高气压强电场电离过程中的离子浓度分布规律

研究了高气压强电场电离区域的离子浓度分布的连续性方程, 对电离区域的电离物的产生、消失和输运进行了研究。通过采用电离放电增加了输入能量密度、G 值、电离占空比等, 从而提高了离子产生率。通过外加电场和离子“雪崩”头部的本征电场的叠加作用, 离子被束缚在放电通道中。对离子施加垂直电场方向的作用力, 就能把电场中的等离子体成束输送出去。已经能够做到有效体积仅为1cm³的等离子体源, 输运等离子体率达到 10¹² cm^{- 3}•s^{- 1}。     

流体-亚稳态原子传输混合模型模拟空心阴极放电特性

利用流体-亚稳态原子传输混合模型研究了氩气矩形空心阴极放电稳态时的参数. 数值计算得到了压强为10 Torr时的电势、电子、离子和亚稳态氩原子密度以及电子平均能量的分布. 结果表明电子和离子密度峰值为4.7×10¹² cm^-3, 亚稳态原子密度峰值为2.1×10¹³ cm^-3. 本文同时对流体-亚稳态原子传输混合模型和单一流体模型模拟得到的放电参数进行了比较. 结果表明, 分步电离是新电子产生的重要来源, 亚稳态原子对空心阴极放电特性有重要影响. 与单一流体模型相比, 混合模型计算得到的电子密度升高, 阴极鞘层宽度和电子平均能量降低. 关键词： 空心阴极放电 流体-亚稳态原子传输模型 电子密度 分步电离     

弹丸消融速率的理论模型及数值计算

建立了计算托卡马克加料中弹丸消融的物理模型,结合1维输运模型编制了1.5维弹丸消融计算机模拟代码。使用ITER-FEAT的相关参数,对半径为6mm,初速度为2000m•s^-1,从低磁场侧注入弹丸的消融速率进行了模拟计算。结果显示,弹丸消融速率先随注入深度而逐渐增大,最大消融速率约6×10²⁶s^-1,然后由于弹丸半径的减小,消融速率迅速减小,穿透深度约0.45m。这一结果与中性气体屏蔽模型(NGS)的结果一致,证明计算代码正确有效。同时,从计算结果反映出,对ITER这样的堆级托卡马克,采用常规弹丸注入方式,尽管速度高达2000m•s^-1,穿透深度也远未达到等离子体中心,因此应采取其他有效措施来提高等离子体加料效率。     

超薄EuF3电极修饰层对有机场效应晶体管性能的提升

采用EuF₃薄层修饰低功函数金属Ag源、漏电极,制备了CuPc有机场效应晶体管,研究了不同厚度EuF₃对器件性能的影响。结果表明,EuF₃的厚度由0 nm增至0.6 nm时,接触电阻由23.65×10⁵ Ω·cm减 至3.86×10⁵ Ω·cm,使得器件载流子迁移率由1.5×10^-3 cm²·V^-1·s^-1提高到4.65×10^-3 cm²·V^-1·s^-1。 UPS测试结果表明,薄层EuF₃在Ag与有机半导体间形成了界面偶极势垒,使源漏电极表面功函数增大,空穴注入势垒降低,Ag电极与有机半导体层界面的接触电阻减小,进而提升了空穴的注入效率。     

Ag离子注入非晶SiO2的光学吸收、拉曼谱和透射电镜研究

能量为200keV的Ag离子，以1×10¹⁶，5×10¹⁶，1×10¹⁷ cm^-2的剂量分别注入到非晶SiO₂玻璃，光学吸收谱显示：注入剂量为1×10¹⁶ cm^-2的样品的光吸收谱为洛伦兹曲线，与Mie理论模拟的曲线形状一致；注入剂量较大的5×10¹⁶，1×10¹⁷ cm^-2的谱线共振吸收增强，峰位红移并出现伴峰. 透射电镜观察分析表明，注入剂量不同的样品中形成的纳米颗粒的大小、形状、分布都不同，注入剂量较大的还会产生明显的表面溅射效应，这些因素都会影响共振吸收的峰形、峰位和峰强. 当注入剂量达到1×10¹⁷ cm^-2时，Ag纳米颗粒内部可能还形成了杂质团簇. 关键词： 离子注入 纳米颗粒 共振吸收 红移     

