Lateral resolution in focused electron beam-induced deposition: scaling laws for pulsed and static exposure

In this work, we review the single-adsorbate time-dependent continuum model for focused electron beam-induced deposition (FEBID). The differential equation for the adsorption rate will be expressed by dimensionless parameters describing the contributions of adsorption, desorption, dissociation, and the surface diffusion of the precursor adsorbates. The contributions are individually presented in order to elucidate their influence during variations in the electron beam exposure time. The findings are condensed into three new scaling laws for pulsed exposure FEBID (or FEB-induced etching) relating the lateral resolution of deposits or etch pits to surface diffusion and electron beam exposure dwell time for a given adsorbate depletion state.     

Visualization of the surface distributions of reactive oxygen species on model human tissues treated by a He+O2 plasma jet

The European Physical Journal D - The present paper intends to be a new study of a widely used precursor in nanostructure deposition and FEBID processes with focus on its fragmentation at...     

Spatial chemistry evolution during focused electron beam-induced deposition: origins and workarounds

The successful application of functional nanostructures, fabricated via focused electron-beam-induced deposition (FEBID), is known to depend crucially on its chemistry as FEBID tends to strong incorporation of carbon. Hence, it is essential to understand the underlying mechanisms which finally determine the elemental composition after fabrication. In this study we focus on these processes from a fundamental point of view by means of (1) varying electron emission on the deposit surface; and (2) changing replenishment mechanism, both driven by the growing deposit itself. First, we revisit previous results concerning chemical variations in nanopillars (with a quasi-1D footprint) depending on the process parameters. In a second step we expand the investigations to deposits with a 3D footprint which are more relevant in the context of applications. Then, we demonstrate how technical setups and directional gas fluxes influence final chemistries. Finally, we put the findings in a bigger context with respect to functionalities which demonstrates the crucial importance of carefully set up fabrication processes to achieve controllable, predictable and reproducible chemistries for FEBID deposits as a key element for industrially oriented applications.     

阵列射流冲击冷却局部对流换热特性的数值计算与试验验证

本文运用数值计算的方法对具有初始横流的阵列射流在不同的排列方式、冲击间距和横流/射流质量流量比下 的流动换热进行了三维数值研究,并采用热色液晶测试技术对阵列射流冲击的冷却表面温度分布进行了试验研究。获得了 每一股射流的冲击冷却局部对流换热系数分布的特征,研究结果表明本文的计算结果与实验特征是基本吻合的。     

Surface diffusion: the low activation energy path for nanotube growth

We present the temperature dependence of the growth rate of carbon nanofibers by plasma-enhanced chemical vapor deposition with Ni, Co, and Fe catalysts. We extrapolate a common low activation energy of 0.23-0.4 eV, much lower than for thermal deposition. The carbon diffusion on the catalyst surface and the stability of the precursor molecules, C2H2 or CH4, are investigated by ab initio plane wave density functional calculations. We find a low activation energy of 0.4 eV for carbon surface diffusion on Ni and Co (111) planes, much lower than for bulk diffusion. The energy barrier for C2H2 and CH4 dissociation is at least 1.3 eV and 0.9 eV, respectively, on Ni(111) planes or step edges. Hence, the rate-limiting step for plasma-enhanced growth is carbon diffusion on the catalyst surface, while an extra barrier is present for thermal growth due to gas decomposition.     

Flow and Heat Transfer Characteristics of in-Line Impinging Jets With Cross-Flow At Short Jet-To-Plate Distance

The aim of this research is to numerically and experimentally study the flow and heat transfer characteristics of in-line impinging jets in cross-flow. The jets from a row of round orifices are perpendicularly impinged on the inner surface of a rectangular wind tunnel at a short distance between the orifice plate and impinged surface (H) of 2D, where D is a diameter of the orifice. The jet velocity was fixed corresponding to Re = 13,400 for all experiments, and the cross-flow velocity was varied at three different velocity ratios (velocity ratio, jet velocity/cross-flow velocity) of 3, 5, and 7. The heat transfer characteristic was visualized using a thermochromic liquid crystal sheet, and the Nusselt number distribution was evaluated by an image processing technique. The flow pattern on the impinged surface was also visualized by an oil film technique. The numerical simulation was used to explore a flow interaction between the impinging jets and cross-flow. The results indicated that Nusselt number peak increased by the increasing cross-flow velocity for short jet-to-plate distance. For the range determined, the maximum local Nusselt number peak was obtained at VR = 3 as the consequence of high velocity and high turbulence kinetic energy of jet impingement.     

