单片集成GaAs MESFET微波开关——Ⅱ、宽带单刀单掷和单刀双掷开关电路

本文介绍了单片集成GaAs MESFET微波开关的设计方法和制作工艺.利用空气桥和通孔接地等工艺技术,研制成的调配型宽带单刀单掷开关在0.01～7GHz内,插损为2～3.5dB,隔离度不小于32dB;分布型宽带单刀双掷开关在4.5～7GHz内,插损为1～2dB,隔离度不小于21dB,5GHz下的最大功率容量为3瓦.实验也证实电路的开通时间小于0.6ns.     

Epitaxial Layer Design for High Performance GaAs pHEMT SPDT MMIC Switches

From a hydrodynamic device simulation for the pseudomorphic high electron mobility transistors (pHEMTs), we observe an increase of maximum extrinsic transconductance and a decrease of source-drain capacitances. This gives rise to an enhancement of the switching speed and isolation characteristics as the upper-to-lower planar-doping ratios (UTLPDR) increase. On the basis of simulation results, we fabricate single-pole-double-throw transmitter/receiver monolithic microwave integrated circuit (MMIC) switches with the pHEMTs of two different UTLPDRs (4:1 and 1:2). The MMIC switch with a 4:1 UTLPDR shows about 2.9 dB higher isolation and approximately 2.5 times faster switching speed than those with a 1:2 UTLPDR.     

高性能DC-20GHz反射型GaAs MMIC SPST和SPDT开关

GaAsMMIC SPST和SPDT开关,由于其体积小、重量轻、无功耗,在许多电子系统和电子设备中得到广泛应用,南京电子器件研究所最近研究出高性能DC-20 GHz超宽带反射型GaAsMMIC单刀单掷(SPST)和单刀双掷(SPDT)两种开关,获得了优异电性能.     

8mm波段单刀单掷、单刀双掷开关

南京电子器件研究所已研制成8mm波段单刀单掷、单刀双掷开关。该类开关采用脊波导结构，具有插人损耗小、驻波小及隔离大等特点，可应用于毫米波雷达及测试等方面。其主要技术指标如下表。8mm波段单刀单掷、单刀双掷开关     

Via-Shape-Control for Copper Dual-Damascene Interconnects With Low-k Organic Film

Copper dual-damascene (DD) interconnects are fabricated with low-k organic film (SiLKtrade) without any etch-stop layers by use of dual hard mask (dHM) process combined with sidewall-hardening etching step. It is a key point to reduce shoulder loss during trench etching at connecting regions of vias and trenches, so that hardening of the via-sidewall by fluorocarbon plasma during via etching is implemented. Careful designs of dual hard mask structures and their patterning sequence are carried out for the process without etch-stop layer under the trench. The two-layered interconnect with low-k structure has achieved low via-resistance of 0.65 Omega at 0.28 mumOslash with keeping large tolerance of misalignment up to 0.1 mum.     

GaAs MMIC broadband SPDT PIN switch

The first GaAs MMIC using PIN diodes as the active elements is described. The single-pole double-throw (SPDT) switch covers the frequency range 2 to 18 GHz, and can handle incident powers of 1W at X-band. Isolation and insertion loss vary respectively from ? 55 dB and 1 dB at 2 GHz to ?17 dB and 2.2 dB at 18 GHz.     

宽带GaAsFET微波单片集成单刀双掷开关

本文报道了一种采用串、并联ＦＥＴｓ结构的ＧａＡｓＭＭＩＣ单刀双掷开关。芯片尺寸为０．９７＊１．２３ｍｍ．在ＤＣ－１０ＧＨＺ频率范围内，插入损耗小于２．２ｄＢ，隔离度大于３２ｄＢ，反射损耗大于１２ｄＢ，并关时间小于１ｎｓ，在５ＧＨＺ下的功率处理能力大于２０ｄＢｍ。此开关具有极低的直流功率耗散。     

一种X波段GaAs单片单刀双掷开关

采用0.2μmGaAsPHEMT工艺设计了一种X波段单刀双掷开关单片集成电路。在片测试结果为8～11GHz范围内,隔离度>30dB,在中心频率9.5GHz能够达到45dB,插损<1.2dB。芯片结构非常简单紧凑,仅用了两个并联的PHEMT管。     

砷化镓光控半导体开关

光控半导体开关在脉冲功率等方面具有广泛的应用前景,越来越受到人们的重视。本文对光控半导体开关进行了简要介绍,包括ＧａＡｓ：Ｓｉ：Ｃｕ开关的原理和应用;ＧａＡｓ：Ｓｉ：Ｃｕ基本材料的制备;开关过程中的锁定现象及其机理;以及设计和实验中的几个问题．     

铜布线面临生产实际挑战

铜布线工艺 在集成电路布线中,铝被广泛使用,其布线工艺较为简单。1997年9月,IBM公司率先推出一种称为CMOS7S的新技术,该技术在集成电路设计中采用铜代替铝作为外部导电材料,使电路布线的尺寸更加微小,芯片处理逻辑运算的能力更强。     

Electrical and Thermal Cosimulation of GaAs Interconnects

It is well known that the poor thermal conductivity of GaAs adversely affects the electrical performance of GaAs circuits. Although they interact, the electrical and thermal circuits are simulated using separate software simulation packages. If the circuits are cosimulated on the same package, then the electrical and thermal circuits can interactively determine accurate information for the temperature-dependent variables of the electrical circuit. This paper demonstrates a method of electrical and thermal cosimulation of GaAs interconnects. To illustrate, the method is implemented on a meander line deposited on a GaAs epitaxial substrate. Each horizontal and vertical section of the meander is viewed as an individual heat source cell. An iterative procedure solves for the temperature of each cell and predicts the dc resistance of the line. Using a first-order thermal circuit, simulation shows good agreement with experimental data.     

