Self-organized nanostructures in Si1-xGex films on Si(001)

Received: 30 July 1998/Accepted: 23 October 1998     

Si(001)表面稀土金属硅化物纳米结构

稀土金属元素的硅化物在n型硅衬底上具有高电导率和低肖特基势垒的特点,在大规模集成的微电子器件领域具有很好的应用价值.文章系统介绍了在Si(001)表面自组装生长的稀土金属硅化物纳米结构的研究进展,较全面地讨论了退火温度、退火时间以及稀土金属表面覆盖度等生长条件对纳米结构生长的影响作用,并在此基础上分析了纳米线、纳米岛的晶化结构,衬底对纳米结构生长的影响,以及纳米结构的演化过程.搞清楚这些内在的生长机理,有助于人们今后实现可严格控制稀土金属硅化物纳米结构的形貌尺寸和分布的自组装生长.此外,文章还介绍了目前人们对稀土金属硅化物纳米线电学性质的研究进展.     

Room-temperature epitaxial growth of CeO2(001) films on YSZ buffered Si(001) substrates

2 (001) epitaxial thin films deposited on Si(001) with yttria-stabilized zirconia buffers have been obtained for the first time at room temperature by pulsed-laser deposition. The influence of oxygen pressure on the crystal quality of CeO₂ was studied for the films deposited at 100 °C. The rocking curve full width at half maximum of the CeO₂(002) peak for films deposited at room temperature and 100 °C was between 1° and 2°, for oxygen pressures below 3×10^-2 mbar. The best crystal quality was obtained at around 3×10^-3 mbar. Epitaxial growth at room temperature was confirmed by cross-sectional transmission electron microscopy. Scanning electron microscopy and atomic force microscopy revealed very smooth surfaces for oxygen pressure below 3×10^-2 mbar, with rms roughness values around 0.3 nm over 5 μm×5 μm. Received: 25 September 1997/Accepted: 22 April 1998     

Formation of pyramid-like nanostructures during cobalt film growth by magnetron sputtering

Cobalt pyramid-like nanostructures with sharp tips were formed on the surfaces of cobalt thin films grown by magnetron sputtering only when a negative bias was applied. There are two types of pyramids, which grew on top of a columnar grain structure directly from Si(001) substrates. The formation of pyramid-like nanostructures is only selective to a -Co (hcp) thin film but not a -Co (fcc) thin film, where the basal plane is 101̄0 with several well-defined low-energy faceted planes. When grown on Si(111) substrates, the shape of the basal plane changes to a pentagon or other polygon. The island nucleation seems to depend on adatom energy, sputtering rate and the interface stress between the Co thin film and the substrate, but growth is significantly determined by the minimum surface configuration of the structure. PACS 61.10.Nz; 68.55.Ac; 68.37.Lp; 66.30.Pa; 68.35.Md     

One-dimensional Ge nanostructures on Si(001) and Si(1 1 10): Dominant role of surface energy

Ge/Si(001) is a prototypical system for investigating three-dimensional island self-assembly owed to the Stranski–Krastanow growth mode. More than twenty years of research have produced an impressive amount of results, together with various theoretical interpretations. It is commonly believed that lattice-mismatch strain relief is the major driving force leading to the formation of these islands. However, a set of recent results on Si(001) and vicinals point out that, under suitable conditions, this is not the case. Indeed, we here review experimental and theoretical results dealing with nanostructures mainly determined by surface-energy minimization. Results are intriguing, as they reveal the existence of magic sizes, show the presence of very peculiar morphologies, such as micron-long wires, and distinguish among attempts to facet the wetting-layer and true SK islands.     

