Comparison study of GaN films grown on porous and planar GaN templates

The GaN thick films have been grown on porous GaN template and planar metal-organic chemical vapor deposition(MOCVD)-GaN template by halide vapor phase epitaxy(HVPE). The analysis results indicated that the GaN films grown on porous and planar GaN templates under the same growth conditions have similar structural, optical, and electrical properties. But the porous GaN templates could significantly reduce the stress in the HVPE-GaN epilayer and enhance the photoluminescence(PL) intensity. The voids in the porous template were critical for the strain relaxation in the GaN films and the increase of the PL intensity. Thus, the porous GaN converted from β-Ga2O3 film as a novel promising template is suitable for the growth of stress-free GaN films.     

Improving nucleation in the fabrication of high-quality 3D macro-porous copper film through the surface-modification of a polystyrene colloid-assembled template

A new approach is developed to the fabrication of high-quality three-dimensional macro-porous copper films. A highly-ordered macroporous copper film is successfully produced on a polystyrene sphere (PS) template that has been modified by sodium dodecyl sulfate (SDS). It is shown that this procedure can change a hydrophobic surface of PS template into a hydrophilic surface. The present study is devoted to the influence of the electrolyte solution transport on the nucleation process. It is demonstrated that the permeability of the electrolyte solution in the nanochannels of the PS template plays an important role in the chemical electrodeposition of high-quality macroporous copper film. The permeability is drastically enhanced in our experiment through the surface modification of the PS templates. The method could be used to homogeneously produce a large number of nucleations on a substrate, which is a key factor for the fabrication of the high-quality macroporous copper film.     

Pore matrices prepared at supercritical temperature by computer simulations: matrix characterization and studies of diffusion coefficients of adsorbed fluids

We present series of molecular dynamics simulations to study the structure of different porous matrix configurations. The present simulations are an extension of recently reported data at a temperature below the critical. Here, we show how temperature modifies the structure and porosity of pore matrices during their preparation in comparison with the previous work. Moreover, in these studies at a higher temperature, we studied in more detail the structure of the porous matrix. Matrices were prepared by two different processes. The first method consisted of a single Lennard-Jones fluid simulated at a fixed density and at a supercritical temperature. Then, the matrix configuration was taken from the last configuration of the fluid. The second method was prepared from a binary mixture, where one of the components served as a template material. The final porous matrix configuration was obtained by removing template particles from the mixture. Matrices were prepared at two different densities and at different matrix particle interactions. The volume distribution, the cluster formation and the connectivity between the particles in the pore matrix were investigated. The importance of using template particles was clear since they produced larger voids and higher porosities. On the other hand, the temperature of preparation seems to modify the size of the voids and the porosity in the matrices. For instance, at this high temperature, the matrix porosity is higher when template particles are present in the system. These results point in the opposite direction compared to those found in a previous paper at a lower temperature. The diffusion of fluids immersed in the different matrices was also analysed by calculating the mean square displacements of their particles. It was observed that this quantity was higher when matrices were prepared with template particles. These results also point to different directions in contrast with pore matrices prepared at a lower temperature. Finally, the results show that temperature plays an important role in the pore matrix formation.     

Introducing voids around the interlayer of AlN by high temperature annealing

Introducing voids into AlN layer at a certain height using a simple method is meaningful but challenging. In this work, the AlN/sapphire template with AlN interlayer structure was designed and grown by metal-organic chemical vapor deposition. Then, the AlN template was annealed at 1700 ℃ for an hour to introduce the voids. It was found that voids were formed in the AlN layer after high-temperature annealing and they were mainly distributed around the AlN interlayer. Meanwhile, the dislocation density of the AlN template decreased from 5.26×10⁹ cm^-2 to 5.10×10⁸ cm^-2. This work provides a possible method to introduce voids into AlN layer at a designated height, which will benefit the design of AlN-based devices.     

Study on the thermoelectric properties of porous Bi-Te films deposited using thermal evaporation on AAO template

The application of thermoelectric films is limited to retain the temperature gradient. In this study, the Bi-Te films are deposited on the AAO template with a pore size of 100 nm using thermal evaporation. The results show that the conductive types of the Bi-Te film are tuned by source temperature. The power factor of the p-type porous film decreases 36% by comparing to that of the p-type nonporous film (1020 μW/mK² at 250 °C). Meanwhile, the temperature difference in the porous device is maintained and is approximately 5.0 °C. Thus, the maximum output power is achieved in the porous device (about 25 pW), which is 5 times higher than that of the nonporous device. This provides a method to improve the conversion efficiency of thermoelectric film device by maintaining the temperature difference by using porous structure.     

