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1.
信息技术的飞速发展,对芯片性能提出了越来越高的要求,芯片中晶体管和电子互连的密度也在不断增加.电子电镀是大马士革以及芯片封装电子互连的主要成形方法,互连密度的提高对于电子电镀成形工艺及性能调控方法提出了许多新的要求.本文概述了本团队近几年在芯片高密度互连的电子电镀成形方法以及性能调控方面的研究成果,主要包括3D TSV垂直互连及大马士革互连的填充及后处理工艺、高密度凸点电镀成形方法及互连界面可靠性研究、特殊结构微纳互连的制备及性能调控方法、微纳针锥结构低温固态键合方法、水相化学及电化学接枝有机绝缘膜等工作,以期对芯片电子电镀领域的研究带来启迪,推动芯片高密度互连技术的发展.  相似文献   

2.
以分布有微孔的印刷线路板(PCB)作为模板,按照PCB孔金属化工艺路线,研究乙醛酸化学镀铜和柠檬酸盐体系铜电沉积工艺在PCB微孔金属化中的应用.结果表明,乙醛酸化学镀铜和柠檬酸盐体系电沉积铜可以成功地应用于PCB微孔金属化加工工艺中.微孔化学镀铜金属化导电处理后,铜附着于微孔内壁,颗粒细小,但排列疏松且局部区域发生漏镀现象.微孔一经电镀铜加厚,镀层电阻显著下降;孔壁内外的铜沉积速率达到0.8:1.0;铜颗粒具有一定的侧向生长能力,能够完全覆盖化学镀铜时产生的微小漏镀区域;微孔内壁铜镀层连续、结构致密并紧密附着于内壁,大大增强了PCB上下层互连的导电性能.  相似文献   

3.
沈钰  李冰冰  马艺  王增林 《电化学》2022,28(7):2213002
随着半导体集成度的不断提高,铜互连线的电阻率迅速提高。当互连线宽度接近7 nm时,铜互连线的电阻率与钴接近。IBM和美国半导体公司(ASE)已经使用金属钴取代铜作为下一代互连线材料。然而,钴种子层的形成和超级电镀钴填充7 nm微孔的技术工艺仍是一个很大的挑战。化学镀是在绝缘体表面形成金属种子层的一种非常简单的方法, 通过超级化学镀填充方式, 直径为几纳米的盲孔可以无空洞和无缝隙的方式完全填充。本文综述了化学镀钴的研究进展,并分析了还原剂种类对化学镀钴沉积速率和镀膜质量的影响。同时, 在长期从事超级化学填充研究的基础上, 作者提出了通过超级化学镀钴技术填充7 nm以及一下微盲孔的钴互连线工艺。  相似文献   

4.
王翀  彭川  向静  陈苑明  何为  苏新虹  罗毓瑶 《电化学》2021,27(3):257-268
电镀铜技术是制造印制电路板、封装载板等电子互连器件的核心技术.本文介绍了印制电路中电镀铜技术及其发展概况,主要总结了电子科技大学印制电路与印制电子团队在印制电路电镀铜技术基础研究和产业化应用等方面的工作.首先,以三次电流分布理论为基础,采用多物理场耦合方法构建阴极表面轮廓线随时间变化的镀层生长过程模型.该模型描述了铜沉...  相似文献   

5.
总结自大马士革铜工艺建立以来,电化学工作者利用化学镀技术围绕该工艺而开展的一系列相关研究,介绍了应用化学镀沉积镍三元合金防扩散层和化学镀铜种子层的研究以及离子束沉积法(Ion ized C lus-ter Beam,ICB)形成Pd催化层后的化学镀铜技术和超级化学镀铜方法.简要叙述化学镀铜技术在超大规模集成电路中的应用,总结化学镀铜技术的研究进展,并指出了今后的发展方向.  相似文献   

