the crater depth can be even smaller than that produced by a single pulse. The results of the performed hydrodynamic simulation show that the ablation can be suppressed due to the formation of the second shock wave. The modeling results of the double-pulse ablation obtained for different delays correlate with the experimental findings.     

New ablation experiment aimed at metal expulsion at the hydrodynamic regime

The effects of nanosecond visible laser on metallic materials have been studied experimentally. High laser energies (>10¹³ W/cm²) created a hydrodynamic regime, where the ablation pressure and the ensuing shock wave are the main mechanisms for material expulsion. Plasma shielding caused a constant material removal despite the increase of energy, while the increase of number of pulses resulted in an almost linear increase of the crater volume, despite the lower depths reached with every subsequent pulse. Our results show that there is a correlation between ablation efficiency and material properties, namely ablation efficiency decreases with melting temperature and bulk modulus.     

Foamy coating obtained by laser ablation of glass ceramic substrates at high temperature

This paper presents a study of the effect of temperature in the machining of glass ceramic cooking plates by laser ablation. A Q-switched Nd:YAG laser at its fundamental wavelength of 1064 nm with pulsewidths in the nanosecond range was used. The beam was focalized and scanned over the surface covering an area of several squared millimetres. With the same irradiance and process parameters the rise of the surface temperature some hundreds of degrees changes drastically the ablation conditions. As temperature is risen the amount of particles ejected from the interaction zone diminishes, recasting over the processed area generating a white and foamy self-layer.The size of the ejected particles and the morphology, composition and microstructure of the new layer is described. This layer could be used to change the thermal conductivity of the glass ceramic plate as well as for aesthetic purposes.     

Study of the X-ray emission from Ta plasma obtained by ns laser ablation

In this work, the continuum spectrum of X-rays originated from the interaction of a moderate intensity ns Nd:YAG laser (1064 nm, 9 ns, 30 Hz, 900 mJ, 10¹¹ W/cm²) with Ta target producing plasma is investigated. Plasma expands unisotropically with a velocity, depending on the pressure of the residual gas in the vacuum chamber. The X-ray intensity is a function of the laser energy and of the gas pressure inside the chamber. The X-ray energy is measured with an X-ray filter positioned in front of the Si(Li) solid-state detector. A temperature of about ～1–2 keV of the hot electrons, responsible for the continuum spectrum emission from the plasma, is calculated from the fit of the X-ray spectrum, applying a Maxwellian distribution.     

A simple model for high fluence ultra-short pulsed laser metal ablation

The ultra-short laser metal ablation is a very complex process, the complete simulation of which requires applications of complicated hydrodynamics or molecular dynamics models, which, however, are often time-consuming and difficult to apply. For many practical applications, where the laser ablation depth is the main concern, a simplified model that is easy to apply but at the same time can also provide reasonably accurate predictions of ablation depth is very desirable. Such a model has been developed and presented in this paper, which has been found to be applicable for laser pulse duration up to 10 ps based on comparisons of model predictions with experimental measurements.     

Carbon-plasma produced in vacuum by 532 nm-3 ns laser pulses ablation

A study of VIS laser ablation of graphite, in vacuum, by using 3 ns Nd:YAG laser radiation is reported. Nanosecond pulsed ablation gives an emission mass spectrum attributable to C_n neutral and charged particles. Mass quadrupole spectroscopy, associated to electrostatic ion deflection, allows estimation of the velocity distributions of several of these emitting species within the plume as a function of the incident laser fluence. Time gated plume imaging and microscopy measurements have been used to study the plasma composition and the deposition of thin carbon films. The multi-component structure of the plume emission is rationalized in terms of charge state, ions temperature and neutrals temperature. A special regard is given to the ion acceleration process occurring inside the plasma due to the high electrical field generated in the non-equilibrium plasma conditions. The use of nanosecond laser pulses, at fluences below 10 J/cm², produces interesting C-atomic emission effects, as a high ablation yield, a high fractional ionization of the plasma and presence of nanostructures deposited on near substrates.     

Emission properties of laser ablation of SnO2: Sb transparent conducting film and KTiOPO4 crystal

Optical emission spectra of Nd:YAG laser ablation of KTiOPO₄ (KTP) crystal and SnO₂:Sb transparent conducting thin film were recorded and analyzed in vacuum and in air. The integral intensities of spectral lines from laser-ablated KTP crystal were obtained as functions of distance from the target surface and laser power density in vacuum and in air. The ambient gas effects on pulsed laser ablation of target were discussed. We also performed laser ablation of SnO₂:Sb transparent conducting thin film in air and the electron temperature and full-width at half-maximum (FWHM) of atomic and ionic spectral lines in the plasma were quantified using Boltzmann plot method and Lorentzian fit, respectively. Integral intensities of atomic and ionic Sn spectral lines were also obtained as functions of distance from the target surface and laser irradiance. The intensity ratio of ionic and atomic Sn spectral lines as a function of laser power density was got which gives some information about the variation of ionization ratio with laser irradiance in the plasma produced by high-power laser.     

