Fabrication of multilayer thin film filters by hydrofluoric acid bonding

A hydrofluoric acid (HF) bonding technique for multilayer thin films was studied to fabricate dielectric multilayer interference filters. The effects of pressure, HF concentration and annealing treatment on bonding strength were studied. Bonding strength of multilayer thin films of more than 5 MPa were obtained. In addition, a new type edge filter of 47 layers (47L) and a band-pass filter of 63 layers (63L), with their films sandwiched between glass substrates, were fabricated using this method. The measured transmittance spectra agreed well with the designed ones.     

Plasmon analysis and homogenization in plane layered photonic crystals and hyperbolic metamaterials

Dispersion equations are obtained and analysis and homogenization are carried out in periodic and quasiperiodic plane layered structures consisting of alternating dielectric layers, metal and dielectric layers, as well as graphene sheets and dielectric (SiO₂) layers. Situations are considered when these structures acquire the properties of hyperbolic metamaterials (HMMs), i.e., materials the real parts of whose effective permittivity tensor have opposite signs. It is shown that the application of solely dielectric layers is more promising in the context of reducing losses.     

Narrow band filters in both transmission and reflection with metal/dielectric thin films

We present a novel narrow band filter operating in both transmission and reflection for the first time to our knowledge. This proposed structure consists of one unsymmetrical dielectric Fabry-Perot cavity and an ultrathin metal film with n ≈ k. Theoretical analysis shows that both the reflectance and transmittance at the central wavelength are maximums. Due to the high absorption induced by the metal, a good rejection level can be obtained for a wide spectral range. In addition, the changes of peak value ratio R_max/T_max is also investigated by adjusting the amount of dielectric stacks. We finally demonstrate the experimental results to verify these designs.     

Polarization-Independent Guided-Mode Resonance Filters under Oblique Incidence

We present the dispersion relation of guided-mode resonances in planar periodic waveguides, both for s-polarized （TF, mode） and p-polarized （TM mode） incident waves. For a fixed homogeneous planar waveguide, dispersion curves of the TE eigenmode cannot cross that of the TM eigenmode at all. That is to say, at a certain wavelength, TE and TM modes cannot be excited with the same propagation constant. Due to Bragg reflection in the planar periodic waveguide, dispersion curves of the TE leaky mode may intersect with that of the TM leaky mode in the first Brillouin zone. We employ these intersections to achieve polarization-independent guided-mode resonance filters.     

Large forbidden band in one-dimensional multi-layered structure containing exponentially graded materials

In the present communication, we have presented band spectra and reflectance properties of one-dimensional multi-layered structure containing dielectric exponentially graded and simple dielectric layers. This study has been performed theoretically by using transfer matrix method. In this paper we have taken the multi-layered structure where refractive index of odd layers is varying continuously along the direction perpendicular to the surface of the layer in exponential form. The effect of the graded profiles are studied and compared with the conventional multi-layered structure of suitable contrast of refractive indices in detail. In this study the materials are considered as non-magnetic and layers other than the graded are taken to be homogeneous and isotropic dielectric medium of constant refractive index. It has been found that the introduction of graded layers enhanced the forbidden band gaps and affects the reflectance of electromagnetic wave spectra significantly. By changing the grading profiles and the contrast, we obtained the forbidden band gaps and the reflectance of such structural change accordingly. Therefore, introducing a graded exponential layer of dielectric in the one-dimensional multi-layered structure provides possible mechanism for enhancing the reflectance as well as the forbidden gap in the optical region. Such multi-layered structure may be useful in the design of a broadband filter.     

Laser conditioning and nonlinear absorption of LaF3/MgF2 dielectric multilayers at 193 nm

