Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C_2H_2/Ar mixture

Physical qualities of dusty plasma in the pulsed radio-frequency C_2H_2/Ar microdischarges are carefully investigated by a one-dimensional hydrodynamic model and aerosol dynamics model.Since the thermophoretic force has a great effect on the nanoparticle density spatial distribution,the neutral gas energy equation is taken into accounted.The effects of pulse parameters(dust ratio,modulation frequency) on the nanoparticle formation and growth process are mainly discussed.The calculation results show that,as the duty ratio increases,the mode transition from the sheath oscillation(a regime) to the secondary electron heating(7 regime) occurred,which is quite different from the conventional pulsed discharge.Moreover,the effect of modulation frequency on the width of sheath and plasma density is analyzed.Compared with the H_2CC~-ions,the modulation frequency effect on the nanoparticles density becomes more prominent.     

Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C_2H_2 discharges

A self-consistent fluid model is employed to investigate the coagulation stage of nanoparticle formation, growth,charging, and transport in a radio-frequency capacitively coupled parallel-plate acetylene(C2H2) discharge. In our simulation, the distribution of neutral species across the electrode gap is determined by mass continuity, momentum balance, and energy balance equations. Since a thermal gradient in the gas temperature induced by the flow of the neutral gas, a careful study of the thermophoretic force on the spatial distribution of the nanoparticle density profiles is indispensable. In the present paper, we mainly focus on the influences of the gas flow rate, voltage, and gas pressure on the spatial distribution of the nanoparticle density. It appears that the resulting density profile of the 10-nm particles experiences a significant shift towards the upper showerhead electrode once the neutral equations are applied, and a serious shift is observed when increasing the gas flow rate. Thus, the flow of neutral gas can strongly influence the spatial distribution of the particles in the plasma.     

Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C_2H_2 discharges

The role of pulse parameters on nanoparticle property is investigated self-consistently based on a couple of fluid model and aerosol dynamics model in a capacitively coupled parallel-plate acetylene(C2H2) discharge. In this model, the mass continuity equation, momentum balance equation, and energy balance equation for neutral gas are taken into account.Thus, the thermophoretic force arises when a gas temperature gradient exists. The typical results of this model are positive and negative ion densities, electron impact collisions rates, nanoparticle density, and charge distributions. The simulation is performed for duty ratio 0.4/0.7/1.0, as well as pulse modulation frequency from 40 k Hz to 2.7 MHz for pure C2H2 discharges at a pressure of 500 m Torr. We find that the pulse parameters, especially the duty ratio, have a great affect on the dissociative attachment coefficient and the negative density. More importantly, by decreasing the duty ratio, nanoparticles start to diffuse to the wall. Under the action of gas flow, nanoparticle density peak is created in front of the pulse electrode,where the gas temperature is smaller.     

大气压氩气射流等离子体的光谱特性研究

等离子体喷枪是一种重要的等离子体源,已成为近几年低温等离子体研究的一个重要课题。本文利用钨针-钨丝网电极制作了直流喷枪装置,在大气压空气中产生了稳定的等离子体羽,并采用发射光谱的方法,对等离子体羽的等离子体参数进行了研究。在钨针电极与钨丝网电极之间放出耀眼的白光,钨丝网电极出口的气流下游有火苗形状的等离子体羽喷出。在电压保持不变的条件下(13.5 kV),等离子体羽长度随气体流量增加而增大;在气体流量保持不变的条件下(10 L·min-1),羽长度随外加电压的增大而增大。在气体流量一定的条件下,放电电压和放电电流呈反比例关系,即电压随着电流的增大而减小,说明放电属于辉光放电。采集了该喷枪在300～800 nm范围内的放电发射光谱,通过玻尔兹曼方法对放电等离子体电子激发温度进行了测量。结果表明,电子的激发温度随外加电压的增大而降低,随着工作气体流量的减小而升高。利用放电的基本理论对上述现象做了解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

