利用x射线小角散射技术研究微晶硅薄膜的微结构

采用x射线小角散射（SAXS）技术研究了由射频等离子体增强化学气相沉积（rf-PECVD）、 热丝化学气相沉积(HWCVD)和等离子体助热丝化学气相沉积(PE-HWCVD)技术制备的微晶硅（ μc-Si:H）薄膜的微结构.实验发现，在相同晶态比的情况下，PECVD沉积的μc-Si:H薄膜微 空洞体积比小，结构较致密，HWCVD沉积的μ-Si:H薄膜微空洞体积比大，结构较为疏松，PE -HWCVD沉积的μc-Si:H薄膜，由于等离子体的敲打作用，与HWCVD样品相比，微结构得到明 显改善.采用HWCVD二步法和PE-HWCVD加适量Ar离子分别沉积μc-Si:H薄膜，实验表明，微结 构参数得到了进一步改善.45°倾角的SAXS测量显示，不同方法制备的μc-Si:H薄膜中微空 洞分布都呈各向异性.红外光谱测量也证实了SAXS的结果. 关键词： 微晶硅薄膜 微结构 微空洞 x射线小角散射     

用小角X射线散射研究纳米粒子的粒度分布

采用小角X射线散射中的对数高斯分布函数的方法，确定了纳米粒子的粒度分布。通过理论分析、计算，对氧化锌纳粒子进行实验测试。结果表明，氧化锌纳米粒子的平均半径尺寸为3．34nm，分布的标准偏差为1．35。     

Al-Zn-Mg-Cu-Li合金时效过程微结构演化的小角x射线散射研究

应用小角x射线散射技术分析了Al-Zn-Mg-Cu-Li合金在130，150和160℃温度时效24 h析出粒子的微结构参数的变化情况. 粒子的半径随着时效温度的增高而增加，它的比内表面积和体积百分数随着时效温度的增高而减小. 对Porod曲线q³J(q)-q²的分析表明,析出粒子与基体之间有明显的界面. 关键词： 小角x射线散射 Al-Zn-Mg-Cu-Li合金 时效 析出粒子     

非晶硅薄膜晶化过程中微结构的分析

使用X射线衍射技术和高分辨率电子显微镜(HREM),分析研究了在非晶硅薄膜由非晶相向微晶相转化过程中其网络结构的变化特征,由此,给人们一个直观的信息,并加深对非晶硅薄膜微结构的认识。 关键词：     

非晶硅薄膜的低温快速晶化及其结构分析

在镀铝的廉价玻璃衬底上高速沉积的非晶硅薄膜在不同的温度下退火10min.退火温度为500℃时,薄膜表面形成了硅铝的混合相,非晶硅薄膜开始呈现了晶化现象 退火温度为550℃时,大部分(约80%)的非晶硅晶化为多晶硅,平均晶粒尺寸为500nm 退火温度为600℃时,几乎所有的非晶硅都转化为多晶硅,其平均晶粒尺寸约为15μm.     

小角x射线散射结晶聚合物结构的研究

利用结晶聚合物的“三相结构”模型计算了结晶聚合物的一维电子密度相关函数,结论是三相模型的片层厚度和不变量与两相结构的意义不同.利用计算结果分析了一批样品的结构参量,发现用Ruland方法得到的结晶过渡层的厚度与用一维电子密度相关函数的结果是一致的.用Bragg定律求出的结晶聚合物的长周期与相关函数法长周期相差很多.这是因为两种分析结晶过渡层厚度的方法都是以样品电子密度的不均匀区为基础的,本质是一致的.但是Bragg法的长周期与相关函数法的长周期代表的范围不同 关键词： 小角x射线散射 结晶聚合物 三相结构 相关函数     

非晶硅薄膜的低温快速晶化及其结构分析

在镀铝的廉价玻璃衬底上高速沉积的非晶硅薄膜在不同的温度下退火10min.退火温度为500℃时,薄膜表面形成了硅铝的混合相, 非晶硅薄膜开始呈现了晶化现象;退火温度为550℃时,大部分(约80%)的非晶硅晶化为多晶硅,平均晶粒尺寸为500nm;退火温度为600℃时,几乎所有的非晶硅都转化为多晶硅,其平均晶粒尺寸约为1.5μm.     