Second-harmonic spectroscopy of Ge/Si(001) and Si1-xGex(001)/Si(001)

0.9 Ge_0.1(001)/Si(001) films with SH photon energies 3.1<2hν<3.5 eV near the bulk E₁ critical point of Si(001) or Si_0.9Ge_0.1(001). Ge was deposited on Si(001) by using atomic layer epitaxy cycles with GeH₄ or Ge₂H₆ deposition at 410 K followed by hydrogen desorption. As Ge coverage increased from 0 to 2 monolayers the SH signal increased uniformly by a factor of seven with no detectable shift in the silicon E₁ resonant peak position. SH signals from Si_0.9Ge_0.1(001)/Si(001) were also stronger than those from intrinsic Si(001). Hydrogen termination of the Si_0.9Ge_0.1(001) and Ge/Si(001) surfaces strongly quenched the SH signals, which is similar to the reported trend on H/Si(001). We attribute the stronger signals from Ge-containingsurfaces to the stronger SH polarizability of asymmetric Ge-Si and Ge-Ge dimers compared to Si-Si dimers. Hydrogen termination symmetrizes all dimers, thus quenching the SH polarizability of all of the surfaces investigated. Received: 13 October 1998 / Revised version: 18 January 1999     

Formation mechanism of one-dimensional Si islands on a H/Si(001) surface

The formation mechanism of one-dimensional Si islands on a H/Si(001)-(2x1) surface is studied using scanning tunneling microscopy/spectroscopy and first-principles calculations. We observed that one-dimensional islands that are made from dimer chains are formed at the initial growth stages similar to the bare Si(001) surface. It is found that the number of odd-numbered dimer chains is larger than that of even-numbered dimer chains. We propose the growth processes of the two types of growth edges to explain the observation.     

Surface electromigration of metals on Si(001): In/Si(001)

The possibility of surface electromigration (SE) of metals of In, Ga, Sb and Ag on a very flat Si(001)2×1 substrate (single domain 2×1) was examined by SEM, μ-RHEED and μ-AES under UHV conditions. It was found that Ga, Sb and Ag show no SE on Si(001) surface even at DC annealing temperatures for the desorption of these metals. For In on Si(001), a very fast SE (8000 μm/min) towards the cathode side was found that suddenly sets in at 450°C DC annealing, which was related to a surface phase transition. μ-RHEED and μ-AES observation showed that the SE is related to an ordered 4×3-In phase together with two-dimensional In gas phase over the 4×3-In phase and an In-disordered phase at the front end of SE. Single domain 4×3-In phases were found to occur under sequences of In deposition and DC annealing which involve the In SE on Si(001).     

First-principles study of ferromagnetism in epitaxial Si-Mn thin films on Si(001)

Density-functional theory calculations are employed to investigate both the epitaxial growth and the magnetic properties of thin Mn and MnSi films on Si(001). For single Mn adatoms, we find a preference for the second-layer interstitial site. While a monolayer Mn film is energetically unfavorable, a capping-Si layer significantly enhances the thermodynamic stability and induces a change from antiferromagnetic to ferromagnetic order. For higher Mn coverage, a sandwiched Si-Mn thin film (with CsCl-like crystal structure) is found to be the most stable epitaxial structure. We attribute the strong ferromagnetic intralayer coupling in these films to Mn 3d-Si 3s3p exchange.     

Self-assembled magnetic nanostructures: Epitaxial Ni nanodots on TiN/Si (001) surface

Systems containing single domain magnetic particles are of great interest in view of their possible applications in ultrahigh-density data storage and magnetoelectronic devices. The focus of this work is plan-view STEM Z-contrast imaging study of the self-assembly growth of magnetic nickel nanostructures by domain matching epitaxy under Volmer–Weber (V–W) mode. The growth was carried out using pulsed laser deposition (PLD) technique with epitaxial titanium nitride film as the template, which was in turn grown on silicon (001) substrate via domain matching epitaxy. Our results show that the base of nickel islands is rectangular with the two principal edges parallel to two orthogonal 〈110〉 directions, which is [110] and [] for [001] oriented growth. The size distribution of the islands is relatively narrow, comparable to that obtained from self-assembled islands grown under Stranski–Krastanow (S–K) mode. A certain degree of self-organization was also found in the lateral distribution of islands: island chains were observed along the directions close to 〈011〉, which are also the edge directions. The interaction between neighboring islands through the island edge-induced strain field is believed to be responsible for the size uniformity and the lateral ordering.An erratum to this article can be found at     

