Gd靶激光等离子体6.7nm光源的实验研究

本文对Gd靶激光等离子体极紫外光源进行了实验研究, 在 6.7 nm附近获得了较强的辐射, 并研究了6.7 nm 附近光辐射随打靶激光功率密度变化的规律以及收集角度对极紫外辐射的影响. 同时, 对平面Gd靶激光等离子光源的离子碎屑角分布进行了测量, 发现从靶面的法线到沿着靶面平行方向上Gd离子数量依次减少. 进一步研究结果表明采用0.9 T外加磁场的条件下可取得较好的Gd 离子碎屑阻挡效果.     

Optimization of soft x-ray line emission from laser-produced carbon plasma with laser intensity

Absolute measurement for He-α resonance (1s^{2 1}S₀?1s2p¹ P ₁, at 40.2 Å) line emission from a laser-produced carbon plasma has been studied as a function of laser intensity. The optimum laser intensity is found to be ≈1.3×10¹² W/cm² for the maximum emission of 3.2 × 10¹³ photons sr^?1 pulse^?1. Since this line lies in the water window spectral region, it has potential application in x-ray microscopic imaging of biological sample in wet condition. Theoretical calculation using corona model for the emission of this line is also carried out with appropriate ionization and radiative recombination rate coefficients     

脉冲Nd:YAG激光烧蚀Cu产生等离子体总辐射的时空分辨研究

通过时空分辨的光谱测量技术,测定了在环境气压下,Ｎｄ：ＹＡＧ脉冲激光烧蚀金属Ｃｕ产生等离子体的总辐射随时间与空间的强度分布,研究了烧蚀环境气压对总辐射强度的影响,提出了电子碰撞与复合激发模型。     

Scaling of x-ray emission and ion velocity in laser produced Cu plasmas

The x-ray emission from slab targets of copper irradiated by Nd:glass laser (1.054 μm, 5 and 15 ns) at intensities between 10¹² and 10¹¹W/cm² has been studied. The x-ray emissions were monitored with the help of high quantum efficiency x-ray silicon photo diodes and vacuum photo diodes, all covered with aluminium filters of different thickness. The x-ray intensity vs the laser intensity has a scaling factor of (1.2–1.92). The relative x-ray conversion efficiency follows an empirical relationship which is in close agreement with the one reported by Babonneau et al. The ion velocities were monitored using Langmuir probes placed at different angles and radial distances from the target position. The variation of the ion velocity with the laser intensity follows a scaling of the form Φ ^β where β ∼0.22 which is in good agreement with the reported scaling factor values. The results on the x-ray emission from Cu plasma are reported.     

Ion and X-ray techniques used for study of laser-produced plasmas

This review article describes apparatus for ion and X-ray diagnostics, which were used in experimental studies of laser-produced plasmas performed by the IPPLM's team in collaboration with other researchers at IPPLM and PALS Research Centre in Prague (the Czech Republic). The investigations of expanding laser-produced plasma properties in dependence on laser beam parameters were done by means of ion diagnostics devices: ion collectors (ICs), cylindrical ion energy analyzer (IEA) and the mass spectrograph of the Thomson type. At IPPLM, different types of detectors have been developed for measurement of X-ray emission. Properties of laser-produced beams of ions and X-ray radiation were analysed in the cooperative experiments performed with the use of a high-energy iodine laser PALS at the PALS Research Centre ASCR in the Czech Republic and the low-energy repetitive laser at IPPLM.     

脉冲Nd∶YAG激光烧蚀Al产生等离子体特征辐射的机理研究

采用时间与空间分辨光谱测量技术,研究了在Ar气为缓冲气体下,用脉冲Nd∶YAG激光烧蚀Al产生等离子体的发射光谱及其随气压的变化规律,对粒子的激发机理进行了讨论,认为特征谱线是由复合辐射为主要机理,并用此结论在一定程度上解释了实验结果。     

CO2激光锡等离子体极端紫外及可见光光谱

利用CO2激光烧蚀锡靶产生等离子体,当入射到靶面的单个脉冲能量为400mJ,半峰全宽(FWHM)为75ns时,使用光谱仪和增强型电荷耦合器件(ICCD)采集了等离子体的时间分辨光谱。在局域热平衡假设下,利用谱线的斯塔克展宽和五条Sn II谱线的相对强度计算并得到了等离子体电子密度、电子温度和辐射谱线强度随时间的变化规律;利用掠入射极端紫外平场光栅光谱仪,结合X射线CCD同时探测了光源在6.5～16.8nm波段的时间积分极端紫外辐射光谱。实验结果表明:激光点燃等离子体早期的100ns内有很强的连续谱,此后才能分辨出明显的原子和离子线状谱。在延时0.1～2.0μs的时间区间内,等离子体中的电子温度和密度分别在2.3～0.5eV和7.6×1017～1.2×1016 cm-3范围内,均随时间经历了快速下降,然后再较缓慢下降的过程。激光锡等离子体极端紫外不可分辨辐射跃迁光谱峰值中心位于13.5nm,FWHM为1.1nm。     