Physical mechanism of silicon ablation with long nanosecond laser pulses at 1064 nm through time-resolved observation

Nanosecond (ns) laser ablation can provide a competitive solution for silicon micromachining in many applications. However, most of the previous studies focus on ns lasers at visible or ultraviolet (UV) wavelengths. The research is very limited for ns lasers at infrared (e.g., 1064 nm) wavelengths (which often have the advantage of much lower cost per unit average output power), and the research is even less if the ns laser also has a long pulse duration on the order of ∼100 ns. In this paper, time-resolved observation using an ICCD (intensified charge-coupled device) camera has been performed to understand the physical mechanism of silicon ablation by 200-ns and 1064-nm laser pulses. This kind of work has been rarely reported in the literature. The research shows that for the studied conditions, material removal in laser silicon ablation is realized through surface vaporization followed by liquid ejection that occurs at a delay time of around 200-300 ns. The propagation speed is on the order of ∼1000 m/s for laser-induced plasma (ionized vapor) front, while it is on the order of ∼100 m/s or smaller for the front of ejected liquid. It has also been found that the liquid ejection is very unlikely due to phase explosion, and its exact underlying physical mechanism requires further investigations.     

Frequency-tripled Nd:YAG laser ablation in laser structuring process

With the increasing demand for finer lines/spaces on PCB boards, a new technology—laser structuring—has emerged in recent years. In this research, the frequency-tripled Nd:YAG laser is selected as the laser source in laser structuring; this laser is often used in miniaturization machining. This paper describes in detail the processing parameters’ influences, such as laser power, numbers of repetition, repetition rate and bite size, on laser structuring results. From the research results, it can be concluded that the line width and depth are increased with increases in the laser power and numbers of repetition. Repetition rate, bite size and velocity are related to one another. When the bite size is fixed, the velocity increases with the repetition rate and the depth of the line is decreased at the same time. When the repetition rate is fixed, velocity increases with the bite size.     

Characterization of laser ablation plasmas by laser beam deflection

Laser probe beam and multiple-pass deflection techniques were used for real time and in situ monitoring of laser ablation plasma plumes in the mTorr pressure regime. Intensity and transit time of shock wave fronts were studied as functions of focal lens position, laser energy and pressure. The velocity of the shock wave was determined to be up to 30 km s⁻¹ for a pressure of 40 mTorr and to drop below 4 km s⁻¹ at 1 Torr. For transparent targets rear-side shock wave velocity was on to be slower than the corresponding front one. This method promises a reliable diagnostic tool for pulsed laser deposition processing allowing an increase in the quality of coating technologies.     

Two color laser ablation: Enhanced yield, improved machining

Laser ablation of semiconductors with nano- and picosecond lasers can be significantly improved, both in terms of yield and surface quality, by simultaneous irradiation of the sample with the fundamental beam (λ = 1064 nm) and a small amount of its second harmonic (SH) produced in a thin nonlinear crystal. While the total energy fluence is conserved, the small fraction of the second harmonic serves to excite electrons into the conduction band to get the ablation process started. For femtosecond laser pulses, the effect becomes insignificant, since sufficient conduction band population is provided by multiphoton absorption.     

Formation of periodic structures by laser ablation of metals in liquids

Experimental results are presented on ablation of metals (W, Cu, brass and bronze) in a liquid environment (e.g., ethanol or water) by irradiation with either a pulsed copper vapor laser (0.51 μm) or a pulsed Nd:YAG laser (1.06 μm). The target material is ejected into surrounding liquid in the form of nanoparticles. In a certain range of laser parameters (fluence and number of laser shots) the surface of the solid target is composed of micro-cones having a regular structure. The distance between neighboring micro-cones in the structure depends on the laser spot size. The structures allow the observation of up-conversion of the laser frequency due to generation of the second harmonics in the eye retina.     

Picosecond and femtosecond pulsed laser ablation and deposition of quasicrystals

A Nd:glass laser with pulse duration of 250 fs and 1.3 ps has been used to evaporate a Al₆₅Cu₂₃Fe₁₂ quasicrystalline target. The gaseous phase obtained from the ablation process has been characterised by several techniques such as emission spectroscopy, quadrupole mass spectrometry and ICCD imaging, used to study the plume composition, energy and morphology. The results show that the ablation processes in the short-pulse regimes are very different to the nanosecond one. In particular the plume angular distribution shows a characteristic high cosine exponent and the composition is completely stoichiometric and independent from the laser fluence. Furthermore the mass spectra indicate the presence of clusters, both neutral and ionised and the emission from the target suggest a rapid thermalisation leading to the melting of the surface. To clarify the ablation process some films have been deposited, on oriented silicon, at different experimental conditions and analysed by scanning electron microscopy, atomic force microscopy, energy dispersive X-ray analysis and X-ray diffraction. The analyses show the presence of nanostructured films retaining the target stoichiometry but consisting of different crystalline and non crystalline phases. In particular the nanostructure supports the hypothesis of the melting of the target during the ablation and a mechanism of material ejection is proposed for both picosecond and femtosecond regimes.     

