卫星激光通信滤光膜的研制

为满足卫星激光通信中超高速数据传输的特殊要求,采用电子束和离子辅助沉积技术,制备了532nm、632nm和1 064nm波长处高反射,808nm和1 550nm处高透射的多波段滤光膜.选取了H4和SiO2作为高低折射率材料,通过对膜系设计曲线的不断优化,减少了灵敏层的个数,得到了相对易于制备的膜系结构;采用电子束加热蒸发方法并加以离子辅助沉积系统制备薄膜,采用光控与晶控同时监控的方法控制膜厚;通过不断调整工艺,提高了薄膜的抗激光损伤能力,减小了膜厚控制误差,提高了透射波段的透过率及反射波段的反射率,最终得到了光谱性能较好的滤光膜.该薄膜能够承受雨淋、盐雾、高低温等环境测试,满足使用要求.     

卫星激光通信滤光膜的研制

为满足卫星激光通信中超高速数据传输的特殊要求,采用电子束和离子辅助沉积技术,制备了532 nm、632 nm和1 064 nm波长处高反射,808 nm和1 550 nm处高透射的多波段滤光膜.选取了H₄和SiO₂作为高低折射率材料,通过对膜系设计曲线的不断优化,减少了灵敏层的个数,得到了相对易于制备的膜系结构;采用电子束加热蒸发方法并加以离子辅助沉积系统制备薄膜, 采用光控与晶控同时监控的方法控制膜厚;通过不断调整工艺,提高了薄膜的抗激光损伤能力,减小了膜厚控制误差,提高了透射波段的透过率及反射波段的反射率,最终得到了光谱性能较好的滤光膜.该薄膜能够承受雨淋、盐雾、高低温等环境测试,满足使用要求.     

Passage of sound wave through a resonant parametric layer: Theory

General expressions were derived for the transmittance and reflectance at normal incidence of a monochromatic sound wave on a plane-parallel layer with a modulated speed of sound at a resonant layer thickness.     

磁控溅射制备铬薄膜的结构和光电学性质(英文)

用直流磁控溅射技术在石英基片上制备不同厚度(5nm～114nm之间)的铬膜.使用X射线衍射仪和分光光度计分别检测薄膜的结构和光学性质,利用德鲁特模型和薄膜的透射、反射光谱计算铬膜的厚度和光学常量,并采用Van der Pauw方法测量薄膜电学性质.结果表明:制备的铬薄膜为体心立方的多晶态,随着膜厚的增加,薄膜的结晶性能提高,晶粒尺寸增大;在可见光区域,当膜厚小于32nm时,随着膜厚的增加,折射率快速减小,消光系数快速增大,当膜厚大于32nm时,折射率和消光系数均缓慢减小并逐渐趋于稳定;薄膜电阻率随膜厚的增加为一次指数衰减.     

磁控溅射制备铬薄膜的结构和光电学性质

用直流磁控溅射技术在石英基片上制备不同厚度(5 nm~114 nm之间)的铬膜.使用X射线衍射仪和分光光度计分别检测薄膜的结构和光学性质,利用德鲁特模型和薄膜的透射、反射光谱计算铬膜的厚度和光学常量,并采用Van der Pauw方法测量薄膜电学性质.结果表明:制备的铬薄膜为体心立方的多晶态,随着膜厚的增加,薄膜的结晶性能提高,晶粒尺寸增大;在可见光区域,当膜厚小于32 nm时,随着膜厚的增加,折射率快速减小,消光系数快速增大,当膜厚大于32 nm时,折射率和消光系数均缓慢减小并逐渐趋于稳定;薄膜电阻率随膜厚的增加为一次指数衰减.     

