Heat flow through a plasma sheath in the presence of secondary electron emission from plasma‐wall interaction

The formation of a plasma sheath in front of a negative wall emitting secondary electron is studied by a one‐dimensional fluid model. The model takes into account the effect of the ion temperature. With the secondary electron emission (SEE ) coefficient obtained by integrating over the Maxwellian electron velocity distribution for various materials such as Be, C, Mo, and W, it is found that the wall potential depends strongly on the ion temperature and the wall material. Before the occurrence of the space‐charge‐limited (SCL ) emission, the wall potential decreases with increasing ion temperature. The variation of the sheath potential caused by SEE affects the sheath energy transmission and impurity sputtering yield. If SEE is below SCL emission , the energy transmission coefficient always varies with the wall materials as a result of the effect of SEE , and it increases as the ion temperature is increased. By comparison of with and without SEE , it is found that sputtering yields have pronounced differences for low ion temperatures but are almost the same for high ion temperatures.     

Sheath structure in plasma with two species of positive ions and secondary electrons

The properties of a collisionless plasma sheath are investigated by using a fluid model in which two species of positive ions and secondary electrons are taken into account. It is shown that the positive ion speeds at the sheath edge increase with secondary electron emission(SEE) coefficient, and the sheath structure is affected by the interplay between the two species of positive ions and secondary electrons. The critical SEE coefficients and the sheath widths depend strongly on the positive ion charge number, mass and concentration in the cases with and without SEE. In addition, ion kinetic energy flux to the wall and the impact of positive ion species on secondary electron density at the sheath edge are also discussed.     

二次电子发射和负离子存在时的鞘层结构特性

 建立了包括电子、离子、器壁发射二次电子以及负离子多种成分的等离子体无碰撞鞘层的基本模型,讨论了二次电子发射和负离子对1维稳态等离子体鞘层结构的影响,并且分析了多种成分等离子体鞘层内的二次电子和负离子的相互作用。结果表明：二次电子发射系数的增加和负离子含量的增加,都将导致鞘层的厚度有所减小;二次电子发射系数超过临界发射系数之后,鞘层不再是离子鞘。随着器壁材料二次电子发射系数的增加,鞘层中的负离子密度分布也逐渐增加;负离子的增加,导致二次电子临界发射系数有所增加。另外,在等离子体鞘层中二次电子发射和负离子的存在,也影响着鞘层中电子的放电特性与器壁材料的腐蚀。     

霍尔推进器中磁化二次电子对鞘层特性的影响

为进一步研究霍尔推进器壁面二次电子发射对推进器性能的影响,采用流体模型数值模拟了二次电子磁化效应的等离子体鞘层特性.得到二次电子磁化鞘层的玻姆判据.讨论了不同的磁场强度和方向、二次电子发射系数以及不同种类等离子体推进器的鞘层结构.结果表明:随器壁二次电子发射系数的增大,鞘层中粒子密度增加,器壁电势升高,鞘层厚度减小;鞘层电势及粒子密度随着磁场强度和方位角的增加而增加;而对于不同种类的等离子体,壁面电势和鞘层厚度也不同.这为霍尔推进器的磁安特性实验提供了理论解释. 关键词： 霍尔推进器 磁鞘 二次电子     

二次电子分布函数对绝缘壁面稳态鞘层特性的影响

由于缺乏详细的理论计算和实验结果,在研究绝缘壁面稳态流体鞘层特性时,通常假设壁面出射的总二次电子服从单能分布(0)、半Maxwellian分布等.在单能电子轰击壁面的详细二次电子发射模型基础上,采用Monte Carlo方法统计发现:当入射电子服从Maxwellian分布时,绝缘壁面发射的总二次电子服从三温Maxwellian分布.进而,采用一维稳态流体鞘层模型进行对比研究,结果表明:二次电子分布函数对鞘边离子能量、壁面电势、电势及电子/离子密度分布等均具有明显影响;总二次电子服从三温Maxwellian分布时,临界空间电荷饱和鞘层无解,表明随着壁面总二次电子发射系数的增加,鞘层直接从经典鞘层结构过渡到反鞘层结构.     

