Application of improved Speckle contouring technique to surface roughness measurements

One of the well known drawbacks in Electronic Speckle Pattern Interferometry (ESPI) is the poor fringe density due to electronic and speckle noise and decreasing fringe visibility with increasing speckle decorrelation. As recently reported we suggested improving the fringe density and enlarging the measurement range by the incremental addition of phase images. The technique has already been successfully applied to in-plane and out-of-plane displacement field measurements of carbon-fibre reinforced composites. This paper demonstrates how the technique can be used to improve the sensitivity and to extend the measurement range for speckle contouring applications. The angular correlation of the speckle phase images is used to get the desired 3D information of the investigated object surface. It is demonstrated how the angular speckle contouring techinque can easily be automated with respect, for example, to possible industrial applications. Roughness measurements are carried out on milled Rugo test surfaces. All measurements are performed without the usual vibration isolation, and of course, without the treatment of the surface with fine, white powder for contrast enhancement, which would falsify the results.     

Three-dimensional optical profilometry using a four-core optical fibre

This paper describes the use of a four-core optical fibre for measurements of three-dimensional rigid-body shapes. A fringe pattern, which is generated by interference of four wavefronts emitted from the four-core optical fibre, is projected on an object's surface. The deformed fringe pattern containing information of the object's surface topography is captured by a digital CCD camera and is analysed using a two-dimensional Fourier transform profilometry. It is demonstrated for the first time that the use of such a four-core optical fibre increases the compactness and the stability of the fringe projection system.     

Display of tilt information of vibrating object in time average mode using lateral shearing interferometry and interferometric grating

We have experimentally demonstrated vibration analysis of a reflecting object in time-average mode using shearing interferometry and interferometric grating. Experimental results show that time-average moiré fringes, formed between fringe pattern reflected from object and sinusoidal grating are modulated spatially by the amplitude of vibrating tilt. From the experimental results, information regarding tilt of vibrating objects can be determined.     

Slope measurement by two-wavelength electronic shearography

A technique is presented for the slope measurement of objects using an electronic shearography system. To detect the gradients of an object shape, a laser diode is modulated to produce two wavelengths on successive image frames. These two frames are then subtracted to generate correlation fringes which depict slope variations of the object surface. The theory of this technique is described and measurements of conical, cylindrical, and spherical test objects are presented. Com parisons of experimental results with theoretical data are demonstrated to be in good agreement. The implementation of fringe analysis using phase stepping techniques is also discussed.     

Holography, speckle, and computers

Surveys are presented on automatic and quantitative deformation measurements using CCDs and computers in holographic interferometry and speckle metrology for diffusely reflecting surfaces. For delivering relationships between object deformation and observed quantities, we discuss formations of fringes and signals observed in these methods in terms of correlation functions of spatially randomly varying complex amplitude of light. Dependencies of the observed patterns on object deformation and optical systems are discussed. Physical meanings of the derived relationships are explained in terms of the dynamic behaviors of speckles resulting from surface deformation. Automatic measurements are described in chronological orders. They include analysis of fringe patterns resulting from photographic recording of specklegrams, video recording and analysis of speckle patterns used in electronic speckle pattern interferometry as well as direct digital correlation techniques, and digital holography that uses both digital recording and reconstruction of holograms.     

A compact ESPI system for displacement measurements of specular reflecting or optical rough surfaces

A stable and compact speckle interferometer for doing out-of-plane displacement measurements on reflective as well as diffusely scattering object surfaces is demonstrated. The set-up is based on a nearly path length compensated interferometer of the Fizeau type and uses diffuse illumination of the object combined with a speckled reference wave. This combination eliminates the need for special optical components, and the interferometer can be built of commonly available components. The diffuse illumination wave is obtained by scattering coherent light from a diffusely scattering surface. The speckled reference wave is established by reflecting a part of the diffuse illumination wave from a glass plate placed in front of the object. Besides relaxing the alignment tolerances of the set-up, the diffuse illumination eliminates the need for any preparation of the surface under test, which turns the system into a candidate for testing micro mechanical systems. When using the interferometer for measurements of the eye, the risk of focusing the laser beam on the retina is decreased due to the diffuse object illumination.     

Radiation heat transfer between specularly and diffusely reflecting surfaces

Radiation heat transfer between specularly and diffusely reflecting plane surfaces is exactly analyzed based on radiation intensity without employing the image method. With this analysis, specular reflection can be treated easier than with the image method, leading to possible formulation of the basic equation in defiance of the number of specular reflections. The basic equation is applied to the simple two-dimensional radiation transfer system, from which approximate expressions are made for the surfaces nearly perfectly reflecting diffusely and for those nearly perfectly reflecting specularly. Numerical solutions are obtained of both exact and approximate expressions for systems of parallel plates and adjoint plates. It is confirmed that the approximations are quite acceptable, except for the case with very low emittance. The mean heat fluxes over the plate obtained by approximate solutions agree well with those by exact expressions.     

