亚波长消反射光栅

为了降低消反射光栅的偏振敏感性，将等效介质理论推广到二维亚波长结构，对一种特定的矩形柱状结构进行了分析。构造了一种分析方法，然后利用光栅结构的有关表达式得到这种二维结构的近似等效系数。并设计了适用于10．6μm红外波段的二维亚波长消反射光栅，用二元光学的制作工艺在si衬底上进行了实验制备。测试结果表明：对中心波长为10．6μm的红外光，这种光栅象单层消反射膜一样，具有很好的增透效果。     

Area-coded effective medium structures, a new type of grating design

We propose a new way to design gratings with desired diffraction properties by using subwavelength feature sizes perpendicular to the ordinary superwavelength grating period. This is different from well-known one-dimensional binary-blazed gratings that use a structuring along the grating period and thus opens new flexibility in generating arbitrary effective-index distributions in the direction of the grating period. Since the subwavelength features form contiguous areas, they are called area-coded effective medium structures (ACES). Compared with well-known binary subwavelength structures in two-dimensional arrangements consisting of pillars, ACES are more stable and have comparable efficiency properties. As an example we show how to design in principle a four-level area-coded effective medium grating, compare the efficiency of ACES with binary-blazed and échelette gratings, and optimize the subwavelength period of ACES.     

A detailed study of metallic surface-relief grating

This paper presents a more detailed interaction of an electromagnetics light with a metallic surface-relief subwavelength grating utilizing the rigorous coupled-wave analysis. The focus of this work is the accurate modeling of undetermined aspects of diffraction patterns produced by binary metallic grating structures, specially gold grating. First-order diffraction efficiency for rectangular-groove gold grating with equal groove and ridge widths are presented for various wavelengths as a function of period, groove depth, polarization and angle of incidence. We also studied diffraction efficiency of both of TE and TM polarization modes against increasing of incident angle as well as TE polarization against increment of grating period. As a result, very low reflectivity at zero-order was found out for TE and TM polarizations at the pitch of Λ = 2λ. Having been studied diffraction efficiency of metallic surface-relief gratings, we also examined polarization-dependent efficiency of diffraction orders, for different groove depths. Simulation results have been completely presented.     

Diffraction grating with rectangular grooves exceeding 80% diffraction efficiency

A novel design for a surface relief grating with rectangular grooves is presented. The first reflected diffraction order shows experimentally 84% diffraction efficiency for a metallic grating. The required binary surface relief can be manufactured by using one single microlithographic fabrication step similar to standard processes in microelectronics. Each period of the grating consists of a subwavelength “minilattice” with a variable duty cycle. A theoretical model of the structure is presented and compared to measurements at 10.6 μm wavelength. Applications ranging from deflectors, polarizing beam splitters, variable attenuators to general diffractive components such as kinoforms for laser beam shaping are proposed.     

Broadband Terahertz Polarization Converter and Asymmetric Transmission Based on Coupled Dielectric‐Metal Grating

Coupled dielectric‐metal gratings are investigated for broadband terahertz (THz) wave polarization conversion and asymmetric transmission by the experiments and numerical simulations, which are composed of the subwavelength Si grating and metallic wire grating layers. The dielectric grating layer with a large artificial birefringence and low dispersion is employed as a phase engineered waveplate, and the metal wire grating arranged with a 45° angle to the dielectric grating is utilized as a high‐efficiency polarizer. Due to the subwavelength integration, this coupled grating presents a local resonance coupling mechanism between dielectric and metal gratings, which greatly enhances the polarization rotation and expands the bandwidth, not a simple combination with dielectric and metallic gratings. The results demonstrate that a broadband asymmetric transmission with an extinction ratio of 30dB from 0.2 to 1.2 THz is achieved and the highest transmission of 90% can be obtained. It provides a simple way towards practical applications for THz artificial dispersion materials, polarization control and asymmetric transmission.     

基于超材料的中波红外宽带偏振转换研究

基于硅纳米块阵列和亚波长金属光栅,硅纳米块长轴与金属光栅夹角为45°,本文设计了一种高效、宽带偏振转换结构.模拟计算表明该结构实现了线偏振光90°旋转,在3.4—4.5μm波段偏振转换率大于60%,在3—5μm光谱范围内的转换对比率大于10~4.由于该结构光学性能优异,制备难度低,可以应用于光传输控制.     