6.
后摩尔时代, TSV三维互连成为高端电子器件制造的关键技术之一. TSV电镀铜填充是主流金属化的方法面向晶圆级TSV互连工艺集成应用.本文总结了电镀铜添加剂的国内外研究与发展现状,主要包括加速剂、抑制剂以及季铵盐整平剂、含氮聚合物整平剂、含氮杂环整平剂、无机分子整平剂的分子结构,添加剂与Cl-协同作用关系,主要添加剂分子之间协同作用关系, TSV电镀铜填充机理模型等,并凝练提出了TSV电镀铜添加剂及作用机理研究面临的关键问题,以期为TSV添加剂以及作用机理的研究带来一定启发.  相似文献   

7.
受高算力芯片的需求驱动,尽管摩尔定律日趋减缓,高端芯片的工艺复杂度和集成度仍在逐代增大.随着前道工艺中晶体管架构与其集成密度不断优化提升,后道工艺所涉及的芯片内互连技术挑战愈发严峻,迫切需要对互连材料与工艺进行革新.同时,高集成度的系统级3D封装也是高性能芯片的关键解决方案,其中核心的3D封装技术对芯片间互连材料与工艺不断提出新的要求.为此,本文系统探讨了后摩尔时代芯片内和芯片间多代候选互连材料及其工艺的潜力及挑战,从材料创新、工艺优化、架构突破、设计范式等多方面综合研判了未来互连技术的发展路径,并对超导互连、光互连等颠覆性互连技术做了前瞻性分析,可以预见互连材料的革新将有力推动新的芯片技术革命.  相似文献   

8.
玻璃微流控芯片廉价快速制作方法的研究   总被引:3,自引:0,他引:3  
研究了一种玻璃微流控芯片的快速、低成本制作工艺和方法. 该方法采用商品化的显微载玻片(soda-lime玻璃)作为芯片基质材料, 利用AZ 4620光刻胶代替传统工艺中的溅射金属层或多晶硅/氮化硅层作为玻璃刻蚀的掩膜层, 同时利用一种紫外光学胶键合方法代替传统熔融键合方法实现芯片的键合, 整个工艺对玻璃基质材料要求低, 普通微流控芯片(深度小于50 μm)制作流程仅需约3.5 h, 可降低制作成本, 缩短制作周期. 还系统地研究了光刻胶厚度、光刻胶硬烘时间和玻璃腐蚀液配比对玻璃微流控芯片制作的影响, 获得了优化的工艺参数.  相似文献   

9.
聚合物材料表面金属化在通讯、电子、航空航天领域具有重要应用. 化学镀铜是聚合物材料表面金属化的主要技术之一. 聚合物材料表面的前处理直接影响化学镀铜层的结合力及镀层平整度. 本综述详细介绍非导电聚合物材料的种类、组成以及性能, 并概述其表面化学镀铜前处理的研究进展.  相似文献   

10.
本文详细介绍芯片制造中铜互连技术,综述酸性硫酸铜电镀工艺要点及常用添加剂作用机理,并概述国内外新型添加剂研究进展. 在此基础上,展望新型铜互连工艺替代酸性硫酸电镀铜工艺的可能性.  相似文献   

11.
Ion redistribution in an electric double layer   总被引:1,自引:0,他引:1  
The structure of a single flat electric double layer (EDL) is studied by grounding a symmetric electrolyte (NaCl), which is in contact with a planar positively corona-treated polypropylene film. Because the profiles of the electrostatic potential distribution and ion distribution in the solution are altered when the solution is grounded, some mobile counterions in the diffuse layer of the electrolyte solution will go into the Helmholtz layer and thus decrease the electric potential psi(a/2) at the Stern plane in order to obtain a new equilibrium. After the system is grounded for a long time, the representation of the electric double layer changes from a Stern model to a Helmholtz model. Theoretical and experimental analyses are given in this study.  相似文献   

12.
应用巨正则系综统计法处理液/液界面(ITIES)双电层体系。根据MVN模型,假定溶液中离子可穿入界面内层(定向溶剂分子层),由体系(内层)巨正则配分函数导出内层微分电容(C1)统计表达式,拟合计算C1随该层表面电荷密度(σm)变化关系。理论同时表明,C1与σm涨落存在确定关系  相似文献   

