Study of Ti addition in channel layers for In-Zn-O thin film transistors

Ti added In-Zn-O thin films and their application to thin film transistors were studied. The In-Zn-O films were deposited by pulsed plasma deposition using targets with various Ti contents added. High content of Ti in In-Zn-O films was found to induce a decrease in carrier concentration. The effect was attributed to suppression of oxygen vacancies by Ti incorporation. For thin film transistors with Ti added In-Zn-O as channel layer materials, threshold voltage showed positive shift as Ti content increases and field effect mobility was not decreased at the same time. Results of a bias stress experiment on device fabricated at room temperature are also given.     

Effects of refractive index modifiers and UV light on an epoxy-functional inorganic-organic hybrid sol-gel derived thin film system

Thin film systems consisting of (3-glycidyloxypropyl)trimethoxysilane (GDPTMS), dimethyldimethoxysilane (DMDMOS) and, either zirconium(IV) n-propoxide (Zr(OPrⁿ)₄) or diphenyldimethoxysilane (DPDMS) were synthesised via the sol-gel method. GDPTMS and DMDMOS were employed as the main network formers, whereas Zr(OPrⁿ)₄ or DPDMS was both a network former and a refractive index modifier. The comparative effects of Zr and DPDMS content, and UV light on the optical and thermal properties of the system were evaluated. Refractive index measurements and cross-sectional scanning electron microscopy of the resultant thin films were performed. The thermal stability of each system, in terms of temperature at 10% mass loss, was characterised by dynamic thermogravimetry. It was demonstrated that the selection of refractive index modifier along with UV irradiation plays an important role in tuning the optical and thermal properties of an epoxy-functional inorganic-organic hybrid sol-gel derived thin film system.     

Mg掺杂PST薄膜的溶胶-凝胶法制备及晶相形成研究

利用溶胶-凝胶法成功制备了Mg掺杂Pb_0.4Sr_0.6Mg_xTi< sub>1-xO_3-x薄膜，利用x射线衍射仪对薄膜的物相和结构进行了分析， 用扫描电子显微镜对薄膜的形貌和断面等进行了观察.研究结果表明，薄膜以立方钙钛矿为 晶相，薄膜中晶相以团聚状颗粒存在，晶相含量受热处理条件和Mg的掺杂量所控制.Mg掺杂 对Pb_0.4Sr_0.6Mg_xTi_1-xO_3-x 薄膜晶相含量的影响与钙钛矿中的氧空位缺陷相关.在一定的掺杂范围内，由掺杂引起晶相 的晶格畸变较小时，体系掺Mg平衡了晶体内本征氧空位引入的电荷不平衡，使晶相更为稳定 ，析晶能力提高，晶体形成量随掺杂浓度的提高而提高.当掺杂浓度达到一定量时， 随着Mg 掺杂浓度增加，一方面使形成晶体时杂质浓度增加造成参与形成晶相的组成含量下降，另一 方面使进入钙钛矿结构的Mg增加，氧空位大量增加使畸变程度提高，形成的晶相不稳定，析 晶能力下降，晶体含量随掺杂Mg浓度的增加而不增反降.在相同条件下制备的Pb_{0.4Sr0.6MgxTi1-xO3-x薄膜中Mg掺量约为 x=0.01时，得到的钙钛矿相含量最高，本征氧缺陷所带入的正电荷和Mg引入时带入的负电荷 间达到平衡.此外，Mg的掺入还影响到析晶与热处理过程之间的关系.在高Mg掺量范围，Mg含 量越高，形成的晶相越不稳定，热处理时间越长，使热处理过程中分解的晶相量越多，随Mg 掺量越高和热处理时间越长，薄膜中晶相含量越低. 关键词： 溶胶-凝胶法 PST薄膜 Mg掺杂 晶相形成}     