亚波长光栅的偏振闪耀特性

 使用琼斯矩阵的方法推导了连续结构亚波长光栅的衍射方程,给出了光栅衍射效率表达式,对偏振特性与衍射特性进行了研究。发现连续结构亚波长光栅仅存在３个衍射级,总衍射效率为100%,且衍射效率可在衍射级间任意分配,0级的偏振态与入射光的偏振态相同,±1级衍射光偏振态与入射光无关,－1级为左旋圆偏振光,＋1级为右旋圆偏振光。通过设置入射光偏振态与光栅相位延迟等参数,可使光栅具有闪耀特性,据此可用于设计高效偏振光分束器和偏振光开关。     

Reflective silicon binary diffraction grating for visible wavelengths

We introduce a device based on subwavelength resonant grating technology. Using a single lithography step we built a reflective binary grating that mimics the functionality of a blazed diffraction grating in a flat geometry. We have also demonstrated that efficient subwavelength resonant devices for visible wavelengths can be built using silicon.     

锥形轮廓亚波长二维表面浮雕结构的矢量衍射特性

本文利用严格耦合波理论对多台阶逼近锥形轮廓的亚波长二维表面浮雕结构进行了计算分析.从本文的计算结果来看,采用多台阶来逐步逼近锥形轮廓的亚波长零级二维表面浮雕结构具有在宽波段、大视角上能够实现抗反射,并且对光波的偏振态下不敏感的特性.从而使得该结构为薄膜光学在材料的选择方面提供了极大的选择自由度.     

Space-variant polarization manipulation for far-field polarimetry by use of subwavelength dielectric gratings

A method for polarimetric measurement that uses a discrete space-variant subwavelength dielectric grating is presented. One retrieves the polarization state by measuring the far-field intensity of a beam emerging from the grating followed by a polarizer. The analysis for a partially polarized, quasi-monochromatic beam is performed by use of the beam coherence polarization matrix along with an extended van Cittert-Zernike theorem. We experimentally demonstrate polarization measurements of both fully and partially polarized light.     

亚波长金属偏振分束光栅设计分析

结合有效介质理论和薄膜光学的抗反射设计方法,设计了基于0.65μm工作波长的亚波长金属偏振分束光栅,给出了光栅的优化设计参数,采用严格耦合波理论分析了光栅的偏振分束特性.结果表明,亚波长金属光栅对TE偏振表现为金属膜特性,具有高反射,对TM偏振表现为介质膜特性,具有高透射,在-30°<θ<30°的大入射角范围和0.47μm<λ<0.80μm的宽入射波谱内,该光栅的透射光和反射光均具有高偏振消光比和低插入损耗的特点. 关键词： 亚波长金属偏振分束光栅 有效介质理论 薄膜光学 严格耦合波理论     

Polarization and Color Separator Using Binary Phase Grating with Subwavelength Period

A data projector using three liquid crystal display panels has a complex optical system. The illuminating optics separate the beam from a light source into three primary colors and separate those into opposite polarizations using multi-layer films and prisms. A reflection grating with the period of subwavelength has high diffraction efficiency for p polarized light and high regularly reflectance for s polarized light. The diffraction angle of a grating largely depends on the wavelength, because a diffractive optical element (DOE) has large chromatic dispersion. The grating with the period of subwavelength can separate the unpolarized light into polarization components effectively using its polarization dependency and can separate white light into color components using its chromatic dispersion simultaneously. The grating makes the optical system simpler and smaller than those with conventional devices. In this paper the efficiency of polarization separation for the grating is calculated by a rigorous analytical method. Next, the condition for color separation is calculated by Snell#x0027;s law, and an optical system using a grating that performs polarization and color separation is proposed. Experimental results of the DOE fabricated are well matched with those of this simulation.     

