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1.
顾广瑞  伊藤利道 《中国物理 B》2009,18(10):4547-4551
This paper reports that the nano-sheet carbon films (NSCFs) were fabricated on Si wafer chips with hydrogen--methane gas mixture by means of quartz-tube-type microwave plasma chemical vapour deposition (MWPCVD). In order to further improve the field emission (FE) characteristics, a 5-nm Au film was prepared on the samples by using electron beam evaporation. The FE properties were obviously improved due to depositing Au thin film on NSCFs. The FE current density at a macroscopic electric field, E, of 9~V/μ m was increased from 12.4~mA/cm2 to 27.2~mA/cm2 and the threshold field was decreased from 2.6~V/μ m to 2.0~V/μ m for Au-coated carbon films. A modified F-N model considering statistic effects of FE tip structures in the low E region and a space-charge-limited-current effect in the high E region were applied successfully to explain the FE data of the Au-coated NSCF.  相似文献   

2.
This paper reported that the nano-catkin carbon films were prepared on Si substrates by means of electron cyclotron resonance microwave plasma chemical vapour deposition in a hydrogen and methane mixture. The surface morphology and the structure of the fabricated films were characterized by using scanning electron microscopes and Raman spectroscopy, respectively. The stable field emission properties with a low threshold field of 5V/μm corresponding to a current density of about 1μA/cm^2 and a current density of 3.2mA/cm^2 at an electric field of 10V/μm were obtained from the carbon film deposited at CH4 concentration of 8%. The mechanism that the threshold field decreased with the increase of the CH4 concentration and the high emission current appeared at the high CH4 concentration was explained by using the Fowler-Nordheim theory.  相似文献   

3.
Nano-sheet carbon films are prepared on Si wafers by means of quartz-tube microwave plasma chemical vapour deposition (MPCVD) in a gas mixture of hydrogen and methane. The structure of the fabricated films is investigated by using field emission scanning electron microscope (FESEM) and Raman spectroscopy. These nano~carbon films are possessed of good field emission (FE) characteristics with a low threshold field of 2.6 V/μm and a high current density of 12.6 mA/cm^2 at an electric field of 9 V/μm. As the FE currents tend to be saturated in a high E region, no simple Fowler-Nordheim (F-N) model is applicable. A modified F N model considering statistic effects of FE tip structures and a space-charge-limited-current (SCLC) effect is applied successfully to explaining the FE data observed at low and high electric fields, respectively.  相似文献   

4.
A new electroluminescence device is fabricated by microwave plasma chemical vapour deposition system and electron beam vapour deposition system. It is comprised of highly doped silicon/diamond/boron/nitrogen-doped diamond/indium tin oxide thin films. Effects of process parameters on morphologies and structures of the thin films are detected and analysed by scanning electron microscopy, Raman spectrometer and x-ray photoelectron spectrometer. A direct-current (DC) power supply is used to drive the electroluminescence device. The blue light emission with a luminance of 1.2 cd·m 2 is observed from this double-doped diamond thin film electroluminescence device at an applied voltage of 105 V.  相似文献   

5.
This paper reports that bunchy flake-like nano-graphite crystallite films (BNGCFs) were deposited on Si substrates by using the microwave chemical vapour deposition technique. Furthermore the BNGCFs were characterized by x-ray diffraction spectra, scanning electron microscopy, Raman spectra and field emission (FE) I--V measurements, and a lowest turn-on field of 1.5V/μm, and a high average emission current density of 30mA/cm*  相似文献   

6.
类富勒烯纳米晶CNx薄膜及其场致电子发射特性   总被引:1,自引:0,他引:1       下载免费PDF全文
利用微波等离子体增强化学气相沉积技术制备出了CNx薄膜,并利用x射线光电子能谱、x射线衍射、扫描电子显微镜和Raman光谱等测试手段对所制备的CNx薄膜的微结构和成分进行了分析.研究了其场致电子发射特性.发现薄膜的结构和场发射特性与反应系中的甲烷、氮气及氢气的流量比有关,当甲烷、氢气及氮气流量比为8/50/50 sccm时,制备的薄膜具有弯曲层状的纳米石墨晶体结构(类富勒烯结构)和很好的场发射特性.场发射阈值电场降低至1.1V/μm.当电场为5.9V/μm时,平 关键词: 类富勒烯 x薄膜')" href="#">CNx薄膜 场致电子发射 微波等离子体增强化学气相沉积  相似文献   

7.
利用微波等离子体化学气相沉积法,在覆盖金属钛层的陶瓷衬底上制备出类球状微米金刚石聚晶膜,后对膜的表面进行氮离子的注入.通过扫描电子显微镜、拉曼光谱、X射线衍射谱及二级结构场发射测试,对膜进行了注入前后的分析.氮离子注入后场致电子发射的效果变强,这可能是氮离子的注入增加了类球状微米金刚石聚晶膜表面的缺陷度,从而增加了价带和导带间的缺陷能级,使电子更容易跃迁到高能级上,提高了场致电子的发射效果.  相似文献   