Cu60Zr30Ti10非晶合金弛豫和晶化过程的小角X射线散射研究

应用小角X射线散射技术研究了Cu60Zr30Ti10非晶合金从300到813 K之间微结构的演化情况.发现在淬火状态下Cu60Zr30Ti10非晶合金中存在直径30 nm左右的富Cu区.非晶的结构弛豫包括573 K之前的低温结构弛豫和573 K到玻璃转变温度的高温结构弛豫,弛豫的结果是产生含有有序原子团簇的富Cu区,这些有序原子团簇的富Cu区是随后晶化过程中晶核产生的基础.Porod曲线分析表明,晶化生成的纳米体心立方CuZr相和基体之间有明锐的界面.     

高温处理对CNx薄膜晶化的影响

利用直流磁控溅射制得非晶态氮化碳膜,然后在高温下、常压Ｎ气氛中进行热处理,利用ＤＴＡ,ＸＲＤ和Ａｕｇｅｒ研究晶化前后氮化碳成分、结构以及键态的变化．实验结果表明：在１１８６℃附近出现了晶化现象,高温晶化处理可以促进无定形氮化碳向晶态转变,在ＸＲＤ图谱上出现α Ｃ３Ｎ４衍射峰．Ａｕｇｅｒ实验结果表明膜中出现富Ｃ,Ｓｉ,Ｎ的区域 关键词：     

薄膜中异常晶粒生长理论及能量各向异性分析

针对柱状晶薄膜，建立了异常晶粒生长理论模型.指出薄膜中的晶粒生长，除像传统的整体材料中的晶粒生长一样考虑晶界能外，还应当考虑表面能、界面能和应变能.对能量的各向异性进行了回顾性分析.从表面能的最小化考虑，面心立方和体心立方薄膜的择优取向或织构应分别为（111）和（110）；而从应变能的最小化考虑，面心立方和体心立方薄膜的择优取向或织构应分别为（110）和（100）. 关键词： 薄膜 异常晶粒生长 模型 织构     

氢稀释对高速生长纳米晶硅薄膜晶化特性的影响

以SiH₄与H₂为气源,采用射频等离子体增强化学气相沉积技术,在较高的压强(230Pa)下,研究氢稀释率对纳米晶硅薄膜的生长速率和晶化特性的影响. 实验表明,薄膜的晶化率,晶粒尺寸随着氢稀释率的提高而增加,当氢稀释率为99%,薄膜的晶化率接近70%. 而沉积速率却随着氢稀释率的减小而增加,当氢稀释率从99%减小到95%时,薄膜的沉积速率由0.3nm/s 增加至0.8nm/s. 关键词： 纳米晶硅薄膜 氢稀释 晶化率 硅烷     

Influence of reducing anneal on the ferromagnetism in single crystalline Co-doped ZnO thin films

