High resolution spectral-domain optical coherence tomography using a thermal light source

A high resolution spectral-domain optical coherence tomography (SD-OCT) system based on a thermal light source was presented. A novel normalized method was introduced to remove the background noise and the DC noise of the interference spectrum. A Gaussian spectral calibration procedure was performed to improve axial resolution and image quality before reconstructing OCT image. With the proposed method, the quality of the obtained images was greatly improved. Two-dimensional (2D) cross-sectional images with axial resolution of 1.2?μm were obtained. Furthermore, the film thickness of single-layer film sample was obtained. The experimental result demonstrates the SD-OCT system has potential for film thickness measurement and surface topography.     

基于频域变换的MEMS声学薄膜缺陷检测算法

The micro-electro-mechanical system (MEMS) acoustic film has extremely high requirements for tape-out, storage and packaging environments, and its surface defects will affect the quality and performance of MEMS devices. The image defects detection is an effective non-contact optical detection means that can effectively improve the yield rate of MEMS production. However, the periodic structure texture of the MEMS devices surface will interfere with defect detection. A acoustic film defect detection algorithm based on frequency domain transformation was proposed. By calculating the gradient distribution of spectrogram and establishing the Boolean mask, the dominant frequency components corresponding to the periodic structure texture were eliminated. The residual spectrograms were subjected to a Fourier inversion to reconstruct the defect images. The reconstructed images were decomposed by single-layer Haar wavelet to obtain the low-frequency sub-band image and the defect information was extracted by simple threshold segmentation. The defect detection effects of different types of MEMS acoustic film were showed. The experimental results show that it is reasonable to set the zoom constant in the range of 0.7~1.0.     

太赫兹无损检测的多特征参数神经网络分析技术

提出一种基于太赫兹无损检测的多特征参数神经网络分析技术,用于分析耐高温复合材料的粘贴质量无损检测.采用抽片式方法设计了一种耐高温复合材料的脱粘缺陷样品,抽片厚度为0.1mm.采用太赫兹时域光谱无损检测技术对耐高温复合材料的多层脱粘缺陷进行了检测试验研究,对比了上下脱粘缺陷所对应的太赫兹时域波形及频谱信息的异同,针对性地建立了耐高温复合材料粘贴质量的上层脱粘参数、下层脱粘参数、频域吸收质心参数等多特征参数,将特征参数进行优化作为反向传播神经网络的输入并对其进行上下脱粘分类识别.通过对反向传播神经网络的训练测试,实现了耐高温复合材料上层脱粘0.1mm、下层脱粘0.1mm的脱粘缺陷的识别.     

New method for fast morphological characterization of organic polycrystalline films by polarized optical microscopy

A new method to visualize the large-scale crystal grain morphology of organic polycrystalline films is proposed. First,optical anisotropic transmittance images of polycrystalline zinc phthalocyanine(Zn Pc) films vacuum deposited by weak epitaxial growth(WEG) method were acquired with polarized optical microscopy(POM). Then morphology properties including crystal grain size, distribution, relative orientation, and crystallinity were derived from these images by fitting with a transition dipole model. At last, atomic force microscopy(AFM) imaging was carried out to confirm the fitting and serve as absolute references. This method can be readily generalized to other organic polycrystalline films, thus providing an efficient way to access the large-scale morphologic properties of organic polycrystalline films, which may prove to be useful in industry as a film quality monitoring method.     

Raman micro‐spectroscopy for quantitative thickness measurement of nanometer thin polymer films

The sensitivity of far‐field Raman micro‐spectroscopy was investigated to determine quantitatively the actual thickness of organic thin films. It is shown that the thickness of organic films can be quantitatively determined down to 3 nm with an error margin of 20% and down to 1.5 nm with an error margin of 100%. Raman imaging of thin‐film surfaces with a far‐field optical microscope establishes the distribution of a polymer with a lateral resolution of ~400 nm and the homogeneity of the film. Raman images are presented for spin‐coated thin films of polysulfone (PSU) with average thicknesses between 3 and 50 nm. In films with an average thickness of 43 nm, the variation in thickness was around 5% for PSU. In films with an average thickness of 3 nm for PSU, the detected thickness variation was 100%. Raman imaging was performed in minutes for a surface area of 900 µm². The results illustrate the ability of far‐field Raman microscopy as a sensitive method to quantitatively determine the thickness of thin films down to the nanometer range. Copyright © 2015 John Wiley & Sons, Ltd.     