Femtosecond pulsed laser ablation of thin gold film

Laser micromachining on 1000 nm-thick gold film using femtosecond laser has been studied. The laser pulses that are used for this study are 400 nm in central wavelength, 150 fs in pulse duration, and the repetition rate is 1 kHz. Plano-concave lens with a focal length of 19 mm focuses the laser beam into a spot of 3 μm (1/e² diameter). The sample was translated at a linear speed of 400 μm/s during machining. Grooves were cut on gold thin film with laser pulses of various energies. The ablation depths were measured and plotted. There are two ablation regimes. In the first regime, the cutting is very shallow and the edges are free of molten material. While in the second regime, molten material appears and the cutting edges are contaminated. The results suggest that clean and precise microstructuring can be achieved with femtosecond pulsed laser by controlling the pulse energy in the first ablation regime.     

Femtosecond pulsed laser ablation with spatial filtering

With the rise in demand for miniaturized features with better acute edge acuity and negligible thermal damage zone, one of the key vital areas lies in the refinement of the quality of the laser beam itself. Spatial filter is routinely used in optical micromachining systems to smoothen the Gaussian profile of the machining spot in order to obtain a feature of the desired quality. However, its profile smoothening effect has never been investigated for femtosecond pulsed laser micromachining process since the extremely high peak power of femtosecond pulses will cause damage on the filtering aperture of spatial filter. During the development of an acousto-optical micromachining system using femtosecond pulses, we found that if the damage of the filtering aperture can be circumvented, spatial filter can improve the machining quality of femtosecond pulse ablation, especially when ablation is conducted at low-fluency range (just above the ablation threshold fluency). In this paper, we investigate and demonstrate both the improvement and potential that beam refinement can bring about. In our experiment, a series of test patterns were ablated with a 400 nm second-harmonic Ti:Sapphire femtosecond laser of 150 fs duration at varying pulse energy ranging from 31 to 39 nJ. The specimen used in the experiment is a platinum- (Pt) sputtered coating of 100 nm thickness on a quartz substrate. The results show a significant improvement in the constancy of the shape as well as the size of ablated feature, revealing an improved beam profile and beam energy distribution due to spatial filtering.     

Surface ablation of lithium tantalate by femtosecond laser

We report measurements of the laser induced breakdown threshold in lithium tantalate with different number of pulses delivered from a chirped pulse amplification Ti: sapphire system. The threshold fluences were determined from the relation between the diameter D² of the ablated area and the laser fluence F₀. The threshold of lithium tantalite under single-shot is found to be 1.84 J/cm², and the avalanche rate was determined to be 1.01 cm²/J by calculation. We found that avalanche dominates the ablation process, while photoionization serves as a free electron provider.     

Investigation of nanoparticle generation during femtosecond laser ablation of metals

The production of nanoparticles via femtosecond laser ablation of gold and copper is investigated experimentally involving measurements of the ablated mass, plasma diagnostics, and analysis of the nanoparticle size distribution. The targets were irradiated under vacuum with a spot of uniform energy distribution. Only a few laser pulses were applied to each irradiation site to make sure that the plume expansion dynamics were not altered by the depth of the laser-produced crater. Under these conditions, the size distribution of nanoparticles does not exhibit a maximum and the particle abundance monotonously decreases with size. Furthermore, the results indicate that two populations of nanoparticles exist within the plume: small clusters that are more abundant in the fast frontal plume component and larger particles that are located mostly at the back. It is shown that the ablation efficiency is strongly related to the presence of nanoparticles in the plume.     

Preparation of polyynes by laser ablation of graphite in aqueous media

Polyynes were prepared by liquid-phase laser ablation of a graphite target at 1064 nm and identified by analyzing UV absorption spectra in deionized water and various aqueous solutions. We observed that major UV absorption peaks coincide with the electronic transitions corresponding to linear hydrogen-capped polyynes (C_nH₂: n = 6, 8, 10). The peak intensities increased when polyynes were produced by irradiating the target immersed in acidic media, while those were relatively weak in basic media. This leads us to conclude that OH⁻ or H⁺ ions play a certain role in the formation of polyynes.     

Metal thin film ablation with femtosecond pulsed laser

Micromachining thin metal films coated on glass are widely used to repair semiconductor masks and to fabricate optoelectrical and MEMS devices. The interaction of lasers and materials must be understood in order to achieve efficient micromachining. This work investigates the morphology of thin metal films after machining with femtosecond laser ablation using about 1 μm diameter laser beam. The effect of the film thickness on the results is analyzed by comparing experimental images with data obtained using a two-temperature heat transfer model. The experiment was conducted using a high numerical aperture objective lens and a temporal pulse width of 220 fs on 200- and 500-nm-thick chromium films. The resulting surface morphology after machining was due to the thermal incubation effect, low thermal diffusivity of the glass substrate, and thermodynamic flow of the metal induced by volumetric evaporation. A Fraunhofer diffraction pattern was found in the 500-nm-thick film, and a ripple parallel to the direction of the laser light was observed after a few multiple laser shots. These results are useful for applications requiring micro- or nano-sized machining.