基于蛋清栅介质的超低压双电层薄膜晶体管

新一代环保、生物兼容性电子功能器件受到了广泛关注.本文采用具有高质子导电特性的天然鸡蛋清作为耦合电解质膜制备双电层薄膜晶体管,该薄膜晶体管以氧化铟锡导电玻璃为衬底和底电极,以旋涂法制备的鸡蛋清为栅介质,以磁控溅射沉积的氧化铟锌为沟道和源漏电极.实验结果表明,这种基于鸡蛋清的栅介质具有良好的绝缘性,并能在其与沟道界面处形成巨大的双电层电容,从而使得该类晶体管具有超低工作电压（1.5 V）、低亚阈值（164 mV/dec）、大电流开关比（2.4×10⁶）和较高的饱和区场效应迁移率（38.01 cm²/（V· s））.这种以天然鸡蛋清为栅介质的超低压双电层TFTs有望应用于新型生物电子器件及低能耗便携式电子产品.     

微晶硅薄膜晶体管稳定性研究

对有源区处于结构过渡区的微晶硅底栅薄膜晶体管，测试其偏压衰退特性时，观察到一种“自恢复”的衰退现象.当栅和源漏同时施加10 V的偏压时，测试其源-漏电流随时间的变化，发现源-漏电流先衰减、而后又开始恢复上升的反常现象.而当采用栅压为10 V、源-漏之间施加零偏压的模式时，源-漏电流随时间呈先是几乎指数式下降、随之是衰退速度减缓的正常衰退趋势.就此现象进行了初步探讨. 关键词： 过渡区硅材料 微晶硅薄膜晶体管 稳定性 自恢复衰退     

氢元素对铟镓锌氧化物薄膜晶体管性能的影响

对国际上有关铟镓锌氧化物薄膜晶体管中氢元素的来源、存在形式、表征方法以及对器件性能的影响进行了综述.氢元素是铟镓锌氧化物薄膜晶体管中最为常见的杂质元素,能以正离子和负离子两种形式存在于薄膜晶体管的沟道中,并对器件性能和电学可靠性产生影响.对铟镓锌氧化物薄膜晶体管而言,沟道中氢元素浓度越高,其场效应迁移率越高、亚阈值摆幅越小、器件的电学稳定性也越好.同时,工艺处理温度过低或过高都不利于其器件性能的改善,通常以200—300?C为宜.     

有机薄膜晶体管中接触效应的研究

研究了接触效应对有机薄膜晶体管性能的影响.首先在n型重掺杂Si片上制备了以M_OO₃修饰的Al电极为源漏电极的Pentacene基OTFTs(organic thin film transistors),器件场效应迁移率μ_ef达到0.42 cm²/V ·s,阈值电压V_T为-9.16 V,开关比4.7×10³.通过中间探针法,对器件电势分布做了定性判断 关键词： 有机薄膜晶体管 场效应迁移率 接触效应 电荷漂移     

The role of Ti adhesion layer in electric charge transport in pentacene organic thin film transistors

We have performed measurements of electric current in pentacene organic thin film transistors in situ, during growth of pentacene layer. The source and the drain contacts were fabricated with varying thickness of Ti layer, followed by a thick Au layer. Our measurements confirm the hypothesis that only the first two molecular layers of pentacene are responsible for the transport of most of the electric current between the source and the drain. Consequently, several-nm thick Ti layer hinders charge carrier injection from source into the channel. This is manifested as a delayed onset of electric current when the thickness of Ti layer exceeds the thickness of two pentacene molecular layers.     

High-throughput fabrication and semi-automated characterization of oxide thin film transistors

High throughput experimental methods are known to accelerate the rate of research, development, and deployment of electronic materials. For example, thin films with lateral gradients in composition, thickness, or other parameters have been used alongside spatially-resolved characterization to assess how various physical factors affect the material properties under varying measurement conditions. Similarly, multi-layer electronic devices that contain such graded thin films as one or more of their layers can also be characterized spatially in order to optimize the performance. In this work, we apply these high throughput experimental methods to thin film transistors(TFTs), demonstrating combinatorial channel layer growth, device fabrication, and semi-automated characterization using sputtered oxide TFTs as a case study. We show that both extrinsic and intrinsic types of device gradients can be generated in a TFT library, such as channel thickness and length, channel cation compositions, and oxygen atmosphere during deposition. We also present a semi-automated method to measure the 44 devices fabricated on a 50 mm×50 mm substrate that can help to identify properly functioning TFTs in the library and finish the measurement in a short time. Finally, we propose a fully automated characterization system for similar TFT libraries, which can be coupled with high throughput data analysis. These results demonstrate that high throughput methods can accelerate the investigation of TFTs and other electronic devices.     

