Quasi-sinusoidal single-order diffraction transmission grating used in x-ray spectroscopy

A novel design of quasi-sinusoidal single-order diffraction transmission grating (QSTG) is proposed, which can achieve a line density up to thousands line/millimeter as that of traditional transmission gratings with the current level of nanofabrication technique. We fabricate a 1000?line/mm QSTG using the new design approach, and display the calibration results of such QSTG on the soft x-ray beam of synchrotron radiation.     

梯形透过率光栅远场光强分布及光栅方程的解析推导

二值化梯形透过率光栅是一种具有离轴衍射级次的二维光栅,其各衍射点光强信息和位置信息的确定对该新型光栅的实际应用具有重要意义。然而,目前尚无相关解析理论对其进行合理的描述。为了解决上述问题,通过二维傅里叶变换方法获得了该光栅各个衍射级次光强分布的解析表达式,并根据二维光栅的结构特征给出了在透射式和反射式情况下该光栅满足的光栅方程。这为该新型光栅的光线追迹计算打下了理论基础。最后,将解析表达式计算结果与采用X-Lab软件标量衍射模块计算的数值模拟结果进行比较,验证解析理论的正确性。     

High efficiency terahertz diffraction grating with trapezoidal elements

A newly designed grating used in terahertz region is proposed, which is composed of the trapezoidal elements repeated successively along one dimension of the substrate, and uniform interval(the grating period) repeated along the other dimension. The transmission of the grating owns a designable trapezoidal profile dependent on the geometric dimensions of the element. The far-field diffraction patterns of a designed grating at incident broadband terahertz frequencies, with element dimensions of upper, lower side and period of 50, 250, and 300 μm, respectively, are simulated by the scalar diffraction theory. The simulation results indicate that the terahertz grating exhibits a property of single-order diffraction,and the diffraction efficiency of the first order reaches 6.6%, exceeding that of a traditional sinusoidal amplitude grating with identical period and duty cycle. Owing to the regular architecture and the high single-order diffraction efficiency, the grating is easy to fabricate and shows great potential applications in single-shot spectral measurements of weak broadband terahertz pulse.     

反射式单级衍射光栅

介绍了单级衍射光栅的发展趋势, 从理论上论证了单级衍射光栅的可行性, 引入了一种新型衍射光学元件—-准正弦反射式单级衍射光栅(QSRG). 它能有效抑制高级衍射, 可用于提高光谱系统的信噪比和精度. 而通过QSRG的实验结果也验证了此新型色散元件确实具有良好的单级衍射特性, 二级及以上的高级衍射被有效地抑制, 与理论预测几乎一致. 本文的结果可望在反射式光谱测量系统中得到广泛应用.     

准随机矩形孔阵列透射光栅

自支撑透射光栅的周期加强筋结构在降低光栅的通光面积、减少光栅衍射效率的同时, 也影响了光栅原有的衍射模式, 致使其应用更加复杂. 为了应对这一问题, 作者提出了利用在高Z材料薄膜上准随机排布矩形孔实现自支撑透射光栅的技术方法. 理论分析与实验结果表明, 利用新方法制作的透射光栅较好地摆脱了周期性加强筋对透射光栅衍射模式的强加干扰.     

Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region

We fabricate and measure a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region. The fabrication process is carefully controlled so that the grating groove and multilayercoating parameters well meet the design targets. At an incident angle of 10°, the peak diffraction efficiency of the ＋1st order is 20.6% at 14.56 nm and that of the -1st order is 22.1% at 14.65 nm, both close to the theoretical limits.     

High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region

We describe a simple method to fabricate blazed gratings used in the extreme ultraviolet wavelength region. The method uses an argon and oxygen mixed-gas ion beam to directly etch the grating substrate through a rectangular profile photoresist grating mask. With this method the etched grating groove profile can be well controlled. An Mo/Si multilayer-coated specimen with a blaze angle of 1.9 degrees was fabricated and measured. At an incident angle of 10 degrees and a wavelength of 13.62 nm, the diffraction efficiency of the negative second order reaches 36.2%.     

