水下应用的电容式微机械超声换能器阵列设计

为提高用于水下成像的电容式微机械超声换能器的指向性,文中用ANSYS力电耦合分析法设计了工作频率为400 k Hz的收发一体传感器的结构参数并完成了实验验证。同时研究了阵列设计方法,分析了电容式微机械超声换能器阵列各参数对指向性的影响,完成了从微小敏感单元到阵列的设计,实现了阵列指向性的优化设计。该阵列为16阵元的线阵,阵元间距为1.925 mm,阵元宽度为1.82 mm。进行了水下指向性测试,实验表明该线阵的-3 dB主瓣宽度为5?,最大旁瓣级为-13.5 dB,对称性好。该设计是实现较远距离的探测,提高成像分辨率的前提。     

面向电容式微机械超声换能器器件的32通道收发 电路设计与测试*

针对以电容式微机械超声换能器(CMUT)阵列为探头的超声成像系统,设计了一种兼具现场可编程门阵列(FPGA)控制、脉冲驱动以及微弱电流信号检测功能的电路。利用FPGA产生64路控制信号,控制脉冲信号的频率、脉冲个数、占空比等参数;脉冲电路在FPGA以及直流电压的控制下,产生32路脉冲信号;接收电路通过跨阻放大结构实现32路电流信号检测;32通道收发电路利用脉冲产生芯片内自带的T/R开关进行高压隔离。通过搭建测试平台,对收发电路功能及一致性进行测试,并连接CMUT进行自发自收测试。测试结果表明,32通道收发电路具有良好的一致性,电路可以实现基于CMUT阵列的32通道超声信号的发射,检测回波信号,并对CMUT器件的带宽进行测试。电路具有功能完善,结构稳定的优点,为基于CMUT阵列的超声成像系统的应用提供了硬件支持。     

硅油介质中矩形电容式微机械超声换能器发射与接收声场特性研究*

与传统压电式超声换能器相比,基于微机电系统微加工技术制备的电容式微机械超声换能器(CMUT)具有频带宽、灵敏度高、一致性好、易于集成等优势,在医学超声成像中具有广阔的应用前景。该文针对研制的矩形CMUT器件,开展硅油介质中CMUT发射、接收声场特性的理论分析及实验验证研究。首先,针对CMUT阵元结构特征和工作原理,根据指向性函数理论和Bridge乘积原理,建立了矩形CMUT阵元指向性函数分析模型。此基础上,分析微元数目以及谐振频率对CMUT指向性的影响规律。最后,针对7 mm×7 mm二维矩形CMUT在硅油介质中的发射和接收特性进行了实验验证,测试表明发射指向性曲线与仿真理论曲线基本吻合;此外,CMUT接收与发射指向性的测试表明,收发指向性具有一致性,从而验证了声场的互易性。该文的研究对CMUT器件的封装设计以及基于CMUT阵列的乳腺超声CT成像系统的研制具有重要参考价值。     

应用于微电容超声换能器的信号处理电路设计*

针对微电容超声换能器的输出信号特征及检测要求,文中设计了换能器的微弱信号处理电路,包括基于跨阻的微弱电流信号检测和多重反馈带通滤波电路。通过搭建水下测试平台,对电路性能及功能进行实际测试,并进行水下测距实验。实验结果表明,该电路可对微电容超声换能器输出的400 k Hz信号进行检测放大与滤波;电路的线性度为0.18%,滤波电路中心频率为396 k Hz,带宽为55 k Hz。该电路可用于CMUT的接收信号处理并应用于超声测距及成像的前端信号处理。     

空气耦合电容式微超声换能器设计

建立了空气耦合电容式微超声换能器(CMUT)的理论方法,分析CMUT各个结构参数对其性能参数的影响。根据理论分析结果结合无损检测应用背景设计了一个由16个阵元构成的CMUT阵列,并采用SOI晶圆键合工艺制作。该阵列每个阵元包含16个圆形CMUT敏感单元,敏感单元的半径400μm,中心频率230 kHz。建立CMUT发射和接收瞬态仿真模型分别得到CMUT发射声压和接收灵敏度与激励电压的关系,并通过实验测试验证该仿真模型的准确性。最后通过实验对CMUT与商用压电空耦超声换能器的性能进行对比,实验结果表明CMUT的发射声压和接收灵敏度与商用换能器达到相同数量级,并且能够成功激发和接收铝合金板中A_0模态Lamb波。     