Comparison of resonances and spectral properties for microstructures incorporating singular layered metal dielectric subwavelength grating with different profiles

A multilayered structure incorporating a single metal-dielectric subwavelength grating is a structure with characteristic of polarization separation for visible light, enabling creating visible color aspect. Based on that, two specific structures separately with grating layers of rectangular and sinusoidal refractive index profiles are designed and their related resonant behaviors and spectral properties are compared respectively for s and p polarized incident lights. The impacts of structural parameters of the structures together with dielectric materials on their resonances and spectra in reflection are studied in detailed. Similarities of resonant behaviors, reflection spectra and variations in resonant locations and spectral profiles between both structures are also demonstrated for both polarizations, especially for s polarized light. Due to such similarities and convenience in fabrication, the structure with a sinusoidal grating can replace that with a rectangular grating in mass production for color-based various applications such as color security, image reproduction.     

Ability and Limitation of Effective Medium Theory for Subwavelength Gratings

In the recent researches of subwavelength relief gratings, the effective refractive indices are used for calculating the coefficients of reflection and transmission of light waves. The effective refractive indices are given by the effective medium theory for light waves propagating in a bulky stratified medium. This paper describes the ability and limitation of the theory applied to estimate the performance of such subwavelength gratings. The limitation is revealed by numerical calculations using a rigorous electromagnetic grating theory and the effective medium theory. As a result, an understanding of the wave behavior in the subwavelength grating has been acquired, which explains the limitation of the effective medium theory.     

Absorption enhancement of 980 nm MSM photodetector with a plasmonic grating structure

We present finite-difference time-domain (FDTD) simulation to analyze the optical absorption enhancement of metal-semiconductor-metal (MSM) photodetectors employing plasmonic grating structures. Simulation results show that the combination of a subwavelength aperture and a nano-structured metal grating results in up to 16 times enhancement in optical absorption, in comparison to conventional MSM photodetector structures employing only a subwavelength aperture.     

Real-time analysis of partially polarized light with a space-variant subwavelength dielectric grating

A novel method for real-time polarization measurement is presented. The method is based on a space-variant wave plate that we realized as a computer-generated space-variant subwavelength dielectric grating. The Stokes parameters of the incident beam are determined by Fourier analysis of the space-variant intensity transmitted through the grating and an analyzer. We discuss the design and realization of such wave plates and demonstrate our technique with polarization measurements of both polarized and partially polarized CO(2)-laser radiation at a wavelength of 10.6 mum.     

High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633 nm

We propose the use of high-index materials for the fabrication of subwavelength diffractive components operating in the visible domain. This approach yields a reduction of fabrication constraints and an improvement of theoretical performance. A blazed grating with subwavelength binary features and with a period of 5.75 wavelengths is designed and fabricated in a TiO(2) layer coated upon a glass substrate. The first-order diffraction efficiency measured with a He-Ne laser beam is 83%, which is slightly larger than that achieved theoretically by the best standard (continuous profile) blazed grating fabricated in glass with the same period.     

Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings

We introduce a new structural cutoff beyond which subwavelength gratings cease to behave as homogeneous media and discuss its effects on the proper selection of the sampling periods of subwavelength diffractive elements. According to this analysis, a 3lambda-period blazed binary grating composed of square pillars is designed for He-Ne operation and is fabricated by etching of a TiO>(2) layer deposited upon a glass substrate. Its first-order measured diffraction efficiency is 12% larger than the theoretical efficiency of an ideal blazed échelette grating in glass with the same period.     

Near-field optical polarimetry of plasmonic nanowires

Local polarization properties of a gold subwavelength grating with plasmon-induced linear dichroism are studied by scanning near-field optical dynamic polarimetry. Periodic modulation of linear dichroism with the period corresponding to the period of the grating and the contrast of 0.3 is found at the distance of λ/20 from the sample.     

Investigation of geometrical effects of antireflective subwavelength grating structures for optical device applications

We calculated diffraction efficiencies of subwavelength grating (SWG) structures for various optical device applications by using a rigorous coupled-wave analysis method. The geometrical effects, such as grating shape, height, and period, were investigated in order to obtain better antireflection performance. Cone shaped SWG structures with a taller height provide lower reflectance over a broadband wavelength range compared to that of flat surface and nanorod. It was found that the low reflection regions are quite related with the grating period and the refractive index of substrate materials. From the comparison between external and internal reflection of SWG structures, we also showed that the internal reflection requires shorter grating period than the case of external reflection to acquire broadband antireflection properties.