超声气体射流辅助飞秒激光刻蚀石英微槽工艺研究

针对飞秒激光加工硬脆材料过程中存在重凝、微裂纹、崩边等物理缺陷,为获得高质量加工面,提出超声气体射流辅助飞秒激光加工方法。以刻蚀石英微槽为研究对象,探讨了超声气体射流辅助飞秒激光加工机理,探究了超声频率、超声功率及气体入口压力对飞秒激光刻蚀石英微槽深度及深宽比的影响规律,对比分析了有无超声气体射流辅助下飞秒激光刻蚀石英微槽形貌。实验结果表明,在飞秒激光重复频率20 kHz、单脉冲能量50μJ、离焦量0μm、扫描速度4 mm/s、单次扫描加工条件下,石英微槽深宽比从无超声气体射流辅助下的0.81提升至超声气体射流辅助下的1.23,槽深由27.16μm增加到48.82μm,此时超声气体射流参数为气体入口压力0.6 MPa、超声频率28 kHz、超声功率300 W。在超声气体射流辅助下石英微槽表面附着颗粒物减小,表面形貌显著提高。     

周期调制结构平面薄膜电爆炸实验研究

在金属层表面引入微结构以实现对Z箍缩等离子体形成和发展过程中不稳定性的调控具有重要研究价值.在“强光一号”装置上(峰值电流~1.4 MA,上升时间~100 ns),开展了针对具有一维周期性凹槽调制结构的金属薄膜的电爆炸实验研究.实验负载采用外推型平面结构,基底为30μm厚铝膜,刻蚀周期为2 mm,刻蚀深度约为10μm.通过激光阴影成像、激光干涉成像和可见光自辐射成像等系统进行联合诊断.实验结果表明刻蚀结构对等离子体发展过程的不稳定性特征产生了明显调制作用,原本征波长也受到抑制,微结构周期对不稳定结构波长产生趋同效应;未刻蚀一侧边界层同样受刻蚀层结构的影响,在不稳定结构上表现出相似形貌,且内外侧不稳定性特征的耦合关联性增强;刻蚀凹槽处在爆炸过程中膨胀更为迅速,形成的表面等离子体结构与初始结构反相;在刻蚀结构的几何突变处会形成细长的等离子体喷流,在二分之一刻蚀波长处出现波谱特征峰.理论分析表明电流密度调制造成电热不稳定性分布改变是调控作用产生的重要原因.     

超声波辅助酸蚀提高熔石英损伤阈值

为了提高熔石英元件表面抗激光损伤阈值,利用超声波辅助HF酸研究平滑光学元件表面缺陷形貌和去除刻蚀后残留物效果,通过扫描电子显微镜电镜和原子力显微镜记录表面形貌结构,以及单脉冲激光辐照测试抗损伤阈值确定实验参数。研究表明,超声波场的引入能催化HF酸的刻蚀速率、提高钝化效果并且更易剥离嵌入的亚μm级杂质粒子。经过实验测试,获得了熔石英类元件相匹配的超声辅助HF酸刻蚀实验参数,研究结果对应用超声波辅助HF酸研究熔石英表面抗激光损伤有重要意义。     

水浴条件下YAG倍频、三倍频激光切割Si片比较

对Nd∶YAG固体激光器倍频、三倍频激光输出在空气和水浴环境下刻蚀Si片进行了研究,分析了刻蚀速率和样品表面形貌,得出了在355 nm刻蚀波长下,水浴环境中,刻蚀速率最快,刻槽宽度最小,小于10 μm的实验结论,为工业应用提供参考.     

锶蒸气中原子激光与离子激光的同时振荡

通过锶蒸气中的高频脉冲放电,实现了锶原子6.45μm自终止跃迁激光和锶离子1.03μm/1.09μm自终止跃迁激光的同时振荡.其中6.45μm激光最大激光平均功率为273mW.在对比实验的基础上分析和讨论了主要工作参数对这两组激光输出影响的差异.     

锶蒸气中原子激光与离子激光的同时振荡

通过锶蒸气中的高频脉冲放电,实现了锶原子6.45*!μm自终止跃迁激光和锶离子1.03*!μm/1.09*!μm自终止跃迁激光的同时振荡.其中6.45*!μm激光最大激光平均功率为273*!mW.在对比实验的基础上分析和讨论了主要工作参数对这两组激光输出影响的差异.     