Influence of Streamwise Pitch on Local Heat Transfer Distribution for In-Line Arrays of Circular Jets with Spent Air Flow in Two Opposite Directions

Abstract

The effect of streamwise jet-to-jet spacing on local heat transfer distribution due to an in-line rectangular array of confined multiple circular air jets impinging on a surface parallel to the jet plate are experimentally studied. The length-to-diameter ratio of nozzles of the jet plate is 1.0. The flow, after impingement, is constrained to exit in two opposite directions from the confined passage formed between the jet plate and target plate. Mean jet Reynolds numbers based on the nozzle exit diameter (d) covered are 3,000, 5,000, 7,500, and 10,000; jet-to-plate distances studied are d, 2d, and 3d. Streamwise jet-to-jet distances of 3d, 4d, and 5d, and a constant spanwise pitch of 4d, are considered. The jet plates have ten spanwise rows in the streamwise direction and six jets in each spanwise row. The flat heat transfer surface is made of thin stainless-steel metal foil. Local temperature distribution on a target plate is measured using a thermal infrared camera. Wall static pressures in the streamwise direction are measured midway between the spanwise jets to estimate cross-flow velocities and individual jet velocities. The streamwise distribution of the jet flow and the cross flow is found to be least influenced by the streamwise pitch variation for the range of parameters considered during the present study. Heat transfer characteristics are explained partially on the basis of flow distribution. The cooling performance, based on the strip-averaged Nusselt number per unit mass flow rate of coolant per unit area of cooled surface, indicates deterioration for lower streamwise pitch and higher jet-to-plate distance.     

微射流阵列冲击恒热流壁面换热数值模拟

微射流冲击作为一种高热流冷却技术,在大功率激光器、微电子芯片等微型高热流器件冷却方面有广阔应用前景.本文对微射流阵列冲击恒热流表面的换热情况进行数值模拟,详细分析了微射流阵列的换热特点,对比了射流孔顺排和叉排方式的冷却性能,得出射流入口雷诺数、射流孔间距、射流高度等因素对冷却特性的影响规律.     

稠密颗粒射流撞击壁面颗粒膜表面波纹特征

采用高速摄像仪对稠密颗粒射流撞击有限尺寸壁面的流动过程进行了实验研究,重点研究了颗粒膜及其表面波纹特征,考察了颗粒粒径、射流速度和固含率等因素对颗粒膜形态和表面波纹的影响.研究结果表明,随着颗粒粒径增大,稠密颗粒撞壁流由颗粒膜向散射模式转变.与液体射流撞壁液膜相比,颗粒膜扩展角较大,射流速度对其影响不显著.稠密颗粒射流撞壁颗粒膜表面波纹存在明显的叠加现象,颗粒膜表面波纹频率比液膜大约低一个数量级.颗粒膜表面波纹主要由射流脉动引起,表面波纹频率与射流脉动频率具有相同的数量级.     

Protein surface shielding agents in protein crystallization

The molecules adhering temporarily on the surface of protein molecules change the propensity of protein molecules to deposit on the crystal surface in a definite position and orientation. The concepts of competitive adhesion modes and protein surface shielding agents acting on the surface of molecules in a non-equilibrium process of protein crystallization provide a useful platform for the control of crystallization. The desirable goal, i.e. a transient preference of a single dominating adhesion mode between protein molecules during crystallization, leads to uniform deposition of proteins in a crystal. This condition is the most important factor for diffraction quality and thus also for the accuracy of protein structure determination. The presented hypothesis is a generalization of the experimentally well proven behaviour of hydrophilic polymers on the surface of protein molecules of other compounds.     

