Dual-frequency paired polarization phase shifting ellipsometer

A novel dual-frequency paired polarization phase shifting ellipsometer (DPPSE) is proposed and experimentally demonstrated. It combines the features of the phase shifting interferometer and common-path polarized heterodyne interferometric ellipsometer where the ellipsometric parameters (EP) of a specimen are measured accurately. The experimental results verify that DPPSE is capable of determining the full dynamic range of EP. In addition, the properties of dual-frequency paired linearly polarized laser beam in DPPSE perform in common phase noise rejection mode. It is insensitive to environmental disturbance and laser frequency noise. The capability of DPPSE to perform higher accuracy EP measurement than conventional ellipsometer is verified according to error analysis.     

Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates

A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from light intensity fluctuations caused by the modulation current can be decreased greatly.The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.     

双点干涉法位相缺陷检测中的解相算法比较

双点光源移相干涉测量是大口径光学元件位相缺陷检测的一种重要方法。为了分析双点干涉中误差对解相算法的影响,首先给出相位缺陷检测的系统结构和理论模型,在此基础上,针对测量过程中主要存在的一次移相误差、二次移相误差、光强误差和随机振动误差,研究了Hariharan 5帧移相算法、13帧移相算法和迭代随机移相算法的解相误差,并进行了仿真分析。结果表明,针对这几种误差源,13帧算法解相精度整体优于5帧法,迭代随机移相算法解相效果优于13帧法和5帧法,当这几种误差按实际指标同时作用时,迭代随机移相算法解相误差RMS小于5帧法和13帧法,PV值稳定在0.5 nm以内。由于随机振动占主要作用,说明迭代随机移相算法受误差影响很小。     

飞秒钛宝石放大激光脉冲的载波包络相位测量与控制

通过对重复频率为1 kHz的放大飞秒激光脉冲的光谱干涉实验,结合傅里叶变换进行了载波包络相位漂移的实验研究.在此基础上利用锁相环反馈控制技术实现了对载波包络相位的精密锁定,锁定后的激光脉冲稳态相位均方根误差小于80mrad,锁定时间超过3h.同时在理论上分析了光谱干涉测量放大激光脉冲载波包络相位的原理,给出了光谱干涉信号与载波包络相位的关系. 关键词： 飞秒钛宝石放大器 载波包络相位 光谱干涉 超连续     

椭偏法测量云母波片相位延迟量及双折射率(英文)

为了得到云母波片的相位延迟量和双折射率随波长的变化关系,利用椭偏光谱仪连续测量了云母波片在400～770nm光谱范围内的延迟量.在对云母波片进行校准后,测量的数据被光电探测器收集并输送到计算机,根据输出的数据可以得到云母波片的相位延迟量随波长的变化.利用测得的延迟量计算出了云母波片在一定光谱范围内的双折射率,得到了云母波片的双折射率色散曲线,并通过拟合得到了双折射率色散公式.该方法能测量任意波片的相位延迟量,并且具有测量方便、周期短、精度高等特点.     

一种位相板衍射图样的图像处理新方法

本文介绍了在半导体激光光纤和位相板相结合的准直情况下，利用ＣＣＤ探测器测量大尺寸形位误差的原理，并针对位相板衍射图像的特点，提出了一种处理此类衍射图样的图像处理新方法——投影法。同在时间上采用的多次平均的方法相比较，投影法相当于采用了空间上的平均，消除了ＣＣＤ表面保护玻璃形成的干涉条纹的影响，对空气扰动也起到了很好的抑制作用。并且使二维图像处理变为一维计算，大大提高了计算速度     

低频位相误差新校正方法模拟研究

 就多程放大系统中产生的低频位相噪声，提出用位相补偿反射镜来进行补偿的静态校正方法。用随机位相屏模拟光学元件产生的低频位相噪声，建立光传输模拟模型，引入等效位相片的概念，将数个光学元件对位相的影响简化为等效位相片，在此基础上对位相补偿反射镜的校正原理进行阐述。进而对双程光路校正过程进行了模拟研究，得到了很好的校正效果。     

