Multiple self-mixing interferometry algorithm based on phase modulation for vibration measurement

A novel algorithm based on a phase modulation and demodulation technique for multiple self-mixing interferometry was proposed in this paper. This algorithm can measure nanoscale vibration in real time and enhance the measurement resolution of a multiple self-mixing interferometer twofold compared with that of a self-mixing interferometer. In this paper, the principles of the method were described in detail, and a phase equation for multiple self-mixing interferometry was derived. Experiments were confirmed by conducting a series of experiments with different amplitudes, different signal-to-noise ratios, and different vibration waveforms. The experimental results showed that the algorithm can rapidly demodulate vibration in real time and indicated good agreement between theory and experiment.     

正弦相位调制自混合干涉微位移测量精度分析

为了提高自混合干涉仪的位移测量精度,提出将正弦相位调制技术引入自混合干涉中。相位调制由置于自混合干涉仪外腔中的电光晶体实现,相位解调由傅里叶分析的方法得到。对位移测量过程中各种可能的误差来源如电光晶体调制不稳定性、光在外腔中的二次反馈效应等对测量精度的影响进行了模拟分析,从理论上得到了这种新的信号处理方法可以达到纳米级的测量精度。实验上,用高精度的商用压电陶瓷标定的结果验证了这种正弦相位调制自混合干涉仪在普通实验室噪声环境中可以达到纳米级的位移测量精度。     

基于适度光反馈自混合干涉技术的振动测量

光反馈自混合干涉技术是一种新浮现的有别于传统双光束干涉的一类新的测试技术。为了在适度光反馈下进行振动的精密测量,提出了一种基于适度光反馈自混合干涉技术的振动测量方法。经对光反馈自混合干涉信号条纹分析,发现通过选定合适的光反馈水平及激光器线宽展宽因数,可以得到锯齿干涉条纹。这种干涉信号不仅包含振动幅度信息也包含振动方向信息。该振动测量方法利用锯齿干涉条纹的特点,首先通过条纹记数实现大范围振幅粗测,具有半波长位移分辨力;然后基于适度光反馈下小数条纹的特点,给出了小于半波长位移测量的线性表达式,从而实现位移的精测。仿真计算表明,该方法可以实现大量程高分辨力振动位移测量,在叠加20 dB的噪声下,振幅测量相对误差平均为0.5%。     

自混合干涉信号的位相调制

自混合干涉因其结构简单、紧凑、稳定且易准直等特点而被广泛应用于测量领域。从自混合干涉和电光晶体调制位相的基本原理出发,通过将电光晶体引入自混合干涉外腔调制,研究了自混合干涉测量中电光晶体的位相调制性能。实验证明,利用晶体的调制性能对自混合干涉信号进行位相调制,在很宽的频率范围内都能保证很高的调制精度,测量误差小,具有很好的应用前景。     

Quadrature demodulation technique for self-mixing interferometry displacement sensor

A new, to the best of our knowledge, signal processing method based on quadrature demodulation technique is presented for laser diode self-mixing interferometry(LDSMI) displacement sensor. Phase modulation of the laser beam is obtained by an electro-optic modulator (EOM) in the external cavity. Detection of the target's displacement can be easily achieved by sampling the interference signal at those times which satisfied certain conditions. The major advantage of the technique is that it does not involve any complicated calculation and insensitive to the sampling error. Experimental results show that the proposed method can effectively improve the displacement measurement resolution of the laser diode self-mixing displacement sensor to a few nanometers.     

两重外腔的自混合干涉及其信号分析

提出了具有两重外腔的自混合干涉。根据半导体激光器的自混合干涉理论，研究了两重外腔自混合干涉模型，及其信号的调制和解调方法。该方法用一个附加的参考反射镜在半导体激光器(LD)和目标间形成两重外腔，参考外腔用于补偿光学频率涨落引入的相位误差。用快速傅立叶变换相位探测技术(FFT)分析自混合干涉信号。运用这些方法，可提高相位测量精度，在微光机电系统、光学工程和其他工程应用上有潜在的实用价值。     

Fourier transform method for self-mixing interference signal analysis

Self-mixing interferometry (SMI) has been used to measure the distance and displacement. Although the principle of self-mixing interference is different conventional interference, we concluded that FFT analysis technique could also be used to detect the signal phase and increase the measurement precision of self-mixing interferometry.First the SMI signal is obtained by feeding the light from the target to cavity of laser diode, then it is pre-processed by an analog subtraction circuit to remove the overlapped output intensity due to the injection current modulation. Finally, SMI signal is analyzed by FFT phase detection method. Theoretical analysis and simulation calculations are presented. Experimentally, displacement of a PZT-driven target was measured with a precision of λ/50.     