Plastic relaxation anisotropy in epitaxial films grown on miscut Si(001) substrates

A way of calculating the structural parameters of semiconductor epitaxial layers grown on miscut (0 0 1) substrates is developed. It is shown that the difference between the tensor of film elastic strains and the spherical tensor of strains translating the film’s crystal lattice into the substrate’s lattice is a tensor whose components are proportional to X-ray strains. The technique is used to analyze GaAs and Ge_0.2Si_0.8 films grown on (1 1 13) Si substrates. The anisotropy of the degree of plastic relaxation is established for lateral directions perpendicular and parallel to the interfacial steps in the GeSi film. It is proposed that noninteger Miller indices be used to denote the direction and value of the rotation of the film’s crystal lattice with respect to the substrate lattice.     

Order-disorder transition on Si(001)

A phase transition between c(4x2) and 2x1 structures on the Si(001) surface has been observed at 200 K by low-energy electron diffraction. This transition is a second order order-disorder transition of the asymmetric dimer configuration. The streak pattern remains up to well above the transition temperature. The temperature dependence of the width and the length of the streak can be described in terms of the effects of a strong anisotropic coupling between adjacent asymmetric dimers.     

On the characteristics of AlGaN films grown on (111) and (001) Si substrates

High Al-content Al_xGa_1−xN films were deposited on (001) and (111) Si substrates at 1000 °C using high temperature AlN buffer layers. Experimental results show that Al_xGa_1−xN films grown on (111) Si substrates exhibit better crystalline quality than that in the films deposited on (001) Si substrates. Cracks were found in the high Al-content Al_xGa_1−xN/(111) Si samples but they were not observed in the Al_xGa_1−xN films grown on (001) Si substrates having the same film thicknesses and Al compositions. Based upon the results of X-ray diffraction (XRD) and transmission electron microscopy (TEM), it appears that mono-crystalline Al_xGa_1−xN films were achieved on (111) Si substrates while columnar structure was observed in the Al_xGa_1−xN/(001) Si samples. According to the depth profiles of Al_xGa_1−xN/Si samples using secondary ion mass spectroscopic (SIMS) analyses, enhanced Al inter-diffusion in the Al_xGa_1−xN/(001) Si samples was identified. Room temperature (RT) photoluminescence (PL) measurements of the Al_xGa_1−xN (x≦0.10)/(111) Si samples exhibit strong near band edge luminescence. The PL emission linewidth was found to decrease with the decrement of Al-content.     

Temperature dependence of electron loss spectra from MBE-grown GaAs(001)

Electron loss spectra from GaAs(001) have been recorded in the first derivative mode for different surface reconstructions in the temperature interval 200 to 700°C. Evidences were found that the ELS amplitude depended on the surface structure, i.e. the surface arsenic con centration which varies with the temperature.     

Structural phase transition on Si(001) and Ge(001) surfaces

Among a variety of solid surfaces, Si(001) and Ge(001) have been most extensively studied. Although they seem to be rather simple systems, there have been many conflicting arguments about the atomic structure on these surfaces. We first present experimental evidence indicating that the buckled dimer is the basic building block and that the structural phase transition between the low-temperature c(4x2) structure and the high-temperature (2x1) structure is of the order-disorder type. We then review recent theoretical work on this phase transition. The real system is mapped onto a model Ising-spin system and the interaction parameters are derived from total-energy calculations for different arrangements of buckled dimers. The calculated critical temperature agrees reasonably well with the experimental one. It is pointed out that the nature of the phase transition is crucially affected by a small amount of defects on the real surfaces.