An atmospheric-pressure nitrogen-plasma jet produced from microdischarges in a porous dielectric

This report presents an atmospheric-pressure nitrogen-plasma jet generated from microdischarges in a porous dielectric. A plasma jet with a length of 42 mm was produced by feeding nitrogen gas through a porous alumina installed between an outer electrode and a hollow inner electrode and by applying 60 Hz sinusoidal voltage wave to the electrodes. Microdischarges in the porous alumina are ejected as a plasma jet from the outer electrode through a 1 mm hole by increasing the applied voltage, showing that the temperature of the jet decreases to a value close to room temperature. Even at a frequency as low as 60 Hz, the plasma that evolves from a large amount of microdischarge inside a porous dielectric can have characteristics that are similar to those generated at several hundreds of kilohertz. From the electrical measurements, it is expected that not only the steady generation but also the frequency of the pulses resulting from the microdischarges in the porous dielectric play an important role in obtaining a stable plasma jet. We also identified the various excited plasma species produced from the plasma jet by an optical emission spectroscopy.     

Peculiarities of Dielectric Barrier Discharges

The dielectric barrier discharge (DBD) is a highly transient, non‐thermal discharge form, which exists in a broad pressure range. It occurs in arrangements, where a dielectric layer covers at least one electrode. The dielectric quenches the current and distributes the discharge over the whole surface. Depending on the geometrical conditions three basic types of DBD arrangements are distinguished. In arrangements with a gas gap a filamentary or a homogeneous‐diffuse discharge mode appears. The (stable) filamentary mode consists of a multitude of microdischarges, which in some extent can be rather easily tailored for e. g. plasma‐chemical applications. In arrangements with a long electrode (or several in parallel) on a dielectric surface and a plane counter‐electrode on the reverse side of the dielectric, pure surface discharges can be observed. They are characterised by low ignition voltages. The extension of the discharge on the surface depends on the voltage amplitude. If pairs of long electrodes are within the bulk of a dielectric, discharge phenomena appear on the surface of the dielectric. As these devices can be produced with small and precise electrode gaps, high mean field strengths in the discharge region can be realised. The properties of the discharges in these arrangements as well as their dynamics are described in detail and compared with one another. The advantages of each type are highlighted. Some aspects, which may be of interest for plasma‐chemical reactions on surfaces and in the gas space are discussed.     

气流对微秒脉冲滑动放电特性的影响

脉冲电源驱动的滑动放电能够在大气压下产生高能量、高功率密度的低温等离子体. 为了研究微秒脉冲电源在针-针电极结构中产生滑动放电的特征, 本文采用电压幅值为0–30 kV, 脉冲宽度约8 μs, 脉冲重复频率为1–3000 Hz的微秒脉冲电源, 通过测量电压、电流波形和拍摄放电图像, 研究了微秒脉冲滑动放电的电特性. 实验结果表明, 随着施加电压的增加微秒脉冲滑动放电存在三种典型的放电模式: 电晕放电、弥散放电和类滑动放电. 不同放电模式的电压、电流波形和放电图像之间差异显著. 脉冲重复频率对微秒脉冲滑动放电特性有影响, 表现为当气体流量较小(2 L/min)时, 类滑动放电的放电通道随着脉冲重复频率的增大逐渐集中, 而当气体流量较大(16 L/min)时, 类滑动放电的放电通道随着脉冲重复频率的增大逐渐分散. 不同气流下重复频率对滑动放电特性的影响与放电中粒子的记忆效应和气流的状态有关.     