Effects of temperature and input energy on quasi-three-level emission cross section of Nd3+:YAG pumped by flashlamp

The influence of temperature and input energy on fluorescence emission cross section of Nd³⁺:YAG crystal is studied. The stimulated emission cross sections of quasi-three-level systems are determined in a temperature range from -30 to 60 ℃ and an input energy range from 18 to 75 J. The cross section is found to decrease with the temperature and the input energy is increased. This is attributed to the thermal broadening mechanism of the emission line. This study is relevant for the development of laser design.     

Au等离子体M带5f-3d跃迁透射谱的理论模拟

基于细致组态(DCA)方法和跃迁系列群 (UTA) 模型,采用全相对论处理并结合量子亏损理论,计算了金Au激光等离子体的M带5f-3d跃迁的透射谱, 给出了金等离子体在不同电子温度和电子密度的时空电离态特性,平均电离度,离子丰度和离子内各能级的布居数,并模拟出Au等离子体的M 带5f-3d跃迁的细致谱线,其计算结果可对激光等离子体透射谱的电子温度和电子密度进行精密诊断.     

Mitigation of energetic ion debris from Gd plasma using dual laser pulses and the combined effect with ambient gas

For the next-generation beyond extreme ultraviolet lithography(EUVL) sources, gadolinium(Gd) plasma with emission wavelength at 6.7 nm seems to be the leading candidate. Similar to the Sn target 13.5 nm light source, ion debris mitigation is one of the most important tasks in the laser-produced Gd plasma EUV source development. In this paper,a dual-laser-pulse scheme, which uses a low energy pulse to produce a pre-plasma and a main pulse after a time delay to shoot the pre-plasma, is employed to mitigate the energetic ion generation from the source. Optimal conditions(such as pre-pulse energy and wavelength, and the time delay between the pre-pulse and the main pulse for mitigating the ion energy) are experimentally obtained, and with the optimal conditions, the peak of the ion energy is found to be reduced to1/18 of that of a single laser pulse case. Moreover, the combined effect by applying ambient gas to the dual-pulse scheme for ion debris mitigation is demonstrated, and the result shows that the yield of Gd ions is further reduced to around 1/9 of the value for the case with dual laser pulses.     

Oscillation conditions of cw simultaneous dual-wavelength Nd：YAG laser for transitions 4F3／2-4I9／2 and 4F3／2-4I11／2

The operating condition of a cw simultaneous dual-wavelength Nd:YAG laser for both {}^4F_{3/2}-{}^4I_{9/2} (quasi-three-level system) and {}^4F_{3/2}-{}^4I_{11/2}(four-level system) transitions is studied. According to this condition, the cw simultaneous dual-wavelength at 1.06μm and 946 nm in Nd:YAG crystal has been realized experimentally through an adaptive coating design of the cavity mirrors. A total power output of 2.5W of the dual-wavelength at 946nm and 1.06μm has been achieved with an optical conversion efficiency 14.3%. The experimental results are in good agreement with the theoretical analysis.     

Numerical investigation of non-local electron transport in laser-produced plasmas

Non-local electron transport in laser-produced plasmas under inertial confinement fusion (ICF) conditions is studied based on Fokker-Planck (FP) and hydrodynamic simulations. A comparison between the classical Spitzer--H\"arm (SH) transport model and non-local transport models has been made. The result shows that among those non-local models the Epperlein and Short (ES) model of heat flux is in reasonable agreement with the FP simulation in overdense region. However, the non-local models are invalid in the hot underdense plasmas. Hydrodynamic simulation is performed with the flux limiting model and the non-local model, separately. The simulation results show that in the underdense region of the laser-produced plasmas the temperature given by the flux limiting model is significantly higher than that given with the non-local model.     

