多脉冲飞秒激光对锗材料的烧蚀效应

 开展了脉宽为40 fs的不同数量激光脉冲对锗材料的烧蚀效应实验,采用扫描电镜、激光共聚焦显微镜等方法对不同数量的飞秒激光脉冲作用下锗材料表面烧蚀区进行了检测,并对作用后材料烧蚀形貌演化规律进行了分析,初步分析了锗材料烧蚀区周围形成的不同环区的形貌特征及成因,对各环区烧蚀形貌特征随激光作用脉冲数的增加而产生的形貌演化过程进行了观测。并给出单脉冲飞秒激光对锗材料的烧蚀阈值为1.2 J·cm^-2,采用激光共聚焦显微镜测得该阈值条件下单个飞秒激光脉冲对锗材料的烧蚀深度约为150 nm。     

Effect of the laser fluence on structural and optical characterization of thin CdS films synthesized by femtosecond pulsed laser deposition

CdS thin films have been grown on Si(1 1 1) and quartz substrates using femtosecond pulsed laser deposition. X-ray diffraction, atomic force microscopy, photoluminescence measurement, and optical transmission spectroscopy were used to characterize the structure and optical properties of the deposited CdS thin films. The influence of the laser fluence (laser incident energy in the range 0.5–1.5 mJ/pulse) on the structural and optical characterizations of CdS thin films has been studied. The results indicate that the structure and optical properties of the CdS thin films can be improved as increasing the per pulse output energy of the femtosecond laser to 1.2 mJ. But when the per pulse output energy of the femtosecond laser is further increased to 1.5 mJ, which leads to the degradation of the structure and optical properties of the CdS thin films.     

ArF laser surface modification of polyethersulfone film: Effect of laser fluence in improving surface biocompatibility

ArF laser treatment of polyethersulfone (PES) films was performed to improve biocompatibility of surfaces. For this purpose, the threshold fluence for laser ablation of PES was obtained from experimental measurements and then samples were irradiated at 2 separate ranges of fluences, i.e. below and above the ablation threshold. In order to investigate the physico-chemical changes, the modified surfaces were characterized by attenuated total reflectance (ATR) infrared spectroscopy and contact-angle measurements. The biocompatibility of the treated samples in comparison to those untreated was examined in vitro using a platelet adhesion test. The number of adhered platelets was obtained using the lactate dehydrogenase (LDH) method. For surfaces irradiated below the ablation threshold, a high reduction in the number of the adhered platelets was observed; while this number increased in samples treated at the fluence above the ablation threshold. The change in platelet adhesion was attributed to the change in chemistry and roughness of the irradiated surfaces.     

多脉冲飞秒激光对锗材料的烧蚀效应

开展了脉宽为40 fs的不同数量激光脉冲对锗材料的烧蚀效应实验,采用扫描电镜、激光共聚焦显微镜等方法对不同数量的飞秒激光脉冲作用下锗材料表面烧蚀区进行了检测,并对作用后材料烧蚀形貌演化规律进行了分析,初步分析了锗材料烧蚀区周围形成的不同环区的形貌特征及成因,对各环区烧蚀形貌特征随激光作用脉冲数的增加而产生的形貌演化过程进行了观测。并给出单脉冲飞秒激光对锗材料的烧蚀阈值为1.2 J·cm-2,采用激光共聚焦显微镜测得该阈值条件下单个飞秒激光脉冲对锗材料的烧蚀深度约为150 nm。     

Morphology and composition on Al surface irradiated by femtosecond laser pulses

We study the surface chemicals and structures of aluminum plates irradiated by scanning femtosecond laser pulses in air for a wide range of laser fluence from 0.38 to 33.6 J/cm². X-ray photoelectron spectroscopy and X-ray diffraction analyses indicate clearly that crystalline anorthic Al(OH)₃ is formed under femtosecond laser pulse irradiation. Besides aluminum hydroxide, crystalline Al₂O₃ is also found in the samples irradiated at high laser fluence. Field emission scanning electron microscopy demonstrates that the surfaces of the samples irradiated with low laser fluence are colloidal-like and that nanoparticles with a few nanometers in size are embedded in glue-like substances. For high laser fluence irradiated samples, the surfaces are highly porous and covered by nanoparticles with uniform size of less than 20 nm.     

Structure formation on the surface of alloys irradiated by femtosecond laser pulses

Laser-induced periodic surface structures with different spatial characteristics have been observed after multiple linearly polarized femtosecond laser pulse (120 fs, 800 nm, 1 Hz to 1 kHz pulse repetition frequency) irradiation on alloys. With the increasing number of pulses, nanoripples, classical ripples and modulation ripples with a period close to half of classical ripples have all been induced. The generation of second-harmonic has been supposed to be the main mechanism in the formation of modulation ripples.     