Effect of Parallel-Plate Geometry on Mode Transition Behavior in Argon Microplasmas: Two-Dimensional Simulation

A two-dimensional self-consistent fluid model is employed to investigate radio-frequency process parameters on the plasma properties in Ar microdischarges. The neutral gas density and temperature balance equations are taken into account. We mainly investigate the effect of the electrode gap on the spatial distribution of the electron density and electron temperature profiles, due to a mode transition from the regime(secondary electrons emission is responsible for the significant ionization) to the regime(sheath oscillations and bulk electrons are responsible for sustaining discharge) induced by a sudden decrease of electron density and electron temperature.The pressure, radio-frequency sources frequency and voltage effects on the electron density are also elaborately investigated.     

直流激励的大气压氩气喷枪的光谱研究

利用正高压驱动空心针-板喷枪装置,通入工作气体氩气,在大气压空气中产生了均匀稳定的喇叭状等离子体羽。电学和光学测量结果表明,放电虽然是在直流电源驱动下工作,但放电为周期性的脉冲。通过对等离子体羽发光信号进行空间分辨测量,研究了脉冲的形成机理,发现除针尖附近的电晕放电外,等离子体羽是以正流光(等离子体子弹)从针尖向着接地电极方向传播的。采用光谱学方法,对电子激发温度随电压的变化及其空间分布进行了测量。结果表明,电子激发温度(约为3 eV)随电压的增大而升高,在一定电压下,电子激发温度沿气流方向也在升高。     

不同电极结构下介质阻挡放电电离特征的试验研究

由于具有工作气压高、放电均匀等特点,大气压介质阻挡放电成为近年来非平衡等离子体领域研究的主要技术。电极结构是电离特性的主要影响因素之一,因此,通过电极结构优化来改善电离特性,对等离子体放电设备的应用领域拓展及性能优化至关重要。为改善大气压介质阻挡放电的电离特性,产生高活性、高均匀性的低温等离子体,基于自主设计的同轴介质阻挡放电装置进行了不同电极结构的电离试验及参数诊断;在一个标准大气压、放电频率11.4 kHz、放电峰值电压5.4～13.4 kV条件下进行了氩气电离试验;采用原子发射光谱法（AES）对氩等离子体谱线的激发、分光进行了检测分析;研究了螺纹电极、齿状电极、圆柱电极放电的特征光谱参数及外施电压对介质阻挡放电特征参数的影响。结果表明,齿状电极放电所形成等离子体的放电强度更大且放电效果显著,电子平均能量利用率低,电子激励温度弱于圆柱电极;圆柱电极放电强度较弱,但易形成大面积均匀性等离子体;大气压环境下电子激励温度不因外源电压的升高而单调递加,这表明通道内微放电的主要特征并不依赖于外施电压的供给,而是取决于电极结构、气体组份、气体压强;增大外施电压仅能增加单位时间内微放电的数量,经整合电子激励温度可达3 500 K,符合典型的低温等离子体特征。     

气压对微束射频容性放电模式调制的研究

微束射频容性放电在纳米晶体颗粒等离子体增强气相合成有着潜在的应用前景.本论文利用ICCD、单反相机、高压探头和电流探头等对微束射频容性放电特性进行了实验诊断研究.结果发现:在纯氩气微束射频放电中,随着气压的增加,放电从辉光放电模式向多通道丝状放电模式转换;在99%氩/1%氢混合气体微束射频放电中,丝状放电模式消失,而是从低气压全空间分布的辉光放电模式,到中等气压向轴心收缩的辉光放电模式,最后到高气压的“环状”辉光放电模式;而在纯氢气微束射频放电中,随着气压的增加,放电模式直接从全空间分布的辉光放电模式向“环状”辉光放电模式转换.最后通过射频电场中电子加热、趋肤效应和气体热传导的共同作用解释了产生不同放电模式的物理机制.     

Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model

A self-consistent fluid model for dual radio frequency argon capacitive glow discharges at low pressure is established.Numerical results are obtained by using a finite difference method to solve the model numerically, and the results are analyzed to study the effect of gas pressure on the plasma characteristics. It shows that when the gas pressure increases from 0.3 Torr(1 Torr = 1.33322×10~2 Pa) to 1.5 Torr, the cycle-averaged plasma density and the ionization rate increase;the cycle-averaged ion current densities and ion energy densities on the electrodes electrode increase; the cycle-averaged electron temperature decreases. Also, the instantaneous electron density in the powered sheath region is presented and discussed. The cycle-averaged electric field has a complex behavior with the increasing of gas pressure, and its changes take place mainly in the two sheath regions. The cycle-averaged electron pressure heating, electron ohmic heating, electron heating, and electron energy loss are all influenced by the gas pressure. Two peaks of the electron heating appear in the sheath regions and the two peaks become larger and move to electrodes as the gas pressure increases.     

大气压冷等离子体喷枪气体温度的比较研究

采用介质阻挡放电等离子体喷枪装置,在大气压下流动气体(氩气和痕量氮气)中产生了稳定的喷射等离子体.通过拍摄喷枪发光照片,研究了喷射等离子体长度随气体流量的变化关系.利用高分辨率光谱仪采集等离子体羽处的发射光谱,通过对发射光谱中N+2的第一负系(B 2Σ+u→X 2Σ+g,390～391.6 nm)谱线拟合得到了射流等离...     

纳秒脉冲放电等离子体射流特性

采用单针式电极,使用单极性重复频率脉冲电源,在常压氦气、氩气、氮气和空气中得到等离子体射流,并改变电压、流量和气体种类,分别观察不同的实验条件对等离子体射流的影响。实验结果表明:射流长度随施加电压的增加而增长;随着流量的连续变化,射流长度先逐渐变长,达到峰值后由于湍流影响,长度又逐渐缩短,达到一定流量后趋于饱和。此外,不同工作气体中的等离子体射流呈现截然不同的外观,氦气和氩气中射流呈针状模式,长度可达7 cm以上;而在氮气和空气中,射流呈现为长度不超过2 cm的刷状模式。     

Numerical and theoretical calculation of breakdown voltage in the electrical discharge for rare gases

This work has been devoted to a numerical and analytical calculus of the voltage breakdown in electrical discharge for several rare gases such as argon, krypton, neon, xenon and helium. It was performed using a fluid model 2D, which is based on the numerical solution of the two Boltzmann equations (equation of continuity and momentum), coupled to Poisson's equation to measure the breakdown voltage according to the product of the electrode spacing and the pressure. This study allowed a better comprehension of the physical phenomena occurring in the discharges. We, thus, developed a calculation, based on the empirically Paschen's law, allowing the determination of the breakdown voltage, which describes the transition from insulating gas to the conductive state. Paschen's curves of the different gases are plotted and a comparison between numerical and experimental as well as analytical results is also presented and analyzed.     

棒-环电极大气压等离子体射流的光谱特性

通过设计新型的交流电压激励的氩气等离子体射流,在棒电极的上游与下游区域均产生了大气压非平衡态等离子体羽。该射流与平行场射流和交叉场射流不同,它的电场与气流方向的夹角可以在一定范围内变化。结果表明,随着外加电压或夹角的增加,上游羽的长度增加而下游羽的长度减小。利用光学和电学的方法,研究发现随着外加电压的增加,上下游放电脉冲的个数均增加。利用放电的光学发射谱,发现上游羽有Ar和OH的谱线,而下游羽除了Ar和OH的谱线外,还可以观察到N₂的谱线。并且下游羽的谱线强度比上游羽的略高。基于碰撞辐射模型,通过谱线强度比的方法研究了上下游羽的电子密度和电子激发温度。结果表明上下游羽的电子密度随着外加电压的增加而增加。上下游羽的电子激发温度也随着外加电压的增加而增加。并且,在同一外加电压时下游羽的电子密度和电子激发温度均比上游羽的高。此外,利用OH发射光谱研究了上下游羽的气体温度,发现下游羽的气体温度也比上游羽的略高。     