大马士革铜互连线织构的研究

采用EBSD研究了不同线宽和退火前后Cu互连线的织构和晶界特征分布.Cu互连线均具有多重织构,其中(111)织构强度最高.沉积态样品在室温下发生了自退火现象,并出现了一些异常长大的晶粒.随高宽比降低和退火处理,Cu互连线晶粒尺寸变大,(111)织构得到加强,而具有较低应变程度的织构与(111)织构强度的比例下降.沉积态样品出现了(111)<112>和(111)<231>织构组分.退火后,出现了(111)<110>组分,而且(111)<112>和(111)<231>组分得到增强.Cu互连线以大角度晶界为主,其中具有55°～60°错配角的晶界和∑3晶界比例最高,35°～40°的错配角和∑9晶界次之.随高宽比增加和退火处理,∑3晶界比例逐渐升高,∑9晶界比例下降.     

大马士革铜互连线织构的研究

采用EBSD研究了不同线宽和退火前后Cu互连线的织构和晶界特征分布.Cu互连线均具有多重织构,其中(111)织构强度最高.沉积态样品在室温下发生了自退火现象,并出现了一些异常长大的晶粒.随高宽比降低和退火处理,Cu互连线晶粒尺寸变大,(111)织构得到加强,而具有较低应变程度的织构与(111)织构强度的比例下降.沉积态样品出现了(111)<112>和(111)<231>织构组分.退火后,出现了(111)<110>组分,而且(111)<112>和(111)<231>组分得到增强.Cu互连线以大角度晶界为主,其中具有55°～60°错配角的晶界和∑3晶界比例最高,35°～40°的错配角和∑9晶界次之.随高宽比增加和退火处理,∑3晶界比例逐渐升高,∑9晶界比例下降.     

带GaAs TTL电平驱动器的SPDT开关的模拟和性能

介绍了一种带ＧａＡｓＴＴＬ电平驱动器及单刀双掷（ＳＰＤＴ）开关的设计、模拟和测试结果。驱动器的设计采用了开关输入稳压负载,建立了所用器件的大信号模型,对电路进行了模拟分析和优化,模拟和测试结果吻合较好,开关时间达到５ｎｓ,插入损耗小于１．０ｄＢ,隔离度大于６０ｄＢ。     

ULSI中Cu互连线的显微结构及可靠性

观察了ULSI中大马士革结构的Cu互连线的晶粒生长和晶体学取向.分析了线宽及退火对Cu互连线显微结构及电徙动的影响.Cu互连线的晶粒尺寸随着线宽的变窄而减小.与平坦Cu膜相比,Cu互连线形成微小的晶粒和较弱的 (111) 织构.300℃、30min退火促使Cu互连线的晶粒长大、(111) 织构发展,从而提高了Cu互连线抗电徙动的能力.结果表明,Cu的扩散涉及晶界扩散与界面扩散,而对于较窄线宽的Cu互连线,界面扩散成为Cu互连线电徙动失效的主要扩散途径.     

一种超低插损砷化镓射频开关

报道了利用离子注入技术研制出一种用于手机的超低插损砷化镓单片射频单刀双掷开关。该产品在82 0～ 95 0 MHz下 ,插入损耗≤ 0 .4 d B,回波损耗≥ 1 9.5 d B,反向三阶交调截距点≥ 67d Bm,隔离度≥ 1 5 .5 d B,控制电压为 (0 ,+4 .75 V)     

基于GaAs PIN二极管的宽带大功率单片单刀双掷开关

GaAs PIN二极管具有开态电阻小、截止频率高以及功率容量大的特点,采用GaAs PIN二极管制作的开关插入损耗较小、隔离度较高、并且功率的线性较好。基于河北半导体研究所GaAs PIN工艺制造了一款单刀双掷开关芯片。该开关采用单级并联结构。通过微波在片测试,在小信号条件下,6～18 GHz范围内插入损耗小于1.45 dB、隔离度大于28 dB,输入输出反射损耗小于7.5 dB。把开关装入夹具中进行功率特性测试,在连续波输入功率37 dBm,12 GHz条件下测试输出功率仅压缩0.5 dB,具有非常好的功率特性。在4英寸(100 mm)晶圆上开关的成品率较高,具有非常好的工程应用前景。     

8~20GHz GaAs pin二极管单片单刀双掷开关

基于中国科学院微电子研究所的GaAs pin二极管工艺,设计、制作并测试了一种单片单刀双掷开关. 在8~20GHz频段内,开关正向导通时的插入损耗最小值为1.5dB,输入和输出端的回波损耗大于10dB;开关关断状态的隔离度最大值为32dB. 开关的支路采用串联-并联-并联的结构,其中的GaAs pin二极管基区厚为2.5μm. 在1.3V的偏置电压下,正向导通的串联二极管工作电流为7mA.     

Ultra-Wideband Electromagnetic Radiation from GaAs Photoconductive Switches

The experiment results of ultrawide band electromagnetic radiation with DC biased GaAs photoconductive semiconductor switch combining double ridge horn antenna triggered by high repeat frequency femto-second laser pulse are reported.The GaAs switches are insulated by solid multi-layer transparent dielectrics and the distance of two electrodes is 3mm.The electrode material of the switch is ohmic contact through alloy technics with definite proportion of Au/Ge/Ni.This switch and double ridge horn antenna are integrated and the receive antenna is connected with the test instrument.From receiving antenna,ultra fast electrical pulse of 200ps rise time and 500ps pulse width is obtained,the repetition rate of the pulse is about 82MHz and the frequency spectrum is in the range of 4.7MHz～14GHz.The radiation characteristic of the ultrafast electrical pulse is analyzed.