Surface and structural investigations on laser irradiated P-type silicon

P-type silicon (100) is irradiated with Nd:YAG laser (532 nm, 500 mJ and 6–7 ns) in air at room temperature for two different laser incident angles 0° and 45° with the surface normal of the target for 10–50 laser shots with a step of 10 shots. The surface morphological changes of exposed samples are explored by making use of the scanning electron microscope. The variations in crystal structure and crystallinity along with laser annealing effects are examined by employing Raman spectroscopy. The thermal sputtering, hydrodynamic sputtering, exfoliation sputtering, whisker formation and bubble bursting are the salient features found on the irradiated surfaces. An increase in laser shots causes incremental changes in area of melted and heat-affected zones and Raman shifts.     

飞秒强激光场中的原子、分子——非微扰现象研究

文章简要回顾了飞秒强激光场中的原子、分子这一研究领域在近年来所取得的一系列里程碑式的重大发现,包括多光子电离、阈上电离、隧穿电离、越垒电离、非顺序双电离、电离稳定化、高次谐波发射等等非微扰现象.讨论了纯量子理论和纯经典方法在处理该类问题时经常遇到的困难.介绍了作者所在小组为此提出的半经典模型及其在解释强场物理现象时所取得的成果.最后对这一领域在未来几年内的可能发展方向作了简单的评述.     

飞秒双脉冲激光照射金属薄膜的热行为

通过双温方程对飞秒单脉冲与双脉冲照射金薄膜进行了计算模拟分析,得到了金靶的电子温度和晶格温度随着时间空间的变化。在同样激光能量密度下,单脉冲与双脉冲使得金膜温度的变化表明双脉冲使得更多的激光能量渗透到靶材内部,这些能量可以使得烧蚀深度更深,有利于提高激光烧蚀靶材的效率。计算结果显示随着激光能量密度的增加熔化面深度逐渐增加,单脉冲与双脉冲熔化面深度的变化明显不同。在激光能量密度高于损伤阈值附近,单脉冲的烧蚀深度大于双脉冲的烧蚀深度,随着激光能量密度增加,双脉冲的烧蚀深度将大于单脉冲的烧蚀深度。     

飞秒双脉冲激光照射金属薄膜的热行为

通过双温方程对飞秒单脉冲与双脉冲照射金薄膜进行了计算模拟分析,得到了金靶的电子温度和晶格温度随着时间空间的变化。在同样激光能量密度下,单脉冲与双脉冲使得金膜温度的变化表明双脉冲使得更多的激光能量渗透到靶材内部,这些能量可以使得烧蚀深度更深,有利于提高激光烧蚀靶材的效率。计算结果显示随着激光能量密度的增加熔化面深度逐渐增加,单脉冲与双脉冲熔化面深度的变化明显不同。在激光能量密度高于损伤阈值附近,单脉冲的烧蚀深度大于双脉冲的烧蚀深度,随着激光能量密度增加,双脉冲的烧蚀深度将大于单脉冲的烧蚀深度。     

Effect of pulse width and fluence of femtosecond laser on the size of nanobump array

Conical nanobump arrays were generated on gold thin film processed by interfering femtosecond laser. The transition of the height and diameter as functions of fluence and pulse width was investigated. When the fluence was 87 mJ/cm², the height and diameter were not so different at 350 fs or shorter pulse width. They decreased at longer pulse width, and no bump could be generated over 1.6 ps. The results suggest the decrease of size is due to the diffusion of electron to not-excited region, and due to heat conduction to not heated region or substrate, or change of absorbance of laser. At long pulse width of 2.4 ps and relatively higher fluence of 190 mJ/cm², nanobump had liquid-like structure as a stop motion of a water drop.     

Effect of scanning resolution and fluence fluctuation on femtosecond laser ablation of thin films

Femtosecond-pulse laser pulses have been shown to hold great potential for high-precision micromachining. Much research has been done to characterize the laser parameters for predicting the feature size, and the most important of these is the number of pulses incident at each point of ablation. Theoretical modeling, so far, has been restricted to a single point where the number of pulses incident at each point of ablation depends on the pulse-repetition rate and the dwell time of the laser beam at that machining point. However, to make the theoretical model useful, a laser scanning system with the ability to fabricate complex microfeatures is considered in this work. In this case, the scanning resolution determines the number of pulses incident at each scanning point. This has been taken into account while presenting a theoretical and experimental analysis of the effect of the scanning resolution on the threshold fluence of the material. Results of ablation on a gold thin film were subjected to theoretical analysis to predict the feature size. In addition, the effect of the energy fluctuation of the laser on the feature size has been evaluated to predict the minimum achievable feature size for a gold thin film. PACS 42.65; 61.80     

Thermal behavior of thin metal films irradiated by shaped femtosecond pulse sequences laser

A numerical solution of the two-temperature model has been performed up to the shaped femtosecond pulse sequences heated metal target. The two-temperature model is used to analyze the shaped femtosecond pulse sequences with the following major conclusions. We confirm the distinctly different results on the different shaped femtosecond pulse sequences. As the number of shaped femtosecond pulses increases, the nonequilibrium state between electrons and phonons gradually disappears, the highest transient electron temperature is lowered and the thermolization time is prolonged, the electron heat conductivity remains higher because of the effect of incubation on the electron temperature, which preserves the advantages of ultrashort lasers. The shaped femtosecond pulse sequences can increase the efficiency in ablation and micromachining.     

