Numerical studies of atmospheric pressure glow discharge controlled by a dielectric barrier between two coaxial electrodes

The glow discharge in pure helium at atmospheric pressure, controlled by a dielectric barrier between coaxial electrodes, is investigated based on a one-dimensional self-consistent fluid model. By solving the continuity equations for electrons, ions, and excited atoms, with the current conservation equation and the electric field profile, the time evolution of the discharge current, gas voltage and the surface density of charged particles on the dielectric barrier are calculated. The simulation results show that the peak values of the discharge current, gas voltage and electric field in the first half period are asymmetric to the second half. When the current reaches its positive or negative maximum, the electric field profile, and the electron and ion densities represent similar properties to the typical glow discharge at low pressures. Obviously there exist a cathode fall, a negative glow region, and a positive column. Effects of the barrier position in between the two coaxial electrodes and the discharge gap width on discharge current characteristics are also analysed. The result indicates that, in the case when the dielectric covering the outer electrode only, the gas is punctured earlier during the former half period and later during the latter half period than other cases, also the current peak value is higher, and the difference of pulse width between the two half periods is more obvious. On reducing the gap width, the multiple current pulse discharge happens.     

Spectroscopic Study of CO2 Decomposition in Sealed‐off CO2 Lasers

The CO₂ decomposition in a DC glow discharge in a sealed‐off CO₂ laser mixture (6% CO₂ : 20% N₂ : 74% He) in the pressure range 2 ‐ 22 Torr is investigated. Both the time evolution and the steady‐state CO₂ decomposition are studied by means of time resolved optical emission spectroscopy. A decrease of the time to reach steady‐state values of particles concentrations in the discharge system with decreasing pressure and increasing discharge current is observed. The degree of CO₂ decomposition rapidly decreases with increasing pressure and exhibits only a small increase with increasing discharge current. This behaviour can be explained by the variations of the reduced electrica field strength E/N and of the electron density. Also the influence of the balast volume is discussed in this work.     

直流大气压辉光放电高能电子密度的空间分布

利用针阴极和水阳极,在6 mm的空气隙产生了大气压空气辉光放电。该大气压辉光放电具有明显的负辉区、正柱区和阳极辉区等明亮的发光区。通过研究放电的电压电流特性,发现该放电处于亚辉光放电到正常辉光放电阶段。由于氮分子第二正带系337.1 nm的光谱强度反映高能电子密度,对337.1 nm谱线的强度进行了空间分辨测量。结果发现高能电子在针尖附近密度最大,而其他区域相差不多。随电压升高,高能电子密度减少。增大限流电阻,高能电子密度也减少。氧原子对杀菌消毒具有重要作用,利用发射光谱法对氧原子谱线强度的空间分布进行了测量,发现氧原子谱线强度与高能电子的空间分布及其随参数的变化关系一致。     

棒-板电极下缩比气隙辉光放电相似性的仿真研究

建立了棒-板电极下氩气直流放电的流体模型,利用有限元法对几何位形相似的两个气隙放电过程进行了数值求解.两放电气隙外加电压相同,气隙线性尺寸的比值为10:1,气压分别为1 Torr和10 Torr.仿真得到了两相似气隙的放电的伏安特性曲线以及放电物理量(如电位、电场、电子密度、离子密度、电子温度等)的空间分布.根据气体放电相似性的基本结论,检验了气隙对应物理量之间的数值关系.结果表明:两相似气隙的放电类型为正常辉光放电,对应放电物理量之间存在相似性理论指出的比例关系,且在相同幅值的直流电压作用下,气隙放电的工作点相同.这将为利用气体放电相似性来外推相似气隙的放电特性提供一定的理论依据.     

RF impedance measurements of DC atmospheric micro-discharges

The available diagnostics for atmospheric micro-plasmas remain limited and relatively complex to implement; so we present a radio-frequency technique for diagnosing a key parameter here. The technique allows one to estimate the dependencies of the electron density by measuring the RF-impedance of the micro-plasma and analyzing it with an appropriate equivalent circuit. This technique is inexpensive, can be used in real time and gives reasonable results for argon and helium DC micro-plasmas in holes over a wide pressure range. The electron density increases linearly with current in the expected range consistent with normal glow discharge behavior.     

