强流磁约束金属离子注入源

设计和制造了适合工业应用的强流金属离子源。离子源的电弧阴、阳电极之间和放电室壁采用永磁体阵列形成导流、屏蔽磁场,改进了电弧的放电特性和提高等离子体密度。离子注入源在加速电压为30kV、50 Hz 条件时,平均束流流强约为30mA,调试结果表明附加磁场提高了离子源性能。     

Feasibility study on high current ion beam extraction from anode spot plasma for large area ion implantation

In this paper, we have investigated the feasibility of the high current beam extraction from anode spot plasma as an ion source for large area ion implantation. Experiments have been carried out with the ambient plasma produced by inductive coupling with radio-frequency (RF) power of 200 W at the frequency of 13.56 MHz. Anode spot plasmas are generated near the extraction hole of 2 mm in diameter at the center of a bias electrode whose area exposed to the ambient plasma can be changed. It is found that the maximum ion beam current is extracted at the optimum operating pressure at which the area of bias electrode exposed to ambient plasma is fully covered with the anode spot plasma whose size is dominantly determined by the operating pressure for given gas species. It is also observed that the extracted ion beam current increases nonlinearly with the bias power due to the changes in size and shape of the anode spot plasma. With the well-established anode spot plasma operating at the optimum gas pressure, we have successfully extracted high current ion beam of 6.4 mA (204 mA/cm²) at the bias power of 22 W (∼10% of RF power), which is 43 times larger than that extracted from the plasma without anode spot. Based on the experimental results, criteria for electrode design and operating pressure for ion beam extraction from larger extraction aperture are suggested. In addition, the stability of anode spot plasma in the presence of ion beam extraction through an extraction hole is discussed in terms of the particle balance model.     

Theoretical analysis of a new extraction system for a DUHOCAMIS operating in a high magnetic field

A new extraction system is designed for a penning ion source DUHOCAMIS(dual hollow cathode ion source for metal ion beams)being installed at the Institute of Heavy Ion Physics,Peking University.We have analyzed theoretically the central particle trajectories in the extraction region for ions having different q/m ratios and then compared our results with the simulation results of CST(Computer Simulation Technology)software.The validity of the system is verified and some analytical formulas are obtained which will be used for the optimization of the extraction system as well as the experimental setup.     

Theoretical analysis of a new extraction system for a DUHOCAMIS operating in a high magnetic field

A new extraction system is designed for a penning ion source DUHOCAMIS （dual hollow cathode ion source for metal ion beams） being installed at the Institute of Heavy Ion Physics,Peking University.We have analyzed theoretically the central particle trajectories in the extraction region for ions having different q/m ratios and then compared our results with the simulation results of CST （Computer Simulation Technology） software.The validity of the system is verified and some analytical formulas are obtained which will be used for the optimization of the extraction system as well as the experimental setup.     

在等离子体源离子注入中靶周围等离子体的行为

在等离子体源离子注入中，将待处理的工件直接放在等离子体内，并在工件上按一定的占空比加脉冲连续式负偏压，我们通过计算，分析了在工件未加负偏压时等离子体对工件的作用，并给出了在工件加上负偏压时注入工件的离子能量的简化分布模型，最后计算了在负偏压脉冲持续时间内离子阵鞘层边界的扩展。     

RFQ冷却聚束器的离子引出系统

论述了RFQ冷却聚束器的两种离子引出系统——静电引出和小型RFQ方法的模拟结果，并通过流体力学方法计算了设计中的静电引出系统的氦气流量和系统可能获得的真空度. 研究结果表明：在较低氦气气压时，应该选用小型RFQ引出方法，以获得更好的束流品质，而在较高氦气气压时，只能选用静电引出方法. 另外，由于设计中的RFQ冷却聚束器经常工作于高氦气气压条件下，因此高纯度氦气的回收和再利用是必需的.     

Laser ion source for ITEP–TWAC project

Laser ion source (LIS) is the only type of source capable of generating 10–30 mA beams of highly charged ions for the ITEP–TeraWatt (TWAC) accelerator/accumulator facility [B.Yu. Sharkov et al., Nucl. Instrum. Methods Phys. Res. A 415 20 (1998).]. The assembling stage of the new LIS based on 100 J/1 Hz master oscillator–power amplifier CO₂-laser system [Yu. Satov, et al., J. Russ. Laser Res. 25(3) 205 (2004).] is in progress at ITEP now. In the first phase, the ion beam parameters (charge state distribution, current, pulse length and emittance) will be specified for different elements and target irradiation conditions. According to the planning, the new LIS and the new high-current injector [D. Kashinsky, et al., Proceedings of the Heavy Ion Fusion Conference, Moskow (2002).] will be used to deliver the beams of highly charged ions for the ITEP–TWAC accelerator/accumulator facility.     