利用自混合干涉效应的条纹计数法对扬声器振动特性的实验研究(英文)

基于半导体激光器的自混合干涉效应，通过实验研究了扬声器的振动特性。实验中，用粘在扬声器振膜上的反射镜作为目标物体（该反射镜的反射率为95％，扬声器用50Hz的正弦波驱动）,然后通过条纹计数法获得扬声器的振幅。实验结果表明，在一定范围内，扬声器的振幅与驱动电压呈线性关系。该实验装置极其简单紧凑，自混合干涉信号也十分清晰，实验方法迅速，价格低廉，易实现，而且不需要专用电源，也不需要其他的光学仪器，这一系列优点充分表明自混合干涉技术在振动测量领域具有广阔的发展前景。     

Self-mixing interferometry based on sinusoidal phase modulation and integrating-bucket method

In order to realize real-time displacement measurement with high resolution, sinusoidal phase modulation and integrating-bucket method are introduced in the self-mixing interference (SMI) system firstly. The phase of the laser beam is modulated by an electro-optic modulator (EOM) in the external cavity. Theoretical analysis, simulation results and error evaluation are presented. Experimentally, the micro-displacement of a high-precision commercial PZT is reconstructed and the reconstruction accuracy is on the order of nanometers for displacements of a few micrometers.     

仿真分析测量参数对光反馈自混合信号的影响

针对含有光反馈的半导体激光器,在外腔波动条件下,研究其光反馈干涉自混合信号模型。经计算仿真分析,得到了外腔运动参数及激光器本身参数的变化对光反馈自混合信号波形的影响规律。结果表明,利用光反馈自混合干涉效应可以进行多参数传感测量。     

激光自混合干涉测振仪的硬件系统设计

基于激光自混合干涉技术的特点,设计了一种新型半导体激光自混合干涉测振仪系统。系统将频率调制引入自混合干涉中,实现对振动物体的非接触式测量。介绍了激光自混合干涉测振仪的原理、仪器系统的光路系统设计、信号的调制模块设计、解调模块设计以及DSP系统的采集处理模块设计。该仪器体积小、成本低、易于准直、可以非接触式测量,能够测量振动频率在50kHz内的物体,其中包括非周期性振动。可以测量出振动物体的振动频率、振幅以及还原振动波形,振动幅度测量精度可以达到0．325μm,频率精度为1Hz。     

The study of laser self-mixing vibrometer employing different feedback regime using a VCSELS

Laser interferometry based on self-mixing effect widely used to measure displacement, velocity, vibration and distance due to compactness, non-contact, as well as low cost. An important use of the self-mixing effect inside a laser diode is in optical self-mixing vibrometer. We have experimentally investigated self-mixing interference produced by the feedback of light from a vibrated target into a vertical-cavity surface-emitting laser for sensing applications. In this paper, the self-mixing vibrometer employing different feedback regime is discussed and a theoretical analysis is also proposed. Numerical analysis focused on the distortion self-mixing waveform. Numerical analysis and experimental results show that mode-hop occurs when the laser self-mixing vibrometer employing at high feedback level.     

Self-mixing interferometer based on temporal-carrier phase-shifting technique for micro-displacement reconstruction

A novel self-mixing interferometer based on temporal-carrier phase-shifting technique is presented. The phase of the laser beam is modulated with a triangular wave by an electro-optic modulator (EOM) in the external cavity. Phase demodulation of the interference signal is achieved by five-step Schwider-Hariharan algorithm combined with a special sampling technique. Theoretical analysis and simulation results are presented. Some errors of the technique have been discussed. Experimentally, the new interferometer is applied to measure the displacement of a high precision commercial PZT and a displacement measurement accuracy of λ/60 can be obtained.     