一种针对彩色物体的光栅投影三维测量方法

针对传统彩色编码光栅三维轮廓术中光栅易受到物体表面彩色纹理的干扰,从而造成编码条纹颜色误判和相位误差增大这一问题,提出一种基于互补彩色光栅的三维测量方法,给出了理论分析、光栅设计原理、补偿算法与实验分析。对图像进行初步的解耦校正后,通过预先设计的光栅互补特性,依据彩色响应模型求取物体表面逐点的反射率,并对红绿蓝(RGB)三通道反射率的不平衡进行补偿,消除物体表面彩色纹理的干扰,改善光栅的正弦性。以补偿后的图像来指导彩色编码条纹的分割解码并用傅里叶变换法提取出包裹相位,依据解码结果指导相位展开,继而完成整个三维测量过程。实验证明该方法对彩色纹理的补偿准确有效,降低了彩色纹理对测量的影响。     

Dispersion of collective modes at inhomogeneous metal surfaces

A simple model in which electrons are assumed to be specularly reflecting on a plane located a distance u above the boundary of a homogeneous metallic region is proposed for studying dynamical properties of metal surfaces. This model is believed to incorporate essential effects of the inhomogeneity of a pure jellium surface in a new way. It leads to a strong reduction of hydrodynamic dispersion effects for long wavelengths surface plasmons, in agreement with experiment and with various previous calculations. The model is also applied to surface phonons and exact numerical dispersion curves for both surface phonons and plasmons at arbitrary wavelengths are presented.     

Optical surface roughness evaluation of phosphorus-doped polysilicon films

The surface roughness of phosphorus-doped polycrystalline silicon (polysilicon) film is widely believed to be related to its electrical property. In this work, the roughness of polysilicon films prepared in situ under varied processing conditions, is determined using an optical technique that is based on measuring the spectral absorbance of specularly reflected light. The roughness measurements attained are found to follow the logical trend of roughness anticipated from phosphorus-doped polysilicon prepared under controlled variations of temperature, pressure and phospine/silane flow ratio.     

Fourier synthesis of a three-dimensional surface by the method of multiangle projection of fringes

A new method is proposed for contactless measurements of the surface shape of diffusely reflecting objects. The method is based on the multiangle projection of fringes and the joint processing of the obtained images by Fourier synthesis. It improves the spatial resolution of the reconstructed surface of an object in all directions and simultaneously decreases the shaded areas on an object.     

Pulsed digital holographic interferometry by using a flexible fiber endoscope

A system based on digital holographic interferometry in combination with a flexible fiber endoscope is described. A Q-switched pulsed laser is used. Two digital holograms of the test object, corresponding to the two laser pulses, are captured at separate video frames of a CCD-camera, transferred in a frame grabber and further processed in a PC. If the object undergoes a deformation during the interval between the two laser pulses (usually in the range of 5–600 μs), a fringe pattern will result from the difference between the two holograms. This fringe pattern has the information needed to evaluate quantitatively the amount of the deformation. A compact system has been developed to be used for various applications, both mechanical and biological, where measurements need to be performed at “hidden” surfaces or inside more or less closed objects. The quality of the results obtained by using mechanical objects is usually better than for biological objects. This can be explained easily by the fact that a biological surface is much more complex, in particular some parts of the surface may reflect the light well whereas some other parts may absorb it. Experimental results are presented.     

相移阴影莫尔条纹正交化解调技术

提出一种基于克莱姆正则化分析法的三帧自标定相移阴影莫尔三维轮廓技术.该技术首先采用移动光栅的方法获得相移条纹图,然后通过不同帧相移条纹图相减去除条纹图背景,进而结合克莱姆正交化法和最小二乘法,发展了一种相位解调方法,提取了测量相位.以五步Harlharan算法为参考,用不同算法对同一物体表面进行测量.结果表明,相对于典型的三步相移法和主量分析方法,提出的方法测量得到的相位误差最小(0.5rad),且简化了测量过程.     

Travel-time statistics for signals scattered at a rough surface

Abstract

The travel time of signals reflected or refracted by a rough surface is investigated in the geometrical optics approximation. It is shown that surface roughness typically decreases the mean travel time in the case of large-scale roughness, when only one specularly reflecting point moves randomly around its unperturbed position, resulting in a negative travel-time bias (toward early echoes). In the opposite limiting case of multipath propagation, when many specular points exist on a random surface, the travel-time bias is always positive. General results are illustrated by two examples related to ocean remote sensing which involve sound scattering from the ocean surface and bottom.     

