象质评价中光学参数的最佳匹配

文中导出了确定成象质量的两个参数一光学孔径与波象差之间相互关系的一些关系式。从理论和实践两方面找出了两者之间的最佳匹配区。文章得出的结果与传统的象质评价标准有显着的差别。     

光学合成孔径成像系统子孔径像差研究

根据波像差理论，推导了光学合成孔径成像系统单个子孔径存在各种像差时波面方差与子孔径数(N)的关系。推导结果表明，piston误差对系统的影响最大，其次是离焦误差、倾斜误差、球差、彗差和像散。运用离焦误差对piston误差、球差和像散进行像差平衡，其效果显著，特别是球差引起的波面方差下降90％。系统各项像差系数随子孔径数的增加而降低;当子孔径数大于6时，各像差系数变化缓慢。根据瑞利判据，计算N(N≤6)个子孔径合成系统的像差允限和相应的3孔径系统的斯特列尔比。     

Conditions for identical position of optimal image plane for axial imaging with different values of f-number

By analysis of the dependence of longitudinal spherical aberration on the numerical aperture, it is possible to find such values of the numerical aperture, where spherical aberration is zero. Such values of the numerical aperture are called correction zones. The work theoretically analyses the described problem and equations are given for wave aberration coefficients using correction zones for spherical aberration of the third and the fifth order. Our work presents an analysis of optimal values of correction zones and an optimal position of the center of the reference sphere based on the variance of wave aberration for the image quality evaluation. Relations are described for calculation of correction zones of an optical system having an identical position of the optimal image plane for two values of the f-number. The analysis of optical systems using correction zones is performed on an example.     

A novel method of high resolution imaging through random perturbation wave front

A novel method is proposed for eliminating the effect of the traditional optical aberration on high resolution imaging by random perturbation wave front and digital image processing. A random phase mask, whose phase spectrum fluctuation is accordant with Kolmogorov distribution, is positioned near the aperture stop of optical system, making the optical aberration image become random perturbation image, that is, the intermediate image. The blind deconvolution algorithm based on maximum-likelihood estimation technique is used to restore the intermediate image acquired by a digital detector. The effects of optical aberrations and the noise on the restoration image are explored. To demonstrate the validity of the method proposed, the computer simulation and laboratory experiments are carried out for the imaging of the optical system with primary aberration. The results have shown that the present method is well suited for effectively improving the imaging quality of the optical system with certain aberration, thus making the optical system resolution close to or reach the diffraction-limit of the optical system.     

NA1.35投影光刻光学系统偏振像差的优化

为了实现NA1.35投影光刻光学系统高质量成像，在设计过程中除了控制波像差，还需进一步优化光学系统的偏振像差。利用Jones光瞳和物理光瞳表达了NA1.35投影光刻光学系统的偏振像差，并用二向衰减量与延迟量分析了光学系统偏振像差的大小；根据光线入射到不同光学面上最大入射角度的不同，为每个光学面设计相应的膜系以优化光学系统的偏振像差。相比于采用常规膜系，膜系优化后NA1.35投影光刻光学系统的二向衰减量和延迟量分别减小到了0.021 8、0.057 2 rad，即减小了光学系统的偏振像差。利用Prolith光刻仿真软件，分别对采用常规膜系和优化膜系的NA1.35投影光刻光学系统进行曝光性能仿真，结果显示:膜系优化后光学系统的成像对比度提高了4.4%，证明了NA1.35投影光刻光学系统偏振像差优化方法的有效性。     

Zernike模式像差共轭组合模型

根据Zernike模式在单位圆的同心孔径圆域内某些模式间具有一定耦合性的结论及对应Zernike模式像差在一定同心光瞳区域内的相互抵消特性,对具有相同角频率不同阶数的Zernike模式建立组合模型,同时根据同心光瞳区域内像差均方根值的降幅比参数给出了同心光瞳直径为4mm时的Zernike模式线性共轭组合模型。最后通过共轭组合模型对光学质量影响的研究发现,共轭模型组合之后能显著提高光学质量。同时也表明Zernike模式组合对光学质量的影响不具备叠加性,而对共轭组合模型表现为补偿关系。     

基于波像差判据的同步相移显微干涉检焦方法

为了实时准确地将激光直写系统中经直写物镜聚焦的光斑定位于待加工元件表面,提出了一种基于波像差判据的同步相移显微干涉检焦方法,实现了对离焦量的实时检测与调整。在直写系统中引入检焦光路,与直写光路共享同一物镜,构建Linnik型同步相移显微干涉检焦系统,提取包含离焦量的波面相位信息;再从大数值孔径（NA）的物镜波像差数据中解析出离焦量的大小与方向。仿真结果验证了基于波像差判据的离焦计算方法的正确性,NA≥0.5时,离焦探测灵敏度可达4 nm, 通过实验验证了同步相移显微干涉检焦方法的可行性,检焦精度可达10 nm以内,满足激光直写高精度的测量要求。     