基于金属掺杂ITO透明导电层的紫外LED制备

为降低ITO薄膜对紫外波段的光吸收,制备低电压高功率的紫外LED,研究了一种基于金属掺杂ITO透明导电层的365 nm紫外LED的制备工艺。利用1 cm厚的石英片生长了不同厚度ITO薄膜以及在ITO上掺杂不同金属的新型薄膜,并研究了在不同的退火条件下这种薄膜的电阻和透过率,分析了掺杂金属ITO薄膜的带隙变化。将这种掺杂的ITO薄膜生长在365 nm外延片上并完成电极生长,制备成14 mil×28 mil的正装LED芯片。利用电致发光（EL）设备对LED光电性能进行测试并对比。实验结果表明:掺Al金属的ITO薄膜能够相对ITO薄膜的带隙提高0.15 eV。在600℃退火后,方块电阻降低6.2 Ω/□,透过率在356 nm处达到90.8%。在120 mA注入电流下,365 nm LED的电压降低0.3 V,功率提高14.7%。ITO薄膜掺金属能够影响薄膜带隙,改变紫光LED光电性能。     

矩形波宽带通滤光膜研究

对矩形波宽带通滤光片进行了深入研究,提出了一种设计、制备矩形波宽带通滤光片的方法。使用该方法设计并制备了400 nm～1 100 nm波段,中心波长λ₀=515 nm,透射带λ=λ₀±25 nm,透射带平均透射率■≥92%,截止带λ=400 nm～475 nm、λ=555 nm～1 100 nm,截止带透射率小于0.1%的矩形波宽带通OD3-A滤光片。对样片光谱进行了测试,结果满足需求。该方法设计、制备矩形波宽带通滤光片克服了F-P型窄带滤光膜监控精度要求高、通带宽带窄、成本高以及传统长、短波截止膜组合方式膜层总厚度过大、通带透过率低、波形矩形度差的缺点。     

刑侦检测光学系统中干涉滤光片的设计与制备

在刑侦现场勘查不同物证痕迹时,采用多波段光源对痕迹进行获取,而多波段光源是利用不同性能的干涉截止滤光片以获得不同波段的输出光.为了寻找衣物上体液和其它痕迹,利用干涉滤光片的组合方法,采取电子束蒸发并加以离子辅助沉积系统,根据薄膜干涉滤光片理论并借助膜系设计软件,制备了低成本高质量的450~520 nm波段高透射矩形波.通带透过率大于99%,其它波段透过率小于0.2%,陡度S<3%,并通过了酸碱度环境的检测.重点讨论了膜系设计中波纹产生的原因及波纹的的压缩.     

中心波长121.6nm的真空紫外窄带滤光片设计和制备

采用双半波法布里-珀罗(F-P)干涉滤光片结构设计了中心波长在121.6 am的窄带滤光片,其峰值透射率为6.78%,通带半宽度为10.7 nm.通过设计、制备和测量峰值波长在217 nm的滤光片验证了设计用到的光学常数和膜厚定标都比较精确.在此基础上制备了121.6 nm的窄带滤光片,到合肥同步辐射实验室测量的结果是中心波长在120.74 nm,峰值透射率为5.94%,通带半宽度为12 nm.可以看出实际制备的滤光片和预先设计的基本吻合但还是有一定的偏差,最后对实际测量的和理论设计的偏差进行了分析.     

90°反射式相位延迟器的设计

铜蒸气激光反射镜在非正入射的时候 ,两个不同的偏振态之间会产生不同的相移。通过优化设计 ,在4 90～ 5 30nm之间p、s波获得了 90°的相移 ,同时也使反射率在 99 998%以上。Ag层的厚度对于相移不敏感 ,并且当其厚度大于一定值的时候 ,对反射率没有影响。根据误差分析 ,制备薄膜时其沉积速率精度控制在± 1%以下 ,在光谱范围内能达到± 15 2 8°的相移误差 ,相移均在 5 0 4nm处附近存在有一个收敛值。折射率的变化控制在± 1%以下 ,在光谱范围内能达到± 12 77°的相移误差。最外一层厚度变化± 1% ,其相移变化达到± 5 5°,2～ 5层和 9～ 16层对相移的影响也在 0 .5°之上 ,其余各层对相移影响非常的小。使用时的入射角控制在± 1°时 ,在光谱范围内能达到± 2 .86°的相移误差。在 5 30nm附近的波段对入射角不敏感。     