Polarizing beam splitter of a deep-etched fused-silica grating

We described a highly efficient polarizing beam splitter (PBS) of a deep-etched binary-phase fused-silica grating, where TE- and TM-polarized waves are mainly diffracted in the -1st and 0th orders, respectively. To achieve a high extinction ratio and diffraction efficiency, the grating depth and period are optimized by using rigorous coupled-wave analysis, which can be well explained based on the modal method with effective indices of the modes for TE/TM polarization. Holographic recording technology and inductively coupled plasma etching are employed to fabricate the fused-silica PBS grating. Experimental results of diffraction efficiencies approaching 80% for a TE-polarized wave in the -1st order and more than 85% for a TM-polarized wave in the 0th order were obtained at a wavelength of 1550 nm. Because of its compact structure and simple fabrication process, which is suitable for mass reproduction, a deep-etched fused-silica grating as a PBS should be a useful device for practical applications.     

Diffraction grating eigenvector for translational and rotational motion

Future energy scaling of high-energy chirped-pulse amplification systems will benefit from the capability to coherently tile diffraction gratings into larger apertures. Design and operation of a novel, accurate alignment diagnostic for coherently tiled diffraction gratings is required for successful implementation of this technique. An invariant diffraction direction and phase for special moves of a diffraction grating is discussed, allowing simplification in the design of the coherently tiled grating diagnostic. An analytical proof of the existence of a unique diffraction grating eigenvector for translational and rotational motion that conserves the diffraction direction and diffracted wave phase is presented.     

一种制作超高频全息光栅的新方法

为了满足测量的高分辨率和灵敏度，基于光栅为关键元件的光学测量方法要求光栅有很高的频率。在已有的高折射率介质制栅方法的基础上提出了一种新的制作超高频全息光栅的方法，该方法制栅准确、简单、方便，其特点是所制光栅的频率与激光波长及介质的折射率无直接关系，而是等于制栅光路所得频率与两倍母栅频率之和。实验表明，利用该方法制得１００００线／ｍｍ的光栅是完全可能的     

光栅周期包含的Bragg层数对Bragg型凹面衍射光栅的影响

单个衍射光栅周期所包含的Bragg周期层数是连续Bragg齿型凹面衍射光栅的主要参数之一,该参数可改变光栅齿结构,对凹面衍射光栅的分辨力.自由光谱范围及衍射效率有重要影响.本文通过理论分析与仿真模拟,对比了4种不同层数的Bragg型凹面衍射光栅的特性参数.研究结果表明:在衍射光栅尺寸不变的情况下,改变单个光栅周期包含的Bragg周期层数不会显著提高器件主衍射级次的分辨力;单个光栅周期包含的Bragg周期层数与光栅可衍射的级次数成正相关.单周期层数的Bragg凹面衍射光栅的主衍射级次效率最高,其可衍射的级次数最少,且其他衍射级次分散的能量最少;增加单个光栅周期所包含的Bragg周期层数会降低主衍射级次的自由光谱范围.该研究对于设计低插损、高分辨率、宽工作波段的波分复用器或光栅光谱仪具有重要的指导意义.     

Circular Dammann grating

A circular Dammann grating that can produce circular equal intensities at various orders in the far field is described. A set of parameters such as order, circular number, uniformity, and diffraction efficiency has been defined to describe the novel diffractive phase elements. Numerical solutions of binary-phase (0, pi) circular Dammann gratings are given. The results of experiments with a four-order circular Dammann grating made by a lithographic technique are presented. This novel diffractive optical element should be highly interesting in a wide variety of practical applications.     

Nondestructive imaging of a type I optical fiber Bragg grating

Nondestructive images of refractive-index variation within a type I fiber Bragg grating have been recorded by the differential interference contrast imaging technique. The images reveal detailed structure within the fiber core that is consistent with the formation of Talbot planes in the diffraction pattern behind the phase mask that had been used to fabricate the grating.     

Design of a circular Dammann grating

A novel circular Dammann grating is proposed to generate uniform-intensity impulse rings corresponding to different diffraction orders in the far field. The intensities of the rings are determined by the coefficients of the circular sine series decomposition of the grating function. The definition of diffraction efficiency and uniformity for this novel device are described. Numerical solutions of binary phase circular Dammann gratings are presented. A binary phase three-order circular Dammann grating of pi phase depth is fabricated by an e-beam direct writing technique and is experimentally demonstrated.     