Stabilization of organic thin film transistors by ion implantation

We report on the effects of low energy ion implantation (N and Ne) in the reduction and control of the degradation of pentacene organic thin film transistors (OTFTs) due to the exposure to atmosphere (i.e. oxygen and water). We have observed that a controlled damage depth distribution preserves the functionality of the devices, even if ion implantation induces significant molecular structure modifications, in particular a combination of dehydrogenation and carbonification effects. No relevant changes in the pentacene thin film thickness have been observed. The two major transport parameters that characterize OTFT performance are the carrier mobility and the threshold voltage. We have monitored the effectiveness of this process in stabilizing the device by monitoring the carrier mobility and the threshold voltage over a long time (over 2000 h). Finally, we have assessed by depth resolved X-ray Photoemission Spectroscopy analyses that, by selectively implanting with ions that can react with the hydrocarbon matrix (e.g. N⁺), it is possible to locally modify the charge distribution within the organic layer.     

High-performance Zinc-Tin-Oxide thin film transistors based on environment friendly solution process

Zinc-Tin-Oxide (ZTO) thin films were fabricated using a simple and eco-friendly sol-gel method and their application in thin film transistors (TFTs) was investigated. Annealing temperature has a crucial influence on the structure and electrical properties of sol-gel ZTO thin films. The ZTO thin films annealed at 300–600?°C revealed smooth and uniform surfaces with amorphous state, in addition, a high optical transparency over 90% of the ZTO films in the visible range was obtained. The electrical performance of ZTO TFTs showed obvious dependence on annealing temperature. The ZTO TFTs annealed at 500?°C showed a high carrier mobility of 5.9?cm²/V, high on/off current ratio (I_on/off) of 10⁶-10⁷, and threshold voltage (V_th) of 1.03?V. To demonstrate the application of sol-gel ZTO films in low-power display fields, we also fabricated ZTO TFTs with a solution-processed high-permittivity (high-k) ZrTiO_x dielectric layer. The ZTO/ZrTiO_x TFTs showed high mobility of 17.9?cm²/V and I_on/off of 10⁵-10⁶?at a low operation voltage of 3?V, indicating that Indium-free ZTO thin films would be potential candidates for low cost, high performance oxide TFT devices.     

Spatially correlated charge transport in organic thin film transistors

Hole mobility in organic ultrathin film field-effect transistors is studied as a function of the coverage. For layered sexithienyl films, the charge carrier mobility rapidly increases with increasing coverage and saturates at a coverage of about two monolayers. This shows that the first two molecular layers next to the dielectric interface dominate the charge transport. A quantitative analysis of spatial correlations shows that the second layer is crucial, as it provides efficient percolation pathways for carriers generated in both the first and the second layers. The upper layers do not actively contribute either because their domains are smaller than the ones in the second layer or because the carrier density is negligible.     

Readout of super-resolution marks with Ti thin film

Using Ti as the super-resolution reflective film to replace the Al reflective layer in conventional read-only optical disk, the recording marks with a diameter of 380 nm and a depth of 50 nm are read out in a dynamic testing device whose laser wavelength is 632.8 nm and numerical aperture of the lens is 0.40. The optimum Ti thin film thickness is 18 nm and the corresponding signal-noise-ratio is 32 dB.     

Migration of indium ions in amorphous indium-gallium-zinc-oxide thin film transistors

Electromigration of In in amorphous indium-gallium-zinc-oxide thin film transistors under repeated switching operation was investigated by analyzing the distribution of component elements. During the repeated switching operations up to 300 times, threshold voltage of this device increased gradually implying alteration to the internal device structures. Energy dispersive X-ray spectroscopy revealed noticeable redistribution of metallic components, especially In, in the channel layer beneath the source electrode during switching operations by the migration of metallic ions away from the source electrode, which is attributed to electromigrations similar to those observed in organic light emitting diodes having indium tin oxide electrodes.     