13.
Summary: Single polyelectrolyte component microcapsules and multilayers, exemplified by poly(allylamine hydrochloride) (PAH), have been prepared using a method of glutaraldehyde (GA)‐mediated covalent layer‐by‐layer (LbL) assembly. The GA cross‐linking of the adsorbed PAH results in surfaces covered by reactive aldehyde groups, which can then react with PAH to result in another layer of covalently linked PAH. The repeated assembly of single polyelectrolyte in an LbL manner can be thus achieved. The PAH multilayers can grow linearly along with the layer number, and their thickness can be controlled at the nanometer scale, as verified by UV‐vis absorption spectrometry and ellipsometry. Single polyelectrolyte microcapsules are obtained after removal of the template cores at low pH. The morphology and integrity are confirmed by scanning force microscopy and confocal laser scanning microscopy.

Schematic illustration of the preparation of a single polyelectrolyte component microcapsule by GA‐mediated covalent LbL assembly.  相似文献   


14.
Poly(3,4-ethylenedioxythiophene (PEDOT) derivatives display a multitude of attractive properties such as high conductivity, biocompatibility, ease of functionalization, and high thermal stability. As a result, they show promise for applications in materials and biomedical engineering. In order to increase their applications in the practical domain, trivial fabrication techniques are required. Here, we present a simple layer-by-layer dip methodology to assemble water-soluble PEDOT derivatives that can then be disassembled via electrical stimulation. As a result, a dynamic PEDOT layered system is fabricated and could be applied as responsive materials for bioengineering. PEDOT-SO3 and PEDOT-NMe3 are synthesized via direct C-H arylation polymerization and chemical polymerization, respectively. The electrostatic interactions between oppositely charged SO3 and NMe3+ enabled the stacking of PEDOT derivatives. The layer-by-layer assemblies are confirmed by ultraviolet–visible spectroscopy and profilometer. Morphological analyses are performed using scanning electron microscopy and atomic force microscopy, which revealed that the polymer coatings are uniform without any cracks. In situ material assembly is studied using quartz crystal microbalance, and we also demonstrate that these PEDOT-derivative assemblies can be disintegrated by electrical stimulation. Cyclic voltammetry shows a proportional increase in stored charge density with the increase in bilayer thickness, confirming stable electroactivity of these assemblies. Using this approach, we can assemble conductive bio interface on both conductive and nonconductive surfaces, expanding the capability to fabricate bioelectronic electrodes.  相似文献   

15.
超薄层在白色有机电致发光器件中的应用   总被引:1,自引:0,他引:1  
以DCJTB为掺杂剂, 以BCP为空穴阻挡层, 研究了两种结构的有机电致发光器件ITO/NPB/BCP/Alq3:DCJTB/Alq3/Al(结构A)和ITO/NPB/BCP/Alq3/Alq3:DCJTB/Alq3/Al(结构B)的电致发光光谱. 实验结果显示, 在结构A器件的电致发光光谱中, 绿光的相对发光强度较弱,增加Alq3层的厚度对绿光的相对发光强度的影响也很小; 而在结构B器件的电致发光光谱中, BCP层与掺杂层(Alq3:DCJTB)之间的Alq3薄层对绿光的相对发光强度影响显著, 用很薄的Alq3层就可以得到强的绿光发射. 进一步改变器件结构, 利用有机超薄层就可以得到稳定的白光器件ITO/NPB(50 nm)/BCP(3 nm)/Alq3(3 nm)/Alq3:DCJTB(1%(w))(5 nm)/Alq3(7 nm)/Al. 随着电压的增加(14-18 V), 该器件的色坐标基本保持在(0.33, 0.37)处不动; 在432 mA·cm-2的电流密度下, 该器件的发光亮度可达11521 cd·m-2.  相似文献   