电容式微超声波换能器的设计与电容值测试*

本文设计的微电容超声波换能器(CMUT)是由电容阵列组成的超声波传感器,主要是利用电容的改变来实现能量的转换。是基于硅硅键合技术的MEMS电容式超声传感器,制作的传感器误差小,并且工艺流程简单且能进行量产。在利用E4990A阻抗分析仪对传感器进行C—V测试分析而得出其电容的实际值与理论值的误差仅为1.6%。并且利用该仪器测试传感器电容在工作电压下随频率的变化,得出其在工作电压下,频率为400K的时候电容值为617.67PF,为对传感器进行理论计算提供了重要支撑,并且为后续转换电路的设计提供了数据支撑。     

超声内镜换能器的应用进展

超声内镜集结了超声检查与内镜检查双重功能,可以获得腹部和胸腔内器官的高质量图像,是一种先进的医疗设备。超声内镜探头的核心部分是超声换能器。超声内镜检查需经过狭窄的消化道或内窥镜的活检通道伸进体内,由于工作环境的限制,超声内镜用换能器与普通超声成像换能器相比,工作频率更高、尺寸更小、制作工艺更精密。本文从超声内镜所用换能器的外形结构、内部组成、工作模式及材料等角度,对目前国内外超声内镜换能器的应用进展情况进行了描述,并根据超声内镜换能器的现状对未来的发展趋势进行了分析。     

声子晶体结构在功率超声换能器中的应用

该文提出了一种二维声子晶体结构模型,并将该模型应用于横向尺寸较大的功率超声换能器的前盖板中,避免了形成耦合振动对换能器的影响,从而优化了该类换能器的工作性能.首先设计了一种具有近周期性结构的圆柱形孔的前盖板,然后研究了声子晶体结构前盖板散射体的半径大小和高度对换能器共振频率以及前盖板带隙的影响.结果表明,随着散射体半径...     

cMUT阵元的声学分析与环形扫描成像

电容式微机械超声换能器(cMUT)具有宽带宽、灵敏度高、机械阻抗低和与电子电路集成制造等优点.由于超声换能器声场设计的好坏决定了成像质量的优劣,为了明确阵元参数与辐射声场的关系,该文对不同的阵元参数进行了计算仿真.与压电陶瓷超声换能器的结构不同,cMUT阵元是由多个电容单元(cell)并联构成.因此分析了cell的半径...     

以有效值计算的热声键合PZT换能器阻抗分析

在热超声芯片键合过程中,PZT换能器阻抗是键合系统的一个重要的研究参数。本文在提取PZT换能器驱动电信号实部数据的前提下,采用连续加窗的有效统计值计算的广义阻抗表征整个键合周期内的PZT换能器阻抗变化,由此获得键合过程PZT换能器阻抗的动态变化规律。文中详细介绍了PZT换能器阻抗的试验方法,并分析了试验结果。     

Capacitive micromachined ultrasonic transducers using commercial multi-user MUMPs process: Capability and limitations

The objective of this work is to construct capacitive micromachined ultrasound transducers (cMUTs) using multi-user microelectromechanical systems (MEMS) processess (MUMPs) and to analyze the capability of this process relative to the customized processes commonly in use. The MUMPs process has the advantages of low cost and accessibility to general users since it is not necessary to have access to customized fabrication capability such as wafer-bonding and sacrificial release processes. While other researchers have reported fabricating cMUTs using the MUMPs process none has reported the limitations in the process that arise due to the use of standard design rules that place limitations on the material thicknesses, gap thicknesses, and materials that may be used. In this paper we explain these limitations, and analyze the capabilities using 1D modeling, Finite Element Analysis, and experimental devices. We show that one of the limitations is that collapse voltage and center frequency can not be controlled independently. However, center frequencies up to 9 MHz can be achieved with collapse voltages of less than 200 V making such devices suitable for medical and non-destructive evaluation imaging applications. Since the membrane and base electrodes are made of polysilicon, there is a larger series resistance than that resulting from processes that use metal electrodes. We show that the series resistance is not a significant problem. The conductive polysilicon can also destroy the cMUT if the top membrane is pulled in the bottom. As a solution we propose the application of an additional dielectric layer. Finally we demonstrate a device built with a novel beam construction that produces transmitted pressure pulse into air with 6% bandwidth and agrees reasonably well with the 1D model. We conclude that cMUTs made with MUMPs process have some limitations that are not present in customized processes. However, these limitations may be overcome with the proper design considerations that we have presented putting a low cost, highly accessible means of making cMUT devices into the hands of academic and industrial researchers.     

Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities

This work reports performance improvements of air-coupled capacitive micromachined ultrasonic transducers (CMUTs) using resonant cavities. In order to perform this work, we have designed and manufactured a CMUT employing multi-user microelectromechanical systems (MEMS) processes (MUMPs). The transducer was designed using Helmholtz resonator principles. This was characterised by the dimensions of the cavity and several acoustic ports, which had the form of holes in the CMUT plate. The MUMPs process has the advantage of being low cost which allows the manufacture of economic prototypes. In this paper we show the effects of the resonant cavities and acoustic ports in CMUTs using laser Doppler vibrometry and acoustical measurements. We also use Finite Element (FE) simulations in order to support experimental measurements. The results show that it is possible to enhance the output pressure and bandwidth in air by tuning the resonance frequency of the plate (f_p) with that of the Helmholtz resonator (f_H). The experimental measurements show the plate resonance along with an additional resonance in the output pressure spectrum. This appears due to the effect of the new resonant cavities in the transducer. FE simulations show an increase of 11 dB in the output pressure with respect to that of a theoretical vacuum-sealed cavity MUMPs CMUT by properly tuning the transducer. The bandwidth has been also analyzed by calculating the mechanical Q factor of the tuned CMUT. This has been estimated as 4.5 compared with 7.75 for the vacuum-sealed cavity MUMPs CMUT.     

用来激励高频超声换能器的电激励源

讨论了超声换能器的几种激励方法，分析了三种常用激励方法在激励高频超声换能器时的特点及其同局限性，我们雪崩ＭＡＲＸ电路制作的单极窄脉冲能地激励率高达１００ＭＨｚ的换能器并取得了较好的结果。     

Lead-free KNLNT piezoelectric ceramics for high-frequency ultrasonic transducer application

This paper presents the latest development of a lead-free piezoelectric ceramic and its application to transducers suitable for high-frequency ultrasonic imaging. A lead-free piezoelectric ceramic with formula of (K_0.5Na_0.5)_0.97Li_0.03(Nb_0.9 Ta_0.1)O₃ (abbreviated as KNLNT-0.03/0.10) was fabricated and characterized. The material was found to have a clamped dielectric constant ε₃₃^S/ε₀ = 890, piezoelectric coefficient d₃₃ = 245 pC/N, electromechanical coupling factor k_t = 0.42 and Curie temperature T_c > 300 °C. High-frequency (40 MHz) ultrasound transducers were successfully fabricated with the lead-free material. A representative lead-free transducer had a bandwidth of 45%, two-way insertion loss of -18 dB. This performance is comparable to reported performances of popular lead-based transducers. The comparison results suggest that the lead-free piezoelectric material may serve as an alternative to lead-based piezoelectric materials for high-frequency ultrasonic transducer applications.     

An absolute method for determination of misalignment of an immersion ultrasonic transducer

An absolute methodology has been developed for quantification of misalignment of an ultrasonic transducer using a corner-cube retroreflector. The amplitude based and the time of flight (TOF) based C-scans of the reflector are obtained for various misalignments of the transducer. At zero degree orientation of the transducer, the vertical positions of the maximum amplitude and the minimum TOF in the C-scan coincide. At any other orientation of the transducer with the horizontal plane, there is a vertical shift in the position of the maximum amplitude with respect to the minimum TOF. The position of the minimum (TOF) remains the same irrespective of the orientation of the transducer and hence is used as a reference for any misalignment of the transducer. With the measurement of the vertical shift and the horizontal distance between the transducer and the vertex of the reflector, the misalignment of the transducer is quantified. Based on the methodology developed in the present study, retroreflectors are placed in the Indian 500 MWe Prototype Fast Breeder Reactor for assessment of the orientation of the ultrasonic transducer prior to the under-sodium ultrasonic scanning for detection of any protrusion of the subassemblies.     