飞秒激光用多层介质膜脉宽压缩光栅的设计

以薄膜光学的干涉理论和衍射光学的傅里叶模式理论为基础，给出了0.8μm飞秒激光器用多层介质膜脉宽压缩光栅的理论设计；设计采用H3L(HL)^9H0.5L2.4H的多层介质膜为基底，当刻蚀后表面浮雕结构的占宽比为0.35，线密度为1480线/mm，槽深为0.2μm，顶层HfO₂的剩余厚度为0.15μm时，对于Littrow角度(36.7°)和TE波模式入射的衍射光栅其-1级衍射效率达到95％以上. 关键词： 飞秒激光 脉宽压缩光栅 多层介质膜     

用刻蚀坑方法抑制平面型InGaAs/InP盖革模式APD的边缘击穿

通过测量平面型InGaAs/InP雪崩光电二极管闭管扩散器件帽层InP中Zn杂质的分布,拟合出掺杂浓度随扩散深度的变化函数,并且利用离化积分研究不同倍增层厚度下的最佳刻蚀坑深度和最佳刻蚀方法.结果表明在帽层深度不变的情况下,最佳刻蚀坑深度会随着倍增层厚度而变化,当倍增层厚度为1μm左右时刻蚀坑深度在0.1~0.3μm之间.采取反应离子刻蚀可以获得良好的刻蚀坑形貌,有利于边缘击穿的抑制.     

运用泵浦耦合器和飞秒刻蚀光栅制作的全光纤化掺铥光纤激光器(英文)

全光纤化掺铥光纤激光器作为光学参量振荡器的泵浦源,可以实现3～5μm激光输出,在激光雷达和光电对抗领域有着极为重要的应用前景.本文运用全国产化的泵浦光耦合器和双包层掺铥光纤实现了全光纤化掺铥光纤激光器.该光纤激光器采用自制的光纤布喇格光栅作为反射腔镜,增益光纤采用水冷的方式.光纤布喇格光栅通过45fs、800nm的飞秒脉冲光和相位掩模板直接在双包层掺铥光纤上刻蚀得到,泵浦光通过泵浦光耦合器的一端耦合进入增益光纤,产生的激光由泵浦光耦合器的另一端输出.输出激光的最高功率达到22.2W,激光波长为1.96μm,斜率效率约为37%,激光线宽为72.4pm.     

脉冲激光与电化学复合的应力刻蚀加工质量研究

脉冲激光电化学复合加工可以有效去除激光辐照区域内的电解产物, 提高加工效率, 改善加工质量. 针对高性能金属材料的微细加工要求, 采用脉冲激光电化学复合的应力刻蚀加工方法对铝合金的刻蚀特性进行理论和试验研究. 通过比较激光直接刻蚀加工和激光电化学复合加工的特点, 应用扫描电子显微镜、光学轮廓仪等检测技术分析了刻蚀区域的形貌特征. 根据力学电化学原理, 探讨了金属材料微结构加工的应力去除机理. 通过加工试验, 研究了工艺参数和加工方式对加工质量的影响, 采用优化的工艺参数, 加工出了质量较好的微结构. 试验结果表明, 激光电化学复合的连续扫描加工稳定性好, 可以有效地降低表面粗糙度, 提高加工质量. 关键词： 激光电化学 应力刻蚀 加工质量 工艺参数     

Guided-Wave Two-Dimensional Acousto-Optic Scanner Using Proton-Exchanged Lithium Niobate Waveguide

Two-dimensional scanning of a 0.6328 mum guided-light beam has been realized using noncolinear acousto-optic (AO) coplanar Bragg diffraction together with colinear AO guided-mode to substrate radiation-mode conversion in a Z-cut Xpropagation LiNbO3 proton-exchanged (PE) waveguide. The two surface acoustic (SAW) waves utilized are at the center frequencies of 500 and 200 MHz, propagating in the Y and X axes, respectively. Two-dimensional scanning of approximately 720 resolvable light beam spots, namely, 18 40 (horizontal vertical) scanning, has been demonstrated using a light beam of 1.0 mm aperture. The total number of resolvable beam spots can be greatly increased from 720 by simply utilizing SAW transducers of larger bandwidth and a light beam of greater aperture. It should also be possible to significantly increase the diffraction efficiency from 3 % by optimizing the parameters of the PE waveguide and the SAWs.     

Effect ofγ-radiation on the spectral luminescence characteristics of impure cadmium tungstate crystals

Results of a study of the effect of γ-radiation on the spectral luminescence properties of cadmium tungstate crystals doped with silver, bismuth, and molybdenum cations are presented. Spectral characteristics of the nondnnnoped crystals are briefly described. Absorption and photo and X-ray luminescence spectra of the crystals taken before and after exposure to γ-radiation (5.5·10⁴ Gy) are compared. It is found that the spectral characteristics of the crystals doped with silver, bismuth, and molybdenum cations do not change markedly after the exposure. The relation between the type of impurity-induced defects, individual characteristics of the impurity cations, and the character of the effect of γ-radiation on the spectral luminescence properties of impure crystals is analyzed (preliminarily). Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 64, No. 1, pp. 55–60, January–February, 1997.     

Measurement of nonlinear coefficient of optical fiber based on small chirped soliton transmission

We measure the waveform and phase curves of short optical pulses before and after transmission over different lengths of fibers by use of the pulse analyzer with the frequency-resolved optical gating (FROG),and numerically simulate pulse evolution under the experimental conditions.The nonlinear coefficient of the fiber is given by comparing the experimental results with the numerical ones.Difference between the experiment and numerical simulation is analyzed.     