Determination of the transport properties in 4H-SiC wafers by Raman scattering measurement

The free carrier density and mobility in n-type 4H-SiC substrates and epilayers were determined by accurately analysing the frequency shift and the full-shape of the longitudinal optic phonon--plasmon coupled (LOPC) modes, and compared with those determined by Hall-effect measurement and that provided by the vendors. The transport properties of thick and thin 4H-SiC epilayers grown in both vertical and horizontal reactors were also studied. The free carrier density ranges between 2×10¹⁸ cm^-3 and 8×10¹⁸ cm^-3 with a carrier mobility of 30--55 cm²/(V·s) for n-type 4H-SiC substrates and 1×10¹⁶--3×10¹⁶ cm^-3 with mobility of 290--490 cm²/(V·s) for both thick and thin 4H-SiC epilayers grown in a horizontal reactor, while thick 4H-SiC epilayers grown in vertical reactor have a slightly higher carrier concentration of around 8.1×10¹⁶ cm^-3 with mobility of 380 cm²/(V·s). It was shown that Raman spectroscopy is a potential technique for determining the transport properties of 4H-SiC wafers with the advantage of being able to probe very small volumes and also being non-destructive. This is especially useful for future mass production of 4H-SiC epi-wafers.     

355 nm激光光电离甲醛飞行时间质谱的研究

利用脉宽为5 ns脉冲Nd: YAG 355 nm激光在功率密度为10¹¹–10¹² W/cm²条件下实现了甲醛含水团簇多光子电离, 并用飞行时间质谱对其电离产物和电离过程进行了研究. 实验中观测到了甲醛的质子化团簇系列 (CH₂O)_nH⁺(n=1–4), 甲醛的去质子化团簇系列(CH₂O)_nCHO⁺ (n=1–3), 以及两个起源于H₂CO去质子和质子化的含水团簇系列HCO⁺(H₂O)_n(n=1,3,5)和H₃CO⁺(H₂O)_n(n=1,3,5), 并对其中的一些团簇结构构型进行了猜测. 研究在不同的激光功率密度下甲醛团簇质谱峰的变换情况, 当激光密度达到9.3× 10¹¹ W/cm², 开始出现CH₂O和H₂O本体及其光致碎片的信号, 但对应的各质量峰没有明显地分辨开, 而是以包络的形式出现, 这是激光电离产生高能离子释放的一种表现, 提出认等离子体动力学鞘层加速机制(模型)来解释高能离子形成的物理机制. 关键词： 甲醛 团簇 飞行时间质谱 激光电离     

均匀掺杂GaAs材料光电子的输运性能研究

通过建立原子结构的理论模型和电离杂质散射理论公式,研究了光电子在透射式均匀掺杂GaAs光电阴极体内的输运过程,分析了光电阴极的掺杂浓度、发射层厚度、电子扩散长度等相关因素对阴极出射面的弥散圆斑以及到达阴极出射面的光电子数与激发光电子总数之比的影响.计算结果表明,当透射式均匀掺杂GaAs光电阴极发射层厚度为2 μm、电子扩散长度为3.6 μm、掺杂浓度为1×10¹⁹ cm^-3时,其极限线分辨率为769 mm^-1.此GaAs材料光电子的输运性能 关键词： GaAs 光电阴极 光电子输运 弥散圆斑 分辨率     

CFETR磁体系统的中子学计算及活化分析

用蒙特卡洛中子输运程序(MCNPX)对中国聚变工程实验CFETR超导磁体进行中子学输运计算,利用欧洲活化计算程序FISPACT对其进行活化计算分析,针对计算结果重点分析了磁体系统的中子学剂量分布以及活化情况。计算结果表明,中子能量通量最大处出现在聚变堆内侧线圈处,为3.97×10¹⁴ MeV•m^–2,在该条件下超导线圈可以满足设计要求。停机后磁体组件的活度为3.33×10¹⁰Bq•kg^–1,停机10年后下降2个数量级达到6.14×10⁸Bq•kg^–1。研究结果验证了所使用的CFETR 3维模型满足初步设计条件。     