组合式力热动态载荷光学窗口的光学特性研究

针对在一定压差及温度梯度等复合环境下工作的大口径光学窗口,提出了一种由光学玻璃与亚克力板组成的光学窗口组合方案,并以热光学分析为基础,对光学窗口整体强度及热环境进行了理论分析计算,得出光学窗口玻璃最小厚度。利用有限元软件将压力场及轴向温度场映射至三维结构模型,计算得到直径为380 mm的光学窗口在不同玻璃厚度下力热耦合的面形变化及成像质量评价指标,并通过相应的环境性试验对仿真结果进行验证。实验结果表明:以K9光学玻璃为原材料的大口径光学窗口在此工作环境下的厚度不小于32.5 mm;当光学窗口厚度为35 mm时,其所受热力学影响可以忽略。因此,35 mm的大口径组合式光学窗口既能满足强度要求,又能满足多光谱相机成像质量要求,为该类窗口的设计提供了依据。     

Polarization modulation imaging ellipsometry for thin film thickness measurement

A polarization modulation (PM) imaging ellipsometer is proposed and setup in order to measure precisely the thickness of thin film. Five images are collected sequentially by CCD camera with respect to five pre-determined azimuth angles of a quarter wave plate (QWP) during measurement. Then two-dimensional (2-D) distributions of the ellipsometric parameters ψ and Δ over the full dynamic range are obtained. Conceptually, PM imaging ellipsometer integrates the features of phase shift interferometry with conventional photometric ellipsometry by rotating the QWP sequentially to produce polarization modulation that is able to measure the thickness of a thin film in two dimensions precisely and quickly. The basic principle of PM imaging ellipsometer is derived wherein features such as common path configuration, full dynamic range of measurement, and insensitive to non-uniform response of the CCD are analyzed. The experimental results verify the ability and performance of PM imaging ellipsometer on 2-D thin film thickness, while the errors regarding the ellipsometric parameters measurements are discussed.     

Determining thickness independently from optical constants by use of ultrafast light

We show that the application of ultrafast techniques, especially terahertz time-domain spectroscopy, allows simultaneous measurements of material thickness and optical constants from transmission measurements, by analyzing not only the phase difference between the main terahertz pulse through the medium but also the subsequent multireflection pulse (an echo) from the medium. Such a method provides a fast and precise characterization of the optical properties and can extract thickness information and hence other optical constants in a broad bandwidth. It may have applications in science and engineering such as in situ film thickness and quality monitoring, optical constants measurement, medical imaging, noninvasive detection, and remote sensing.     

闪光照相系统成像重复性的测量

为了更直观利用照像图像信息考察照相系统的重复性,提出了利用等光程条件下的黑密度分布曲线对成像重复性进行测量的方法,通过两次成像的黑密度分布曲线的线性拟合参数来评估成像系统的成像重复性。实验测量了有无后锥条件下的闪光照相系统的重复性以及底片接收系统的成像重复性,实验结果表明:后锥的存在对成像重复性没有明显影响,底片接收时闪光照相系统的成像重复性约为5%,底片本身引入的成像重复误差约为1.6%。     

闪光照相系统成像重复性的测量

为了更直观利用照像图像信息考察照相系统的重复性,提出了利用等光程条件下的黑密度分布曲线对成像重复性进行测量的方法,通过两次成像的黑密度分布曲线的线性拟合参数来评估成像系统的成像重复性。实验测量了有无后锥条件下的闪光照相系统的重复性以及底片接收系统的成像重复性,实验结果表明:后锥的存在对成像重复性没有明显影响,底片接收时闪光照相系统的成像重复性约为5％,底片本身引入的成像重复误差约为1.6％。     

Studies on the influence of argon flow rate on PECVD grown diamond-like nanocomposite film

Diamond like nanocomposite film is grown using PECVD method for its use as IR window. It is seen that the argon flow rate variation can change the surface quality and the film thickness and these changes are also not linear. So, depending upon application, argon flow rate is to be optimized. Moreover, an interferometric technique to measure the phase variation of the film surface has been proposed. This phase variation is comparable with the surface quality as obtained from AFM images and can thus be considered as a cheap alternative technique to measure surface quality.     

防离子反馈Al2O3膜对三代夜视成像器件性能的影响

为解决三代微光管寿命问题，采用电子显微镜和质谱仪对微通道板输入面溅射蒸镀的Al₂O₃膜质量进行了分析，研究了膜层对器件性能的影响，并就Al₂O₃给三代微光夜视成像器件带来的成像质量问题进行了讨论。研究结果表明：尽管Al₂O₃薄膜可以有效地防止离子反馈，但给管子成像质量带来了严重影响，使得图像模糊，信噪比降低等。提出了从本质上解决器件寿命问题的有效措施是将光电阴极与显示屏进行真空隔离，以实现光电阴极无离子反馈的轰击。     

Optical film with microstructures array for slim-type backlight applications

A novel optical film with optical microstructures is proposed for enhancing the light control in slim-type backlight modules. The proposed film enables a homogeneous luminance distribution to be obtained though an appropriate adjustment of the filling ratio of the optical microstructures in different regions of the backlight unit. The simulation results show that the luminance provided by a backlight incorporating a filling-ratio-optimized optical film and a pyramid-structured brightness enhancement film is approximately 1.5 times of the luminance obtained from a backlight with conventional optical films. In addition, the proposed film enables a significant reduction in the thickness of the backlight unit. Thus, the novel optical film is suitable for a slim bottom-lit backlight module.     