Resonance scattering of canonical elastic shells in absorbing fluid medium

Resonance scattering of elastic spherical shell and cylindrical shell while the surrounding fluid medium has absorption is studied. The normal mode solution derived using exact elastic theory and the separation of variables is still applicable. However, the scattering form function has to be modified for the absorbing medium, otherwise the unreasonable result would be obtained. The backscattering form function in the absorbing medium is redefined, and the form function of elastic spherical and cylindrical shell with vacuum or solid matter filled is calculated in various absorption conditions. The results show that the absorption of surrounding fluid leads to notable attenuation of the coincidence resonances in the mid-frequency, but it has a little influence on the low-frequency resonance scattering induced by the filler inside the shell.     

Single-beam self-referenced phase-sensitive surface plasmon resonance sensor with high detection resolution

A versatile and low-cost single-beam self-referenced phase-sensitive surface plasmon resonance(SPR)sensing system with ultra-high resolution performance is presented.The system exhibits a root-mean-square phase fluctuation of ±0.0028.over a period of 45 min.i.e.a resolution of±5.2×10-9 refractive index units.The enhanced performance has been achieved through the incorporation of three design elements:a true single-beam configuration enabling complete self-referencing so that only the phase change associated with SPR gets detected,a differential measurement scheme to eliminate spurious signals not related to the sensor response,and the elimination of retardation drifts by incorporating temperature stabilization in the liquid crystal phase modulato .Our design should bring the detection sensitivity of non-labeling SPR biosensing closer to that achievable by conventional fluorescence-based techniques.     

Influences of SiO2 protective layers and annealing on the laser-induced damage threshold of Ta2O5 films

Ta2O5 films are prepared on BK7 substrates with conventional electron beam evaporation deposition.The effects of SiO2 protective layers and annealing on the laser-induced damage threshold (LIDT) of the films are investigated.The results show that SiO2 protective layers exert little influence on the electric field intensity(EFI)distribution,microstructure and microdefect density but increase the absorption slightly.Annealing iS effective on decreasing the microdefect density and the absorption of the films.Both SiO2 protective layers and annealing are beneficial to the damage resistance of the films and the latter is more effective to improve the LIDT.Moreover,the maximal LIDT of Ta2O5 films is achieved by the combination of SiO2 protective layers and annealing.     

A stereo matching algorithm using multi-peak candidate matches and geometric constraints

Gray cross correlation matching technique is adopted to extract candidate matches with gray cross correla- tion coefficients less than some certain range of maximal correlation coefficient called multi-peak candidate matches. Multi-peak candidates are extracted corresponding to three closest feature points at first. The corresponding multi-peak candidate matches are used to construct the model polygon. Correspondence is determined based on the local geometric relations between the three feature points and the multi-peak candidates. The disparity test and the global consistency checkout are applied to eliminate the remaining ambiguous matches that are not removed by the local geometric relational test. Experimental results show that the proposed algorithm is feasible and accurate.     

Hybrid Wavelength and Code Division Multiple Access in Optical Networks

A review of schemes for multiple access in fiber optic networks shows that a hybrid of wavelength and code division multiple access (WCDMA) combines the best features of both. In particular, the hybrid scheme retains the large information carrying capacity of wavelength division multiple access (WDMA) and flexibility of code division multiple access (CDMA). In this paper WDMA, optical CDMA (OCDMA), and WCDMA networks are discussed. In OCDMA networks, concept of incoherent and coherent coding including inverse decoding and matched filter is introduced. The delay performance of both WDMA and WCDMA networks, under the simple suboptimum access protocols based on cyclic search, is computed. It has been shown quantitatively that tuning delay significantly affects the delay performance of both WDMA and WCDMA networks. Futhermore, delay performance of WCDMA networks is always better than the WDMA networks for the same tuning delay, load, and number of users.     

Fiber Modal Index Measurements Based on Fiber Gratings

A novel method based on fiber gratings for measuring the effective indices of fiber modes is proposed. The effective index difference between the core mode and a cladding mode was obtained by analyzing the interference fringe of a pair of cascaded long-period fiber gratings. In order to extract the core mode index from the measured index difference, an index matching oil immersion method is proposed. By analyzing the interaction between the cladding mode and the oil applied on the cladding surface, the mode order and the effective index of the involved cladding mode might be calculated. Experimental results about the interference fringe shifts induced by the oil index and the oil-applied length are also presented.     

Optical Pulse Compression Schemes That Use Nonlinear Bragg Gratings

Nonlinear optical pulse compression of picosecond pulses typically requires long lengths of optical fiber and multiple components. Periodic structures, such as fiber Bragg gratings, are highly dispersive at wavelengths outside of the photonic bandgap. This implies that such gratings can be used as very short all-fiber compressors. In this paper a number of such compression schemes are reviewed involving uniform and nonuniform fiber Bragg gratings, relying on both soliton and nonsoliton compression principles. Experimental results supporting the corresponding underlying theory are also presented. Finally, an extension of one of the compression schemes is shown, which allows the generation of adjustable high-repetition rate soliton trains.