电子回旋共振离子源等离子体的密度测量

 诊断电子回旋共振离子源等离子体的传统方法是采用传统的单探针无发射时测量伏安曲线,并根据曲线的拐点由理论公式计算出的等离子体密度。本文设计并研制了等离子体密度的测量装置。采用单根朗缪尔探针（该探针可以用来发射电子）测量等离子体的伏安特性。在探针有发射和无发射两种状态下测量得到两条伏安曲线,根据这两条曲线的"分叉点"得到等离子体电位,然后根据该电位直接由计算机计算出电子温度、电子密度。采用该新方法,测量得到的等离子体参量空间电位约为17 V,悬浮电位约为-5 V,电子温度约为4.4 eV,离子密度为1.10×10¹¹cm^-3,与传统方法计算出的等离子体1.12×10¹¹cm^-3相比,两者相差仅1.8％,但新方法效率和精度更高。     

用于1MeV 分离作用RFQ加速器改造的ECR氧离子源及LEBT系统的研制

An ECR O~ ion source and LEBT system have been developed for the upgrade of 1MeV Integral Split Ring RFQ at Peking University.To satisfy the requirement of RFQ,a more than 10mA oxygen beam has been extracted at 22kV through a 5mm diameter aperture.Its normalized root-mean-square emmitance is less than 0.1π·mm·mrad,which is required by RFQ accelerator.The LEBT matching section is redesigned upon the bench test results.The preliminary results will be presented in this paper.     

Technical issues related to the design of third generation ECR ion sources

The design of third generation electron cyclotron resonance ion sources (ECRIS) had to take into account some technical issues that are usually not relevant for conventional ECRIS, either in terms of microwave power management or in terms of stray magnetic field. In fact, strong magnets originate high stray fields that are detrimental for beam optics, for the pumping system lifetime and mainly for the gyrotron normally used for power generation. Additionally, the presence of intense X-ray fluxes generated by the ECRIS plasma, observed in many experiments, can generate an unexpected heat load upon the thermal balance of the superconducting ECRIS cryostat, which can trigger a warm-up in the case of closed-loop cryostat connected to a cryocooler setup. These and other issues are presented by the authors along with a study of possible solutions.     

Recombination effects during the laser-produced plasma expansion

The precise characterization of plasmas generated by laser irradiation is needed for the development of ion sources. As the characteristic parameters of the expanding plasma vary with both the distance and the time, an experimental study of their evolution is appropriate for a deeper knowledge of the plasma. The purpose of this work is to study the same characteristics of laser plasma produced by ablation of a pure Cu target as a function of the distance from the target along the propagation axis of the plasma plume. We irradiated the target by a KrF laser and a lens of 15 cm focal length. As the diagnostic system, a small Faraday cup array and an axial Faraday cup were utilized to study the spatial variation in the total charge carried by plasma ions. Charge loss during the plasma expansion was observed due to the recombination of charged species, which occurs within a critical distance, relatively close to the target, where the plasma density is high enough. The critical distance was determined for different laser fluences; beyond the critical distance, the collisions among plasma particles are negligible and the ion charge remains frozen. It was observed that the critical distance increases as the laser fluence increases.     

射频离子源离子束成分光谱测量

为HL-2A 装置中性束注入器研制了引出束功率为1MW 的射频离子源。在测试平台上,实验离子源已经成功引出了束能量和束电流分别为35keV 和12.4A、束质子比为79%、脉宽为100ms 的氢离子束,达到了设计束功率要求的44%。在射频离子源实验平台上,利用多普勒频移光谱方法测量了离子源引出束流成分比例,对比了束流成分和射频离子源引出束流之间的关系。实验数据分析表明,在10A 引出束流的情况下,离子流成分 H⁺ ₁、H⁺ ₂ 和H⁺ ₃ 分别为75%、18%和7%。并且当引出束流从3.3A 升至10.4A 时,H⁺ ₁ 从37%升至78%,而H⁺ ₃ 则从19%降至9%。     

Non-equilibrium plasma production by pulsed laser ablation of gold

A gold target has been irradiated with a Q-switched Nd:Yag laser having 1064\,\hbox{nm} wavelength, 9\,\hbox{ns} pulse width, 900\,\hbox{mJ} maximum pulse energy and a maximum power density of the order of 10^{10}\,\hbox{W}/\hbox{cm}^2 . The laser-target interaction produces a strong gold etching with a production of a plasma in front of the target. The plasma contains neutrals and ions having high charge state. Time-of-flight measurements are presented for the analysis of the ion production and ion velocity. A cylindrical electrostatic deflection ion analyzer permits to measure the yield of the emitted ions, their charge state and their ion energy distribution. Measurements indicate that the ion charge state reaches 6^+ and 10^+ at a laser fluence of 100\,\rm{J/cm}^2 and 160\,\rm{J/cm}^2 , respectively. The maximum ion energy reaches about 2\,\hbox{keV} and 8\,\hbox{keV} at these low and at high laser fluence, respectively. Experimental ion energy distributions are given as a function of the ion charge state. Obtained results indicate that electrical fields, produced in the plume, along the normal to the plane of the target surface, exist in the unstable plasma. The electrical fields induce ion acceleration away from the target with a final velocity dependent on the ion charge state. The ion velocity distributions follow a "shifted Maxwellian distribution", which the authors have corrected for the Coulomb interactions occurring inside the plasma.     