A sensitive and simple pulsed surface thermal lens (TL) technique is used in situ to investigate the laser conditioning and to measure the nonlinear absorption of LaF₃/MgF₂ dielectric multilayers deposited on CaF₂ substrates at 193 nm. Due to the high single-shot sensitivity of the surface TL technique, the laser conditioning can be monitored from the first shot of irradiation on a shot-by-shot basis. The LaF₃/MgF₂ multilayers show a very strong conditioning effect. The ratio of the absorption before and after the laser irradiation is in the range 4–8 for a highly reflective (LH)²⁰ LaF₃/MgF₂ multilayer, and 3–4 for (1L3H)⁷ and (3L1H)⁷ multilayers. In comparison, a (LH)²⁰ LaF₃/AlF₃ multilayer shows only a weak conditioning effect, with an absorption ratio of approximately 1.4. Our experimental results suggest that the strong conditioning effect of the LaF₃/MgF₂ multilayer is due to the absorption conditioning of the LaF₃ layers. However, the MgF₂ layers are shown to be responsible for the considerable increase in LaF₃ absorption as well as the ability to condition the absorption. The fluoride multilayers present non-negligible nonlinear absorption and the two-photon absorption coefficient of the multilayers is estimated to be approximately 5×10^-7 cm/W. Received: 11 December 2000 / Accepted: 20 February 2001 / Published online: 25 July 2001     

周期结构薄膜在折射率色散下反射区特性研究

周期性结构是光学薄膜设计的基本物理模型,给出了反射区中心波长的一般性条件,研究了在膜层材料存在折射率色散情况下,等厚周期结构和非等厚周期结构的薄膜反射区中心波长与带宽特性.研究结果表明:在等厚和非等厚周期结构中,考虑膜层材料折射率色散与忽略色散情况相比,中心波长向长波方向移动,反射级次与相对波数的线性关系偏离;在薄膜光学厚度一定的非等厚周期结构中,高折射率层光学厚度大于低折射率层时,反射级次与相对波数的线性关系偏离度高;非等厚周期结构薄膜的带宽在低反射级次上小于等厚周期结构,同时膜层的色散对反射带宽影响不大.     

Dispersion properties of planar Bragg waveguides

We reformulate the leaky mode condition of planar Bragg waveguides as two simple, separate conditions on the propagation constant; a phase match condition and a loss formula. These relations enable efficient numerical calculations of the mode properties. Furthermore, we use the phase match condition as a starting point to discuss the dispersion of waveguides with advanced cladding structures. In particular, we point out that chirped claddings, where the effective reflection point is dependent on frequency, do not give dispersion characteristics significantly different from metallic waveguides or waveguides with periodic claddings.     

Sputter depth profiling by secondary ion mass spectrometry coupled with sample current measurements

Ion-induced secondary electron emission determined via sample current measurements (SCM) was employed as a useful adjunct to conventional secondary ion mass spectrometry (SIMS). This paper reports on the results of 3-6 keV O₂⁺ SIMS-SCM sputter depth profiling through CrN/AlN multilayer coatings on nickel alloy, titanium dioxide films deposited on stainless steel, and corrosion layers formed onto surface of magnesium alloy after long-term interaction with an ionic liquid. For Au/AlNO/Ta films on silicon, in addition to SIMS-SCM profiles, the signal of mass-energy separated backscattered Ne⁺ ions was monitored as a function of the depth sputtered as well. The results presented here indicate that secondary electron yields are less affected by “matrix effect” than secondary ion yields, and at the same time, more sensitive to work function variations and surface charging effects. SCM depth profiling, with suppression of “the crater effect” by electronic gating of the registration system is capable of monitoring interfaces in the multilayer structure, particularly, metal-dielectric boundaries. In contrast to SIMS, SCM data are not influenced by the angle and energy windows of an analyser. However, the sample current measurements provide lower dynamic range of the signal registration than SIMS, and SCM is applicable only to the structures with different secondary electron emission properties and/or different conductivity of the layers. To increase the efficiency, SCM should be accompanied by SIMS measurements or predetermined by proper calibration using other elemental-sensitive techniques.     

Flexible all-plastic mirrors for the THz range

We present a simple and cheap approach to fabricate large-area stop-band filters and mirrors for the THz range. This approach extends the well-known concept of dielectric mirrors to the far infrared. We use alternating layers of different polymer materials with a typical thickness of several tens of micrometers to build a flexible all-plastic mirror. The structures are characterized by THz time-domain spectroscopy. The experimental results are in good agreement with transfer-matrix simulations. Received: 28 September 2001 / Accepted: 4 October 2001 / Published online: 20 December 2001     

Radiation characteristics of multilayer periodic dielectric structures

Radiation characteristics of multilayer periodic dielectric structures are investigated by the method which combines the building block approach of multimode network theory with the rigorous mode matching procedure. The multilayer periodic structure is composed of uniform dielectric layers and single periodic layers. Two examples are given in this paper; first, radiation property of the double dielectric grating antenna is analyzed. The results indicate that the double dielectric grating antenna has relatively smaller dimensions than that of the single one. It is undoubtly of great importance in the case that the limitation of the weight and the volume of the system is strictly required. Secondly, some curved profile grating antennas are analyzed by combining the present method with the staircase approximation. In such a way, the effects of groove profile on the performance of the grating antennas are systemetically studied and some useful guidelines for the design of the dielectric grating antennas are thereby suggested.     

