Wet-etched diffractive lenses for hard X-rays

A method for the fabrication of linear transmission Fresnel zone plates for X-rays in the 8-15 keV photon energy range is presented. The diffractive elements are generated by electron-beam lithography and chemical wet etching of (110)-oriented silicon membrane substrates. Diffractive structures with aspect ratios of more than 30 for 300 nm-wide structures were obtained. The diffraction efficiency of such a lens was measured for 13.3 keV radiation to be 20%.     

含多层衍射光学元件的折/衍射混合头盔目镜

基于对多层衍射元件的衍射效率的理论分析,设计了用于头盔显示器的含有多层衍射元件的60视场折/衍射混合目镜系统。系统在设计波段和整个视场范围内衍射效率均在90 %以上,提高了光能利用率和像面对比度。目镜的出瞳距离为22 mm,出瞳直径为8 mm。调制传递函数（MTF）在25 lp/mm时全视场均在0.38以上,满足VGA分辨率要求。目镜中畸变为4.8%,垂轴色差最大为10 m。整个系统结构紧凑,镜头总长26.8 mm,最大直径16 mm,全系统质量仅8 g,实现了光学系统的轻小型化     

折衍混合光学系统超宽温消热差设计

利用折衍混合结构设计了超宽温范围内的光学被动式消热差Petzval物镜,系统工作波段为3.2～4.5 m,视场角为8.42,焦距为95 mm,后工作距为60.5 mm。使用锗和硅两种材料,引入了2个非球面和1个衍射面, 实现了消热差和结构简单轻量化,该系统在－80～200 ℃范围内, 调制传递函数(MTF) 优于0.7,接近衍射极限, 成像质量良好,该系统适用于像元尺寸为35 m、像元数320240的非制冷红外焦平面阵列探测器。     

折衍混合光学系统超宽温消热差设计

利用折衍混合结构设计了超宽温范围内的光学被动式消热差Petzval物镜,系统工作波段为3.2～4.5 m,视场角为8.42,焦距为95 mm,后工作距为60.5 mm。使用锗和硅两种材料,引入了2个非球面和1个衍射面, 实现了消热差和结构简单轻量化,该系统在－80～200 ℃范围内, 调制传递函数(MTF) 优于0.7,接近衍射极限, 成像质量良好,该系统适用于像元尺寸为35 m、像元数320240的非制冷红外焦平面阵列探测器。     

一种无损检测眼镜镜片折射率的方法

提出了一种无损检测眼镜镜片基底折射率的方法。该方法通过测量眼镜镜片在可见光区域内的反射比数据,采用高斯牛顿迭代法拟合反射比曲线来检测镜片基底折射率,并用Cauchy模型分析了镜片折射率的色散现象。检测结果表明,镜片折射率的相对误差不超过2%,可基本满足对镜片折射率区间的判定。     

Analytic design of multiple-axis, multifocal diffractive lenses

In this Letter, we introduce an analytic procedure for designing diffractive lenses using the combination of wavefronts aberrated by Zernike polynomials. We show how to design amplitude-only, phase-only, continuous, and binary lenses providing equivalent results. As an example we apply it to the design of a multiple-axis, multifocal lens. The number of foci and their positions can be easily controlled. Theoretical predictions have been experimentally confirmed. The main advantage of this procedure is that, because it is simple and intuitive, it can be used successfully for the design of complex lenses.     

Precise etching of fused silica for refractive and diffractive micro-optical applications

One of the challenges of current laser material processing is the high-quality etching of transparent materials for micro-optical applications. The ablation of transparent materials with UV-, ultrashort pulse and even of VUV-lasers is characterized by a high etch rate and a high laser fluence and causes considerable surface roughness evolution. The combination of specific laser processing techniques, e.g., scanning contour mask technique and direct writing with a small laser spot, with laser-induced backside wet etching (LIBWE) allows the direct machining of dielectric materials with an almost optical quality for the fabrication of diffractive as well as refractive topographic features. The etching of multi-level elements, gratings with variable depth, micro-lenses as well as free-form surface topographies with PV-values from some 100 nm to a few micrometers, a nanometer depth accuracy and a low roughness of less than 10 nm rms is presented and demonstrates the capabilities of this approach for precision engineering.     

大焦深人工晶体的设计

运用Zemax光学设计软件构建Liou-Brennan眼模型,设计了增大焦深的非球面、折射型多焦点和衍射型多焦点人工晶体,并用点列图和视锐度分析了所设计的人工晶体的光学质量。对于非球面人工晶体,在3mm瞳孔下,当人眼无球差时,最佳视锐度相当高,但焦深仅为1．4m^-1;当人眼球差为0．4λ时,最佳视锐度可达0．9,焦深达2．2m,同时在整个焦深范围内视觉质量均优越。对于衍射型和折射型多焦点人工晶体,在明视条件下,虽然视远和视近时视觉质量良好,但是中间距离的视锐度〈0．5。衍射型多焦点人工晶体只有81％的光能用于成像,远近焦点能量均分,且与瞳孔大小无关;折射型多焦点人工晶体的远近焦点能量与瞳孔大小相关。设计的人工晶体均能增大人眼的焦深,但各有优缺点,临床上应该酌情选用。     

衍射光学透镜色散特性的仿真研究

在白光照射下,衍射光学透镜的焦距不仅同材料色散和波长色散有关,而且还同孔径因子有关。基于折射率随波长变化的经验公式,利用自编的仿真计算程序包,得到了透镜焦距、材料色散、波长色散、孔径因子之间的关系曲线。所获得的理论分析和仿真计算结果为进一步设计消色差的纯衍射目视光学系统提供了理论依据,具有一定的指导意义。     

Fabrication of three-focal diffractive lenses by two-photon polymerization technique

Fabrication of submicron-height relief of three-focal diffractive lenses using two-photon polymerization is studied. Optical properties of the designed lenses are investigated theoretically and experimentally. The proposed design of the combined diffractive?Crefractive lenses is promising for the realization of three-focal optical ophthalmological implants with predetermined light intensity distribution between the foci. The realized three-focal optical element has a diameter size of 2.7?mm with the focal distances in the range of 27?C34?mm.     