大气压氖气介质阻挡放电脉冲等离子射流特性

采用自行研制的低造价、小体积、可产生幅值0~35 kV、重复频率1 kHz的高压s脉冲电源,设计了一套以大气压氖气为工作气体的介质阻挡放电（DBD）等离子体射流源,通过测量并计算放电过程中的电压-电流波形、拍摄放电图像、光谱分析等手段,对电压幅值、气体流速对氖气等离子体射流特性的影响进行了研究。结果表明:s脉冲电源激励下大气压氖气DBD能产生锥状的等离子射流且其等离子强度适中;s脉冲电源电压幅值的快速上升,可在放电空间瞬间施加高的过电压,能有效促进放电功率、电子密度、电子激发温度和射流长度的增加;工作气体流速的增加使得放电功率、电子激发温度和电子密度减小,而射流长度变化很小;一定条件下,能形成长距离的射流。     

PICPMCC 数值模拟四阳极直流辉光放电

利用OOPIC 代码并结合MCC 方法考察四阳极低气压直流辉光放电中粒子间的碰撞, 并对其进行了数值模拟。首先分析OOPIC 代码的计算流程, 给出模拟的边界条件和时间、空间步进; 然后对所得到的等离子体密度、温度的分布情况进行了分析。结果表明, 放电气压、电流以及环电极的有效宽度均影响等离子体密度和温度的径向分布。当气压为300Pa 时, 电子密度在径向较大范围内是均匀分布的, 而当气压升高到800Pa 时, 其径向不均匀增大, 且总的密度和电子的平均温度下降。放电电流的增大使得等离子体密度和温度均相应升高。但环电极有效宽度的减小使得等离子体密度的分布更不均匀, 并使总的密度和平均温度均下降。     

Microhollow cathode sustained discharges: comparative studies in micro- and equivalent macro-cell geometries

We present an experimental study of discharge initiation in a three-electrode configuration consisting of a microhollow cathode discharge (MHCD) and a third planar electrode, biased positively and placed some distance away. This work is based on the microcathode sustained (MCS) configuration where the MHCD acts as a plasma cathode and enables the generation of a stable, non-equilibrium plasma at high pressure in the volume between the MHCD and the third electrode. Our experiments were carried out in two different set-ups, one using a MHCD as a cathode and another in an “equivalent” macrocell geometry, easier to implement and operating at lower pressure in which the same phenomena are observed. Consistent with previous modeling results, we find that the plasma column in the volume between the MHCD and the third electrode is characterized by a low reduced electric field, with values similar to those expected for a positive column. The ignition voltage of the plasma column depends on the voltage difference between the MHCD and the third electrode, the MHCD current, and the gas pressure and gap spacing.     

三种电极的大气压氩等离子体射流光学特性

采用铜片-单匝线圈电极、螺旋缠绕电极和双铜片电极3种结构的放电装置,以氩气作为工作气体,在正弦波激励下获得了大气压等离子体射流。利用电学方法测量了放电电流以及电荷量,并对放电脉冲和放电功率进行了研究;利用发射光谱法对射流的等离子体参量进行了空间分辨测量,并根据ArⅠ 763.5 nm和Ar Ⅰ 772.4 nm的光强计算了电子激发温度。结果发现：在外加电压的正负半周期内,电流脉冲的个数和幅值呈现非对称的变化趋势;随着外加电压的增加,3种结构电极的放电功率从1.7 W逐渐增加到6.0 W;在相同的外加电压情况下,电极面积越小,等离子体射流的长度越长;3种等离子体射流的电子激发温度在1 348.5~3 212.1 K之间,并且随着气体流量的增加,各位置的电子激发温度总体上呈下降趋势,而等离子体的电子密度呈上升趋势。实验结果表明：外加电压对放电功率有一定影响;射流长度与电极面积有关;气体流量对电子激发温度和电子密度的空间分布起重要作用。