聚合物物理属性对离子注入效应的影响

聚合物导电性能差, 表面电荷积聚所产生的电容效应致使其表面电位衰减, 采用等离子体浸没离子注入对其表面改性是非常困难的. 建立了绝缘材料等离子体浸没离子注入过程的粒子模拟(PIC)模型, 实时跟踪离子在等离子体鞘层中的运动形态及特性并进行统计分析. 并基于PIC模型, 将聚合物表面的二次电子发射系数直接与离子注入即时能量建立关联, 研究了聚合物厚度、介电常数和二次电子发射系数等物理量对鞘层演化、离子注入能量和剂量的影响规律. 研究结果表明: 当聚合物厚度小于200 μ m, 相对介电常数大于7, 二次电子发射系数小于0.5时, 离子注入剂量和高能离子所占的份额与导体离子注入情况相当. 通过对聚合物表面离子注入剂量和高能离子所占份额的研究, 为绝缘材料和半导体材料表面等离子体浸没离子注入的实现提供了理论和实验依据.     

壁面二次电子发射对霍尔推力器放电通道绝缘壁面双鞘特性的影响

为进一步揭示霍尔推力器放电通道绝缘壁面鞘层的特性, 利用考虑了壁面二次电子分布函数的一维稳态流体鞘层模型, 研究了壁面二次电子发射对近壁双鞘特性的影响. 分析结果表明, 由于壁面发射的二次电子对近壁鞘层中的电子密度有增加作用, 存在一个临界二次电子发射系数σ_dc使得: 当σ≤σ_dc时, 鞘层为单层的正离子鞘结构; 当σ>σ_dc时, 鞘层表现为双层的正离子鞘和电子鞘相连结构, 连接点对应于垂直于壁面方向上电势分布的拐点. 然而, 当σ进一步增大到0.999时, 鞘层转变为三层的正离子鞘-电子鞘-正离子鞘交替结构. 数值结果表明: 随着σ的增加, 电子鞘与离子鞘的连接点向远离壁面的方向移动, 电子鞘的厚度逐渐增加; 随着壁面出射电子能量系数a的增加, 近壁区鞘层的厚度也逐渐增加. 关键词： 霍尔推力器 双鞘 壁面二次电子发射     

霍尔推进器中振荡鞘层对电子与壁面碰撞频率的影响研究

利用二维粒子模拟方法研究振荡鞘层对近壁电导的影响.研究结果表明,当二次电子发射系数大于1时,鞘层处于振荡状态.在振荡鞘层状态下,电子与壁面的碰撞通量沿平行与壁面方向剧烈的周期性振荡,振荡的波长为电子静电波波长量级,电子与壁面的碰撞频率高出经典鞘层状态下电子与壁面碰撞频率1—2个数量级,此时的碰撞频率对通道中电流的贡献不可忽略.振荡鞘层相对与经典鞘层增大了电子与壁面的碰撞频率,但是振荡鞘层的存在,仍然会使一部分慢电子无法穿越鞘层的势垒而打到壁面. 关键词： 霍尔推进器 振荡鞘层 二次电子     

不同成分等离子体鞘层的玻姆判据

在一维平板鞘层中采用流体模型分别研究了不同成分无碰撞等离子体鞘层的玻姆判据.通过拟牛顿法数值模拟了含有电子、离子、负离子以及二次电子的等离子体鞘层玻姆判据.结果表明二次电子发射增加了鞘层离子马赫数的临界值,且器壁发射二次电子温度越高,离子马赫数临界值越小.负离子使离子马赫数临界值减小.而在含有二次电子和负离子的等离子体鞘层中,当负离子较少时,二次电子发射对离子马赫数临界值影响较大;当负离子增加时,离子马赫数的临界值则主要受负离子的影响. 关键词： 鞘层 等离子体 玻姆判据     

电子温度对霍尔推进器等离子体鞘层特性的影响

采用二维粒子模拟方法研究了霍尔推进器通道中电子温度对等离子体鞘层特性的影响, 讨论了不同电子温度下电子数密度、鞘层电势、电场及二次电子发射系数的变化规律. 结果表明: 当电子温度较低时, 鞘层中电子数密度沿径向方向呈指数下降, 在近壁处达到最小值, 鞘层电势降和电场径向分量变化均较大, 壁面电势维持一稳定值不变, 鞘层稳定性好; 当电子温度较高时, 鞘层区内与鞘层边界处电子数密度基本相等, 而在近壁面窄区域内迅速增加, 壁面处达到最大值, 鞘层电势变化缓慢, 电势降和电场径向分量变化均较小, 壁面电势近似维持等幅振荡, 鞘层稳定性降低; 电子温度对电场轴向分量影响较小; 随电子温度的增大, 壁面二次电子发射系数先增大后减少. 关键词： 霍尔推进器 等离子体鞘层 电子温度 粒子模拟     