中红外完全带隙Si反蛋白石光子晶体的制备与光学性能研究

通过溶剂蒸发对流自组装法制备SiO2胶体晶体,采用低压化学气相沉积法填充Si,制备得到Si反蛋白石(opal)三维光子晶体.采用扫描电子显微镜对Si反opal的显微形貌进行表征,采用平面波展开法理论模拟Si反opal的光子带隙,采用傅里叶变换红外光谱仪测试其光学性能.研究结果表明:Si在SiO2微球空隙内填充致密均匀,显微红外光谱测试的光子带隙反射峰位置及带宽与理论计算基本符合.变角度反射光谱测试表明,Si反opal沿不同角度入射时在中心波长3319nm处均存在明显的反射峰,证明其具有完全光子带隙,带隙位于中红外大气窗口区域.     

Optical Analysis of Nanocrystalline ZnO Films Coated on Porous Silicon by Radio Frequency (RF) Magnetron Sputtering

Zinc oxide thin films have been deposited onto porous silicon (PSi) substrates at high growth rates by radio frequency (RF) sputtering using a ZnO target. The advantages of the porous Si template are economical and it provides a rigid structural material. Porous silicon is applied as an intermediate layer between silicon and ZnO films and it contributed a large area composed of an array of voids. The nanoporous silicon samples were adapted by photo electrochemical (PEC) etching technique on n-type silicon wafer with (111) and (100) orientation. Micro-Raman and photoluminescence (PL) spectroscopy are powerful and non-destructive optical tools to study vibrational and optical properties of ZnO nanostructures. Both the Raman and PL measurements were also operated at room temperature. Micro-Raman results showed that the A₁(LO) of hexagonal ZnO/Si(111) and ZnO/Si(100) have been observed at around 522 and 530 cm^–1, re- spectively. PL spectra peaks are distinctly apparent at 366 and 368 cm^–1 for ZnO film grown on porous Si(111) and Si(100) substrates, respectively. The peak luminescence energy in nanocrystalline ZnO on porous silicon is blue-shifted with regard to that in bulk ZnO (381 nm). The Raman and PL spectra pointed to oxygen vacancies or Zn interstitials which are responsible for the green emission in the nanocrystalline ZnO.     

人工调控微结构压电驻极体的热稳定性和电荷动态特性

利用表面带有周期性结构的硬质模板,通过冷压工艺将周期结构图案复制到多孔聚四氟乙烯(PTFE)薄膜表面,再经过热黏合工艺与致密氟化乙丙烯共聚物(FEP)薄膜复合,制备出了高度有序的微孔结构复合膜,并用电晕充电的方法对复合膜进行极化处理,最终获得氟聚合物复合膜压电驻极体.借助对这类复合膜压电驻极体介电谐振谱的测量,得到了材料的杨氏模量.并利用等温热老化工艺对它们的压电系数d33的热稳定性进行了考察.最后通过短路热刺激放电谱的测量和分析,讨论了该复合膜在热老化处理后的电荷动态 关键词： 有序结构 压电驻极体 压电性 电荷动态特性     

多孔阳极氧化铝膜的制备及其在一维纳米材料合成中的应用

从一维纳米材料的研究范畴入手 ,综述了多孔阳极氧化铝膜的结构特征、形成机理以及作为模板在合成纳米导电聚合物、纳米金属、纳米半导体、纳米复合材料及碳纳米管等方面的研究与应用的最新进展 ,揭示了多孔阳极氧化铝模板在合成与组装纳米新材料方面的重要作用 .     

低压化学气相沉积技术制备锗反蛋白石三维光子晶体

采用溶剂蒸发对流自组装法将单分散SiO2微球组装形成三维有序胶体晶体模板,用低压化学气相沉积法填充高折射率材料锗,酸洗去除SiO2模板,获得了锗反蛋白石三维光子晶体.通过扫描电镜、X射线衍射仪和紫外-可见-近红外光谱仪对锗反蛋白石的形貌、成分、结构和光学性能进行了表征.结果表明：锗在SiO2微球空隙内具有较高的结晶质量,填充致密均匀.通过改变沉积工艺,可控制锗的填充率;制备的锗反蛋白三维光子晶体具有明显的光学反射峰,表现出光学带隙效应.测试的光学性能与理论计算基本吻合.     