强激光与等离子体相互作用产生的超强太赫兹辐射

超短强激光脉冲在等离子体中传播时会激发大振幅的等离子体尾波场，它是一种电子等离子体波．由于这是一种静电波，它一般不能转换成电磁辐射．我们发现在不均匀等离子体中激发的尾波场在一定条件下可以通过线性模式转换产生电磁辐射．由于用超短强激光脉冲尾波场可以达到的电场振幅达100GV／m，其振动频率在太赫兹（10^12Hz）附近，用这种方法可以产生电场强度达到GV／m的太赫兹辐射．     

透明Nd:YAG激光陶瓷的研究与应用进展

综述了近年来,特别是近两年来国内外透明Nd:YAG激光陶瓷的研究与应用情况,重点对我国的透明Nd:YAG激光陶瓷研究近况进行了分析,指出了透明Nd:YAG激光陶瓷是目前陶瓷研究的热点。提出了透明Nd:YAG激光陶瓷研究中尚存在的问题和我国在此领域中与国外研究的巨大差距。分析指出:我国研究透明Nd:YAG激光陶瓷的各个院所之间,应该强强联合,优势互补,对该领域的理论和制备工艺进行更为深入的研究。     

Comparison of the laser-induced plasma of different metal targets as X-rays sources in vacuum

ABSTRACT

Laser-induced plasma is a good source of X-rays. It has much importance in different fields such as industry and medical field. In the current work, Nd: YAG laser was irradiated on metal targets (Al, Cu, Ni, Zn, Sb and Pb) under vacuum 10^?3?torr. Plasma plume is captured by the charged couple device. The emitted X-rays from plasma plume are detected by BPX-65 PIN photodiode through a proper biasing circuit and electrical signals are stored by digital storage oscilloscope (UNI-T UT2202C, 200?MHz). Energy was calculated from these electrical signals. The parameters of X-rays are strongly dependent on the atomic number.     

Optimization of C<Superscript>5+</Superscript> Balmer-α line intensity at 182 Å from laser-produced carbon plasma

Parametric dependence of the intensity of 182 Å Balmer-α line (C⁵⁺; n = 3 → 2), relevant to xuv soft X-ray lasing schemes, from laser-produced carbon plasma is studied in circular spot focusing geometry using a flat field grating spectrograph. The maximum spectral intensity for this line in space integrated mode occurred at a laser intensity of 1.2 × 10¹³ W cm^?2. At this laser intensity, the space resolved measurements show that the spectral intensity of this line peaks at ～1.5 mm from the target surface indicating the maximum population of C⁵⁺ ions (n = 3), at this distance. From a comparison of spatial intensity variation of this line with that of C⁵⁺ Ly-α (n = 2 → 1) line, it is inferred that n = 3 state of C⁵⁺ ions is predominantly populated through three-body recombination pumping of C⁶⁺ ions of the expanding plasma consistent with quantitative estimates on recombination rates of different processes.     

Ti类氦Kα线在高温稠密等离子体中的漂移

采用离子球模型,通过自洽求解Dirac方程和Poisson方程,得到类氦Ti离子Kα线系的两条电偶极辐射光谱能量随不同等离子体环境的变化关系.同时分析了束缚电子交换能随等离子体环境的变化规律.结果表明：光谱能量漂移量随等离子体电子密度变化呈现出很好的线性关系.对此,拟合得到Ti类氦Kα线光谱能量漂移量随等离子体环境参数变化的公式,对探索高温高密度等离子体诊断方法具有一定意义. 关键词： 类氦离子 自洽场离子球模型 光谱漂移 等离子体诊断     

双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项卡脖子关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

等离子体X射线吸收谱及发射谱研究

 报道计算高温高密等离子体吸收谱和发射谱（光学薄）的理论方法；该方法基于相对论原子理论，可以计算任何单元素以及多元素等离子体的谱分辨X射线吸收谱和发射谱（光学薄）；应用了量子亏损理论，可以减少计算量。利用该方法计算金等离子体LTE吸收谱，计算结果与实验符合良好。本文还对金等离子体LTE的光学薄发射谱进行了研究, 这将有利于对实验进行进一步的诊断分析。该理论计算方法还可提供等离子体内各电离度能级布居等重要物理参数。因此经“标准实验”检验的该理论计算方法将是提供ICF“精密”物理辐射参数的重要基础。     

等离子体X射线吸收谱及发射谱研究

报道计算高温高密等离子体吸收谱和发射谱（光学薄）的理论方法;该方法基于相对论原子理论,可以计算任何单元素以及多元素等离子体的谱分辨X射线吸收谱和发射谱（光学薄）;应用了量子亏损理论,可以减少计算量。利用该方法计算金等离子体LTE吸收谱,计算结果与实验符合良好。本文还对金等离子体LTE的光学薄发射谱进行了研究, 这将有利于对实验进行进一步的诊断分析。该理论计算方法还可提供等离子体内各电离度能级布居等重要物理参数。因此经“标准实验”检验的该理论计算方法将是提供ICF“精密”物理辐射参数的重要基础。