介质阻挡均匀大气压辉光放电数值模拟研究

通过数值求解一维电子、离子连续性方程和动量方程，以及电流连续性方程，计算了氦气介 质阻挡大气压辉光放电电子、离子密度和电场在放电空间的时空分布，以及放电电流密度和 绝缘介质板充电电荷密度随时间的变化. 分析讨论所加电压频率、幅值及介质板性质等对均 匀大气压辉光放电性质的影响. 当外加电压频率足够高时，大量离子被俘获在放电空间，空 间电荷场又引起足够多的电子滞留在放电空间. 这些种子电子使得在大气压下发生汤森放电 ，放电空间结构类似于低气压辉光放电，即存在明显的阴极位降区、负辉区、法拉第暗区和 等离子体正柱 关键词： 大气压辉光放电 介质阻挡 数值模拟 等离子体     

空心针-板电极大气压氩气辉光放电的特性研究

大气压均匀放电等离子体在工业领域具有非常广泛的应用前景,它是利用直流电源激励的空心针-板放电装置,以氩气为工作气体在大气压空气中产生均匀稳定的放电。对氩气流量和气隙间距对辉光放电发光特性的关系进行了研究,结果表明放电所产生的等离子体柱连接两个电极,发光较为均匀(观察不到放电丝)。在板电极附近放电等离子体柱直径最大,最大直径随着电流和气流的增大而增大。放电伏安特性研究发现,与低气压辉光放电相类似,两电极间的电压随着电流的增大而减小,并且随气流和气隙间距的增大而增大。对该大气压直流均匀放电在扫描范围为330～450 nm的光学发射光谱进行分析,获得了放电等离子体的分子振动温度和谱线强度比I_391.4/I_337.1随氩气流量和气隙间距的变化关系。I_391.4/I_337.1均随流量和气隙间距的增大而降低。对等离子体柱的I_391.4/I_337.1沿气流方向(等离子体柱轴向)进行了空间分辨测量,并进行了定性分析,结果表明,振动温度及电子平均能量随着远离空心针口距离的增大而增大。这些结果对大气压辉光放电在工业中的应用具有重要意义。     

Expansion of the working range of forevacuum plasma electron sources toward higher pressures

It is shown that the pressure in forevacuum plasma electron sources is limited from above by a current component that arises in the accelerating gap from a high-voltage glow discharge and dominates in the electron beam. The working pressure range of such electron sources can be expanded toward higher pressures by limiting the current of the high-voltage glow discharge in the accelerating gap.     

Theory of a normal high-pressure glow discharge

In the present work, a theoretical model considering the processes of generation and losses of charged particles in the cathode region of a glow discharge in the drift approximation for ion and electron motion is developed. Exact analytical solutions, which can be used to calculate the current-voltage characteristics of the glow discharge in an arbitrary gas with the known Townsend ionization coefficient, are derived. The calculated parameters of the normal glow discharge (the current density, discharge burning voltage, and width of the space charge region) for different gases are in good agreement with the available experimental data. __________ Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 2, pp. 71–77, February, 2006.     

ICP等离子体鞘层附近区域发光光谱特性分析

为了独立控制鞘层附近区域离子密度和离子能最分布,采用光发射谱(OES)测量技术,对不同射频功率、放电气压和基底偏压下感应耦合等离子体鞘层附近区域辉光特性进行了研究.原子谱线和离子谱线特性分析表明,在鞘层附近区域感应耦合等离子体具有较高的离子密度和较低的电子温度.改变放电气压和射频功率,对得到的光谱特性分析表明,鞘层附近区域离子密度随射频功率的增大而线性增大,在低压下随气压的升高而增大.低激发电位原子谱线强度增加迅速,高激发电位原子谱线强度增加缓慢,而离子谱线强度增加很不明显.改变基底直流偏压,对得到的发射光谱强度变化分析表明,谱线强度随基底正偏压的增加而增大.随着基底负偏压的加入,谱线强度先减小而后增大;直流偏压为-30 V时,光谱强度最弱.快速离子和电子是引起Ar激发和电离过程的主要能量来源.     

Glow Discharge Characteristics of Hollow Needle-Plate Electrode in Atmospheric Pressure ArgonSCIEI北大核心CSCD

