Whole field surface roughness measurement by laser speckle correlation technique

This paper describes a speckle correlation technique for the determination of surface roughness, ranging from 1.6 to 50 μm. Instead of moving the laser beam, the specimen is rotated to achieve angular speckle correlation (ASC) in the far-field plane. The technique is simple and requires minimum optical alignment. The experimental results show a good agreement with the standard specimen of known roughness. An error analysis on the experiment has been carried out. Together with the theoretical curves, the roughness values can be easily related to the change of incidence angle at a particular visibility of the correlation fringes between two speckle patterns.     

高精度基准平面建立方法分析

基准平面的确立,是进行表面参数评定的基础;建立理想的基准平面,在几何量形位公差检测及相关工程测量方面具有重要作用.为了建立高精度的激光扫描基准平面,对扫描平面形成过程中光束的传播进行了详细分析;根据光学矢量反射定律,推导出了扫描误差的理论公式;在此基础上揭示了误差补偿的基本原理,导出了用于补偿扫描机构产生的扫描误差的理论公式;提出了据此准则进行设计的扫描机构的模型.分析表明,用激光及其扫描装置建立光学基准面时,扫描误差是不可避免的,这种误差不加补偿,则最终将引入基准光学平面影响基准精度,进而降低参数的评定精度;借助于所推导的误差补偿公式,是可以补偿这种误差的,这对于建立高精度的扫描基准平面具有理论指导意义.     

Surface wettability of silicon substrates enhanced by laser ablation

Laser–ablation techniques have been widely applied for removing material from a solid surface using a laser–beam irradiating apparatus. This paper presents a surface–texturing technique to create rough patterns on a silicon substrate using a pulsed Nd:YAG laser system. The different degrees of microstructure and surface roughness were adjusted by the laser fluence and laser pulse duration. A scanning electron microscope (SEM) and a 3D confocal laser–scanning microscope are used to measure the surface micrograph and roughness of the patterns, respectively. The contact angle variations between droplets on the textured surface were measured using an FTA 188 video contact angle analyzer. The results indicate that increasing the values of laser fluence and laser pulse duration pushes more molten slag piled around these patterns to create micro-sized craters and leads to an increase in the crater height and surface roughness. A typical example of a droplet on a laser–textured surface shows that the droplet spreads very quickly and almost disappears within 0.5167 s, compared to a contact angle of 47.9° on an untextured surface. This processing technique can also be applied to fabricating Si solar panels to increase the absorption efficiency of light.     

固定夹角反射镜扫描化学激光器小信号增益测量装置

 推导了一种新型1维快速扫描组件——固定夹角反射镜的原理,计算出了其对应于典型扫描距离10 cm和6 cm时的优化参数。并以此扫描组件为基础设计组装了化学激光器小信号增益系数1维快速扫描测量装置,该装置尺寸较小,使用比较方便,可以满足连续波DF/HF化学激光性能研究的需要,且对其扫描组件进行相应的改进,也可用于气动CO₂激光器和COIL小信号增益系数的研究。     

测量平板玻璃折射率实验中激光散斑削减方法的探究

本文描述了以激光为光源测量平板玻璃折射率实验中成像场产生散斑的现象,并获得了一种简单有效的散斑削减方法.理论上激光经过漫散体后产生微光束干涉场,利用统计学的规律,总结出了散斑元之间对比度的影响因素.实验中,选取动-静毛玻璃对作为削减器件,利用静止漫散体增加入射光的粗糙程度,通过缓慢旋转的运动漫散体,可将散斑对比度降为4%左右,使干涉条纹清晰可见.     

Effect of different heating methods on deformation of metal plate under upsetting mechanism in laser forming

In a laser forming process, different forming mechanisms have different deformation behaviors. The aim of laser forming is to acquire plane strain under an upsetting mechanism, while a plate undergoes a small bending deformation. In some industrial applications, the bending strain should not occur. To achieve high-precision forming, the deformation behaviors of a metal plate when an upsetting mechanism plays a dominant role are studied in the paper. Several heating methods are proposed to reduce the plane strain difference along the thickness direction and little bending deformation resulting from a small temperature difference between the top and bottom surfaces of the plate. The results show that negligible bending deformation and a uniform plastic plane strain field can be obtained by simultaneously heating the top and bottom surfaces with the same process parameters. A conventional scanning method needs a larger spot diameter and slower scanning speed under the upsetting mechanism, but a smaller spot diameter and quicker scanning speed may be selected using the simultaneous heating method, which can greatly widen the potential scope of process parameters.     

Design and operation of a laser scanning system

Design and operation of a laser scanning system based on a synchronized scanning geometry is described. Results for scanning plane and cylindrical surfaces are reported. Deviations of the experimental results from that of the expected theoretical ones are presented. The described system offers a good reproducibility and results agree well with the theory. The results obtained from our system are satisfactory and show a promise in order to be used in the real applications. The reported approach can also be used in the design of a three-dimensional vision system.     

