SIMS/XPS characterization of surface layers formed in 3 mass% Si‐steel by annealing in oxygen at low partial pressure

Selective oxidation in silicon steel shows several interesting phenomena, such as the formation of an internal oxidation zone that depends on the oxidation conditions and the steel composition. In this work, SIMS and XPS were used for characterizing the formation processes of surface layers formed during selective oxidation of a typical silicon steel. The starting material is a secondary‐recrystallized 3 mass% Si‐steel sheet with a surface orientation of (011). Sample sheets were annealed at a temperature of 948–1023 K under an atmosphere with a low partial pressure of oxygen. The SIMS depth profiles show that the internal oxidation zone thickens and an iron‐rich layer that formed on the internal oxidation zone expands as the annealing temperature increases. Manganese and chromium levels increase outside the internal oxidation zone, whereas tin exists in the internal oxidation zone. The XPS results of the sample surface show that silicon and manganese levels increase on the sample surface to form oxides, and the chemical composition and state of these elements depend on the annealing temperature. In addition, tin increases on the surface of a relatively thick iron‐rich layer that formed on the internal oxidation layer. These experimental results are discussed on the basis of the thermodynamic characteristics of the elements. Copyright © 2003 John Wiley & Sons, Ltd.     

Investigation of the formation and properties of protective oxide layers on high purity chromium with SIMS imaging techniques

Spallation of the protective oxide layer formed during hot gas oxidation is the main reason for the corrosion of high purity powder metallurgically produced chromium[1]. To explain the formation and occasional spallation of the oxide layer a chromium sample subjected to two consecutive oxidation processes in¹⁶O and¹⁸O atmosphere at high temperature was characterised by 2D and 3D SIMS.The formation of the protective oxide can be described by the diffusion of chromium from the bulk to the surface and the reaction of the chromium atoms with the oxygen from the gaseous phase. The very low solubility of nitrogen in chromium oxide indicates its inability to diffuse through the growing oxide layer and explains the enrichment of nitrogen (same mechanism applies for chlorine) in the interface metal/oxide. The accumulation of trace elements within the interface during the oxidation process explains the reduced adhesion power of the passivation layer and its spallation.Dedicated to Professor Dr. rer. nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthday     

Investigation of metallic interdiffusion in Al x Ga1−x N/GaN/sapphire heterostructures used for microelectronic devices by SEM/EDX and SIMS depth profiling

Secondary ion mass spectrometry (SIMS) depth profiling has been applied to the study of the thermal annealing of ohmic contacts for high electron mobility transistors. The metallic stacks (Ti/Al/Ni/Au) were deposited over the Al_0.28Ga_0.72N/GaN/sapphire heterostructures and subjected to a rapid thermal annealing (850 °C for 30 s under N₂ atmosphere) to improve the contact performance. The surface morphology and the in-depth chemical distribution of the layered contacts were severely modified due to the treatment. These modifications have been analyzed by SIMS depth profiling and scanning electron microscopy–energy-dispersive X-ray microanalysis. The SIMS analysis conditions have been optimized to achieve simultaneously good sensitivity and to avoid ion-induced mixing effects produced by the primary beam sputtering.     

Investigation of the synthesis and internal structure of protective oxide layers on high-purity chromium with SIMS scanning techniques

The major problem affecting the application of chromium in high temperature processes is the ongoing spallation of the protective oxide layer formed during hot-gas oxidation. This results in a continuous material erosion. To gain a deeper insight in the spallation and oxidation process, a high-purity powder-metallurgically produced chromium sample was submitted to a two-stage hot gas oxidation process. The formed oxide layers were investigated by 3D SIMS and scanning SIMS. The formation of the protective oxide layer is carried by the diffusion of chromium from the bulk through the already existing oxide layer and the reaction of the diffused chromium with the oxygen from the gaseous phase. In parallel to the growing of the oxide layer, an accumulation of impurities at the interface oxide layer – bulk can be observed. The enrichment of trace elements at the interface level (for the investigated sample Cl and N) can be explained by the low solubility of these elements in chromium oxide and therefore their inability to diffuse through the already formed protective layer. Received: 24 June 1996 / Revised: 22 January 1997 / Accepted: 26 January 1997     

Ultrasound‐assisted oxidation of tungsten in oxygen plasma: the early stages of the oxide film growth