Atmosphere pressure uniform plasma has the broad application prospect in the industrial field. Using hollow needle cathode - plate anode device excited by direct-current voltage, a uniform and stable glow discharge is generated at atmospheric pressure in ambient air with argon used as working gas. The influence of the experimental parameters (including gas flow rate and the gas gap width) on discharge has been investigated by optical method. It can be found that a glow-discharge plasma column can bridge the two electrodes. The plasma column is uniform, and no filaments can be discerned. Near the plate electrode, the diameter of the plasma column is largest of all positions. The maximal diameter of the plasma column increases with increasing the discharge current or the gas flow rate. Through electrical method, the voltage-current characteristic has been investigated. It has been found that the discharge voltage decreases with increasing the current which is similar with the characteristic of glow discharge in low pressure. It increases with increasing the gas gap width or the gas flow rate. By analyzing the optical emission spectrum scanning from 330 to 450 nm emitted from the direct-current glow discharge, the molecular vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 have been investigated as functions of the gas flow rate and gas gap width. Results indicate that both the vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 decrease with increasing the gas flow rate or the gas gap width. In addition, the molecular vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 have been investigated in spatial resolution along the direction of gas flow(plasma column axial), and give a qualitative analysis as well. It is found that the vibrational temperature and the average electron energy increase with increasing the distance from the hollow needle cathode. These results are important to the industrial applications of glow discharge.     

大气压脉冲调制射频氩气放电等离子体特性的数值研究

基于等离子体流体理论,建立了大气压脉冲调制射频氩气放电的一维流体模型。通过数值模拟的方 法研究了放电参数(放电电极间距、射频频率)对氩等离子体特性的影响。研究结果表明：当电压固定时,随着电 极间距的增加,等离子体区逐渐增大,最大电子密度也增加,在 0.20cm 达到最大值后略有降低;放电电流密度 与输入功率密度随着电极间距的增加而增加;鞘层区电子温度随着电极间距的增加而降低;在脉冲开启前期,等 离子体区电子温度随着电极间距的增加而增加,但当脉冲开启后期,电极间距对等离子体区电子温度影响较小。 不同射频频率下最大电子密度随电极间隙的增加而减小,也具有一个最优值。      

空气中空心阴极不同放电模式下的发光特性

为了进一步揭示空心阴极放电中放电模式的转换机制,特别是空心阴极放电过程中自脉冲的形成机理,利用柱型空心阴极放电结构,在空气环境下研究了放电处于不同模式时的发光特性。测量得到了不同放电模式下的伏安特性曲线、放电发光图像、自脉冲阶段的脉冲波形等。实验结果表明随着放电电流的增加放电分为汤生放电模式、自脉冲放电模式、正常辉光放电模式和反常辉光放电模式。虽然所用电源为直流电源,但在自脉冲放电阶段电流和电压随时间呈周期性变化。实验结果表明在不同的放电模式下具有不同的发光特性。在由汤生放电转换为自脉冲放电模式和由自脉冲模式转换为正常辉光放电模式过程中,放电腔的径向中心处和轴向孔口附近均存在光强的突变。实验同时在200～700 nm范围内测量得到了不同电流时的发射光谱。结果表明发射光谱主要集中在330～450 nm,主要包括氮分子的第二正带系(C3Π_u→B3Π_g )和氮分子离子的第一负带系（B2Σ+_u→X2Σ+_g）。其中氮分子离子第一负带系具有较强的发射光谱。由于B2Σ+_u激发电位较高,因此该谱带较强发射光谱的存在表明空心阴极放电较其他放电形式更容易获得高激发态粒子和高能量电子。在650～700 nm附近存在一弱的发光谱带,主要为氮分子的第一正带发射谱（B3Π_g→A3Σ+_u）。在此基础上根据双原子光谱发射理论,结合氮分子第二正带系的三组顺序组带：Δν=-1,-2和-3,利用玻尔兹曼斜率法计算得到了不同放电模式下氮气的分子振动温度。结果表明在实验电流范围内分子振动温度在3 300 K左右,随着电流的增加而升高,并且在自脉冲消失时存在一突变迅速增强。由于电子能量、电子密度与分子振动温度密切相关,因此该结果也表明随着放电电流的增加电子平均能量和电子密度不断增加,当脉冲消失时,电子平均能量和电子密度出现跃变升高。最后,对空心阴极放电中自脉冲的形成机理进行了讨论,结果表明自脉冲放电源于放电模式的转换。     

Generation of uniform atmospheric pressure argon glow plasma by dielectric barrier discharge

In this paper, atmospheric pressure glow discharges (APGD) in argon generated in parallel plate dielectric barrier discharge system is investigated by means of electrical and optical measurements. Using a high voltage (0–20 kV) power supply operating at 10–30 kHz, homogeneous and steady APGD has been observed between the electrodes with gap spacing from 0.5 mm to 2 mm and with a dielectric barrier of thickness 2 mm while argon gas is fed at a controlled flow rate of 1 l/min. The electron temperature and electron density of the plasma are determined by means of optical emission spectroscopy. Our results show that the electron density of the discharge obtained is of the order of 10¹⁶ cm^???3 while the electron temperature is estimated to be 0.65 eV. The important result is that electron density determined from the line intensity ratio method and stark broadening method are in very good agreement. The Lissajous figure is used to estimate the energy deposited to the glow discharge. It is found that the energy deposited to the discharge is in the range of 20 to 25 μJ with a discharge voltage of 1.85 kV. The energy deposited to the discharge is observed to be higher at smaller gas spacing. The glow discharge plasma is tested to be effective in reducing the hydrophobicity of polyethylene film significantly.     