8.
张培增  李瑞山  谢二庆  杨华  王璇  王涛  冯有才 《物理学报》2012,61(8):88101-088101
采用液相电化学沉积技术制备了ZnO纳米颗粒掺杂的类金刚石(DLC)薄膜, 研究了ZnO纳米颗粒掺杂对DLC薄膜场发射性能的影响. 利用X射线光电子能谱、透射电子显微镜、Raman光谱以及原子力显微镜分别对薄膜的化学组成、 微观结构和表面形貌进行了表征. 结果表明: 薄膜中的ZnO纳米颗粒具有纤锌矿结构, 其含量随着电解液中Zn源的增加而增加. ZnO纳米颗粒掺杂增强了DLC薄膜的石墨化和表面粗糙度. 场发射测试表明, ZnO纳米颗粒掺杂能提高DLC薄膜的场发射性能, 其中Zn与Zn+C的原子比为10.3%的样品在外加电场强度为20.7 V/μm时电流密度达到了1 mA/cm2. 薄膜场发射性能的提高归因于ZnO掺杂引起的表面粗糙度和DLC薄膜石墨化程度的增加.  相似文献   

9.
Zinc oxide (ZnO) nanorods grown on chemical vapor deposited diamond films by thermal vapor transport method have been investigated. In the initial growth status, the semi-spherical ZnO nuclei were preferably deposited near the growth steps on the terraces and the boundaries of diamond grains. With increasing the growth time, the [0 0 0 1] orientated ZnO nanorods appeared and further covered the whole diamond film. It is found that the size of diamond grains would determine the diameter of ZnO nanorods. The electron field emission properties of the ZnO nanorods/diamond system have been significantly improved with respect to pure diamond film. The feature of the ZnO nanorods grown on diamond films played an important role in further enhancing the electron field emission performances.  相似文献   

10.
The properties of the surface-conduction electron-emitter display (SED) are mainly decided by the surface-conduction electron emitters (SCEs). Pd is mostly used to fabricate the surface-conduction electron emitters, which are normally obtained by generating a nano-scale gap from PdO conductive film. ZnO is a potential material for electron emission and the research work has proved that ZnO film can act as the electron-emitter material. In this study, we propose to use the ZnO-Pd two-layer film as the conductive film. Both the multi-layer device electrode film and conductive film were deposited by a magnetron sputter, and SCEs are formed by the electro-forming process as used in SED. The results revealed that the Pd film on ZnO film surface increases the electron emission efficiency from 0.36‰ to 3.85‰.  相似文献   

11.
Yao Wang 《中国物理 B》2021,30(6):68101-068101
Nano-diamond particles are co-deposited on Ti substrates with metal (Ti/Ni) nanoparticles (NPs) by the electrophoretic deposition (EPD) method combined with a furnace annealing at 800℃ under N2 atmosphere. Modifications of structural and electron field emission (EFE) properties of the metal-doped films are investigated with different metal NPs concentrations. Our results show that the surface characteristics and EFE performances of the samples are first enhanced and then reduced with metal NPs concentration increasing. Both the Ti-doped and Ni-doped nano-diamond composite films exhibit optimal EFE and microstructural performances when the doping quantity is 5 mg. Remarkably enhanced EFE properties with a low turn-on field of 1.38 V/μm and a high current density of 1.32 mA/cm2 at an applied field of 2.94 V/μm are achieved for Ni-doped nano-diamond films, and are superior to those for Ti-doped ones. The enhancement of the EFE properties for the Ti-doped films results from the formation of the TiC-network after annealing. However, the doping of electron-rich Ni NPs and formation of high conductive graphitic phase are considered to be the factor, which results in marvelous EFE properties for these Ni-doped nano-diamond films.  相似文献   

12.
Secondary electron emission yieldδ was measured for thin films of alumina prepared byrf sputtering technique. Single pulse method was used along with 4-gridleed optics system to determineδ. Maximum value of 4·3 was obtained at primary energy of 350 eV. The Dionne’s theory was used to analyse the results and the emission probability escape depth and absorption coefficient of secondaries were also estimated. Fairly good correlation is observed between experimental and theoretical values ofδ for beam energies upto 1 keV.  相似文献   

13.
高温退火对非晶CNx薄膜场发射特性的影响   总被引:1,自引:1,他引:1       下载免费PDF全文
采用射频磁控溅射方法在纯N2气氛中沉积了非晶CNx薄膜样品,并 在真空中退火至900 ℃.对高温退火引起的CNx薄膜化学成分、键合结构及其场发射特性方面的变 化进行研究.用傅里叶变换红外光谱和x射线光电子能谱分析样品的内部成分及键合结构的变化,其中sp2键及薄膜中N的含量与薄膜的场发射特性密切相关.退火实验的结果表明 高温退火可以导致CNx薄膜中N含量大量损失,并在薄膜中形成大量sp2< 关键词: x薄膜')" href="#">CNx薄膜 化学键合 退火温度 场致电子发射  相似文献   