The effect of ultrasonic vibrations applied in situ on the formation of W–WO interface during the exposure of a pure tungsten foil to a low‐temperature oxygen plasma is investigated by photoelectron spectroscopy (XPS) and time‐of‐flight secondary ion mass spectrometry (TOF‐SIMS). The tungsten surface was exposed to oxygen plasma at different time intervals and the evolution of the interface formation was studied by angle‐resolved XPS. We show that oxidation without ultrasonic vibrations leads to the formation of a thin oxide film whose growth kinetics is governed by an island growth mechanism. On the other hand, oxide growth in the presence of ultrasonic treatment (UST) appears to follow a layer‐by‐layer growth mode with a distinctly sharper W–WO interface. TOF‐SIMS analysis in this case revealed a reduced amount of water bonded in the film, which suggests an increase in the film's packing density. Copyright © 2006 John Wiley & Sons, Ltd.     

Oxidation, Diffusion and Segregation in CuNi(Mn) Films Studied by AES

 The surface and in-depth compositions of sputter-deposited Cu_0.57Ni_0.42Mn_0.01 thin films were studied by Auger electron depth profiling after thermal treatment. The samples were thermally cycled to maximum temperatures of 300 °C to 550 °C in air, argon and forming gas (N₂, 5 vol. % H₂). Linear least-squares fit to standard spectra and factor analysis were applied to separate the overlapping Auger transitions of Cu and Ni. Under bombardment by 4 keV argon ions, CuNi(Mn) layers display bombardment-induced surface enrichment of Ni in the same extent as binary CuNi alloys. At sufficiently high oxygen partial pressures, a duplex oxide layer is formed and a thick surface copper oxide overgrows the initial nickel oxide. In reducing atmosphere selective oxidation of manganese takes place. A capping NiCr layer prevents CuNi(Mn) from being oxidized, but the film configuration is degraded with increasing annealing temperature due to formation of a surface chromium oxide and diffusion of Ni from the CuNi(Mn) layer into the NiCr/CuNi(Mn) interface.     

Effects of thermal treatment on hydrophilicity and corrosion resistance of Ti surface

Surface treatment of titanium (Ti) surface has been extensively studied to improve its properties for biomedical applications, including hydrophilicity, corrosion resistance, and tissue integration. In this present work, we present the effects of thermal oxidation as surface modification method on metallic titanium (Ti). The Ti foils were oxidized at 300°C, 400°C, 500°C, and 600°C under air atmosphere for 3 hours, which formed oxide layer on Ti surface. The physicochemical properties including surface chemistry, roughness, and thickness of the oxide layer were evaluated in order to investigate how these factors affected surface hydrophilicity, microhardness, and corrosion resistance properties of the Ti surface. The results revealed that surfaces of all oxidized samples were modified by formation of titanium dioxide layer, of which morphology, phase, and thickness were changed according to the oxidized temperatures. Increasing oxidation temperature led to the formation of thicker oxide layer and phase transformation of anatase to rutile. The presence of the oxide layer helped the improvement of corrosion resistance and microhardness. The most improvement in surface roughness was found in the specimens treated at 400°C, which significantly improved surface hydrophilicity. But both surface roughness and hydrophilicity reduced when oxidized at 500°C and 600°C, suggesting that hydrophilicity was dominated by the surface roughness. In addition, this surface treatment did not reduce the biocompatibility of the metallic Ti substrates against murine osteoblasts (MC3T3).     

Analysis of corrosion layers on protective coatings and high temperature materials in simulated service environments of modern power plants using SNMS,SIMS, SEM,TEM, RBS and X-ray diffraction studies

In three different examples, the effects of the oxidation behaviour as well as the microstructural stability of high temperature materials and protective coatings was determined by combining the results of kinetic studies with extensive analytical investigations using, among other techniques, SNMS, SIMS, SEM, TEM, Rutherford back scattering (RBS) as well as X-ray diffraction. 1). The effect of water vapour on the oxidation behaviour of 9% Cr steels in simulated combustion gases has been determined. The effects of O2 and H2O content on the oxidation behaviour of 9% Cr steel in the temperature range 600-800 degrees C showed that in dry oxygen a protective scale was formed with an oxidation rate controlled by diffusion in the protective scale. In the presence of water vapour, after an incubation period, the scales became non-protective as a result of a change in the oxidation limiting process. The destruction of the protective scale by water vapour does not only depend on H2O content but also on the H2O/O2-ratio. 2). The increase of component surface temperature in modern gas turbines leads to an enhanced oxidation attack of the blade coating. Improvements in corrosion resistance and longer lifetime thermal barrier coatings in gas turbines have been achieved by improvement of the high temperature properties of MCrAlY coatings by additions of minor alloying elements such as yttrium, silicon and titanium. 3). The use of oxide dispersion strengthened (ODS) alloys provides excellent creep resistance up to much higher temperatures than can be achieved with conventional wrought or cast alloys in combination with suitable high temperature oxidation/corrosion resistance. Investigation of the growth mechanisms of protective chromia and alumina scales were examined by a two-stage oxidation method with 18O tracer. The distribution of the oxygen isotopes in the oxide scale was determined by SIMS and SNMS. The results show the positive influence of a Y2O3 dispersion on the oxidation resistance of the ODS alloys and its effect on growth mechanisms.     