Fabrication of gradient refractive index ball lenses

The theoretical model of the Maxwell fish eye sphere lens has long been regarded as an absolute optical instrument without practical application since it was proposed. But the study on the theory of Maxwell fish eye micro-spherical lens shows that at certain condition it has fine image formation ability and coupling efficiency. Based on the Fick's diffusion equations, the distribution function of refractive index of gradient refractive index (GRIN) ball lenses is derived. Lithium-containing silicate glass is fabricated and GRIN ball lenses whose diameters are from 0.3 to 3.0 mm are made by ion exchange and the sagging method in sodium nitrate. Radial refractive index profiles of these GRIN ball lens are measured by interferometer. Results show that the distribution of the index of refraction is a parabolic curve and in concordance with the computational consequence and its Δn is 0.0002.     

Spectral study of polysiloxane intraocular lenses

Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 50, No. 5, pp. 833–836, May, 1989.     

折射-衍射混合高精度平行光管的设计

 平行光管是安装、调校、测试光学仪器的重要工具之一,也是光学量度仪器中的重要组成部分。为了提高平行光管的测量精度,利用衍射元件的特殊色差特性和像差特性,提出了折射-衍射混合平行光管的设计方案,系统的入瞳口径为80 mm,焦距为500 mm,系统总长小于550 mm。设计结果表明,系统的最大弥散斑直径为5.2 mm,角分辨率小于4.3″,在空间频率50 lp/mm处,系统的调制传递函数高于0.8,接近衍射极限。     

Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses

The full aperture complex amplitude transmittance function of a multi-level diffraction lens with maskalignment errors was derived based on scalar diffraction theory. The point spread function(PSF) was calculated by the Kirchhoff diffraction integral. It is found that the radius of the Airy disk increases with the increase of the error in the direction of misalignment, and the image center shifts along the direction of misalignment. A fourlevel diffractive lens with a diameter of 80 mm was fabricated, and its PSF and diffraction efficiency of +1 st order were calculated and measured. The distribution of PSF is consistent with the calculated results, and the tested diffraction efficiency is slightly smaller than the calculated value; the relative error is 5.71%.     

复合折射透镜的进展和应用

文章介绍了X射线复合折射透镜的工作原理,详细回顾了X射线复合折射透镜的发展历程,综述了近年来X射线复合折射透镜的研究成果及其主要应用领域.     

一种用于高斯光束整形的衍折射光学元件的研究

由衍射光学元件（ＤＯＥ）和折射透镜组成的衍折射光学元件，用于较大功率密度和光束半径的高斯光束的聚焦。运用ＧＳ算法，用外围的ＤＯＥ产生一个偏移的高斯光束分布，与中心的折射透镜会聚后的高斯光束相干叠加在一个很小的聚焦圆内，在聚焦圆内的光强分布不平整度小于５％。给出了一个圆域基模高斯光束的整形分布，计算误差小于３．５％。     

非制冷长波红外热像仪折衍混合双视场光学系统设计

根据衍射光学元件具有大的负向色散特性,将衍射光学元件应用于红外双视场光学系统中,根据傅里叶光学分析衍射光学元件(DOE)的消色差,列表对比折射透镜与衍射光学透镜的特性,并给出变倍比为4∶1可用作非制冷红外热像仪的光学系统的具体设计实例.系统采用切入式变焦方式,在短焦时切入2片透镜实现宽视场,通过引入二元面和非球面提高了成像质量.设计结果表明:在空间频率11 lp/mm处,短焦距40 mm时,各个视场的MTF值均大于0.6;长焦距160 mm时,各个视场的MTF值均大于0.7,宽视场和窄视场都具有较好的成像质量.     

折射/衍射混合红外双焦光学系统设计

利用二元光学元件消色差和对波面进行任意整形的特点，将二元衍射面应用于红外双焦光学系统中，对变焦方程的解进行了分析，给出了具体的系统设计实例.设计结果表明，在仅使用4片锗透镜的情况下，系统焦距为80 mm，F数为0.8时，系统垂轴像差小于72μm，在10lp/mm时光学传递函数大于0.8；系统焦距为160mm，F数为1.6时，系统垂轴像差小于35μm，在10lp/mm时光学传递函数大于0.7. 关键词： 红外变焦光学系统 折射/衍射混合透镜 光学设计     

折/衍混合长波红外凝视成像系统的杂散光分析

对含有一个用金刚石车削技术制作的衍射光学元件(DOE)的折/衍混合长波红外(LWIR)凝视成像系统进行了杂散光分析.利用LightTools软件对DOE的不同衍射级次、光学表面多次反射、镜筒内壁反射等主要杂散光源进行了模拟和分析,对6种二次反射的模拟结果表明,对归一化的光源,理想光路的像面辐照度为100 W/mm2,每种二次反射会给像面带来0.01 W/mm2的辐照度;反射率为10%的镜筒内壁给像面带来的辐照度为0.01 W/mm2.利用该LWIR凝视成像光学系统进行了相关实验,实验结果证明了上述分析的正确性,表明该项分析有利于对LWIR凝视成像系统光学性能的进一步理解和杂散光的抑制.