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采用脉冲激光沉积法 (PLD), 以石英玻璃为衬底制备了钽掺杂TiO2薄膜并研究了薄膜样品的光电性质. 沉积氧气分气压从0.3 Pa变化到0.7 Pa时薄膜样品的帯隙变化范围是3.26 eV到3.49 eV. 通过测量电阻率随温度的变化关系确定了薄膜内部的主要导电机理. 在150 K到210 K温度范围内, 热激发导电机理是主要的导电机理; 而在10 K到150 K范围内; 电导率随温度的变化复合Mott的多级变程跳跃模型 (VRH); 在210 K到300 K范围内, 电阻率和exp(b/T)1/2呈正比关系.
关键词:
2')" href="#">Ta掺杂TiO2
脉冲激光沉积法
薄膜
导电机理 相似文献
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实验研究表明,SnO2薄膜经过退火处理后其光致发光谱有明显的变化。在氧和氮两种不同气氛中进行热处理,其变化也有差异。这种变化主要是由于SnO2膜中氧空位和自由载流于浓度变化所致。 相似文献
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提出了一种利用离子注入和后续退火制备氮掺杂TiO2薄膜的方法。首先在室温下向石英玻璃中注入Ti离子,随后在氮气中退火到900 ℃,从而制备了氮掺杂的玻璃基TiO2薄膜。SRIM2006程序模拟和卢瑟福背散射谱(RBS)研究表明注入离子从样品表面开始呈高斯分布,实验结果和模拟结果吻合很好。X射线光电子能谱(XPS)研究结果表明注入态样品中形成了金属Ti和TiO2,900 ℃退火后金属Ti转变成TiO2,同时N原子替代少量的晶格O原子形成了O-Ti-N化合物。紫外-可见吸收光谱(UV-Vis)结果显示,当退火温度至500 ℃时,在吸收光谱中开始出现TiO2的吸收边,随退火温度升高到900 ℃,由于O-Ti-N化合物形成,TiO2的吸收边从3.98 eV红移到3.30 eV,TiO2吸收边末端延伸到可见光区,在可见光区的吸收强度明显增加。 相似文献
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提出了一种利用离子注入和后续退火制备氮掺杂TiO2薄膜的方法。首先在室温下向石英玻璃中注入Ti离子,随后在氮气中退火到900 ℃,从而制备了氮掺杂的玻璃基TiO2薄膜。SRIM2006程序模拟和卢瑟福背散射谱(RBS)研究表明注入离子从样品表面开始呈高斯分布,实验结果和模拟结果吻合很好。X射线光电子能谱(XPS)研究结果表明注入态样品中形成了金属Ti和TiO2,900 ℃退火后金属Ti转变成TiO2,同时N原子替代少量的晶格O原子形成了O-Ti-N化合物。紫外-可见吸收光谱(UV-Vis)结果显示,当退火温度至500 ℃时,在吸收光谱中开始出现TiO2的吸收边,随退火温度升高到900 ℃,由于O-Ti-N化合物形成,TiO2的吸收边从3.98 eV红移到3.30 eV,TiO2吸收边末端延伸到可见光区,在可见光区的吸收强度明显增加。 相似文献
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采用先低温O2气氛退火,后高温N2气氛退火的两步退火法工艺,探究了两步退火法对化学浴沉积(CBD)制备的多晶硫化铅(PbS)薄膜光电性能的影响。结果表明,相比于一步退火法,两步退火法所得的PbS薄膜具有较大的晶粒尺寸、较少的晶界和良好的光电性能。在两步退火法中,当第二步退火时间为80 min时,PbS薄膜的响应度为2.33 A·W-1,比探测率为1.18×1010 cm·H1/2·W-1,与一步退火法相比分别提高了259%和236%,即两步退火法可以在传统一步退火法的基础上进一步提高PbS红外光电探测器的性能。 相似文献
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制备Cu掺杂的纳米Sn O2/Ti O2溶胶,采用旋涂法在载玻片上镀膜,经干燥、煅烧制得Cu掺杂的Sn O2/Ti O2薄膜,通过对比实验探讨掺杂比例、条件、复合形式等对结构和性能的影响。采用XRD、SEM、EDS、UVVis等测试手段对样品进行表征,并以甲基橙为探针考察了其光催化降解性能。XRD测试结果显示薄膜的晶型为锐钛矿型,结晶度较高。SEM谱图显示薄膜表面无明显开裂,粒子分布均匀,粒径约为20 nm。EDS测试结果表明薄膜材料中含有Cu元素,谱形一致。UV-Vis吸收光谱表明Cu掺杂以及Sn O2/Ti O2的复合使得在近紫外区的光吸收比纯Ti O2明显增强。光催化实验表明Cu掺杂后使得Sn O2/Ti O2复合薄膜对甲基橙的光催化降解效率进一步提高,Sn O2/Ti O2复合薄膜的光催化活性在10%Cu掺杂时达到最高。 相似文献
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利用磁控溅射在重掺硼硅(p+-Si)衬底上分别沉积TiO2薄膜和掺硼的TiO2(Ti O2∶B)薄膜,并经过氧气氛下600℃热处理,由此形成相应的TiO2/p+-Si和TiO2∶B/p+-Si异质结。与Ti O2/p+-Si异质结器件相比,TiO2∶B/p+-Si异质结器件的电致发光有明显的增强。分析认为:TiO2∶B薄膜经过热处理后,B原子进入TiO2晶格的间隙位,引入了额外的氧空位,而氧空位是TiO2/p+-Si异质结器件电致发光的发光中心,所以上述由B掺杂引起的氧空位浓度的增加是TiO2∶B/p+-Si异质结器件电致发光增强的原因。 相似文献