Discharge Operation Mode Manipulation of Radio Frequency Atmospheric Pressure Glow Discharges in Argon

Stable operation of radio frequency atmospheric glow discharges is widely desired by most processing applications for their conveniency and feasibility, many of which have been addressed with the noble gas of helium and low discharge current density in stable operation regime of α mode. Here, the operation mode manipulation of rf atmospheric pressure glow discharge in argon is investigated using a one‐dimensional self‐consistent modeling approach. Stable operation regime of α mode is found to expand with rinsing excitation frequency and reducing discharge gap distance. The sheath characteristics in terms of sheath voltage and sheath thickness are given to explain the of α ‐γ mode transition. Furthermore, stable operation of discharge in γ mode is proposed tobe achieved by introducing dielectric barriers, which is indicated by monotonously growing of applied voltage with discharge current density (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

多针电晕增强大气压辉光放电稳定性研究

利用多针电晕增强放电装置，在无气流和存在高速气流的情况下都得到了稳定的大气压辉光.通过纪录发光图片、电流-电压波形和伏安特性曲线的方法对影响放电稳定性的因素做了细致地研究，发现了在从电晕放电到辉光放电的过程中存在着过渡阶段，表现为出现带有直流成分的Trichel脉冲.气流速度、极板间距以及针尖锥度和凹坑曲率半径的匹配程度都对放电的稳定性和电流密度有着重要的影响. 关键词： 大气压辉光放电 多针电晕 等离子体     

Investigation of the Early Multiplication Processes of the Glow Discharge Formation in Neon Filled Diode at 1.33 mbar Pressure

The results of the investigation of the glow discharge time and space development in the neon‐filled diode at 1.33 mbar are presented. The glow is of the diffusion type with saturation current value of 0.2 mA. The temporal development of the light intensity, emitted perpendicularly on the diode axis from many different parts of the diode, is registered. Using this temporal development, the spatial development of the emitted light is examined. Electrically registered (by the oscilloscope) the total current through the diode reaches the saturation for 1.5 ms, which corresponds to the classical presumption of the formative time delay. The prebreakdown current is registered measuring the emitted light from diode gap. The investigation of light shows the increase of excitation in the gap at least 3 ms before any significant current has been registered (I < 1 µA). The negative glow appears in the diode gap near the anode and in the next a few milliseconds covers the cathode indicating the presence of the multiplication processes in the diode. The stationary regime in the diode is established for about 10 ms. Using this detection method, three stages of the discharge formation can be easily distinguished. These results indicate that the prebreakdown processes in the diode gap can be associated with the first stage of the breakdown formation. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

间隙绝缘电极辉光放电实验观察

实验研究了ITER H2/He辉光放电壁处理(GDC)系统的电极合理的间隙绝缘参数及标定辉光过程中沉积在电极头部的热负载.进行了H2/He击穿电压特性试验,在ITER GDC预期的壁离子电流密度条件下研究了H2/He辉光放电电压和试验电极上热负荷与压强的关系、试验电极启辉耐受特性、试验电极温度与热负荷的关系以及在不同区...     

Streamers at the Subnanosecond Breakdown of Argon and Nitrogen in Nonuniform Electric Field at Both Polarities

An ICCD camera was used to study plasma glow at the stage of the streamer (ionization wave) formation in the tip–plane gap with a length of 3 mm filled with argon or nitrogen at a pressure of 12.5–400 kPa. Positive and negative nanosecond voltage pulses were applied across the gap. Images of streamer were obtained at different time at its propagation along the gap. A streak-camera equipped with a spectrometer was used to measure time evolution of the radiation intensity of nitrogen molecules at a wavelength of 337.1 nm in several regions along the gap at the negative polarity. Average streamer velocity (1.8 cm/ns) was estimated from experimental data at atmospheric pressure of nitrogen. Amplitude–time characteristics of voltage, discharge current and the current of runaway electron beam behind the aluminum-foil anode with a thickness of 10 μm were measured. Reasons for a diffuse discharge under the given experimental conditions were discussed.