Calibration procedure for 3D measurement systems using two cameras and a laser line

In order to ensure the precision of the measurement of complex 3D object surfaces using non-contact laser scanning systems, a novel stereo vision calibration procedure based on a laser line projection plane is presented. This calibration procedure can also be used in measurement systems based on a single camera and a laser line projection. This procedure, while using only laser-coplanar points, is oriented towards laser line detection and allows the matching of two images on the laser projection plane without the use of a rigid motion equation. These features make this procedure very precise, simple and, consequently, easier to implement.     

基于激光毛化技术的5052铝合金粘接试验研究

为了提高5052铝合金的粘接性能,利用脉冲光纤激光的短脉冲和高峰值功率的特性,对铝合金试件进行了激光毛化试验研究。通过正交实验法,研究了平均功率、扫描速度、脉冲频率和脉冲宽度等工艺参数对激光毛化质量的影响,以及各工艺参数的影响权重,并求得最佳工艺参数,最佳工艺参数为平均功率90 W、扫描速度10 mm/s、脉冲频率1000 kHz、脉冲宽度200 ns。根据优化后的工艺参数,加工获得了粗糙度2.35 μm,然后对激光毛化后的铝合金试件进行单搭接拉伸试验,研究发现粘接强度随着粗糙度的增大而增大,当粗糙度到达一定程度时,粘接强度反而会随着粗糙度的增大而减小。另外,粘接强度还跟铝合金表面的微织构的类型及疏密程度都有很大关系。     

激光扫描在工件表面检测中的应用方法

为了获取磨削工件表面特征信息，提出一种基于激光扫描的磨削工件表面检测方法。利用机械臂带动激光传感器扫描放置在激光测量平面中的磨削工件，从而获得工件在激光测量平面中的三维坐标信息，通过相邻2个扫描点之间的高度变化求出工件边界点的三维坐标信息，结合x轴和y轴坐标的极值点利用最小二乘法拟合出工件边界在激光测量平面中的解析式，进一步求出附着在工件上的坐标系相对于激光测量坐标系的位姿，最后利用工件在激光测量坐标系中的位置矢量信息得出其表面特征信息。实验结果表明，利用该方法对工件表面进行检测，得到工件表面检测误差为0.11 mm，检测平均时间在1 s内，满足工件表面特征检测要求。     

Investigation of sidewall roughness of the microgrooves manufactured with laser-induced etching technique

A novel laser etching technique utilizing an optical fiber as the laser beam guide is introduced. Depending upon whether a pulsed or a continuous wave (CW) laser is employed as the irradiation source, it was found that the etch depth and surface morphology of the grooves varied significantly. It was then demonstrated that deep microgrooves with smooth sidewalls can be obtained using a hybrid pulse and CW scanning process. The results of laser heating and chemical analyses revealed that sidewall roughness of the microgroove is mainly attributed to surface melting.     

Experimental Study of Laser Bistatic Scattering from Random Deeply Rough Surface and Backscattering Enhancement

The laser bistatic scattering from some deeply rough plane samples are measured by using of the automated scattering measurement system. We observe the backscattering enhancement, which is confined to a narrow cone around the antispecular direction, and discuss the influences of roughness and dielectric properties on them.     

Laser direct micromilling of copper-based bioelectrode with surface microstructure array

The laser direct micromilling is proposed to fabricate the microstructure arrays on the surface of dry bioelectrodes using red copper material. Based on the principle of laser machining and SEM results, the forming process of microstructure arrays on the surface of copper-based bioelectrodes is discussed. When the process parameters are varied, the effect of process spacing, laser output power, scanning speed and number of scan on the morphology and geometrical dimension of microstructure array of bioelectrode is investigated. The results show that the cone surface microstructure can be fabricated when process spacing is set to 0.1 mm. Surface roughness of microstructure is greatly changed with different scanning speeds. The height of surface microstructure and recast layer is greatly increased with increasing laser output power. When smaller laser output power or less number of scan are selected, surface microstructure array is difficult to be fabricated. However, it is easy to generate the damage of surface microstructure when the larger output power or excessive scanning times are selected. Moreover, our developed copper-based bioelectrode shows a hydrophobic property when the spacings are selected in the range of 0.1–0.3 mm. Eventually, the optimized process parameters are obtained to fabricate the bioelectrode with cone microstructure array.     

激光轴向偏焦法平整化CVD金刚石膜

利用Nd:YAG型金刚石精密激光切割机,采用激光轴向偏焦法对化学气相沉积（CVD）法制备的金刚石膜表面进行扫描式平整化处理,利用扫描电子显微镜（SEM）、粗糙度仪和金相显微镜对平整化后的金刚石表面进行表征,研究了激光充电电压和焦点位置对扫描凹槽宽度和深度的影响,以及扫描间距对平整化效果的影响。研究结果表明:扫描凹槽宽度随激光充电电压的升高而增大;凹槽深度随激光充电电压的升高而增大,随偏焦量的增大而增大。激光轴向偏焦法对CVD金刚石膜进行平整化处理后,其粗糙度显著减小,利用氢等离子体对其表面进行刻蚀处理,能够有效去除表层石墨,从而达到理想的平整化效果。     

Femtosecond laser-induced surface wettability modification of polystyrene surface