等离子体浸没离子注入非导电聚合物的适应性及栅网诱导效应的研究

本文建立了绝缘材料等离子体浸没离子注入过程的动力学Particle-in-cell(PIC)模型, 将二次电子发射系数直接与离子注入即时能量建立关联, 研究了非导电聚合物厚度、介电常数和二次电子发射系数对表面偏压电位的影响规律以及栅网诱导效应. 研究结果表明: 非导电聚合物较厚时, 表面自偏压难以实现全方位离子注入, 栅网诱导可以间接为非导电聚合物提供偏压, 并抑制二次电子发射, 为厚大非导电聚合物表面等离子体浸没离子注入提供了有效途径.     

电子温度各向异性对霍尔推力器BN绝缘壁面鞘层特性的影响

建立多价态多组分等离子体一维流体鞘层模型,引入电子温度各向异性系数并考虑出射电子速度分布,研究了电子温度各向异性对霍尔推力器中的BN绝缘壁面鞘层特性和近壁电子流的影响.分析结果表明,相比于纯一价氙等离子体鞘层参数,推力器中的多价态氙等离子体鞘层电势降略有降低,电子壁面损失增加,临界二次电子发射系数减小.推力器中的电子温度各向异性现象可以显著地加大出射电子能量系数,进而降低鞘层电势降,增强电子壁面相互作用.数值结果表明,空间电荷饱和机制下电子温度各向异性对鞘层空间电势分布影响显著. 关键词： 霍尔推力器 电子温度各向异性 空间电荷饱和鞘层     

Characteristics of wall sheath and secondary electron emission under different electron temperatures in a Hall thruster

In this paper, a two-dimensional physical model is established in a Hall thruster sheath region to investigate the influences of the electron temperature and the propellant on the sheath potential drop and the secondary electron emission in the Hall thruster, by the particle-in-cell(PIC) method. The numerical results show that when the electron temperature is relatively low, the change of sheath potential drop is relatively large, the surface potential maintains a stable value and the stability of the sheath is good. When the electron temperature is relatively high, the surface potential maintains a persistent oscillation, and the stability of the sheath reduces. As the electron temperature increases, the secondary electron emission coefficient on the wall increases. For three kinds of propellants(Ar, Kr, and Xe), as the ion mass increases the sheath potentials and the secondary electron emission coefficients reduce in sequence.     

Secondary electron emission yield from vertical graphene nanosheets by helicon plasma deposition

The secondary electron emission yields of materials depend on the geometries of their surface structures.In this paper,a method of depositing vertical graphene nanosheet(VGN)on the surface of the material is proposed,and the secondary electron emission(SEE)characteristics for the VGN structure are studied.The COMSOL simulation and the scanning electron microscope(SEM)image analysis are carried out to study the secondary electron yield(SEY).The effect of aspect ratio and packing density of VGN on SEY under normal incident condition are studied.The results show that the VGN structure has a good effect on suppressing SEE.     

A Monte-Carlo calculation of the secondary electron emission of normal metals: I. The model

A model is proposed to describe the secondary electron emission (SEE) of pure normal metals. The various types of collisions suffered by an electron travelling in the solid are analyzed. The dielectric theory is used to account for the collisions with the jellium, including surface effects in an approximate way. The different damping mechanisms for plasmons are reviewed and their influence on SEE is emphasized. The elastic and ionizing collisions with the ionic cores are described by a randium model. The relative importance of each of the above processes for the SEE of normal metals is discussed.     