农用红蓝转光液的性能

CaS:Cu⁺,Eu²⁺荧光粉添加到高分子溶液中配成转光液,喷涂后自然条件下干燥成膜,测试了薄膜的荧光光谱、透光率、荧光抗衰减性能。结果表明,转光液所成薄膜荧光光谱与其添加的荧光粉光谱一致.具有吸收紫外光发射432nm蓝光和648nm红光,吸收绿光发射648nm红光的作用,转光行为有利于植物光合作用。薄膜可见光区透光率在75%以上,荧光抗衰减性能好。     

GaN基紫光LED的高反射率p型欧姆接触

研究用于GaN基大功率倒装焊(Flip-chip)紫光LED(UV-LED)的高反射率p型欧姆接触的电学和光学性能。用磁控溅射的方法在GaN基LED外延片表面沉积了不同厚度Ag,Al,Au和Pd四种金属,测量了样品的反射率和透射率。结合同步辐射高强度X射线衍射和AFM对金属薄膜的晶体结构进行分析,并对表面形貌进行了观测,对由金属薄膜构成的多层膜结构及其对光反射率的作用机理进行了研究。测量结果表明,在入射光波长为400nm时,Ni/Au/Ag和Ni/Au/Al电极的反射率比Ni/Au的反射率提高了三倍。同时与p-GaN有良好的欧姆接触特性。     

一维增透亚波长光栅的研究

将具有高透射性的亚波长光栅置于微机械波长可调谐垂直腔面发射激光器(VCSEL)的内腔当中可以提高波长的调谐范围,为了使波长调谐范围达到最优则必须优化高透射性的亚波长光栅使其透射率达到最大。利用严格耦合波法分析了亚波长光栅的占空比、周期、厚度和入射角对其透射率的影响并找出最优的光栅参数。通过计算分析可得,对于TE和TM偏振存在最佳的占空比使其透射率达到99.5%。在文中条件下,它们对应的占空比分别为0.23和0.80。而光栅厚度对于TE和TM偏振透射率的影响是周期性的,在一个周期内存在一个最佳值使其透射率达到最高。在文中条件下,TE偏振的厚度周期是150 nm,TM偏振的厚度周期是300 nm。当光栅参数不变时,无论是TE还是TM偏振光,它们的透射率只有在垂直入射光栅时(入射角为0°)才能达到最大。而通过等效介质原理可以得出,周期对透射率没有影响。最后计算了透射率在光栅厚度和占空比同时变化时的变化趋势,并从中得出最优的光栅参数。     

近红外光上转换发光显示器中干涉过滤膜的设计

介绍了近红外光上转换发光显示器的结构及其原理,为了进一步提高该显示器的亮度等性能并避免近红外光从屏上泄露,根据多层干涉过滤膜设计原理设计了该显示器所需的两个多层干涉过滤膜：一个为在可见光420~800 nm短波段高反射,近红外光800~1000 nm长波段高透射特性的LP膜;另一个为特性与之对应相反的SP膜.采用对称膜的设计并用MATLAB语言进行了仿真优化,得到了总层数为21,厚度分别为1586.8 nm和2157.8 nm的LP膜和SP膜,该膜系在整个波段和较大角度范围内都具有很好的透反特性考虑多层薄膜制备中存在材料折射率和膜层厚度偏差,该设计膜系具有较大的制造容差.     

High-efficiency guided-mode resonance filter

A high-efficiency guided-mode resonance reflection filter is reported. The device consists of a surface-relief photoresist grating and an underlying HfO (2) waveguide layer deposited on a fused-silica substrate. The spectral response measured with a dye-laser beam at normal incidence exhibited a peak reflectance of 98% at a wavelength of 860 nm with sideband reflectance below ~5% extending over the wavelength range provided by the dye (800-900 nm). At normal incidence the filter linewidth was 2.2 nm. High-efficiency double-peak resonances occurred at nonnormal incidence, with the spectral locations of the maxima vayring with the incidence angle. The filter response at various angles of incidence agreed well with the theoretically calculated reflectance curves.     