Silicon nanocrystals in silica—Novel active waveguides for nanophotonics

Nanophotonic structures combining electronic confinement in nanocrystals with photon confinement in photonic structures are potential building blocks of future Si-based photonic devices. Here, we present a detailed optical investigation of active planar waveguides fabricated by Si⁺-ion implantation (400 keV, fluences from 3 to 6×10¹⁷ cm⁻²) of fused silica and thermally oxidized Si wafers. Si nanocrystals formed after annealing emit red-IR photoluminescence (PL) (under UV-blue excitation) and define a layer of high refractive index that guides part of the PL emission. Light from external sources can also be coupled into the waveguides (directly to the polished edge facet or from the surface by applying a quartz prism coupler). In both cases the optical emission from the sample facet exhibits narrow polarization-resolved transverse electric and transverse magnetic modes instead of the usual broad spectra characteristic of Si nanocrystals. This effect is explained by a theoretical model which identifies the microcavity-like peaks as leaking modes propagating below the waveguide/substrate boundary. We present also permanent changes induced by intense femtosecond laser exposure, which can be applied to write structures like gratings into the Si-nanocrystalline waveguides. Finally, we discuss the potential for application of these unconventional and relatively simple all-silicon nanostructures in future photonic devices.     

Comparison of photonic crystal narrow filters with metamaterials and dielectric defects

The photonic band-gap of the two kinds of 1D photonic crystal structure which is composed of the form of (AB) ^N1 C ^m (BA) ^N2 , one with a metamaterial defect layer (MDL) and the other one with a dielectric defect layer (DDL) are studied. Our results show that in both cases, where there is only one defect layer, m=1, no defect mode exists, but for two defect layers (m=2) there is a single defect mode which is centered in the middle of the band-gap. The width of the defect mode in DDL is narrower than that in MDL. For a number of defects of more than two (m>2) and even, in both of the MDL and DDL structures, there is only one defect mode. For m>2 and odd, the defect mode in the MDL vanishes, but for DDL there is two defect-mode symmetrically centered in the middle of the band-gap. The effects of the defect layers refractive index value, the periodicity number of the structures and the incident angle on the properties of the defect modes and the transmittance spectrum are discussed.     

Tunable coupled plasmon modes via nanoshell particle chains

Coupled plasmon modes have been studied theoretically in periodic chains of nanoshell particles embedded in a graded dielectric host. These chains not only sustain a variety of localized modes as unshelled nanoparticle chains, but also offer precise control of the localization-delocalization transition among these modes by varying the permittivity contrast and/or core-shell radius ratio. By optimizing these parameters, the upper band can be tuned into higher frequencies while the lower band can be tuned into the optical communication frequencies for practical application. We also discuss the Ohmic loss effects in the metallic component of the nanoshells.     

Second- and third-harmonic generations for a nondilute suspension of coated particles with radial dielectric anisotropy

We derive expressions for the effective nonlinear susceptibility tensors for both the second harmonic generation (SHG) and induced third harmonic generation (THG) of nonlinear composite materials, in which nondilute coated particles with radial dielectric anisotropy are randomly embedded in the linear host. Two types of coated particles are considered. The first is that the core possesses a second order nonlinear susceptibility and the shell is linear and radially anisotropic, while the second is that the core is linear with radial anisotropy and the shell has a second order nonlinear susceptibility. We observe greatly enhanced SHG and THG susceptibilities at several surface plasmon resonant frequencies. For the second model, due to the coating material being metallic, there exists two fundamental resonant frequencies ω_c1 and ω_c2, whose difference ω_c2-ω_c1 is strongly dependent on the interfacial parameter and the radial dielectric anisotropy. Furthermore, in both systems, the adjustment of the dielectric anisotropy results in larger enhancement of both SHG and induced THG susceptibilities at surface plasmon resonant frequencies than the corresponding isotropic systems. Therefore, both the core-shell structure and the dielectric anisotropy play important roles in determining the nonlinear enhancement and the surface resonant frequencies.     