Quasi-monocrystalline silicon for thin-film devices

Thermal crystallization of a double layer porous Si film creates a monocrystalline Si film with a thin separation layer between the Si film and the reusable starting wafer. The process enables transfer of thin monocrystalline Si films to foreign substrates, whereby devices may be formed before or after separation of the film. Sub-micrometer thick films are almost compact, while films with a thickness of several μm contain voids, and are therefore termed “quasi-monocrystalline”. Internal voids strongly enhance optical absorption by light scattering. The hole mobility is 78 cm² V^-1 s^-1 at a p-type starting wafer resistivity of 0.05 Ω cm. Received: 24 March 1999 / Accepted: 29 March 1999 / Published online: 5 May 1999     

Controllable fabrication of highly ordered thin AAO template on Si substrate for electrodeposition of nanostructures

In this work, simple fabrication of hexagonally highly ordered porous anodic aluminum oxide (AAO) of Al thin film (1 μm) on Si substrate is described using two-step anodization method for electrochemical synthesis of nanostructures. In this method, the templates were prepared under the controllable conditions of the parameters, which give rise to the possibility of highly ordered nanopore arrays with a well aspect ratio. Pore widening was then fulfilled in 5 wt% phosphoric acid solution at 25 °C. The pore diameter and spacing are proportional to the applied voltage, which is due to the mechanical stress associated with the volume expansion of the aluminum during the anodization according to the mechanical stress model. Pore-widening solution adjusted the pore diameter and thinned the AAO barrier layer at room temperature under the control of etching time. As an application, Cu nanorods arrays embedded in anodic alumina (AAO) template were fabricated by dc electrodeposition. The characterization of the AAO templates and the Cu nanorods produced was made by X-ray diffraction, field emission scanning microscope, energy dispersive X-ray spectroscopy and atomic force microscope (AFM). The images of AFM show that porous AAO template under constant voltage is 40 V which presents the optimum ordering.     

Use of photoresist templates in the synthesis of highly-ordered arrays of titania nanorods

Template synthesis of nanostructures entails the deposition of the desired materials within the pores of a nanoporous membrane or solid. Nanofibrils or tubules of the desired material are obtained within the pores depending on the deposition time and parameters. Methods such as electrochemical and electroless deposition, in situ polymerization, and sol–gel process have been used to deposit nanomaterials within the nanopores of templates such as track-etch polymeric membranes and anodic alumina. This paper reports on the first use of photoresist spin-coated on a conductive glass substrate as a template for nanofabrications. TiO₂ nanofibrils in diameters were synthesized by sol–gel process within the pores of the template. Removal of the template resulted in highly-ordered arrays of nanofibrils vertically standing on the conducting glass substrate. The aspect rations of the obtained nanofibrils were similar to those of the template nanopores, 35 nm in diameter and ∼1.3 microns in length. The photoresist template is shown to be functionally similar to anodic alumina template.     

低温等离子体增强化学气相沉积法制备Ge反opal三维光子晶体及其光学性能

通过溶剂蒸发对流自组装法制备SiO2三维有序胶体晶体模板,采用等离子体增强化学气相沉积法在200℃低温条件下填充高折射率材料Ge,获得了Ge反opal三维光子晶体.实现了低于GeH4热分解温度的低温填充.通过扫描电镜、X射线衍射仪和傅里叶变换显微红外光谱仪对Ge反opal的形貌、成分和光学性能进行了表征.结果表明:沉积得到无定型态Ge,退火后形成多晶Ge,Ge在SiO2微球空隙内填充致密均匀.Ge反opal的反射光谱有明显的光学反射峰,表现出光子带隙效应,其带隙中心波长为1650nm和2640nm,测试的光学性能与理论计算基本符合.采用SU-8光刻胶薄膜也进行了Ge沉积,证实了SU-8模板可以耐受这一沉积温度.低温沉积降低了Ge的填充温度,可以直接采用不耐高温的高分子材料作为初始模板,单次复型制备得到多种构型的完全带隙三维光子晶体.     

Influence of Carbon Multiple Treatments on the Photoelectrical Properties of Porous Glasses

We have studied the influence of multiple carbon treatments on the properties of silica porous glasses. Each step of each carbon treatment started with filling the voids of porous glass with carbon. During the following anneal carbon interacted with the walls of the voids. It was shown that low dimensional silicon clusters were formed inside the voids as a result of this reaction. In the experiments the photoluminescence spectra and conductivity of carbon-processed specimens were measured. The size-distribution of voids in porous glasses was calculated from absorption—desorption isotherms. An original technique was proposed that allowed to obtain the size-distribution of silicon clusters from the positions of peaks in the photoluminescence spectra. Correlation between the photoluminescence intensity and the sizes of pores was revealed. The observed oscillations in the shapes of the photoluminescence spectra in subsequent cycles of carbon treatment are explained by changes of the number of clusters corresponding to definite peaks in the size distribution spectra.     