Fringe projection profilometry based on complementary color-encoded fringe patterns

3D measurement techniques based on color-encoded fringe pattern projection have been widely used in various fields of engineering recently. There is one problem that the surface color of measured object may interfere with the color of projected fringe pattern. To solve this problem, a novel method based on complementary color-encoded fringe projection is proposed. Two color-encoded fringe patterns whose fringe colors are complementary are designed. The first pattern is with the sinusoidal fringe embedding into the green color channel which is used to evaluate phases by Fourier transform method. The fringe color of the captured image is established with the help of the complementary color fringe pattern, which is based on the feature of color complementation. Thus, the influence brought by the color of object surface can be eliminated, and decoding errors can be further reduced. Experiment results indicate that the proposed method is valid and can be applied to the measured colorful objects.     

Height distribution on a rough plane and specularly diffracted light amplitude are Fourier transform pair

In this report we show that the amplitude of specularly diffracted light from a plane rough surface as a function of incident angle cosine is Fourier transform of the height distribution on the surface. Therefore, an even height distribution function, which is the case for many rough surfaces, can be obtained by measuring the specularly diffracted light intensities. Also, it is observed that for polychromatic illumination the spectrum of the specularly diffracted light is modified and the modification depends on roughness, incident angle, and wavelength. It is also shown that, for a fixed incident angle, the height distribution on the rough plane is Fourier transform of the spectral modifying function. Experimental studies on some surfaces of different roughnesses, prepared by grinding sheet-glasses by powders of different grain sizes, show that the corresponding height distributions are Gaussian and the rms heights obtained by the two approaches are quite consistent.     

Physical spherical phase compensation in reflection digital holographic microscopy

Reflection configured digital holographic microscopy (DHM) can perform accurate optical topography measurements of reflecting objects, such as MEMs, MOEMs, and semiconductor wafer. It can provide non-destructive quantitative measurements of surface roughness and geometric pattern characterization with nanometric axial resolution in real-time. However, the measurement results may be affected by an additional phase curvature introduced by the microscope objective (MO) used in DHM. It needs to be removed either by numerical compensation or by physical compensation.We present a method of physical spherical phase compensation for reflection DHM in the Michelson configuration. In the object arm, collimated light is used for illumination. Due to the use of the MO, the object wavefront may have a spherical phase curvature. In the reference arm, a lens and mirror combination is used to generate a spherical recording reference wave in order to physically compensate the spherical phase curvature of the object wavefront. By controlling the position of the mirror and the sample stage, the compensation process has been demonstrated. The relative positions of the test specimen and the reference mirror must be fixed for the physical spherical phase to be totally compensated. A numerical plane reference wave is preferred for the numerical reconstruction of the phase introduced by the test specimen. Experimental results on wafer pattern recognition are also given.     

基于自适应条纹投影的高反光物体三维面形测量

结构光投影方法在三维形貌测量中应用广泛,但是由于被测物体表面反射率变化范围较大,过度曝光会导致相位信息无法获取。而传统的高动态范围扫描技术步骤复杂,耗时较长。文中提出一种自适应条纹投影技术,向待测物体表面投射较高灰度级的条纹图,判断并标记过度曝光点。降低投射强度后通过非线性最小二乘法拟合来确定每个饱和像素点最适合的最大输入灰度,用重新生成的自适应条纹图来采集图像并进行相位计算和三维形貌恢复。通过实验验证,该方法可以对物体表面的高反光区域进行有效测量,避免过度饱和,仿真误差在0.02 mm范围内,实测误差约为0.14 mm,实际实验对过曝点的补偿率可达到99%。     

3-D object profilometry based on direct fringe displacement analysis

A simple, fast and accurate method for 3-D object profilometry is proposed and verified by simulation and experiment. The profilometry method is based on the principle that the height data of a measured object can be obtained from the relevant fringe displacement, which in turn can be obtained by determining the precise position of the fringe center on the reference plane and on the object's surface. With the aid of a fringe skeleton extraction technique, the 3-D information can be acquired even from those images in which some fringes are squeezed, interrupted or shadowed.     

风成海面的极化辐射

采用几何光学模型和统计的方法研究了风成海面的极化辐射特性.本文假设海面由一系列随 机分布的小镜面组成，海面对电磁波的散射可看作镜面的反射，风成海面的辐射是小镜面辐 射的统计平均.计算了前三个Stokes 参数，结果表明辐射亮温随方位的变化关系为余弦函数 ，周期为π；辐射亮温随方位角的变化幅度为几个Κ.风成海面的极化辐射特性提供了利用 被动微波遥感手段反演海洋风场的途径. 关键词： 极化 辐射 亮温 风成海面