Time‐of‐flight secondary ion mass spectroscopic characterization of the nitrogen profile of shallow gate oxynitride thermally grown on a silicon substrate

Silicon oxynitride has been used as a shallow gate oxide material for microelectronics and its thickness has been reduced over the years to only a few tens of angstroms due to device size scaling. The nitride distribution and density characteristic in the gate oxide thus becomes imperative for the devices. The shallow depth profiling capability using time‐of‐flight secondary ion mass spectrometry (TOF‐SIMS) has huge potential for the nitrogen characterization of the shallow gate oxide film. In this article, both positive and negative spectra of TOF‐SIMS on silicon oxynitride have been extensively studied and it was found that the silicon nitride clusters Si_xN^? (x = 1–4) are able to represent the nitrogen profiles because their ion yields are high enough, especially for the low‐level nitride doping in the oxide, which is formed by the annealing of nitric oxide on SiO₂/Si. The gate oxide thickness measured by the TOF‐SIMS profiling method using ¹⁸O or CsO profile calibration was found to correlate very well with transmission electron microscope measurement. The nitrogen concentration in the gate oxide measured using the TOF‐SIMS method was consistent with the results obtained using the dynamic SIMS method, which is currently applied to relatively thicker oxynitride films. Copyright © 2012 John Wiley & Sons, Ltd.     

The Role of Active Oxygen Transfer through the Gas Phase in Propylene Oxidation over a Bismuth–Molybdenum Catalyst

The transfer of atomic oxygen from the surface of bismuth oxide onto molybdenum oxide through the gas phase, including the case when ozone was fed to the catalyst bed, is experimentally studied. It is found that the transfer of atomic oxygen through the gas phase only leads to the formation of the products of complete oxidation of propylene under conditions of heterogeneous propylene oxidation on the mixture of molybdenum and bismuth oxides. No new sites are formed on the surface of molybdenum oxide.     

ToF‐SIMS studies of the oxidation of Fe by D2O vapour: comparison with XPS

The oxidation of iron (Fe) by water (D₂O) vapour at low pressures and room temperature was investigated using time‐of‐flight (ToF) SIMS. The results supported those found previously using XPS and the QUASES^? program in that a duplex oxide structure was found containing a thin outer surface hydroxide (Fe(OD)₂) layer over an inner oxide (FeO) layer. The extraordinary depth resolution of the ToF‐SIMS profiles assisted in identifying the two phases; this resolution was achieved by compensation for surface roughness. A substantial concentration of deuterium was found in the subsurface oxide layer. This observation confirmed previous assessments that the formation of FeO was from the reaction of Fe(OD)₂ with outward‐diffusing Fe, leaving deuterium as a reaction product. Copyright © 2005 John Wiley & Sons, Ltd.     

SIMS investigations on the growth mechanisms of protective chromia and alumina surface scales

The oxidation behaviour of the oxide-dispersion strengthened (ODS) high-temperature alloys MA 956 (an aluminium oxide former) and MA 754 (a chromium oxide former) has been compared with that of two model alloys, Fe-20Cr-5Al and Ni-25Cr. The morphology and composition of the oxide scales were investigated by metallography, X-ray diffraction analysis and scanning electron microscopy. For analysis of the oxide layer growth mechanisms, twostage oxidation experiments with¹⁸O as tracer were used, the distribution of the oxygen isotopes in the oxide scale being determined by SIMS. The ODS alloys show a more selective oxidation than the two model alloys; moreover, the protective oxides on the ODS alloys have a lower growth rate and better adhesion than those on the two model alloys. From the SIMS investigations it can be deduced that the improved properties of the layers on the ODS alloys result from a change in the transport processes in the protective layer; whereas the aluminium and chromium oxide films on the conventional alloys grow by cation and anion transport, the scales on the ODS alloys grow almost exclusively by anion transport. It is shown that the observed properties of the oxide scales on the ODS alloys can be explained by this change in transport mechanism.Dedicated to Professor Günther Tölg on the occasion of his 60th birthday     