减小球差的环带透镜设计

根据光线经过折射面后像距和折射面参数之间的关系,将折射面划分为若干同心圆环,各圆环之间沿光轴有一定的轴向间隔。一束平行于光轴的光线入射后,经过不同部分光线的像点相互重叠从而使球差减小。根据上述思想用单透镜构造一个透镜称为环带透镜,然后以环数为2的透镜为例用CODE V进行像差分析。和双胶合透镜比较得出:环带透镜的球差、波像差以及轴上点的弥散斑优于胶合透镜,同时光学传递函数指标提高,接近衍射极限。     

Design of a dynamic refocus system based on the Seidel aberration theory

This Letter presents an optical design method based on the Seidel aberration theory for dynamic refocus systems.The function of a dynamic refocus system is to increase the amount of return photons when a pulsed laser travels over an extended height range. In this study, the dynamic refocus system is a short focal image system. The aberrations of the dynamic refocus system are calculated individually. Aplanatic lenses are used to eliminate the main spherical aberration. A field lens is used to change the stop position in order to eliminate comas and astigmatism. The effectiveness of the initial design results are confirmed, and the designed dynamic refocus objective with an aperture of F-number 0.98 and a focal length of 14.325 mm is achieved. The total motion of the dynamic refocus mirror is approximately 216 at heights that ranged from 8 to 18 km. The optimum result shows that the dynamic refocus system is an ideal optical image system at each conjugating height with10 km sample thicknesses.     

应用波像差理论计算Kirkpatrick-Baez系统的调制传递函数

调制传递函数（modulation transfer function,MTF）曲线可以客观地评价光学系统的成像性能。基于平面对称光学系统的波像差理论,给出了Kirkpatrick-Baez（KB）显微镜光学系统主要像差的波像差计算表达式,采用自相关法,通过Gauss-Legendre数值积分求解并绘制了KB系统的MTF曲线,且与光学分析软件的MTF曲线进行对比。结果表明:应用波像差理论计算调制传递函数不仅可以定量直观地分析KB系统的成像性能,而且能进一步解析光学系统的单项像差分布情况,提供更具针对性的系统优化方案。     

Wave aberration function and its definition

A definition of a wave aberration as a phase shift upon composition of light waves in the image of a point is given using the concept of point eikonal. An expression that determines the total differential of a wave aberration function is obtained and the condition of its integrability is determined. The sequence of the wave aberration function definition at the known functions of the meridional and sagittal components of lateral aberration is presented.     

Phase aberration correction in medical ultrasound using speckle brightness as a quality factor

Medical ultrasonic images are degraded by tissues with inhomogeneous acoustic velocities. The resulting phase aberration raises the off-peak response of the imaging system's point spread function (PSF), decreasing dynamic range. In extreme cases, multiple images of a single target are displayed. Phase aberration may become a limiting factor to image quality as ultrasonic frequency and aperture size are increased in order to improve spatial resolution. A method is proposed to correct for unknown phase aberration, which uses speckle brightness as a quality factor. The phase delays of a phased array transducer are modified, element by element, to maximize mean speckle brightness in a region of interest. The technique proposed is analogous to the correction technique used by Muller and Buffington [J. Opt. Soc. Am. 64 (9), 1200-1209 (1974)] to adaptively focus incoherent optical telescopes. The method is demonstrated using a computer model with several different simulated aberration profiles. With this model, mean speckle brightness is calculated using the two-dimensional PSF. Experiments have also been conducted in which speckle brightness is shown to increase as the phase delays of an ultrasonic scanner are modified in order to compensate for a rippled aberrating layer made of silicone rubber. The characteristics of the proposed method, and the possibility of employing it clinically to correct for unknown inhomogeneities in acoustic velocity, are discussed.     

Hybrid lens with corrected sphero-chromatic aberration

An optical imaging element is considered, which consists of a plano-convex spherical glass lens and a holographic lens recorded on the flat surface. Such a ‘hybrid lens’ enables one simultaneously to correct spherical aberration and longitudinal chromatism for two given wavelengths. The imaging quality of such an achromatic lens of focal length f = 100 mm and relative aperture 1:10 is evaluated by the ray tracing method. The results ensure that the performance of such a hybrid lens is acceptable for field angles as high as 5:100.     