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用溶胶-凝胶法制得Zn、Cu共掺杂的TiO_2∶SiO_2凝胶,旋转法于玻璃基底涂膜,制得Zn、Cu共掺杂的TiO_2∶SiO_2薄膜,探讨了煅烧温度、煅烧时间及掺杂比例对其结构、形貌和性能的影响。采用XRD、FESEM、FTIR等测试技术对薄膜进行表征,并考察了其对甲基橙的光催化降解性能。XRD测试结果显示:薄膜样品的晶型为锐钛矿型,结晶良好。SEM谱图显示:薄膜微粒粒径小,分布均匀,表面平整、致密且无明显裂痕;紫外-可见光谱(UV-Vis)表明:Zn、Cu共掺杂的TiO_2∶SiO_2薄膜在紫外区和可见光区的吸光度明显增加,提高了对光的利用率;光催化性能测试表明:与纯相TiO_2对比,Zn、Cu共掺杂的TiO_2∶SiO_2薄膜对甲基橙的光催化降解率有较大提高,在600℃下焙烧2h的掺杂的量比为n(Ti)∶n(Si)∶n(Zn)∶n(Cu)=3∶2∶1.5∶4的薄膜样品光催化降解率最高。 相似文献
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Jinming LiuXiaoru Zhao Libing DuanMengmeng Cao Huinan SunJifeng Shao Shuai ChenHaiyan Xie Xiao ChangChangle Chen 《Applied Surface Science》2011,257(23):10156-10160
Nb-doped TiO2 (TNO) thin films were prepared by sol-gel dip-coating method with Nb content in a wide range of 0-20 at.%. The prepared films were preheated at 400 °C and then undertaken by two different post-annealing processes: (a) three times vacuum annealing and (b) multi-round annealing. The designed multi-round annealing was shown to be an effective way to improve the conductive properties of the films, compared to the traditional vacuum annealing process. The minimum resistivity reached approximately 0.5 Ω cm with Nb doping concentration around 12 at.%, and the carrier density increased with Nb-doping concentration until the critical point of 12 at.%, which might be the optimal doping content for our TNO films prepared by sol-gel method. 相似文献
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Optical, structural and photocatalytic properties of TiO2 thin films obliquely deposited on quartz glass substrate using an electron-beam evaporation method were investigated. The photocatalytic activity of the films was evaluated by photodecomposition of methylene blue. An increase in incident deposition angle increased the porosity and surface roughness of the TiO2 films. As a result, the photocatalytic activity was enhanced with incident deposition angle up to 60°. However, a further increase in incident deposition angle to 75° reduced the photocatalytic activity due to a lack of the crystalline phase. 相似文献
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过渡金属氧化物二氧化钒(VO2)在温度340 K附近会发生金属绝缘体的转变(metal-insulator transition, MIT). 基于金属绝缘体的转变性质, VO2薄膜材料具有很好的应用前景. 本文首先采用脉冲激光沉积制备了高质量的V2O5薄膜, 再通过高温氢退火还原V2O5薄膜制备出VO2多晶薄膜. 研究了不同的退火温度、退火时间、退火气氛对VO2薄膜制备的影响, 采用X射线衍射、X射线光电子能谱、变温电阻特性测量等手段对样品进行分析, 发现在H2(5%)/Ar退火气氛下, 在一定的退火温度范围内(500–525 ℃), 退火 3 h, 得到了B相和M相共存的VO2薄膜, 具有M相的VO2的MIT特性, 而相同退火温度下退火时间达到4.5 h, 薄膜完全变成B相的VO2. 通过纯Ar气氛下对B相VO2再退火, 得到了转变温度为350 K, 电阻突变接近4个数量级的M相的VO2薄膜. 实现了VO2的B相和M相的相互转变.