14.
<正>Graphene films are deposited on copper(Cu) and aluminum(Al) substrates,respectively,by using a microwave plasma chemical vapour deposition technique.Furthermore,these graphene films are characterized by a field emission type scanning electron microscope(FE-SEM),Raman spectra,and field emission(FE) I-V measurements.It is found that the surface morphologies of the films deposited on Cu and Al substrates are different:the field emission property of graphene film deposited on the Cu substrate is better than that on the Al substrate,and the lowest turn-on field of 2.4 V/μm is obtained for graphene film deposited on the Cu substrate.The macroscopic areas of the graphene samples are all above 400 mm~2.  相似文献   

15.
The controllable growth of three different morphologies of AlN nanostructures (nanorod, nanotip and nanocrater) arrays are successfully realized by using chemical vapour deposition (CVD) technology. All three nanostructures are of single crystal h-AlN with a growth orientation of [001]. Their growth is attributed to the vapour-liquid-solid (VLS) mechanism. To investigate the factors affecting field emission (FE) properties of AlN nanostructures, we compare their FE behaviours in several aspects. Experimental results show that AlN nanocrater arrays possess the best FE properties, such as a threshold field of 7.2~V/μm and an emission current fluctuation lower than 4%. Moreover, the three AlN nanostructures all have good field emission properties compared with a number of other excellent cathode nanomaterials, which suggests that they are future promising FE nanomaterials.  相似文献   

16.
Gallium nitride (GaN) nanowires grown on nickel-coated n-type Si (1 0 0) substrates have been synthesized using chemical vapor deposition (CVD), and the field emission properties of GaN nanowires have been studied. The results show that (1) the grown GaN nanowires, which have diameters in the range of 50-100 nm and lengths of several micrometers, are uniformly distributed on Si substrates. The characteristics of the grown GaN nanowires have been investigated using X-ray diffraction (XRD) and transmission electron microscopy (TEM), and through these investigations it was found that the GaN nanowires are of a good crystalline quality (2) When the emission current density is 100 μA/cm2, the necessary electric field is an open electric field of around 9.1 V/μm (at room temperature). The field enhancement factor is ∼730. The field emission properties of GaN nanowires films are related both to the surface roughness and the density of the nanowires in the film.  相似文献   

17.
胡小颖  王淑敏  裴艳慧  田宏伟  朱品文 《物理学报》2013,62(3):38101-038101
利用等离子体化学气相沉积技术, 在引入Ti过渡层后的Co膜表面一步制备出碳纳米片-碳纳米管复合材料, 研究了Co膜厚度对复合材料形貌及场发射性质的影响. 当Co薄膜厚度为11 nm时, 得到了垂直基片定向生长的碳纳米管和碳纳米片复合物, 此时, 碳纳米片分布在碳纳米管的管壁上和管的顶端, 样品的场发射性能最佳.  相似文献   

18.
C-axis oriented MgB_2 thin films were synthesized on single-crystal MgO (111) substrates using a chemical vapour deposition technique. The as-formed films revealed a sharp superconducting transition temperature of 38K with the transition width 0.2K. The temperature dependence of the upper critical magnetic field H_{c2}(T) in the films was determined via resistivity for magnetic field H parallel and perpendicular to the c axis of the films. Using the Werthamer-Helfand-Hohenberg formula, we obtained the anisotropy ratio of the upper critical field γ=1.2.  相似文献   

19.
In this paper, a vacuum system is employed to compare the emission stabilities of the same ZnO cathode in a sealed field emission (FE) device and under ultrahigh vacuum (UHV) conditions. It is observed that the emission current is more stable under the UHV level than in the device. When all conditions except the ambient gases are kept unchanged, the emission current degradation is mainly caused by the residual gases in the sealed device. The quadrupole mass spectrometer (QMS) equipped on the vacuum system is used to investigate the residual gas components. Based on the obtained QMS data, the following conclusions can be drawn: the residual gases in ZnO-FE devices are H2, CH4, CO, Ar, and CO2. These residual gases can change the work function at the surface through adsorption or ion bombardment, thereby degrading the emission current of the cathode.  相似文献   

20.
聂朦  赵艳  曾勇  蒋毅坚 《物理学报》2013,62(17):176801-176801
采用脉冲激光沉积法在蓝宝石衬底上制备出可见光发光良好的氧化锌薄膜, 在不同的温度下进行了后退火处理. 随着退火温度的升高, 薄膜的可见光发光发生了显著改变, 载流子浓度、迁移率、电阻率也呈现出一定的变化规律. 结合 X射线衍射、扫描电子显微镜、光致发光谱及霍尔测量, 探讨了本征氧化锌薄膜可见光发光的发射机理, 并分析了其 n型导电的原因. 关键词: 氧化锌薄膜 可见光发光 n型导电  相似文献   

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