基于相位相关性的傅里叶变换光谱数据的相位误差修正方法

 相位误差的校正是傅里叶变换成像光谱仪数据处理的重要环节之一。针对干涉曲线的对称性特征,利用相位相关性计算方法,提出一种新的傅里叶变换光谱数据的相位校正的方法。将相位相关性拟合为Sinc函数,计算亚像素的偏移量,采用离散余弦变换转换到光谱域。使用标准光谱库中的源光谱数据作为原始数据,将通过离散余弦变换仿真的干涉数据与该方法得到的结果进行比较和验证,并与Mertz方法进行了对比。结果表明：该方法精度优于Mertz方法,并且计算简单。     

基于椭偏光谱仪的石英波片光轴方位探测

波片的光轴方向是波片应用中最重要的参数之一。在椭偏光谱仪透射模式下,利用琼斯矩阵对波片旋转过程中P和S两方向上位相的变化进行分析,设计了一种判断石英波片光轴方向的新方法。应用此方法判断光轴方向,具有光路结构简单,检测速度快的特点,且具有很好的实用性。     

Rapid extraction of the phase shift of the cold-atom interferometer via phase demodulation

Generally, the phase of the cold-atom interferometer is extracted from the atomic interference fringe, which can be obtained by scanning the chirp rate of the Raman lasers at a given interrogation time T. If mapping the phase shift for each T with a series of measurements, the extraction time is limited by the protocol of each T measurement, and therefore increases dramatically when doing fine mapping with a small step of T. Here we present a new method for rapid extraction of the phase shift via phase demodulation. By using this method, the systematic shifts can be mapped though the whole interference area. This method enables quick diagnostics of the potential cause of the phase shift in specific time. We demonstrate experimentally that this method is effective for the evaluation of the systematic errors of the cold atomic gravimeter. The systematic phase error induced by the quadratic Zeeman effect in the free-falling region is extracted by this method. The measured results correspond well with the theoretic prediction and also agree with the results obtained by the fringe fitting method for each T.     

GS算法设计连续相位板时相位滤波器的选择

针对GS算法在设计连续相位板(CPP)时,迭代过程在解包相位中引入的高频调制,研究了初始相位与解包相位的频谱分布特性,并对两者的差别进行了比较。根据初始相位的频谱特性,提出了以初始相位的频域截止频率为相位滤波器的截止频率的滤波器选择方法。利用该方法进行了CPP设计,设计结果对应的远场焦斑参数为:均方根误差0.267 2,能量利用率96.32%,顶部不均匀度0.101 2。     

Full field automated evaluation of the quarter wave plate retardation by phase stepping technique

Quarter wave plates are optical elements commonly used in photoelasticity to obtain circularly polarized light. They divide the incident light field into two linearly polarized orthogonal components with a phase difference of a quarter of the light wavelength. Due to the tolerance in manufacturing, however, the actual phase shifting produced by the plates is affected by an error, which noticeably influences the photoelastic measurements performed by means of various automated methods. This paper presents a technique, based on the phase stepping method, for the full field automatic evaluation of the quarter wave plate error.     

与消光式兼容的光度椭偏仪的原理

在PQSA式消光型椭偏仪基础上,把原来方位固定的1/4波片改为旋转波片就可以构成与消光式兼容的新型光度椭偏仪。本文讨论了这种光度椭偏仪的工作原理和计算公式。理论分析指出,这是一种完全的椭偏仪,能唯一地确定的符号,并在测量线偏光的时精度不会下降。文中还报告了进行原理性实验的结果。     

Self-mixing interferometry based on sinusoidal phase modulation and integrating-bucket method

In order to realize real-time displacement measurement with high resolution, sinusoidal phase modulation and integrating-bucket method are introduced in the self-mixing interference (SMI) system firstly. The phase of the laser beam is modulated by an electro-optic modulator (EOM) in the external cavity. Theoretical analysis, simulation results and error evaluation are presented. Experimentally, the micro-displacement of a high-precision commercial PZT is reconstructed and the reconstruction accuracy is on the order of nanometers for displacements of a few micrometers.     