All-fiber self-mixing interferometer for displacement measurement based on the quadrature demodulation technique

The quadrature demodulation algorithm used for all-fiber self-mixing sensors is applied to displacement measurements. A fiber electro-optic modulator is used to introduce phase modulation, which can improve the accuracy of measurements. Although phase modulation is easily affected by the polarization state of light, this method can process signals by sampling the interference signals at specific time points. Such signals are insensitive to polarization, and thus, the calculation process and experimental devices are simplified. The feasibility of the algorithm is validated via a series of experiments under nonpolarization-maintaining conditions.     

基于二次反馈激光自混合新型测距方法

在基于激光自混合干涉的理论上,提出了一种利用二次反馈激光自混合干涉的新型测距方法。利用三角波电流对半导体激光器进行调制,得到一次反馈自混合干涉信号。通过对信号分析可知,当半导体激光器被调制后,会产生一系列的模跳,模跳的数量与绝对距离成正比。通过计算在一个三角波电流调制周期内模跳的数量,就可以求出绝对距离。利用多重激光自混合的概念,提出该种新型测距方法。建立了距离测量系统,进行了实验验证。实验结果表明:由于步长分辨率精度的提高,测距精度明显提高。     

Self-mixing interference in an all-fiberized configuration Er-Yb codoped distributed Bragg reflector laser for vibration measurement

Self-mixing sensing technique can be used for measuring distances, displacements, velocities and vibration. In this paper, for good sensitivity vibration measurement system, self-mixing vibrator using an all-fiberized configuration Er³⁺-Yb³⁺ Distributed Bragg Reflector (EYDBR) laser is proposed and investigated for the first time. Results obtained demonstrate that all-fiberized configuration EYDBR laser present a powerful tool for the advancement of self-mixing vibration sensor and provide a potential remote measurement of the vibration compared with the optical feedback in other traditional fiber lasers.     

Influence of external objects scattering property on self-mixing signal inside fiber laser

The self-mixing sensor based on Er³⁺–Yb³⁺ co-doped Distributed Bragg reflector fiber laser (EYDBR) has been demonstrated for detecting the effect of external objects scattering property on self-mixing signal. Results show that self-mixing interference inside fiber laser with short cavity length especially EYDBR fiber laser can keep high SNR with different types of scattering surfaces even the white print paper. Meanwhile, we have obtained a high and stable SNR at least 29.9 dB in measurements at incident angles smaller than 20°. In this way, the sensing system we demonstrate is suitable for vibration and displacement measurements, particularly for high-precision industrial measurements.     

Multiple self-mixing interferometry based on lock-in amplifier analysis for vibration measurement

Optical Review - In this paper, a novel phase demodulation method for multiple self-mixing interferometry (MSMI) is proposed, which can improve the resolution and accuracy of vibration measurement...     

Nanometer-scale displacement sensing using self-mixing interferometry with a correlation-based signal processing technique

A self-mixing interferometer is proposed to measure nanometre-scale optical path length changes in the interferometer’s external cavity. As light source, the developed technique uses a blue emitting GaN laser diode. An external reflector, a silicon mirror, driven by a piezo nanopositioner is used to produce an interference signal which is detected with the monitor photodiode of the laser diode. Changing the optical path length of the external cavity introduces a phase difference to the interference signal. This phase difference is detected using a signal processing algorithm based on Pearson’s correlation coefficient and cubic spline interpolation techniques. The results show that the average deviation between the measured and actual displacements of the silicon mirror is 3.1 nm in the 0–110 nm displacement range. Moreover, the measured displacements follow linearly the actual displacement of the silicon mirror. Finally, the paper considers the effects produced by the temperature and current stability of the laser diode as well as dispersion effects in the external cavity of the interferometer. These reduce the sensor’s measurement accuracy especially in long-term measurements.     

雨滴碰击光缆后光纤应变相位调制分析

基于云动力学理论,分析了雨滴碰击光缆后径向应变导致光纤纤芯折射率及形状发生改变,使光纤内传输光相位受到调制的过程.建立了雨滴碰击光缆引起光纤内传输光相位调制的模型,获得了降雨强度与相位调制之间的关系.研制了雨滴碰击光缆相位调制实验室验证系统,对比了模拟降雨强度分别为3,5,7,10,15,18,22,30 mm/h时的实验测试与仿真结果,两者变化趋势一致,误差在9%以内.该模型可用于仿真获得不同降雨强度下雨滴碰击光缆引起的光相位调制,为进一步研究降雨对光纤振动传感系统性能的影响,优化光纤振动传感工程应用系统,提出可行的雨量补偿方案提供了理论参考.