A study of porous silicon prepared under different HF concentrations by positron annihilation

Two-dimensional angular correlation of positron-electron annihilation radiation and positron-lifetime experiments have been performed on lightly doped porous silicons prepared under different HF concentrations. Positronium formation in the etched pores and positron trapped in voids are observed in both experiments. A surprising result is found that both positron lifetime and momentum spectra show a reduction in the size of the etched pores with decreasing HF concentration in the etching solution. This trend is different from the intuitive expectation that the pore size increases with increasing porosity. Our result can be explained in terms of the formation mechanism of porous film in lightly doped silicon.     

聚苯乙烯多孔薄膜的密度梯度控制

利用单分散的SiO2微球自组装制备了含一种尺寸微球的SiO2胶体晶体和含多种尺寸微球的多层异质结构。对含一种尺寸微球的SiO2胶体晶体进行煅烧和刻蚀处理后,胶体晶体中空隙所占比例大于立方密堆结构的26%,形成了非密堆结构,而且刻蚀时间越长,空隙比例越大。在同样的热处理和刻蚀条件下,微球尺寸越小的胶体晶体被刻蚀的程度越高,结构中空气空隙所占的比例越大。对SiO2多层异质结构经过煅烧和刻蚀处理后,得到了空隙梯度变化的多层结构,以此为模板制备了密度梯度变化的聚苯乙烯多孔薄膜。薄膜各层之间形成了平滑的过渡,没有显示出明显的层间缺陷,且孔与孔之间没有出现3维有序多孔结构中常见的大的连通孔道。     

罗丹明6G在银纳米线阵列上的SERS光谱研究

制备出有序、均匀的活性衬底一直足表面增强拉曼散射(SERS)研究中的关键.阳极氧化法制备的多孔氧化铝膜的结构有序、均匀,为纳米金属SERS基底的制备提供了模板.以沉积了银的多孔氧化铝组装体为衬底,研究了罗丹明6G(Rh6G)分子的表面增强拉曼散射光谱.结果表明,沉积了银的多孔氧化铝模板是很好的SERS衬底,Rh6G分子在此衬底上的SERS谱强度与银纳米线在表面的显露高度有关,而其拉曼频移未受表面状态的影响,而PO43-离子的存在使SERS强度得到很大提高.     

Temperature dependence of a nanoporous Pd film hydrogen sensor based on an AAO template on Si

In this study, hydrogen sensing properties of nanoporous Pd films based on Anodic Aluminium Oxide (AAO) templates grown on a silicon substrate have been investigated at various temperatures (25–100°C) and hydrogen concentrations (100–1000 ppm) to determine the temperature-sensitivity relationship. For this purpose, a hexagonally shaped AAO template of approximately 50 nm in diameter and 700 nm in length with 80 nm interpore distances was fabricated using two-step anodization of an Al film deposited on an n-type (100) oriented oxidized Si substrate. Then, the nanoporous surface of the AAO template was used as a substrate for supporting a nanoporous Pd film of an approximately thickness of 60 nm. The morphologies of the AAO template and Pd film coated on the AAO template were studied mainly by Scanning Electron Microscopy (SEM). Hydrogen sensing properties of the nanoporous Pd film were measured using a resistance transient method. It was found that the sensor response of the nanoporous Pd films on the AAO template was better than the traditional Pd thin film sensors, the sensitivity of the sensor was approximately 1.8% for 1000 ppm H₂, and the detection limit was lower than 100 ppm at room temperature. The highest sensitivity was measured at room temperature.     

Studies of porosity and diffusion coefficient in porous matrices by computer simulations

We present a series of molecular dynamics simulations to study the porosity on different matrix configurations. The matrices were prepared using two different processes. In the fist method we used direct simulations of a fluid at a fixed density and the matrix was taken from the last configuration of its particles. In the second method we simulated a binary mixture where one of the components served as a template material and the final porous matrix configuration was obtained by removing template particles from the mixture. Matrices were prepared at different densities and at different matrix particle interactions. The results showed that the matrix structure and the matrix porosity were affected by the way the porous matrices were prepared. Finally, we also investigated the diffusion of a fluid inside the matrices. The diffusion coefficient was measured by mean square displacements of the particles in the fluid. It was observed that this quantity was also affected by the kind of porous matrix employed. The calculations were performed for several fluids at different densities in the different porous matrices. From these studies we observed that the highest porosity and diffusion coefficient were found in matrices prepared with attractive particle interactions and without any template.