用四台阶相位板产生涡旋光束

涡旋光束的产生与应用是当前光学领域的研究热点. 利用傅里叶级数展开法分析了四台阶相位板的相位结构, 发现四台阶相位板可看作是由一系列不同拓扑荷数的螺旋相位板所组成, 用线偏振光直接照射相位板时, 将产生多级衍射光波, 各级衍射光均为不同拓扑荷数的涡旋光波, 由于多级衍射光波间的干涉导致光强分布偏离轴对称分布, 因而与涡旋光波有一定差距. 在此基础上, 提出了用四台阶相位板产生涡旋光束的新方案, 借助于Mach-Zehnder 干涉仪光路, 两块四台阶相位板产生的衍射光干涉叠加, 通过调节干涉仪光路的相位差, 使一部分衍射级干涉相消, 另一部分衍射级干涉相长, 相互加强, 从而把线偏振光转换为涡旋光束. 数值模拟计算了几种周期数不同的四台阶相位板衍射光强和角动量分布, 并与螺旋相位板进行比较, 证明用简单的四台阶相位板不仅能够获得与用螺旋相位板相同的涡旋光束, 而且可以用周期数较小的四台阶相位板产生具有大拓扑荷数的涡旋光束, 降低了制作相位板的难度.     

石英波片偏光干涉谱的研究

根据石英晶体双折射率的色散特性,对石英波片的偏光干涉谱进行了理论分析和数值模拟,提出了一种石英波片延迟量和厚度的偏光干涉标定法。即由偏光干涉谱,可以得出石英波片在200~2000 nm宽光谱范围内的延迟量;通过对长波段的偏光干涉谱极值波长的精确判断,可以准确地计算出该石英波片的厚度。利用Lambda900紫外-可见-近红外分光光度计对一片石英波片的偏光干涉谱进行了测量。在波长精度为0.1 nm的情况下,测量的厚度精度为0.1μm。误差分析结果表明,通过提高光谱的最小分辨力及选择较长的光谱波段进行测量计算,可以有效地降低误差。     

Polarization modulation imaging ellipsometry for thin film thickness measurement

A polarization modulation (PM) imaging ellipsometer is proposed and setup in order to measure precisely the thickness of thin film. Five images are collected sequentially by CCD camera with respect to five pre-determined azimuth angles of a quarter wave plate (QWP) during measurement. Then two-dimensional (2-D) distributions of the ellipsometric parameters ψ and Δ over the full dynamic range are obtained. Conceptually, PM imaging ellipsometer integrates the features of phase shift interferometry with conventional photometric ellipsometry by rotating the QWP sequentially to produce polarization modulation that is able to measure the thickness of a thin film in two dimensions precisely and quickly. The basic principle of PM imaging ellipsometer is derived wherein features such as common path configuration, full dynamic range of measurement, and insensitive to non-uniform response of the CCD are analyzed. The experimental results verify the ability and performance of PM imaging ellipsometer on 2-D thin film thickness, while the errors regarding the ellipsometric parameters measurements are discussed.     

位相型全息记录介质的浮雕深度和折射率变化的测量方法

本文提出了一种直接测量位相型全息记录介质的浮雕深度和折射率改变量的方法，它利用干涉显微镜及带ＣＣＤ摄像头的微机组成的简单系统，可获得很高的测量精度。本文分析了测量误差以及为使系统保持最高测量精度而应选取的最佳测量条件。     

Speckle-pattern interferometry applied to the study of phase objects

If a speckle pattern is photographed through a phase object, the individual speckles are displaced over varying distances depending upon the phase irregularities in the object. A double exposure is made, the object being present during one of the two exposures only. When the processed photographic plate is observed through an aperture stop in the Fourier transform plane, interference fringes representing contours of the optical path gradient are obtained. The sensitivity of the method and the direction along which the gradient is measured can be varied by modifying, respectively, the distance of the Fourier-plane aperture from the optical axis and its azimuth.     

An absolute phase to world coordinates method for the defocusing structured light shape measurement system

This paper proposes a flexible calibration method for the defocusing structured light three-dimensional (3D) imaging system. Neither a high accuracy translation stage nor the parameters of the projector is required. Therefore the method is more flexible in many practical applications. World coordinates for calibration are obtained based on the method of coordinates from known plane. The monotonic nonlinear relationships between the absolute phase and each world coordinate have been investigated. Different from other methods, in our method, the 3D shape is directly recovered by the absolute phase to world coordinates method. Experimental results show that, when polynomial curve fitting methods are used, the root-mean-squared (RMS) error for the flat plate reconstruction is less than 0.12 mm, and the measurement error of 3D points is less than −0.34%. Furthermore, when comparing the measurement results of our method with the method of coordinates from known plane based on camera calibration, the relative error is less than −0.05%. Therefore, camera calibration is considered as the major error source.