Metal Silicides in CMOS Technology: Past,Present, and Future Trends

Metal silicides have played an indispensable role in the raped development of microelectronics since PtSi was first used to improve the rectifying characteristics of diodes in early 1960s. This work first provides a brief historical overview of the many different silicides, and, correspondingly, the different processing methodologies used in the past.With regard to the present use of silicides in CMOS technologies a convergence becomes clear with the self aligned technology using only a limited number of silicides, namely, TiSi₂, CoSi ₂, and NiSi. A section on fundamental aspects is included to cover thermodynamics and kinetics, which are essential for understanding the silicide formation processes. The advantage and disadvantages of TiSi₂, CoSi ₂, and NiSi are analyzed with the development trend of CMOS technologies as a measure. Specifically, the reactive diffusion and phase formation of these silicades in the three terminals of a metal-oxides-semiconductor device, that is, gate, source, and drain are scrutinized. The review ends with an extended discussion of about future trends of metal-silicides in micro/nanoelectronics, with reference to the potential material aspects and device structures outlined in the International Technologies Roadmap for Semiconductors.     

磁学在高新科技中的应用

磁的普遍存在和广泛应用 现代磁学研究和应用的发展已经证明：任何物质从宏观的固体、液体和气体到微观的原子、原子核和基本粒子都具有或强或弱的磁性，任何空间从我们体内到身边、从地球到各种天体(行星和恒星)、到星际空间都存在或高或低的磁场．因而可以说，包含物质的磁性和空间的磁场是普遍存在的．一般所说的无磁性物质，实际上是弱磁性物质，而一般所说的磁性物质或称磁性材料，实际上是强磁性物质．     

高科技显微镜发展现状与未来

本文综述了英国、美国、德国、日本等国的高科技显微镜的发展现状和未来,以及今后显微镜的研制开发趋向。     

现代物理学与新技术革命 --"从产业革命到信息社会"之二

现代物理学指的是20世纪的物理学；这里说的新技术革命，指的是20世纪电子技术、自动化技术、核能技术、激光技术、信息技术、新材料技术、空间技术、基因技术、纳米技术等高新技术领域的崛起．这两者之间存在着什么关系？     

新技术革命与信息社会--"从产业革命到信息社会"之三

1新技术革命中的信息技术 20世纪的新技术革命指的是电子技术、核能技术、信息技术、激光技术、空间技术、新材料技术、基因技术、纳米技术等高新技术群落的崛起．其中信息技术在新技术革命中占据特殊地位．     

Present and Future Cryogenic Experiments on Double-Beta Decay

Thermal detectors are introduced and their possible impact on neutrinoless double-beta-decay (20) search is discussed. The thermal experiment MIBETA is described, reporting the up-to-date limits on ¹³⁰Te and ¹²⁸Te. A new generation experiment, consisting in a large expansion of MIBETA and known as CUORE, is presented and discussed.     

光纤通信的过去、现在和未来

简略介绍了世界光纤通信发展历史,概括了光纤通信的现状,最后重点介绍了中国光纤通信的发展历程。