Bias-induced spatially resolved growth and removal of Si-oxide by atomic force microscopy

Three mechanisms for spatially resolved growth and removal of oxide on silicon substrates have been investigated. Thermally grown oxide layers with thicknesses in the range 2–6 nm were the distinctive feature of the system. The layers were characterized and manipulated by methodologies based on atomic force microscopy (AFM) with conducting probes in a vacuum environment of 10^-2–10^-3 Pa. The probe is then effectively a travelling electrode that generates an electrostatic field between the tip and the substrate. Oxide growth was induced for a positive sample bias greater than 5 V, but below the level corresponding to dielectric breakdown. Application of a short pulse of amplitude marginally above that corresponding to dielectric breakdown, on the other hand, had the effect of producing pits of inner diameter of about 10 nm in the pre-existing oxide layer at the point of tip-to-oxide contact. Application of a low positive sample bias (less than that required for measurable oxide growth) in combination with high linear scan speed had the effect of removing a pre-existing oxide layer from the scanned field of view. The most plausible mechanisms are based on transverse ionic diffusion (for oxide growth), controlled dielectric breakdown (for formation of pits) and lateral transport of silicaceous species (for oxide removal). Received: 24 October 2001 / Accepted: 6 January 2002 / Published online: 3 June 2002 RID="*" ID="*"Corresponding author. Fax: +617-3875-7656, E-mail: s.myhra@sct.gu.edu.au     

Modeling and design of an optimized patterned electrode liquid crystal microlens array with dielectric slab

To eliminate the occurrence of disclination lines in the hole patterned electrode liquid crystal microlens array (LC MLA), inserting an ultrathin dielectric slab was proved to be an effective method. The thickness of the dielectric slab played an important role in effecting the optical performance of the liquid crystal microlens array device, including the dynamic focal range, focus diameter and symmetry of phase profile. In this paper, we studied the effect of dielectric slab thickness on the optical performance of the liquid crystal microlens array by numerical simulation. It is indicated that the optical performance of the device could be improved by reducing the dielectric slab thickness, assuming that the dielectric slab thickness was larger than the threshold thickness. The dependence of the threshold thickness on some key parameters was investigated and the associated effect on the optical performance by changing these key parameters was also studied. In the end, the approaches to enhance the optical performance, namely the dynamic focal range of the liquid crystal microlens array was proposed and proved to be in effect by numerical simulation results.     

F2-laser ablation patterning of dielectric layers

Spatially defined patterning of multi-layer dielectric optical systems by laser-induced ablation is demonstrated. A 49-layer high-reflectivity mirror for 193-nm light was irradiated with F₂-laser light through the CaF₂-substrate to cleanly remove the whole dielectric stack by rear-sided ablation. The 157-nm light is absorbed efficiently by dielectric layers such as SiO₂ and Al₂O₃ that are typically used for ultraviolet (UV) transmission at 193-nm and longer wavelengths. Thus it is possible to ablate highly reflective UV-laser mirrors (HR 193 nm) and to create dielectric masks that withstand high power levels at 193 nm. A single 157-nm pulse with a fluence of less than 500 mJ/cm² is sufficient to cleanly ablate the whole layer stack with sharp edges and without debris deposition. Received: 31 October 2000 / Accepted: 14 November 2000 / Published online: 10 January 2001     

Large range of omni-directional reflection in 1D photonic crystal heterostructures

A simple design of one-dimensional omni-directional reflector based on photonic crystal heterostructures structure has been proposed. The proposed structure consists of a periodic array of alternate layers of SiO₂ and Te as the materials of low and high refractive indices, respectively. The structure considered here has three stacks of periodic structures having five layers each. The lattice period of successive stack is increased by a certain multiple (say gradual constant, δ) of the lattice period of the just preceding stack. For numerical computation, the method of transfer matrix method (TMM) has been employed. It is found that such a structure has wider reflection bands in comparison to a conventional dielectric PC structure and the width of the omni-directional reflection (ODR) bands can be enlarged by increasing the value of the gradual constant δ.