Aberrations of plane-symmetric multi-element optical systems

Based on a recently developed aberration theory of plane-symmetric grating systems, its aberration coefficients are firstly extended to be applicable to the plane-symmetric refractive optical surface. To justify the linear approximation of aperture ray in a multi-element system, the ray aberrations of double-element systems with the third-order accuracy of aperture ray are derived and expressed as the form of wave aberrations. The numerical comparisons are then made between the ray tracing, the aberration expressions with the linear and with third-order accuracy of the aperture ray. Moreover, the modifications of the wave and ray aberrations are discussed in the paper when the position of the principal ray changes.     

Third-order aberration analysis of an off-axial optical system

The aberration theory applied to co-axial optical systems is extended to off-axial systems, for which third-order aberration coefficients are considered. The derived aberrations are analyzed using three-dimensional ray bundles, spot diagrams, and image charts, and classified in relation to the system symmetry. This theory is very useful for optical designers, allowing them to clarify the relationship between the structures of off-axial optical systems and the corresponding off-axial aberrations.     

光束斜入射的折反射组合光学系统的像差计算

基于平面对称光栅反射镜系统的像差理论,根据光学元件材料折射率对成像光束波像差进行修正,将像差理论扩展到平面对称折射光学系统,使得该理论可应用于光束斜入射的折反射组合光学系统的像差计算;指出在折反射组合光学系统中考虑物像方空间折射率的关系,以及入射角方向的定义,使得波像差的计算表达式保持统一;应用扩展后的像差理论对折反射...     

Ghost imaging of Multi-Gaussian Schell-model beams in the Z-tilt aberration corrected channels

Based on the optical coherent theory and the extended Huygens–Fresnel integral, lensless ghost imaging of Multi-Gaussian Schell-model beams through the slant non-Kolmogorov turbulence channels with Z-tilt aberration correction has been studied and the theoretical models have been derived. Our results indicate that the nearer of object to illuminant plane, the larger beam width and the more beamlet number are, the more fine of image quality is. The undersize of illumination light source will cause the quality decline of ghost imaging and the image quality of the object illuminated by the incoherent light are worse than that of illuminated by partially coherent light.     

航空光电成像系统像移补偿技术研究

航空光电成像系统由于像移的存在导致成像分辨率下降,严重影响航空光电系统的整机性能。采用像移补偿技术可以提高航空光电系统成像质量。分析了移动探测器像移补偿技术原理与运动光学元件像移补偿技术原理,重点研究了基于快调反射镜(FSM)的高精度像移补偿技术。通过工程简化分析,分别推导了快调反射镜位于平行光路和会聚光路的像移补偿随动角度规律,并针对会聚光路中快调反射镜带来的离焦量进行分析,讨论了离焦量对光学系统波像差的影响。仿真结果表明,随着离焦量的增加,波像差呈线性增大趋势。通过分析光学系统波像差对其光学调制传递函数（MTF）的影响,结果表明F数等于8,在奈奎斯特频率处,当离焦量在0.1 mm以内,光学调制传递函数MTF的下降量在26.6%以内。     

A study of a liquid-filled lens module with a flexible sensor for aberration correction

This study introduces the concept of a liquid-filled lens module; the module is composed of a flexible lens membrane, a flexible sensor membrane that is constructed by attaching sensor chips onto a flexible substrate and transparent liquid that fills the space between the flexible lens membrane and the sensor membrane. The image quality of the liquid-filled lens module is comparable to that of a solid lens module with a flat-type image sensor. However, the liquid-filled lens module has the advantages of requiring fewer parts, having better optical aberration compensation, a wider image range. This study identifies the optimized conditions for the sensor membrane to fulfill the Petzval surface of the optical module and the compensation mechanism of the flexible lens and the sensor membranes. The simulation results show that the distortion aberration, the field of curvature and the Modulation Transfer Function are good.     

Addition of energy dispersion characteristics to the diagram of axis intercept for aberration analysis of core-lens

The diagram of axis intercept (Nishi and Takaoka [1]) is extended to consider the energy dispersion characteristic. The operating condition of core-lenses can be optimized by taking into account not only the aperture aberration but also the chromatic aberration. The diagram is applied to a typical core-lens system configured with three point charges of different polarities and is plotted as a function of the electron energy in addition to the starting angle. Near the stigmatic condition, the diagram fits the quadratic dependence on both the energy dispersion and the beam tilt angle. Then, the coefficients of aperture aberration, energy dispersion and chromatic aberration are obtained.