Three-dimensional visualization of objects in scattering medium using integral imaging and spectral analysis

This paper presents a three-dimensional visualization method of 3D objects in a scattering medium. The proposed method employs integral imaging and spectral analysis to improve the visual quality of 3D images. The images observed from 3D objects in the scattering medium such as turbid water suffer from image degradation due to scattering. The main reason is that the observed image signal is very weak compared with the scattering signal. Common image enhancement techniques including histogram equalization and contrast enhancement works improperly to overcome the problem. Thus, integral imaging that enables to integrate the weak signals from multiple images was discussed to improve image quality. In this paper, we apply spectral analysis to an integral imaging system such as the computational integral imaging reconstruction. Also, we introduce a signal model with a visibility parameter to analyze the scattering signal. The proposed method based on spectral analysis efficiently estimates the original signal and it is applied to elemental images. The visibility-enhanced elemental images are then used to reconstruct 3D images using a computational integral imaging reconstruction algorithm. To evaluate the proposed method, we perform the optical experiments for 3D objects in turbid water. The experimental results indicate that the proposed method outperforms the existing methods.     

Morphology and transmittance of porous alumina on glass substrate

The porous optical film has higher threshold of laser-induced damage than densified films, for the study of mechanism of laser-induced damage of porous optical film with ordered pore structure. Porous anodic alumina (PAA) film with high transmittance on glass substrate has been prepared. Aluminum film was deposited on glass substrate by means of resistance and electron beam heat (EBH) evaporation. Porous alumina was prepared in oxalic acid solution under different anodizing conditions. At normal incidence, the optical transmittance spectrum over 300-1000 nm spectra region was obtained by spectrophotometer. SEM was introduced to analysis the morphology of the porous alumina film. The pore aperture increased with the increase of anodizing voltage, which resulted in a rapid decrease of the pore concentration and the optical thickness of porous alumina film. Damage morphology of porous alumina film is found to be typically defects initiated, and the defect is the pore presented on the film.     

光学薄膜的误差、允差分析及生产过程中的计算机控制

指出实际生产出的薄膜的光学特性和理论计算得到的光学特性常常存在差别的原因．诸如理论模型假设时忽略一些因素引起的差别．薄膜久置引起的薄膜结构改变或吸潮、污染等．以及制造过程中造成的误差(光学监控系统引起的薄膜厚度和折射率的误差)。针对各种误差的来源提出了相应的改善方法。通过对光学监控系统引起的薄膜厚度和折射率的误差进行分析．提出膜系的允差分析．尽量减小由于监控设备引起的误差。最后介绍了实际生产过程中计算机的优化思路。     

规整膜系层厚允许误差的研究

提出了一种通过计算机模拟薄膜的淀积过程来计算规整膜系层厚允许误差的方法,所计算的层厚允许误差不仅取决于膜系的设计结构,还与薄膜的淀积工艺、镀膜设备的监控精度有关.实验结果表明:采用这种方法所计算出的层厚允许误差对于薄膜的实际镀制具有指导意义.     

Full range complex spectral optical coherence tomography technique in eye imaging

We demonstrate a new implementation of complex spectral optical coherence tomography (OCT) in biomedical imaging. By reconstruction of both amplitude and phase we are able to use the negative and positive optical path differences to get images of objects of considerable thickness. An accompanying reduction of coherent noise improves the quality of the images. The property of the complex spectral OCT that permits the measurement range to be increased and permits the simultaneous use of phase and amplitude in spectral systems was not described previously. To show the potential of this technique we measured an anterior chamber of a porcine eye in vitro.     

Measurement of thicknesses of thin films by the Fourier spectrometry method

A Fourier spectrometry method for measuring the thickness of thin and ultrathin films with the help of an additional peak that depends on the optical thickness of the deposited film and is situated outside the region of the central peak of the interferogram is proposed. The experiment demonstrates the necessity of considering the change in optical path in the substrate that is induced by the deposited film.     

Non-imaging ray-tracing for sputtering simulation with apodization

Although apodization patterns have been adopted for the analysis of sputtering sources, the analytical solutions for the film thickness equations are yet limited to only simple conditions. Empirical formulations for thin film sputtering lacking the flexibility in dealing with multi-substrate conditions, a suitable cost-effective procedure is required to estimate the film thickness distribution. This study reports a cross-discipline simulation program, which is based on discrete particle Monte-Carlo methods and has been successfully applied to a non-imaging design to solve problems associated with sputtering uniformity. Robustness of the present method is first proved by comparing it with a typical analytical solution. Further, this report also investigates the overall all effects cause by the sizes of the deposited substrate, such that the determination of the distance between the target surface and the apodization index can be complete. This verifies the capability of the proposed method for solving the sputtering film thickness problems. The benefit is that an optical thin film engineer can, using the same optical software, design a specific optical component and consider the possible coating qualities with thickness tolerance, during the design stage.