Simple method for measuring vibration amplitude of high power airborne ultrasonic transducer: Using thermo-couple

Vibration amplitude of transducer’s elements is the influential parameters in the performance of high power airborne ultrasonic transducers to control the optimum vibration without material yielding. The vibration amplitude of elements of provided high power airborne transducer was determined by measuring temperature of the provided high power airborne transducer transducer’s elements. The results showed that simple thermocouples can be used both to measure the vibration amplitude of transducer’s element and an indicator to power transmission to the air. To verify our approach, the power transmission to the air has been investigated by other common method experimentally. The experimental results displayed good agreement with presented approach.     

Review of the design of power ultrasonic generator for piezoelectric transducer

The power ultrasonic generator (PUG) is the core device of power ultrasonic technology (PUT), and its performance determines the application of this technology in biomedicine, semiconductor, aerospace, and other fields. With the high demand for sensitive and accurate dynamic response in power ultrasonic applications, the design of PUG has become a hot topic in academic and industry. However, the previous reviews cannot be used as a universal technical manual for industrial applications. There are many technical difficulties in establishing a mature production system, which hinder the large-scale application of PUG for piezoelectric transducers. To enhance the performance of the dynamic matching and power control of PUG, the studies in various PUT applications have been reviewed in this article. Initially, the demand design covering the piezoelectric transducer application and parameter requirements for ultrasonic and electrical signals is overall summarized, and these parameter requirements have been recommended as the technical indicators of developing the new PUG. Then the factors affecting the power conversion circuit design are analyzed systematically to realize the foundational performance improvement of PUG. Furthermore, advantages and limitations of key control technologies have been summarized to provide some different ideas on how to realize automatic resonance tracking and adaptive power adjustment, and to optimize the power control and dynamic matching control. Finally, several research directions of PUG in the future have been prospected.     

基于分布式超声无损检测方法的零件内部缺陷检测

超声检测广泛应用于工业检测,比如超声相控阵检测法和超声A扫应用于零件内部缺陷检测。然而,这些方法可以检测出缺陷位置却很难精确地检测缺陷尺寸,缺陷定量成了急需解决并且很有意义的问题。本文提出了一种分布式超声无损检测方法,将超声探头均匀布置在检测表面,每一个超声探头可以同时发射和接收超声信号,通过对接收到的信号进行处理来重构缺陷轮廓。基于分布式超声无损检测方法,重构零件的人造缺陷并建立相应的声学仿真模型。通过多项式拟合法和聚类法分别处理实验和仿真所获得的数据并重构缺陷轮廓。实验结果和仿真结果显示重构的椭圆形缺陷和正方形缺陷具有一定的精度。结果表明分布式超声无损检测方法有潜在的应用价值和理论意义。     

An ultrasonic multi-wave focusing and imaging method for linear phased arrays

To overcome the inherent limits of traditional single wave imaging for nondestructive testing,the multi-wave focusing and imaging method is thoroughly studied.This method makes the compressional waves and shear waves focused in both emission and reception processes,which strengthens the focusing energy and improves the signal-to-noise ratio of received signals.A numerical model is developed to study the characteristics of a multi-wave focusing field.It is shown that the element width approaching 0.8 wavelengths of shear waves can keep a balance between the radiation energy of two waves,which can achieve a desirable multi-wave focusing performance.And an experiment using different imaging methods for a linear phased array is performed.It can be concluded that due to the combination of the propagation and reflection characteristics of two waves,the multi-wave focusing and imaging method can significantly improve the imaging distinguishability of defects and expand the available sweeping range to a sector of-650 to 65°.