飞秒激光烧蚀LiNbO3晶体的形貌特征与机理研究

采用了不同能量的单脉冲和多脉冲飞秒激光对LiNbO₃晶体进行烧蚀，并刻蚀了表面衍射型光栅.通过扫描电镜和原子力显微镜观察了烧蚀点的形貌特征，首次发现利用单束飞秒激光脉冲对LiNbO₃晶体烧蚀，可以得到超衍射极限的烧蚀点，当聚焦光斑直径约为2μm、能量为170nJ的单脉冲飞秒激光作用时，烧蚀点的直径约为400nm，100nJ，17个脉冲作用时烧蚀点的直径约为800nm.同时可以观察到在能量较低的多脉冲飞秒激光作用下， LiNbO₃晶体呈现出大约200nm周期性分布的波纹状结构.实验结果表明，选择合适参数的飞秒激光脉冲可以对LiNbO₃晶体进行超衍射极限加工，这对于利用飞秒激光制作LiNbO₃基质的微纳光电子器件有十分重要的意义.     

两种纤维增强复合材料连续激光烧蚀阈值测量及吸收特性分析

 通过双积分球-光电管测试系统和摄像记录的方法,对芳纶纤维/环氧和碳纤维/环氧两种复合材料在1.319 μm连续激光作用下的烧蚀阈值和烧蚀过程中材料对激光能量的吸收特性进行了实验研究。结果表明：芳纶纤维/环氧复合材料的平均烧蚀阈值随材料厚度增加而降低,碳纤维/环氧复合材料的平均烧蚀阈值不受材料厚度影响,约为70 W/cm²;两种纤维增强复合材料烧蚀前的反射率随激光功率增加而缓慢增大,芳纶纤维/环氧材料从0.40变化到0.45,碳纤维/环氧材料从0.15变化到0.20;当发生烧蚀时,芳纶纤维/环氧材料的反射率急剧下降,吸收率增大,碳纤维/环氧材料的反射率无明显变化,吸收率约为0.80。     

低阈值掺钛蓝宝石激光器实验研究

结合特殊的谐振腔设计和半导体可饱和吸收镜，建成了一台低阈值的自启动掺钛宝石激光器 . 分别用3％和12％的输出耦合镜，获得了阈值低至390mW和600mW的稳定锁模脉冲输出. 采 用12％输出耦合镜，在12W抽运时，输出平均功率为114mW，对应的典型脉宽为17fs，谱宽 为47nm. 相对于以往的低阈值克尔透镜锁模激光器，锁模工作的范围区域加宽，减小了操作 难度，提高了稳定性. 关键词： 低阈值 半导体可饱和吸收镜 克尔透镜锁模 掺钛蓝宝石激光器     

飞秒多脉冲激光烧蚀金属过程中的能量剩余现象

提出了描述整个飞秒多脉冲激光烧蚀过程的物理模型,模型考虑了多脉冲烧蚀的新的特点,考虑靶材吸收率随温度的变化和蒸发效应,建立了激光烧蚀不同阶段的热传导方程,给出了相应的定解条件。以金靶材为例,利用有限差分法,求解了热传导动力学方程,分别给出单脉冲和多脉冲作用下相应的靶材电子和离子亚系统的温度演化图像,及多脉冲激光作用下能量剩余系数和脉冲个数的变化规律,发现理论曲线与相应的实验数据吻合较好。研究结果充分证明多脉冲激光烧蚀过程中剩余能量的存在。     

Direct femtosecond laser surface nano/microstructuring and its applications

This paper reviews a new field of direct femtosecond laser surface nano/microstructuring and its applications. Over the past few years, direct femtosecond laser surface processing has distinguished itself from other conventional laser ablation methods and become one of the best ways to create surface structures at nano‐ and micro‐scales on metals and semiconductors due to its flexibility, simplicity, and controllability in creating various types of nano/microstructures that are suitable for a wide range of applications. Significant advancements were made recently in applying this technique to altering optical properties of metals and semiconductors. As a result, highly absorptive metals and semiconductors were created, dubbed as the “black metals” and “black silicon”. Furthermore, various colors other than black have been created through structural coloring on metals. Direct femtosecond laser processing is also capable of producing novel materials with wetting properties ranging from superhydrophilic to superhydrophobic. In the extreme case, superwicking materials were created that can make liquids run vertically uphill against the gravity over an extended surface area. Though impressive scientific achievements have been made so far, direct femtosecond laser processing is still a young research field and many exciting findings are expected to emerge on its horizon.