弱谐波情况下透射光栅衍射效率标定方法

同步辐射光源中的高次谐波会使透射光栅衍射效率标定精度变差。为了校正光源中的高次谐波对透射光栅衍射效率标定的影响,提出了一种光源存在弱谐波情况下的透射光栅衍射效率标定方法,通过使用谐波X射线的衍射效率修正基波衍射效率标定中谐波的影响,从而得到更为准确的透射光栅衍射效率。使用该标定方法在北京同步辐射光源上开展了透射光栅相对衍射效率标定工作。实验结果表明:在100~800eV存在高次谐波能段,修正后透射光栅一级与零级的相对衍射效率与理论模拟结果吻合较好,修正后光栅二级与一级的相对衍射效率更接近理论模拟结果,但与理论模拟结果仍有较大偏差,该偏差主要来源光栅较弱的二级衍射。     

适用于宽带光的闪耀光栅衍射强度分布规律研究

变栅距光栅线位移传感器是一种新型波长编码位移传感器,为进一步提高传感器波长解调的精度和减小光源的体积,提出适用于全工作波段的恒定闪耀角变栅距光栅结构。首先采用经典光学的方法推导出变栅距闪耀光栅衍射强度分布公式,从理论上证明该光栅结构可实现在全工作波段提高变栅距光栅线位移传感器衍射光强。此外,制作出变栅距闪耀光栅样件证实了工艺可行性。在相同的条件下,对一组参数相同的闪耀光栅和矩形槽形光栅进行了衍射光强比对实验,得到变栅距闪耀光栅的衍射光强约为矩形变栅距光栅的衍射光强的1.7倍,并与按此衍射光强分布公式计算的结果一致。     

Diffraction grating with rectangular grooves exceeding 80% diffraction efficiency

A novel design for a surface relief grating with rectangular grooves is presented. The first reflected diffraction order shows experimentally 84% diffraction efficiency for a metallic grating. The required binary surface relief can be manufactured by using one single microlithographic fabrication step similar to standard processes in microelectronics. Each period of the grating consists of a subwavelength “minilattice” with a variable duty cycle. A theoretical model of the structure is presented and compared to measurements at 10.6 μm wavelength. Applications ranging from deflectors, polarizing beam splitters, variable attenuators to general diffractive components such as kinoforms for laser beam shaping are proposed.     

Diffraction from a moving grating

A first-principles tutorial account is given for the diffraction of either light or free, non-relativistic, massive particles from a moving grating. Discussion on the properties of the moving grating including non-reciprocity is followed by considering both Raman-Nath (thin grating) diffraction and Bragg (thick grating) diffraction in either transmission or reflection geometry. Use of four-momentum conservation with dispersion relations yield the angles of diffraction. The increase in the angle of diffraction for grazing incident by using a moving grating relative to using a static grating is calculated. It is shown that this increase is possible only for Raman-Nath geometry.     

"之"字形光栅衍射特性的数值模拟研究

新近提出的光学色散元件"之"字形光栅具有优越的衍射特征,在光谱测量和分析中具有重要的应用价值.本文基于卷积定理,采用一种新的数值计算方法对应用于X射线波段的"之"字形光栅的衍射模式进行了模拟计算,并将其衍射模式与传统光栅以及正弦光栅的衍射模式进行了比对研究,结果表明:"之"字形光栅可以将高级衍射抑制到低于一级衍射四个量级的水平,具有比传统光栅优越得多的衍射模式,与理论预期结果一致.在此基础上,又分析了实际应用过程中吸收体对X射线的吸收情况给"之"字形光栅衍射模式带来的影响,最终证实了"之"字形光栅具有较强 关键词： 之字形光栅 卷积定理 衍射模式 光谱测量     

透射式矩形相位光栅的衍射光谱分析

提出了一种计算透射式矩形相位光栅衍射场的简便方法,计算并分析了透射式矩形相位光栅的衍射光谱,给出了相位光栅的衍射光谱与光栅材料的折射率、光栅厚度和入射波长的关系,得到了把衍射光能量集中到1级光谱的条件;并在相位光栅的应用方面作了探讨.