In this paper, we demonstrated a simple method to create either a hydrophilic or hydrophobic surface. With femtosecond laser irradiation at different laser parameters, the water contact angle (WCA) on polystyrene’s surface can be modified to either 12.7° or 156.2° from its original WCA of 88.2°. With properly spaced micro-pits created, the surface became hydrophilic probably due to the spread of the water droplets into the micro-pits. While with properly spaced micro-grooves created, the surface became rough and more hydrophobic. We investigated the effect of laser parameters on WCAs and analyzed the laser-treated surface roughness, profiles and chemical bonds by surface profilometer, scanning electron microscope (SEM) and X-ray photoelectron spectroscopy (XPS). For the laser-treated surface with low roughness, the polar (such as C—O, C=O, and O—C=O bonds) and non-polar (such as C—C or C—H bonds) groups were found to be responsible for the wettability changes. While for a rough surface, the surface roughness or the surface topography structure played a more significant role in the changes of the surface WCA. The mechanisms involved in the laser surface wettability modification process were discussed.     

Visualisation on supersonic flow over backward-facing step with or without roughness

At Mach number 3.4, visualisation experiments of flow over backward-facing step (BFS) with or without roughness band attached on upstream wall are carried out via traditional schlieren and newly developed nano-tracer-based planar laser scattering (NPLS). The time-averaged flow characteristic of the reattachment region and the instantaneous rich structures of the redeveloping boundary layer in the steamwise-normal plane are both revealed. Additionally, top views in the different planes (y/h = 0.67, 1.00, 1.33, 1.67, 2.00) are imaged with a resolution of 0.064 mm/pixel. By contrasting the NPLS images at different times, the unsteady evolution characteristic of the coherent vortices in the redeveloping boundary layer was discussed. Static wall pressure is measured by a micro-pressure scanning system. The incipient formation positions are pointed out statistically. Without roughness, the longitudinal structures with scales of 1.0h and 1.2h form later and distribute in a longer region compared to that with roughness. Fractal analysis is applied and the averaged fractal dimensions of the overall and sectional flow structures are calculated. If roughness is adopted, the fractal dimension will be larger and the turning point in the sectional fractal dimensions is earlier. However, the dimension tends to be one coincided value in the farther downstream.     

飞秒激光直写PMMA制备微流道的工艺技术研究

针对目前PMMA微流道加工质量差和效率低的问题, 对飞秒激光直写PMMA制备微流道的工艺技术进行了研究。通过实验分析了不同激光参数对微流道的宽度、深度、粗糙度、微流道两侧堆积物火山口高度的影响及变化规律。实验结果表明, 当激光扫描速度为20 mm/s时, 激光功率为0.5 W时, 微流道粗糙度较低且变化幅度不明显; 激光能量从0.5 W增加到0.75 W时, 微流道的宽度、深度与激光能量呈线性关系增加; 激光功率大于0.5 W时, 随着激光功率以及加工次数的增加, 微流道宽度、深度、粗糙度以及堆积物火山口的高度逐渐增加。经过计算得出, PMMA的烧蚀阈值为0.357 J/cm2。通过优化工艺参数, 制备出粗糙度较低、表面光滑、深度为16 μm的微流道芯片。     

Fabricating of aspheric micro-lens array by excimer laser micromachining

This work presents a unique method for fabricating aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Based on a planetary contour scanning laser machining method along with a shading metal mask and sample movable stage, an array of micro-lenses with precisely controlled surface profiles can be fabricated. Each lens surface profile can be aspheric and pre-designed. Experiments have been carried out and the machining accuracy of each lens surface profile is examined. Good surface roughness and profile accuracy are observed.     

Statistical Properties of Laser Speckles Generated from Far Rough Surfaces

The statistical properties of speckle patterns generated from far rough surfaces, under illumination of a Gaussian beam, are investigated. The surface roughness dependence of the first- and second-order moments of intensity is theoretically investigated, and their analytical expressions have been derived and presented. The analysis indicates that the mean intensity distribution on the receiver plane is closely related to the ratio of the lateral correlation length to the surface root mean square (rms) height. On the other hand, the speckle size and the correlation degree of the speckle intensities are found to be independent of the parameter characterizing the roughness of a surface, and are only determined by the laser beam waist.     

Investigation into the direct laser forming process of steam turbine blade

In order to achieve high precision and unidirectional solidification microstructure of steam turbine blade fabricated by direct laser forming (DLF), this study is focused on the influence of the laser scanning speed, specific energy and powder feeding rate on the forming characteristics of single cladding pass, which is elementary units in DLF, and a new method of columnar crystal preparation is investigated. Results show that both the metal powder stream and the laser specific energy are the most important factors, that control the high temperature behavior of molten pool so as to determine the micro-morphology of laser scanning track. Based on the optimum processing conditions, high definition steam turbine blade of 316L is fabricated (surface roughness Ra of 10.08 to 26.51 μm or so). The microstructure is of fish scale type by natural cooling after DLF, but it is first found that columnar crystals can be formed on the non-columnar crystal substrate of 316L by intermittent cooling with liquid argon. Therefore, the above investigations will benefit the rapid development of steam turbine blade.