This paper reports that the high-quality Co-doped ZnO single crystalline films have been grown on $a$-plane sapphire substrates by using molecular-beam epitaxy. The as-grown films show high resistivity and non-ferromagnetism at room temperature, while they become good conductive and ferromagnetic after annealing in the reducing atmosphere either in the presence or absence of Zn vapour. The x-ray absorption studies indicate that all Co ions in these samples actually substituted into the ZnO lattice without formatting any detectable secondary phase. Compared with weak ferromagnetism (0.16~$\mu _{\rm B}$/Co$^{2 + })$ in the Zn6110M, 7550P, 7280E, 7870Dhttp://cpb.iphy.ac.cn/CN/10.1088/1674-1056/19/5/056101https://cpb.iphy.ac.cn/CN/article/downloadArticleFile.do?attachType=PDF&id=111756Co-doped ZnO, diluted magnetic semiconductors, x-ray absorption fine structure, single crystalline thin filmsProject partially supported by National Science Foundation of China (Grant No.~10804017), National Science Foundation of Jiangsu Province of China (Grant No.~BK2007118), Research Fund for the Doctoral Program of Higher Education of China (Grant No.~20070286037), Cyanine-Project Foundation of Jiangsu Province of China (Grant No.~1107020060), Foundation for Climax Talents Plan in Six-Big Fields of Jiangsu Province of China (Grant No.~1107020070) and New Century Excellent Talents in University (NCET-05-0452).This paper reports that the high-quality Co-doped ZnO single crystalline films have been grown on $a$-plane sapphire substrates by using molecular-beam epitaxy. The as-grown films show high resistivity and non-ferromagnetism at room temperature, while they become good conductive and ferromagnetic after annealing in the reducing atmosphere either in the presence or absence of Zn vapour. The x-ray absorption studies indicate that all Co ions in these samples actually substituted into the ZnO lattice without formatting any detectable secondary phase. Compared with weak ferromagnetism (0.16~$\mu _{\rm B}$/Co$^{2 + })$ in the Zn$_{0.95}$Co$_{0.05}$O single crystalline film with reducing annealing in the absence of Zn vapour, the films annealed in the reducing atmosphere with Zn vapour are found to have much stronger ferromagnetism (0.65~$\mu _{\rm B}$/Co$^{2 + })$ at room temperature. This experimental studies clearly indicate that Zn interstitials are more effective than oxygen vacancies to activate the high-temperature ferromagnetism in Co-doped ZnO films, and the corresponding ferromagnetic mechanism is discussed.Co-doped;ZnO;diluted;magnetic;semiconductors;x-ray;absorption;fine;structure;single;crystalline;thin;filmsThis paper reports that the high-quality Co-doped ZnO single crystalline films have been grown on a-plane sapphire substrates by using molecular-beam epitaxy.The as-grown films show high resistivity and non-ferromagnetism at room temperature,while they become more conductive and ferromagnetic after annealing in the reducing atmosphere either in the presence or absence of Zn vapour.The x-ray absorption studies indicate that all Co ions in these samples actually substituted into the ZnO lattice without formatting any detectable secondary phase.Compared with weak ferromagnetism(0.16 μB/Co2+) in the Zn0.95Co0.05O single crystalline film with reducing annealing in the absence of Zn vapour,the films annealed in the reducing atmosphere with Zn vapour are found to have much stronger ferromagnetism(0.65 μB/Co2+) at room temperature.This experimental studies clearly indicate that Zn interstitials are more effective than oxygen vacancies to activate the high-temperature ferromagnetism in Co-doped ZnO films,and the corresponding ferromagnetic mechanism is discussed.     

Determination of refractive indices and thickness of absorbing crystalline thin films by using prism coupler

Abstract

An improved method has been implemented to study the refection of optical plane waves from anisotropic and absorbing films. The refection from anisotropic non-absorbing films and from isotropic non-absorbing films can be shown as some special cases. The method in this paper can be applied to almost all kinds of materials involved in optical films and integrated optics studies. Guided waves in the anisotropic and absorbing waveguides are determined, and the prism coupler method is employed to determine refractive indices and thickness of the anisotropic and absorbing films. The results show that when we only couple light beams into films with small effective indices, the effect of the absorption can be neglected.     

Electric dipolar interaction assisted growth of single crystalline organic thin films

We report on a forest-like-to-desert-like pattern evolution in the growth of an organic thin film observed by using an atomic force microscope. We use a modified diffusion limited aggregation model to simulate the growth process and are able to reproduce the experimental patterns. The energy of electric dipole interaction is calculated and determined to be the driving force for the pattern formation and evolution. Based on these results, single crystalline films are obtained by enhancing the electric dipole interaction while limiting effects of other growth parameters.     

Determination of refractive indices and thickness of absorbing crystalline thin films by using prism coupler

An improved method has been implemented to study the refection of optical plane waves from anisotropic and absorbing films. The refection from anisotropic non-absorbing films and from isotropic non-absorbing films can be shown as some special cases. The method in this paper can be applied to almost all kinds of materials involved in optical films and integrated optics studies. Guided waves in the anisotropic and absorbing waveguides are determined, and the prism coupler method is employed to determine refractive indices and thickness of the anisotropic and absorbing films. The results show that when we only couple light beams into films with small effective indices, the effect of the absorption can be neglected.     

Structural and electrical properties of single crystalline and bi-crystalline ZnO thin films grown by molecular beam epitaxy

C-oriented ZnO epitaxial thin films are grown separately on the a-plane and c-plane sapphire substrates by using a molecular-beam epitaxy technique. In contrast to single crystalline ZnO films grown on a-plane sapphire, the films grown on c-plane sapphire are found to be bi-crystalline; some domains have a 30o rotation to reduce the large mismatch between the film and the substrate. The presence of these rotation domains in the bi-crystalline ZnO thin film causes much more carrier scatterings at the boundaries, leading to much lower mobility and smaller mean free path of the mobile carriers than those of the single crystalline one. In addition, the complex impedance spectra are also studied to identify relaxation mechanisms due to the domains and/or domain boundaries in both the single crystalline and bi-crystalline ZnO thin films.     