高频离子源等离子体的光谱诊断

 采用发射光谱法研究了高频离子源的等离子体性质。该离子源应用于ZF-200keV中子发生器中，是一种电感耦合型无极环形放电高频离子源。实验采用绝对定标后的光学多道分析系统测定了离子源等离子体在不同阶段氢原子巴耳末谱线系中前三条谱线的强度，并采用部分局部热力学平衡状态的理论，计算出了相应阶段高频离子源等离子体的电子温度、氢原子浓度、氢离子浓度等参数，并进行了简要分析。     

Experimental investigation of plume expansion dynamics of nanosecond laser ablated Al with small incident angle

Experimental study of expansion dynamics of pulsed-laser ablation plasmas from Al is presented. A systematic investigation of plasma plume expansion is done. The laser beam is focused on the target with an incident angle between 0° and 20°. The results show that the plume growth is almost normal to the target surface, irrespective of the incident angle of the laser. Besides, the time evolution of the plasma plume geometry ratio at different incident angles shows that the incident angle of laser beam influences very slightly its shape at later delay time. The results imply that when the incident angle is small (ranging from 0° to 20°), the influence of the incident angle on the plume expansion is rather trivial.     

Non-equilibrium plasma production by pulsed laser ablation of gold

A gold target has been irradiated with a Q-switched Nd:Yag laser having 1064?nm wavelength, 9?ns pulse width, 900?mJ maximum pulse energy and a maximum power density of the order of 10¹⁰?W/cm². The laser–target interaction produces a strong gold etching with production of a plasma in front of the target. The plasma contains neutrals and ions having a high charge state. Time-of-flight (TOF) measurements are presented for the analysis of the ion production and ion velocity. A cylindrical electrostatic deflection ion analyzer permits measurement of the yield of the emitted ions, their charge state and their ion energy distribution. Measurements indicate that the ion charge state reaches 6⁺ and 10⁺ at a laser fluence of 100?J/cm² and 160?J/cm², respectively. The maximum ion energy reaches about 2?keV and 8?keV at these low and high laser fluences, respectively. Experimental ion energy distributions are given as a function of the ion charge state. Obtained results indicate that electrical fields, produced in the plume, along the normal to the plane of the target surface, exist in the unstable plasma. The electrical fields induce ion acceleration away from the target with a final velocity dependent on the ion charge state. The ion velocity distributions follow a “shifted Maxwellian distribution”, which the authors have corrected for the Coulomb interactions occurring inside the plasma.     

Two-dimensional particle-in-cell plasma source ion implantation of a prolate spheroid target

A two-dimensional particle-in-cell simulation is used to study the time-dependent evolution of the sheath surrounding a prolate spheroid target during a high voltage pulse in plasma source ion implantation. Our study shows that the potential contour lines pack more closely in the plasma sheath near the vertex of the major axis, i.e. where a thinner sheath is formed, and a non-uniform total ion dose distribution is incident along the surface of the prolate spheroid target due to the focusing of ions by the potential structure. Ion focusing takes place not only at the vertex of the major axis, where dense potential contour lines exist, but also at the vertex of the minor axis, where sparse contour lines exist. This results in two peaks of the received ion dose, locating at the vertices of the major and minor axes of the prolate spheroid target, and an ion dose valley, staying always between the vertices, rather than at the vertex of the minor axis.     

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介绍了一种广泛应用于离子刻蚀、预清洗和离子束辅助镀膜的阳极层离子源的工作原理,分析了磁场对其性能的影响。给出了线性阳极层离子源磁路的设计。采用ANSYS有限元分析软件对线性阳极层离子源的静态电磁场进行了模拟分析,并与实验结果进行了比较,结果令人满意。通过ANSYS编码对电磁场模拟,可为具体的阳极层离子源的改进设计提供指导。     

Freeman离子源的特性与改进研究

此文简要叙述用于离子束材料改性装置的Ｆｒｅｅｍａｎ离子源的特性，其主要参数：灯丝电流、孤压、磁场、气流量和吸极电压与引出离子束流强的关系。对源体内部因微漏冷却水（真空度由３．９×１０－４降至４．２×１０－４Ｐａ）致使气体分子电离、起弧困难和等离子体不稳作了实验研究；对灯丝与弧室间的氮化硼绝绝物上沉积被溅射出的Ｗ、Ｍｏ原子导致绝缘下降、灯丝寿命缩短进行了部份结构改进。结果表明，提高加工工艺，确保真空系统密封性能和输入气体纯度对弧室内气体分子碰撞电离和等离子体的稳定至关重要；在ＢＮ绝缘物上放置钼制屏蔽罩有效地屏蔽掉Ｗ、ＭＯ原子沉积使灯丝寿命延长一倍，达到了４０小时。     

Upgrade to the IGISOL laser ion source towards spectroscopy on Tc

A new method of optical pumping has been applied to increase the power of the Ti:Sapphire laser system of the FURIOS laser ion source, Jyväskylä. This upgrade has led to a factor of two improvement in the output power, and has been directly employed in the first off-line laser ionisation tests on the long-lived refractory isotope ⁹⁹Tc. In the future further studies will be done to determine the efficiency of this ionisation scheme and to employ it for on-line experiments.