激光刻蚀对镀金表面二次电子发射的有效抑制

使用红外激光刻蚀技术在镀金铝合金表面制备了多种形貌的微孔及交错沟槽阵列.表征了两类激光刻蚀微阵列结构的三维形貌和二维精细形貌,分析了样品表面非理想二级粗糙结构的形成机制.研究了微阵列结构二次电子发射特性对表面形貌的依赖规律.实验结果表明:激光刻蚀得到的微阵列结构能够有效抑制镀金表面二次电子产额(secondary electron yield,SEY),且抑制能力明显优于诸多其他表面处理技术;微阵列结构对SEY的抑制能力与其孔隙率及深宽比呈现正相关,且孔隙率对SEY的影响更为显著.使用蒙特卡罗模拟方法并结合二次电子发射唯象模型和电子轨迹追踪算法,仿真了各微结构表面二次电子发射特性,模拟结果从理论上验证了微阵列结构孔隙率及深宽比对表面SEY的影响规律.本文获得了能够剧烈降低镀金表面SEY的微阵列结构,理论分析了SEY对微结构特征参数的依赖规律,对开发空间微波系统中低SEY表面及提高镀金微波器件性能有重要意义.     

Distribution functions of positive ions and electrons in a plasmanear a surface

In this study, the velocity distribution functions of the ions and electrons in a collisional presheath and collisionless sheath of a plasma near a wall emitting and reflecting ions and electrons are systematically determined. The collisions in the presheath are modeled by a relaxation time approximation (namely, Bhatnagar-Gross-Krook model, or simply BGK model). To find the variation in electrostatic potential with position, the model and analysis from Emmert et al. (1980), are used. Distribution functions of the ions and electrons in a collisionless presheath and sheath on a wall partially reflecting ions and electrons, therefore, can be exactly obtained. The reflections of the ions and electrons by a wall play important roles in studying heat transfer from a plasma sheath to a workpiece surface, and sputter etching and deposition, ion implantation, and ion scattering spectroscopy. Irrespective of ion and electron reflectivities, velocities of the ions in the presheath and sheath are of highly non-Maxwell-Boltzmann distributions. The electrons in the presheath are close to Maxwell-Boltzmann distributions, whereas those in the sheath are non-Maxwell-Boltzmann distributions. Even though the wall partially reflects ions and electrons, the Bohm's criterion is marginally satisfied at the sheath edge. The computed distribution functions for a completely absorbing surface agree with theoretical results provided in the literature. Good comparison of the resulted transport variables with available analytical work is presented in the companion paper     

Langmuir probe in magnetized plasma: Study of the diffusion parameter

In low-temperature magnetized plasma, Langmuir probe measurements must be corrected because of the electron diffusion through the sheath, which is formed around the probe collector. The correction factor, which is called the electron diffusion or electron sink parameter, depends on many other parameters such as the probe geometry, the electron diffusion coefficient, the sheath thickness, or the potential profile through the sheath. Based on a previous work, we determine the values of this parameter under different experimental conditions and we study the effect of the electron energy, of the probe-biased voltage, and of the magnetic field intensity on this parameter. The results are compared with theoretical models published in the literature. An empirical equation is determined to fit the diffusion parameter value versus magnetic field intensity.     

磁绝缘传输线压力平衡模型的修正

 由于电子的发射,在磁绝缘传输线（MITL）的阴极表面附近会形成一层电子鞘层。当传输线工作在稳定态时,电子鞘层的边缘满足压力平衡。在此基础上,考虑了电子鞘层内部的碰撞,利用PIC计算方法对MITL的电压、阴极电流和阳极电流的关系进行修正,使得阴阳极电流在饱和流条件下与模拟计算结果更加符合,最大误差由9%降到3%。碰撞系数关于电压的拟合曲线适合于工作电压为2～7 MV的理想MITL。     

金纳米结构表面二次电子发射特性

使用低气压蒸发工艺制备了金纳米结构,研究了金纳米结构的二次电子发射特性及其对表面形貌的依赖规律,表征了金纳米结构表面出射二次电子能量分布.实验结果表明:蒸发气压升高时,金纳米结构孔隙率增大,表面电子出射产额降低;能量分布表明金纳米结构仅对低能真二次电子有明显抑制作用,对背散射电子的作用效果则依赖于表面形貌.使用由半球和沟槽构成的复合结构,并结合二次电子发射唯象概率模型,对金纳米结构进行模型等效及电子发射特性仿真,模拟结果表明:纳米结构中的半球状纳米颗粒对两种电子产额均有增强作用;沟槽对真二次电子产额有强抑制作用,而对背散射电子产额仅有微弱抑制作用.本工作深入研究了金纳米结构表面电子发射机理,对于开发空间微波系统中纳米级低电子产额表面有重要参考价值.