基于金属氧化物薄膜晶体管的高速行集成驱动电路

本文提出了一种基于非晶铟锌氧化物薄膜晶体管的高速行集成驱动电路,该电路采用输入级复用的驱动结构,一级输入级驱动三级输出级,不仅减少电路输入级2/3晶体管的数量,实现AMOLED或AMLCD显示屏的窄边框显示,而且输入级的工作频率是输出级的1/3,该结构适用于高速驱动电路.电路内部产生了三次电容耦合效应,每一次电容耦合效应都可以提高相应节点的电压,保证了信号完整传输.输出级采用了一个二极管接法的薄膜晶体管,该薄膜晶体管连接了输出级的控制信号和上拉薄膜晶体管的栅极,利用的每一级输出级输出时所产生的电容耦合效应,增加上拉薄膜晶体管的栅极电压,有效地提高电路输出能力和工作速度.仿真表明电路能够输出脉宽达到4μs速度.最后成功地制作了10级行集成驱动电路,包括10级输入级电路和30级输出级电路,负载为R=10k?和C=100pF,实验结果验证,该电路满足4k×8k显示屏在120 Hz刷新频率下的驱动需求.     

Weak avalanche multiplication in SiGe heterojunction bipolar transistors on thin film silicon-on-insulator

In this paper, we propose an analytical avalanche multiplication model for the next generation of SiGe silicon-on-insulator (SOI) heterojunction bipolar transistors (HBTs) and consider their vertical and lateral impact ionizations for the first time. Supported by experimental data, the analytical model predicts that the avalanche multiplication governed by impact ionization shows kinks and the impact ionization effect is small compared with that of the bulk HBT, resulting in a larger base-collector breakdown voltage. The model presented in the paper is significant and has useful applications in the design and simulation of the next generation of SiGe SOI BiCMOS technology.     

Low defect-density polycrystalline silicon for high performance thin film transistors

Polysilicon films formed by the decomposition of silane in a LPCVD reactor at temperatures around 630°C have been used to make thin film transistors. It has been found that deposition of the polysilicon at lower pressures than previously results in improved performance and this is related to the crystallographic structure of the material. The structure of polysilicon deposited at pressures down to 2.5 mTorr has been investigated and the results presented.     

溶胶-凝胶法MgF2紫外增透膜的制备和性能研究

采用溶胶-凝胶法,以醋酸镁和氟化氢为原料,以甲醇为溶剂制备了MgF2溶胶,利用浸渍提拉法在洁净石英基片上镀膜,考察了反应温度对溶胶微结构、薄膜结构和性能的影响。样品采用激光动态光散射、透射电镜、X射线粉体衍射仪、紫外-可见光谱仪、原子力显微镜进行表征。结果表明：通过该方法制备的表面平整的低折射率MgF2薄膜,在紫外区具有很好的增透性能,同时在紫外波长355 nm激光的辐照下（脉宽6 ns）,薄膜具有较高的抗激光损伤性能,激光损伤阈值达10.85 J·cm-2。     

Nanocluster n-CdO thin film by sol-gel for solar cell applications

The nanocluster-CdO film was successfully synthesized by sol-gel method using cadmium acetate and 2-metoxyethanol as starting materials and monoethanolamine as a stabilizer. The structural properties of the CdO film were investigated by atomic force microscopy (AFM). AFM results indicate that the CdO film is consisted of nanoclusters with grain size of 75-85 nm. The optical band gap E_g of nanocluster-CdO film was found to be 2.27 eV. The heterostructure, formed from two semiconductor layers having different optical band gaps, p-Si/n-CdO is prepared as a solar cell device. The electrical properties of the device were characterized by current-voltage and capacitance-conductance-voltage methods. The photovoltaic properties of p-Si/n-CdO device have been investigated. The p-Si/n-CdO heterojunction solar cell shows the best values of V_oc = 0.41 and J_sc = 2.19 mA/cm² under AM1.5 illumination. It is evaluated that this work is useful as a basis for the search of nanomaterial CdO and more competitive p-Si/n-CdO based solar cells, despite the fact that V_oc and J_sc are lower than those reported in the literature.