Secondary ion mass spectrometry and X-ray photoelectron spectroscopy investigation on chemical vapor deposited CeO(2-)ZrO(2)-TiO(2) thin films

Mixed CeO(2)-ZrO(2) systems have attracted widespread interest for their use in three-way catalyst (TWC) technology for automotive exhaust conversion to non-toxic products. In this work, CeO(2)-ZrO(2) thin films were deposited, via chemical vapor deposition, in order to obtain nanoscale materials with a high surface-to-volume ratio, with precise control of system properties. The addition of TiO(2) as buffer layer was also investigated. Cordierite was chosen as substrate, being the usual refractory material for catalytic mufflers. The multilayers were characterized by scanning electron microscopy, X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS). In particular, the combination of SIMS and XPS allowed us to investigate both surface and in-depth chemical composition, studying also film-intermixing phenomena induced by annealing processes.     

Investigation of oxide films on ferritic stainless steel

Summary While annealing cold-rolled strip of ferritic stainless steel in protective atmosphere oxide films may form on the surface. These parts of strip are defective material because of their deteriorated workability and appearance. For detailed investigation of the structure of the oxide layers concerning chemical composition and thickness, they were analysed by SNMS, SEM, and chemical methods.The oxide layers which look yellowish, brown, blue or grey (annealing colours) have a max. thickness of 0.4 m. They consist of oxides of Cr, Mn, Si and Ti. Thickness, chemical composition, colour and the sequence of different oxides in the layer depend on annealing time, annealing temperature and the oxidation potential of the protective atmosphere.     

XPS and ToF‐SIMS characterization of a Finemet surface: effect of cooling

The surface composition of amorphous Finemet, Fe₇₃Si_15.8B_7.2Cu₁Nb₃, was studied by X‐ray photoelectron spectroscopy (XPS) and time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS). The as‐received sample in the original state and after Ar⁺ sputter‐cleaning was analyzed at room temperature as well as after cooling to ? 155 °C. In the cooled state, the surface oxide layer composed of oxides of the alloy constituents was found to become enriched with elemental iron and depleted of elemental silicon, boron, oxygen and carbon as compared to the state at room temperature. Interaction of residual water vapor and hydrogen with the complex oxide layer occurring at low temperatures is believed to be responsible for the enhanced formation of surface hydroxides of the alloy constituents. The processes resulting in the observed redistribution of the elements on the surface of Finemet at low temperatures are discussed. Copyright © 2006 John Wiley & Sons, Ltd.     

The detection of oxygen in magneto-optical layers with SIMS

The detection of oxygen in magneto-optical layers is of fundamental importance for the characterization of the stability of RE-TM material. The magnetic properties are directly influenced by oxide formation. Oxygen depth profiles are carried out by using the SIMS technique. A comparison with magnetic measurements showed a clear conformity. We were able to study the oxidation behaviour of various layers at room temperature and at higher values up to 250° C for several hours. It could be shown that aluminum is a successful material for the protection of RE-films against oxidation. The difficulties of translating SIMS counting rates into concentration values were overcome by using EPMA. Specially prepared reference samples were measured by this technique and could then be used as standard samples for SIMS.     

Investigation into the surface selective oxidation of dual‐phase steels by XPS,SAM and SIMS