Optical and electrical properties of optimized thin gold films as top layer of MIS solar cells

The optical spectral response between 340–860 nm and electrical conductivity measurements were made on thermally evaporated gold films in the thickness range 50–130 Å in order to identify optimal properties for their use as the top layer of MIS solar cells. Films of lower evaporation rate and thickness range 70–100 Å were found to have high transmittance and low reflectance, which is desirable for the above purpose. Films thinner than 70 Å had poor electrical conductivity and thicker than 100 Å had poor solar transmittance, hence were rejected. Improved transmittance and conductivity were obtained upon annealing the film at 250°C for about two hours.     

基于小波变换的油膜光谱特征分析

水上溢油光谱作为高光谱遥感目标识别与分类的参考依据,在溢油识别与厚度区分等方面具有重要的研究意义。通过测量厚度范围为1.0～127 μm间的轻柴油的20组光谱曲线,计算其反射率光谱曲线随厚度变化的特征,并利用db4小波对反射率数据进行处理,突出光谱奇异性及其位置与奇异值随油膜厚度变化的特征。在研究范围内的油膜光谱反射率高于水体,但反射率值与油膜厚度间无固定增减关系。在其厚度小于6 μm时反射率光谱曲线无明显特征,厚度大于6 μm后在388 nm附近存在区别于水体的反射峰特征且随厚度增加特征愈加突出。油膜光谱小波分析后的细节系数在388～393 nm内表现出明显的奇异性,并且奇异位置随厚度增加向短波方向移动、奇异极值增大。研究证实了小波分析在确定油膜光谱特征位置与变化研究中的积极作用,并发现了紫外-可见光短波范围内的光谱特征,为紫外遥感进行溢油识别提供了科学依据。     

Fabrication of ultrathin color filters for three primary colors using guided-mode resonance in silicon subwavelength gratings

We fabricate reflection color filters for three primary colors using silicon two-dimensional triangular-lattice subwavelength gratings on the same quartz substrate. The grating periods are 480, 390, and 300 nm for red, green, and blue filters, respectively. All of the color filters have the same thickness of 100 nm, which enables the simple fabrication of a color filter array. Maximum reflectances of 75 and 46% are obtained at wavelengths of 647.1 and 522.1 nm for the red and green filters, respectively. The blue filter has a double-peaked spectrum with a reflectance of 30% at the peak wavelengths of 450.0 and 502.7 nm. By rigorous coupled-wave analysis, the dimensions of each color filter are designed, and the calculated theoretical reflectance is compared with the measured one.     

Single layer homogeneous model for surface roughness by polarized light scattering

In this paper a homogeneous single layer model for surface roughness by polarized light has been developed. It has been shown that the reflectance change in non-absorbing layer is directly proportional to the refractive index of the ambient and substrate media for s polarization but inversely proportional to the p polarization and it is directly proportional to the square of the thickness of the layer for both the polarization. In an absorbing layer, it has been shown that the thickness of the layer is equal to the twice of surface roughness of the single layer identical system for s polarization but it is ratio of twice of surface roughness to the square of refractive index of thin film for p polarization. The extinction coefficient of the layer is directly proportional to the thickness of that layer for both the polarization. The consequence of the scattered light on the specular reflectance and transmittance for oblique incidence shows that there is reduction in reflectance (in both non-absorbing and absorbing cases) and transmittance (in the absorbing case for p polarization only), due to roughness on the surface under the Drude effective-medium approximation. Thus such an absorbing layer provides a valid model for the effect of scatter on the transmittance for p polarization only.     

Spectrophotometric measurements on a titanium dioxide film with columnar-structure-induced anisotropy

A procedure combining spectrophotometry and measurements of reflectance and transmittance versus incident angles (R/T method) is developed to characterize an obliquely evaporated titanium dioxide (TiO₂) film. The R/T method determines the thickness and columnar orientation of the film. The film thickness can be measured with an uncertainty less than 10 nm. Optical constants of the film over a spectral range of 450 nm to 900 nm are obtained from spectrophotometric measurements with an accuracy around one percent.