关键词:
2薄膜')" href="#">VO2薄膜
金属绝缘体转变
氢退火 相似文献
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Haripriya Rath S. Anand M. Mohapatra Priyadarshini Dash T. Som U. P. Singh N. C. Mishra 《Indian Journal of Physics》2009,83(4):559-565
Nanostructured TiO2 thin films have been prepared through chemical route using sol-gel and spin coating techniques. The deposited films were
annealed in the temperature range 400–1000°C for 1 h. The structure and microstructure of the annealed films were characterized
by GAXRD, micro-Raman spectroscopy and AFM. The as-deposited TiO2 thin films are found to be amorphous. Micro-Raman and GAXRD results confirm the presence of the anatase phase and absence
of the rutile phase for films annealed up to 700°C. The diffraction pattern of the film annealed at 800 to 1000°C contains
peaks of both anatase and rutile reflections. The intensity of all peaks in micro-Raman and GAXRD patterns increased and their
width (FWHM) decreased with increasing annealing temperature, demonstrating the improvement in the crystallinity of the annealed
films. Phase transformation at higher annealing temperature involves a competition among three events such as: grain growth
of anatase phase, conversion of anatase to rutile and grain growth of rutile phase. AFM image of the asdeposited films and
annealed films indicated exponential grain growth at higher temperature.
相似文献
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退火对TiO2薄膜形貌、结构及光学特性影响 总被引:1,自引:0,他引:1
利用射频磁控溅射技术在熔融石英基片上制备TiO<,2>薄膜,采用X射线衍射、扫描电子显微镜(SEM)、拉曼光谱以及透过谱研究了退火温度和退火气氛对TiO<,2>薄膜的结构、形貌和光学特性的影响.实验结果表明:在大气环境下退火,退火温度越.高,薄膜晶化越好,晶粒明显长大,温度高于700℃退火的薄膜,金红石相已明显形成.实验还发现,退火气氛对金红石相的形成是非常重要的,拉曼光谱反应出Ar气氛退火,抑制了金红石晶相的发育,薄膜仍以锐钛矿相为主.Ar气氛退火的薄膜在可见光范围内的透过率比大气退火的要低,并且由透过率曲线推知:金红石的光学带隙约为2.8 eV,比锐钛矿的光学带隙小0.2 eV. 相似文献
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Yanming Shen Hua Yu Jianke Yao Shuying Shao Zhengxiu Fan Hongbo He Jianda Shao 《Optics & Laser Technology》2008,40(3):550-554
TiO2 thin films were prepared by electron beam evaporation at different oxygen partial pressures. The influences of oxygen partial pressure on optical, mechanical and structural properties of TiO2 thin films were studied. The results showed that with the increase of oxygen partial pressure, the optical transmittance gradually increased, the transmittance edge gradually shifted to short wavelength, and the corresponding refractive index decreased. The residual stresses of all samples were tensile, and the value increased as oxygen partial pressure increasing, which corresponded to the evolutions of the packing densities. The structures of TiO2 thin films all were amorphous because deposition particles did not possess enough energy to crystallize. 相似文献
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In this study, SnO2/TiO2 thin films are fabricated on SiO2/Si and Corning glass 1737 substrates using a R.F. magnetron sputtering process. The gas sensing properties of these films under an oxygen atmosphere with and without UV irradiation are carefully examined. The surface structure, morphology, optical transmission characteristics, and chemical compositions of the films are analyzed by atomic force microscopy, scanning electron microscopy and PL spectrometry. It is found that the oxygen sensitivity of the films deposited on Corning glass 1737 substrates is significantly lower than that of the films grown on SiO2/Si substrates. Therefore, the results suggest that SiO2/Si is an appropriate substrate material for oxygen gas sensors fabricated using thin SnO2/TiO2 films. 相似文献