16.
The effect of the number and arrangement of TiO2‐based photoanode layers on the efficiency of dye‐sensitized solar cells (DSSCs) was investigated. Compact, mesoporous, and blocking layers of TiO2 were prepared to form monolayer, bilayer, and trilayer photoanodes. Compact and blocking TiO2 layers were prepared using dip‐coating technique, whereas the doctor‐blade method was employed to prepare TiO2 paste layers using nanoparticles prepared by the sol–gel method. The crystalline structure of photoanodes was characterized by X‐ray diffraction (XRD) measurements and their morphology and thickness were characterized by the scanning electron microscopy (SEM) technique. The photovoltaic performance of constructed DSSC devices was investigated and the optimum arrangement was identified and explained in terms of dye loading enhancement and recombination reduction at the fluorine‐doped tin oxide (FTO)/electrolyte interface.  相似文献   

17.
目前钙钛矿太阳能电池的认证效率已达25.2%,被认为是下一代最有希望的薄膜太阳能电池候选者。但通过溶液加工方法制备的钙钛矿薄膜不可控的形貌与较差的结晶性是制约器件稳定性提升和大面积生产的主要原因。为了有效解决这一难题,研究者们通常在电荷传输层与钙钛矿层之间进行界面修饰。本文从界面修饰的角度出发,总结了不同界面修饰策略在钙钛矿太阳能电池中的应用,并展望了界面修饰在低成本和大面积钙钛矿太阳能电池的应用前景。  相似文献   

18.
可溶性聚合物电致发光材料PDHPV的合成及单、双层发光二极管器件的发光性能比较李晨曦,尹春,黄文强,印寿根,张会旗,何炳林,郑军,华玉林(南开大学高分子化学研究所,天津,300071)(天津理工学院材料物理研究所)关键词PDHPV共轭聚合物;电致发光...  相似文献   

19.
This paper reports on a facile method for synthesizing gold nanoparticles (AuNps) with diameter around 5 nm encapsulated with water‐soluble polythiophene sulfonate poly[2‐(3‐thienyl)ethyloxy‐4‐butylsulfonate] sodium salt (PTS) and their physical–chemical characterization. The synthesis of hybrid materials of polythiophene derivatives and gold nanoparticles is a way to improve the polymer properties, mainly in application for chemical and optical sensing platforms. The AuNps were prepared by reducing gold salt with acid aqueous sodium citrate by the Turkvich method in the presence of PTS, and both PTS and citrate helped to stabilize the AuNps. The suspensions of AuNp:PTS presented good chemical and photostability for long period of storage. The nanoparticles encapsulated with the polymer presented smaller diameters than those obtained using only sodium citrate, according to scanning electron microscopy images. The AuNps obtained were used for fabrication LbL films with commercial chitosan, which were characterized by impedance spectroscopy measurements. The results showed that the charge transfer resistance values (Rct) decrease as the average diameter of the AuNps decreases and the proportion of PTS increases in the nanocomposite. Such increase of the nanocomposite conductivity, given by the low values of Rct, indicates that the novel film architecture developed is promising for chemical sensing applications. © 2016 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2016 , 54, 1245–1254  相似文献   

20.
A series of 10 polythiophene derivatives is reported, in which each polymer has a different percentage of carboxylic acid‐bearing repeat units. The properties of these polymers are explored under acidic conditions, where the carboxylic acid moieties remain neutral, and under basic conditions, where the carboxylic acid units become anionic carboxylates. The properties that are examined for both solutions and films include UV–vis absorption spectroscopy, photoluminescence spectroscopy, and red‐edge optical band gaps. All the properties studied are strongly dependent both on protonation state and percentage of carboxylic acid/carboxylate side chains along the polymer backbone. The anionic form of each polythiophene derivative was also used in layer‐by‐layer film deposition with a cationic phosphonium polyelectrolyte. The film growth process was studied by spectroscopic techniques to assess the influence of side‐chain composition on the film growth and optical properties. © 2019 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2019  相似文献   

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