Effect of temperature on the growth rate of tin dioxide whiskers formed by physical vapor deposition

The effect of temperature on the vertical growth rate of functional tin dioxide nanostructures formed by physical vapor deposition from a gas phase is studied. A model is proposed to describe the formation of tin dioxide nanocrystals. This model adequately describes the experimentally detected effect of the deposition zone temperature on the nanocrystal growth rate in the temperature range under study. An analytical relation between the growth rate of a nanowhisker, its geometric parameters, the nanowhisker material, the substrate material, and the technological parameters of its formation is revealed. The crystal growth rate is found to increase with the deposition zone temperature, which can be caused by an activation character of nucleation processes and precursor mass transport along the substrate surface and the lateral nanocrystal surface.     

气体-表面相互作用的分子动力学模拟研究

采用分子动力学模拟方法研究了气体分子Ar在光滑和粗糙Pt表面上的散射规律.提出了一种速度抽样方法,计算了不同温度条件下气体分子对光滑和粗糙表面的切向动量适应系数和吸附概率.结果显示：光滑表面条件下,气体分子的切向动量系数和吸附概率都随着温度的升高而降低;粗糙度对气体分子切向动量与表面的适应具有极大的促进作用,当粗糙度足够大时,切向动量适应系数的大小趋近于1.0,对温度的敏感性也逐渐降低.采用粒子束方法对气体分子在光滑和粗糙表面上的散射规律进行了定量分析.总结了散射过程中气体分子的典型轨迹和动量变化规律,将气体分子在光滑表面的散射分为两种类型：单次碰撞后散射和多次碰撞后散射.单次碰撞后散射的气体分子平均切向动量有所减小,而经过多次碰撞后散射的气体分子则倾向于保持原有的平均切向动量.对于粗糙表面,粗糙度的存在使气体分子与表面间的动量和能量适应更加充分,导致气体分子在较粗糙表面上散射后的平均切向动量大幅减小并接近于0,且气体分子在表面上经历的碰撞次数越多,其散射后的能量损失越严重.     

On the possibility of controlling transonic profile flow with energy deposition by means of a plasma-sheet nanosecond discharge

A way of effectively affecting the gasdynamic structures of a transonic flow over a surface by means of instantaneous local directed energy deposition into a near-surface layer is proposed. Experimental investigations into the influence of a pulsed high-current nanosecond surface discharge of the “plasma sheet” type on gas fast flow with a shock wave near the surface are carried out. The self-localization of energy deposition into a low-pressure region in front of the shock wave is described. Based on this effect, a facility for automated energy deposition into a dynamic region bounded by the moving shock front can be designed. The limiting value of the specific energy deposition on the surface in front of the shock wave is found. With the help of the direct-shadow method, an unsteady quasi-two-dimensional discontinuous flow arising when a plasma sheet is initiated on the wall in a flow with a plane shock wave is studied. By numerically solving the two-dimensional nonstationary equations of gas dynamics, the influence of the energy of a pulsed nanosecond discharge, which is applied in the frequency regime, on the aerodynamic characteristics of a high-lift profile is investigated. It is ascertained that the energy delivered to the gas before the closing shock wave in a local supersonic region that is located in the neighborhood of the profile contour in zones extended along the profile considerably decreases the wave drag of the profile.     

Prediction of soot and thermal radiation in a model gas turbine combustor burning kerosene fuel spray at different swirl levels

Combustion of kerosene fuel spray has been numerically simulated in a laboratory scale combustor geometry to predict soot and the effects of thermal radiation at different swirl levels of primary air flow. The two-phase motion in the combustor is simulated using an Eulerian–Lagragian formulation considering the stochastic separated flow model. The Favre-averaged governing equations are solved for the gas phase with the turbulent quantities simulated by realisable k–? model. The injection of the fuel is considered through a pressure swirl atomiser and the combustion is simulated by a laminar flamelet model with detailed kinetics of kerosene combustion. Soot formation in the flame is predicted using an empirical model with the model parameters adjusted for kerosene fuel. Contributions of gas phase and soot towards thermal radiation have been considered to predict the incident heat flux on the combustor wall and fuel injector. Swirl in the primary flow significantly influences the flow and flame structures in the combustor. The stronger recirculation at high swirl draws more air into the flame region, reduces the flame length and peak flame temperature and also brings the soot laden zone closer to the inlet plane. As a result, the radiative heat flux on the peripheral wall decreases at high swirl and also shifts closer to the inlet plane. However, increased swirl increases the combustor wall temperature due to radial spreading of the flame. The high incident radiative heat flux and the high surface temperature make the fuel injector a critical item in the combustor. The injector peak temperature increases with the increase in swirl flow mainly because the flame is located closer to the inlet plane. On the other hand, a more uniform temperature distribution in the exhaust gas can be attained at the combustor exit at high swirl condition.     