Surface selective oxides created during continuous annealing (MnO, SiO₂, etc.) can have a deleterious effect on coating adhesion after hot‐dip galvanizing. Earlier research works have made it clear that increasing the annealing atmosphere oxidizing potential can alleviate the problem by reducing external surface selective oxidation. In the present study, increasing the water vapour content of the nitrogen–hydrogen protective gas mixture was used to raise its oxidizing potential. The technique was applied to a classical dual‐phase steel (0.15% C, 1.5% Mn, 0.45% Si, 0.05% Al…) that was annealed for 60 s at 800–810°C in protective atmospheres of nitrogen and 5% hydrogen with water vapour contents ranging from 10 to 6000 ppm. Post‐annealing surfaces were characterized by x‐ray photoelectron spectroscopy (XPS), secondary ion mass spectroscopy (SIMS) and scanning Auger microscopy (SAM). In situ XPS analyses were carried out right after simulation annealing in the preparation chamber connected to the spectrometer, never returning the specimens to air. This made it possible to identify in a reliable way the elements that segregated to the surface during the treatment, and to determine their corresponding oxidation states. On the other hand, the high sensitivity of SIMS was taken advantage of to assess oxide in‐depth concentration profiles (SiO₂, Al₂O₃, FeO) as a function of the annealing conditions, and SAM was used to characterize the corresponding oxide particle morphology. External selective oxidation was thus shown to decrease with increasing water vapour contents in the atmosphere (from 80 to 6000 ppm), whereas internal oxidation increases drastically to ～4 μm below the free surface. At 10 ppm of H₂O the oxygen partial pressure is very low and the external selective oxidation results in a thin, but almost complete, coverage of the steel surface. Consequently, metallic iron cannot be observed at the surface, thus hampering hot‐dip galvanizability, unless the water vapour content is raised to 6000 ppm. Various surface morphologies were observed and discussed. In the authors' opinion, basic investigations of this type are an indispensable first step to improving the response of highly alloyed steels (dual‐phase, TRIP) to hot‐dip galvanizing. Copyright © 2003 John Wiley & Sons, Ltd.     

ToF‐SIMS characterization of glyoxal surface oxidation products by hydrogen peroxide: A comparison between dry and liquid samples

As one of the simplest volatile organic compounds, glyoxal and its oxidation products were considered to be important precursors to aqueous secondary organic aerosol formation. Herein, we analyzed products from glyoxal oxidation by hydrogen peroxide in dry and liquid samples using time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS). ToF‐SIMS spectra and spectral principal component analysis (PCA) were used to investigate surface oxidation products. Dry samples were prepared on clean silicon wafers. Liquid samples consisting of glyoxal and hydrogen peroxide (H₂O₂) were introduced to a vacuum compatible microfluidic reactor prior to UV illumination or dark aging followed by in situ liquid SIMS analysis. A number of reaction products were observed in both dry and liquid samples; different oligomers and carboxylic acids could be formed depending on reaction conditions. In addition, hydrolyzed products were observed in the liquid samples, but not in the dry samples. Although dry samples reveal some products of the aqueous process, they are not fully representative as results from those of the aqueous samples. Our findings suggest that the ability to characterize the liquid surface reaction products provides more realistic information of the reaction products associated with aqueous secondary organic aerosol formation in the atmosphere. Meanwhile, the high mass resolution spectra from the dry sample SIMS measurement are helpful to identify oxidation products in the liquid samples.     

Effect of CO on surface oxidation of uranium metal

The surface reactions of uranium metal with carbon monoxide at 25 and 200 °C have been studied by X-ray photoelectron spectroscopy (XPS); respectively. Adsorption of carbon monoxide on the surface layer of uranium metal leads to partial reduction of surface oxide and results in U4f photoelectron peak shifting to the lower binding energy. The content of oxygen in the surface oxide is decreased and O1s/O4f ratio decreases with increasing the exposure of carbon monoxide. The investigation indicates the surface layer of uranium metal has resistance to further oxidation in the atmosphere of carbon monoxide.     

Effects of AP-CITROX Decontamination Procedure on the Surface Oxide Layer Composition of Stainless Steel Originating from the Primary Circuit of a VVER-Type Nuclear Reactor

A real specimen originating from the primary circuit of a VVER-440 type pressurized water cooled nuclear reactor has been studied by Conversion Electron Mössbauer Spectroscopy (CEMS) in order to find out how the AP-CITROX decontamination procedure modifies the structure and composition of the surface oxide layer of stainless steel which is used in the steam generator. Other methods like voltammetry, gravimetry, and SEM-EDAX were also applied to characterize the samples and to help the interpretation of CEMS results. It was found that, in contradiction with expectations, the presence of the surface magnetite layer could not be convincingly identified even on the non-decontaminated sample. This finding together with the relatively weak Mössbauer signals indicated that the surface oxide layer is strongly Fe-depleted. It was also concluded that the upper layer of the bulk steel (under the oxide layer) has an altered composition probably due to irradiation-enhanced diffusion of the metallic constituents. It was established that the AP-CITROX decontamination procedure does not exert detrimental effects on the thickness and composition of the surface oxide layer.