约化场强对氮-氧混合气放电等离子体演化特性的影响

采用零维等离子体动力学模型,计算了不同约化场强条件下N₂/O₂放电等离子体的演化特性.结果表明,平均电子能量与约化场强有着近似的线性关系,在约化场强为100 Td时,平均电子能量约为2.6 eV、最大电子能量达35 eV;约化场强是影响电子能量函数分布的主要因素.气体放电过程结束后,振动激发态氮分子的粒子数浓度不再变化,电子激发态的氮分子、原子和氧原子的粒子数浓度达到一峰值后开始降低;放电结束后的氧原子通过复合反应生成臭氧.约化场强升高,由于低能电子减少的影响,振动激发态氮分子的粒子数浓度降低,当约化场强由50 Td增加75 Td,100 Td时,粒子数浓度由3.83×10¹¹ cm^-3降至1.98×10¹¹ cm^-3和1.77×10¹¹ cm^-3,其他粒子浓度则相应增大. 关键词： 等离子体 约化场强 粒子演化 数值模拟     

介质阻挡放电等离子体中OH自由基的光腔衰荡光谱原位诊断

研制了一套等效噪声吸收可达3×10^-9cm^-1的连续波光腔衰荡光谱装置。用该装置对介质阻挡放电等离子体中的OH自由基和水进行了原位定量测量,考察了OH自由基数密度随气压和放电电压以及放电频率的变化情况。实验结果表明,在(2.13~22.0)Χ10³Pa范围内,随着气压增加,OH自由基数密度在气压较低时增加;而在较高气压时由于H₂O的解离吸附作用使得体系中电子密度减小,OH自由基数密度随之减小。随放电电压和放电频率增加介质阻挡放电等离子体中电子密度和电子能量增加而导致OH数密度增加。     

Power Consideration for Pulsed Discharges in Potassium Seeded Argon

Minimization of energy consumed in plasma generation is critical for applications, in which a large volume of plasmas is needed. We suggest that a high electron density atmospheric pressure plasmas can be generated by pulsed discharges in potassium seeded argon at an elevated temperature with a very small power input. The ionization efficiency and power budget of pulsed discharges in such plasmas are analytically studied. The results show that ionization efficiency of argon, especially at small reduced electric field E/N （the ratio of the electric field to the gas number density）, is improved effectively in the presence of small amount of potassium additives. Power input of pulsed discharge to sustain a prescribed average level of ionization in potassium seeded argon is three orders of magnitude lower than that in pure argon. Further, unlike in pure argon, it is found that very short high-voltage pulses with very high repetition rates are unnecessary in potassium seeded argon. A pulse with lOOns of pulse duration, 5kHz of repetition rate, and 2Td （1 Td = 1 × 10^-21 Vm^2） of E/N is enough to sustain an electron density of 10^19 m^-3 in 1 arm 1500K Ar＋0.1% K mixture, with a very small power input of about 0.08 × 10^4 W/m^3.     

Electron and Chemical Kinetics in the Low-Pressure RF Discharge Etching of Silicon in SF6

Monte Carlo simulation and Boltzmann equation solutions have been used to study the electron kinetics. All electronic excitation of SF6 is assumed to be dissociative in analogy with the known product channels in ionization and multiphoton dissociation. The electric-field-to-gas-density ratios are high (E/n ? 1000 Td, where 1 Td (Townsend) = 1 × 10-17 V . cm2) in low-pressure (p < 0.3 torr) radiofrequency (RF) discharges. At these high E/n values, the electron energy relaxation time is much shorter than the 74-ns period at 13.56 MHz. Furthermore, the time scale of the chemical kinetics is much longer than the period of the applied RF voltage. Therefore the electron energy distribution can "track" the time-varying electric field, and time- and space-averaged rate coefficients can be used in chemical kinetics models. A rate equation model has been used to study the chemical kinetic processes. Electron-impact dissociation and ionization are the dominant sources of chemically active species. An electron density of 1 × 108 cm-3 is estimated from the known average values of E/n and the discharge input power. Two limiting cases are studied for the positive and negative ion diffusion losses: a) trapped negative ions and positive ion loss at the ambipolar diffusion rate; and b) positive and negative ion losses at the free diffusion rates. Neutral particle diffusion losses are estimated by using an effective diffusion length which takes surface reflection into account and increases as the surface reflection probability increases.     