Method for analyzing the gas jet impinging on a liquid surface

The impingement of a gas jet on a liquid surface in the stable-state regime is analyzed theoretically. We consider the case of the perpendicular jet action. It is found that for describing analytically the processes occurring in this case, it is necessary to employ the balance equation for forces at the interface and not the balance equation for pressures at the lowest point of cavity, which was used in most available publications. Recommendations for experimental studies of a gas jet impinging on a liquid surface are formulated. We report on the results of experiments confirming the correctness of our theoretical analysis and making it possible to determine the empirical value of the shape factor. The experiments were carried out with air and epoxy resin. The cavity formed on the liquid surface had radius R₀ = 1–8 mm and depth h = 0.2–12.5 mm.     

Local super-saturation dependent synthesis of MgO nanosheets

Well-crystallized MgO nanosheets have been prepared with MgB₂ as a precursor without any catalyst via a simple chemical vapor deposition (CVD) method. The nanosheets are grown parallel to (2 0 0) plane according to the high-resolution transmission electron microscopy profiles. At the same time, MgO nanowires are formed in the different area of substrate, which is the result of the difference in local super-saturation. Consequently, we propose that the growth mechanism depends on the surface energy and the local super-saturation in the system.     

Development of a pressure sensitive paint technique for low-speed flows and its application

Pressure sensitive paint (PSP) techniques have been used to measure the pressure distribution on a model surface in high-speed flows. In this study, we developed a PSP technique that can be applied to low-speed flows. Four PSP formulations, each comprised of a porphyrin (PtOEP or PtTFPP) and a polymer (Poly(TMSP) or RTV-118), were tested and the performance of each combination was evaluated. In the static calibration, the luminescence intensity of the PSP coatings was measured from 0 kPa to 11 kPa with 0.5, 1, and 2 kPa increments. Among the four PSP formulations tested, the combination of PtOEP and RTV-118 (PSP-3) showed the best performance. In this study, the low-pressure PSP technique using PSP-3 was applied to an oblique impinging subsonic jet to measure pressure field distributions on the impingement plate at various angles of the oblique jet. For comparison, the flow over the impingement plate was visualized using an oil-film method.     

用速度浓度同步测量系统研究瞬态气体撞壁射流混合过程

用速度浓度同步测量系统研究瞬态气体撞壁射流混合过程谢辉，苏万华，史绍熙，林荣文（天津大学内燃机燃烧学国家重点实验室天津３０００７２）关键词撞壁射流，射流混合，速度浓度同步测量１引言对于中小型直喷式柴油机，燃油喷雾与壁面撞击不可避免，研究喷雾和壁面的相...     

具有不同涂层的样品表面双向反射分布函数的三维测量

利用半球空间双向反射分布函数测量装置,采用样本比值法,实验测量了不同材质及涂层表面对激光束在整个半球空间内的双向反射分布函数.分析了漫反射板与无涂层铝板（裸板）表面,以及不同涂层和不同入射角下同一涂层对入射光的反射光强的空间分布,得出了所测几种样品在特定波长激光照射下的表面反射与散射特性.     

Characteristic responses of a semiconductor gas sensor depending on the frequency of a periodic temperature change

A novel gas-sensing system based on a dynamic nonlinear response is reported to enhance the selectivity toward sample gases using a single detector. A periodic temperature change was applied to a semiconductor gas sensor and the resulting conductance of the sensor was evaluated by fast Fourier transformation (FFT). The dynamic nonlinear response to the sample gases was further characterized depending on the frequency of the temperature change. The characteristic sensor response under the application of a temperature change was theoretically simulated by considering the kinetics of gas molecules on the semiconductor surface.