单晶和孪晶的Zn0.96Co0.04O稀磁半导体薄膜的制备与研究

采用分子束外延技术分别在不同晶面的蓝宝石（sapphire Al₂O₃）基片上制备了沿c轴生长的Zn_0.96Co_0.04O稀磁半导体薄膜.发现在Al₂O₃（1120）晶面（a面）上薄膜是二维层状外延生长的高质量单晶薄膜,而在Al₂O₃（0001）晶面（c面）上薄膜却具有有趣的孪晶结构,部分区域相互之间有一个30°的面内转动来减少和基片之间的失配度.在孪晶薄膜中存在的这些相互旋转形成的区域界面上会引起载流子强烈的散射作用,导致载流子迁移率的下降和平均自由程的缩短.利用X射线吸收精细结构技术证明了无论单晶还是孪晶的Zn_0.96Co_0.04O薄膜中所有的Co都以+2价替代进入了ZnO的晶格,而没有形成任何杂相.而对其磁性研究发现,孪晶的薄膜样品比高质量的单晶薄膜样品具有大得多的饱和磁矩.这充分说明孪晶薄膜中的铁磁性来源与缺陷有关.我们还对铁磁性耦合机制进行了探讨. 关键词： Co掺杂ZnO 稀磁半导体 X射线吸收精细结构 单晶和孪晶薄膜     

Columnar growth of crystalline silicon films on aluminium-coated glass by inductively coupled plasma CVD at room temperature

Silicon films were grown on aluminium-coated glass by inductively coupled plasma CVD at room temperature using a mixture of SiH₄ and H₂ as the source gas. The microstructure of the films was evaluated using Raman spectroscopy, scanning electron microscopy and atomic force microscopy. It was found that the films are composed of columnar grains and their surfaces show a random and uniform distribution of silicon nanocones. Such a microstructure is highly advantageous to the application of the films in solar cells and electron emission devices. Field electron emission measurement of the films demonstrated that the threshold field strength is as low as ～9.8V/μm and the electron emission characteristic is reproducible. In addition, a mechanism is suggested for the columnar growth of crystalline silicon films on aluminium-coated glass at room temperature.     

Oxidation-induced changes in the electro-optical properties of thin copper films

Summary The room temperature oxidation of vapour deposited copper films has been investigated as a function of film thickness and time by the sheet resistance and optical transmittance measurements. An increase of both sheet resistance and transmittance with a tendency to saturation has been observed. Time variation of the sheet resistance shows that the kinetics of oxidation could be described by a model whereby an initial logarithmic oxide growth changes to an inverse logarithmic one as time progresses; the thicker the film, the longer the change-over time. Absorption coefficients of oxidized films show that the resulting oxide is most probably Cu₂O. Evaluation of the oxidized films for possible use as transparent electrode material shows the existence of an optimum thickness value.

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Riassunto Si è studiata l’ossidazione a temperatura ambiente di pellicole di rame depositate per vaporizzazione in funzione dello spessore della pellicola e del tempo mediante la resistenza del foglio e misurazioni di trasmittenza ottica. Si è osservato un aumento sia della resistenza del foglio, sia della trasmittenza con una tendenza alla saturazione. La variazione temporale della resistenza del foglio mostra che la cinetica di ossidazione potrebbe essere descritta da un modello con cui un’iniziale crescita logaritmica dell’ossido cambia in una logaritmica inversa al crescere del tempo; più spessa è la pellicola più lungo è il tempo del cambiamento. I coefficienti di assorbimento delle pellicole ossidate mostrano che l’ossido risultante è molto probabilmente il Cu₂O. La valutazione delle pellicole ossidate per un possibile uso come materiale di elettrodo trasparente mostra l’esistenza di un valore ottimo dello spessore.

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Резюме Исследуется окисление при комнатной температуре пленок меди в зависимости от толщины пленки и времени, используя измерения сопротивления слоя и оптической прозрачности. Наблюдается увеличение сопротивления слоя и прозрачности с тенденцией к насыщению. Временное изменение сопротивления слоя показывает, что кинетика окисления может быть описана с помощью модели, согласно которой начальный логарифмический рост окисла изменяется на обратно логарифмический, когда время увеличивается; для более толстой пленки изменение происходит при больщих временах. Коэффициенты поглощения окисленных пленок показывают, что результирующий окисел представляет Cu₂O. Оценка возможности использования окисленных пленок в качестве прозрачного материала электродов указывает на существование оптимальной толщины пленки.