室内高压电弧/电晕的紫外特性分析和测量研究

随着我国电力技术的迅猛发展,因电弧/电晕放电造成高压设备损坏、高压线传输损耗的问题愈加引起重视。完成了电弧/电晕目标在200～1 000 nm的光谱特性测量,发现电弧电晕光谱强度分布主要集中在200～400 nm紫外波段。提出了使用紫外面阵成像技术用于探测研究电弧/电晕的方法,通过一套自制的紫外面阵成像系统,成功实现了对高压电弧/电晕目标进行的实验室内紫外成像,以及氙灯积分球辐射定标与目标反演。实验结果表明,该套紫外面阵成像系统可用于对电弧电晕放电进行实时检测。该研究验证了电弧/电晕的紫外辐射特性,在距离2 m处得到反演后的6 kV电弧的紫外240～280 nm波段的辐照度为3.39×10-5 W·cm-2,为深入开展电弧/电晕的紫外特性研究提供强有力的依据。     

圆筒状DBD放电特性模拟研究

用XOOPIC软件对同轴圆筒状反应装置DBD放电特性进行了二维模拟研究。在频率为20kHz、正弦电压幅值为5kV的大气压氩气放电中,再现了微放电通道形成和发展过程,其微放电的寿命约为4ns。获得了电子、离子、介质表面电荷密度和电场强度随空间和时间的分布,发现在高压线圈的位置附近电子、离子和介质表面电荷密度存在极值。与典型平板介质阻挡放电相比,微放电中的电子密度、场强增加2~3个数量级。     

The Hydrogen Dissociator

A performance analysis is presented for the hydrogen dissociator used in hydrogen masers to provide a beam of atomic hydrogen. An analysis of the discharge characteristics yields relations for electron temperature as a function of vessel size and gas pressure and for plasma density as a function of power input. Also a relation between ion impact energy at the wall and electron temperature is derived. For a typical dissociator (2" diameter, 0.1 Torr hydrogen pressure, and 4 watt input power) these relationships yield an electron temperature of 39,000°K, a plasma density of 1011 cm-3 and an ion impact energy of 20 volts. The dissociation rate is calculated using published cross-sections. Assuming a recombination rate of 4 × 10-3, the analysis yields an atomic hydrogen density of about 1014 cm-3, a degree of dissociation of 2%, and an atomic beam flux of 1.3 × 1018 cm-2 × sec-1 for the example quoted. This beam flux is in good agreement with estimated values for hydrogen masers. A coefficient for performance ? is derived for the hydrogen dissociator, defined as the ratio of atomic beam flux to discharge power consumption. It is shown that ? is a function of the electron temperature and has a maximum at 87,000°K. It is concluded from this analysis that the discharge in presently used hydrogen dissociators is well optimized given the pressure constraints of the system.     

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开发了氮空心阴极放电PIC/MC二维自洽模型。研究了N2传统空心阴极向微空心阴极放电转变过程中电势和电场的变化。结果表明,不同尺寸的空心阴极放电的电势及电场分布规律几乎类似,但空心阴极孔径减小且气压增加时,电场近似线性增加;典型微空心阴极电场比传统空心阴极放电电场约大3个量级;微空心阴极放电产生的电子,氮分子离子和氮原子离子的密度比传统空心阴极放电约大3个量级,且微空心阴极放电中,N2+密度比N+密度大8倍以上。     

Analytical model of a corona discharge from a conical electrode under saturation

Exact partial solutions are found for the electric field distribution in the outer region of a stationary unipolar corona discharge from an ideal conical needle in the space-charge-limited current mode with allowance for the electric field dependence of the ion mobility. It is assumed that only the very tip of the cone is responsible for the discharge, i.e., that the ionization zone is a point. The solutions are obtained by joining the spherically symmetric potential distribution in the drift space and the self-similar potential distribution in the space-charge-free region. Such solutions are outside the framework of the conventional Deutsch approximation, according to which the space charge insignificantly influences the shape of equipotential surfaces and electric lines of force. The dependence is derived of the corona discharge saturation current on the apex angle of the conical electrode and applied potential difference. A simple analytical model is suggested that describes drift in the point-plane electrode geometry under saturation as a superposition of two exact solutions for the field potential. In terms of this model, the angular distribution of the current density over the massive plane electrode is derived, which agrees well with Warburg??s empirical law.