Applications of total reflection X-ray fluorescence spectrometry in trace element and surface analysis

Total reflection X-ray fluorescence spectrometry (TXRF) is presented as a genuine surface analytical technique. Its low information depth is shown to be the characteristic feature differentiating it from other energy dispersive X-ray fluorescence methods used for layer and surface analysis. The surface sensitivity of TXRF and its analytical capability together with the limitations of the technique are discussed here using typical applications including the contamination control of silicon wafers, thin layer analysis and trace element determination. For buried interfaces and implantation depth profiles in silicon a combination of TXRF and other techniques has been applied successfully. The TXRF method has the particular advantage of being calibrated without the need for standards. This feature is demonstrated for the example of the element arsenic.     

Total-reflection X-ray fluorescence: An alternative tool for the analysis of magnetic ferrofluids

This work presents the first application of the total-reflection X-ray fluorescence (TXRF) to the compositional study of magnetic ferrofluids. With the aims of validating the best analytical conditions and also, limitations of the TXRF in the compositional study of these materials, an alternative empirical method, based in the use of angle-dependence TXRF (AD-TXRF) measurements, is proposed. Three kinds of ferromagnetic nanoparticles, with different morphologies, have been studied. The techniques of inductively coupled plasma mass spectrometry (ICP-MS) and inductively coupled plasma optical emission spectroscopy (ICP-OES) have been used to validate the TXRF results. In contrast with the plasma techniques, the developed TXRF procedure need not of previous chemical acid digestion. Additionally, two procedures of magnetic nanoparticles synthesis, co-precipitation and laser-pyrolysis, have been checked for the contaminants trace metals Zn, Mn and Cr. It has been found that the method of laser-pyrolysis produces nanoparticles of higher purity.     

Metal content in mosses from the Metropolitan Area of the Toluca Valley: a comparative study between inductively coupled plasma optical emission spectrometry (ICP-OES) and total reflection X-ray fluorescence spectrometry (TXRF)

The comparison between inductively coupled plasma optical emission spectrometry (ICP-OES) and total reflection X-ray fluorescence spectrometry (TXRF) for simultaneous determination of metal content (Cr, Cu, Fe, Mn, Pb and Zn) in mosses from the Metropolitan Area of the Toluca Valley was performed. Epiphytic mosses (Fabriona ciliaris and Leskea angustata) were collected in two sampling campaigns and were digested with HNO₃, HCl and HF for ICP-OES method and HNO₃ and HCl for TXRF method. The certified reference material (IAEA-336, Lichen) and the Standard Reference Material (SRM-1573, tomato leaves) were used for the quality control and to evaluate trueness and precision. Linearity, detection and quantification limits were also determined. Results show an ICP-OES and TXRF trueness mean of 101 ± 5% and 97 ± 9%, respectively; the relative standard deviation (RSD percent) was less than 17% in both methods. The moss samples exhibit a satisfactory precision (RSD ≤ 20%), because the RSD percent for ICP-OES, from 2% to 15%, and that for TXRF, from 1% to 17%, were obtained. One factor experimental design and simple regression analysis (α = 0.05) were used to compare the ICP-OES and TXRF metal concentrations. The statistical results do not show significantly different values for Cu, Mn, Pb and Zn in both the sample campaigns. In addition, the average results for Cr in the first sample campaign (30.3 ± 11.4 mg/kg for ICP-OES and 18.6 ± 9.8 mg/kg for TXRF) and Fe values in the second sample campaign (10,810 ± 2980 mg/kg for ICP-OES and 8380 ± 2350 mg/kg for TXRF) were significantly different in both methods. These differences are attributed to an incomplete sample digestion in the TXRF sample preparation. The results of the simple regression analyses show p-value less than 0.05, which indicates an equivalent and significant relation between ICP-OES and TXRF.     

Research and Applications of Total Reflection X-ray Fluorescence Analyzer

Total reflection x-ray fluorescence (TXRF) is a fairly new element analysis method. The TXRF, due to using of total reflection, reduces greatly detection limits and thus places in a leading position in area of atomic spectroscopy. Comparing with AAS, ICP-OES,ICP-MS, NAA, SRXRF and PIXE, TXRF offers superiority combined in low detection limit, small sample mass,multielement simultaneous and non-destructive analysis,greater convenience and low cost.     

Performance of total reflection and grazing emission X-ray fluorescence spectrometry for the determination of trace metals in drinking water in relation to other analytical techniques

An intercomparison survey has been carried out in order to evaluate the performance of two related X-ray fluorescence techniques as compared to the achievements of several other analytical techniques applied for trace elements determination in drinking water. A relatively new technique, total reflection X-ray fluorescence (TXRF) and a novel related technique, grazing emission X-ray fluorescence (GEXRF) have been used for the analysis of a mineral water sample. The concentrations of the following elements have been determined: Na, Mg, K, Ca, Ni, Cu, Zn and Sr. The mineral water sample has also been analyzed by a number of other analytical techniques, routinely utilized in drinking water quality control. The analyses were performed in eleven laboratories which reported 286 individual determinations producing 75 laboratory means. From the obtained results, it can be concluded that the TXRF technique is suitable for a direct determination of heavy elements in drinking water (above potassium, Z = 19). This technique can compete with other analytical techniques routinely used in water quality monitoring. First results obtained with GEXRF spectrometry show that this technique can be successfully applied for the determination of low-Z elements in drinking water. However, results for sodium and magnesium were systematically too low, indicating that modifications of the quantification procedure may be required to improve the accuracy of determination for these light elements.     

Performance of total reflection and grazing emission X-ray fluorescence spectrometry for the determination of trace metals in drinking water in relation to other analytical techniques

An intercomparison survey has been carried out in order to evaluate the performance of two related X-ray fluorescence techniques as compared to the achievements of several other analytical techniques applied for trace elements determination in drinking water. A relatively new technique, total reflection X-ray fluorescence (TXRF) and a novel related technique, grazing emission X-ray fluorescence (GEXRF) have been used for the analysis of a mineral water sample. The concentrations of the following elements have been determined: Na, Mg, K, Ca, Ni, Cu, Zn and Sr. The mineral water sample has also been analyzed by a number of other analytical techniques, routinely utilized in drinking water quality control. The analyses were performed in eleven laboratories which reported 286 individual determinations producing 75 laboratory means. From the obtained results, it can be concluded that the TXRF technique is suitable for a direct determination of heavy elements in drinking water (above potassium, Z = 19). This technique can compete with other analytical techniques routinely used in water quality monitoring. First results obtained with GEXRF spectrometry show that this technique can be successfully applied for the determination of low-Z elements in drinking water. However, results for sodium and magnesium were systematically too low, indicating that modifications of the quantification procedure may be required to improve the accuracy of determination for these light elements. Received: 5 January 1998 / Revised: 17 February 1998 / Accepted: 18 February 1998     

Optimization of the quantitative direct solid total-reflection X-ray fluorescence analysis of glass microspheres functionalized with Zr organometallic compounds

Quantitative determination of Zr in the system constituted by quartz microspheres functionalized with two kinds of organometallic compounds has been studied due to the importance of the correct quantization of the Zr from a catalytic point of view. Two parallel approximations were done, i.e. acid leaching and direct solid quantization. To validate the acid leaching TXRF measures, ICP-MS analysis were carried out. The results obtained by means of the optimization of the quantitative direct solid procedure show that, with a previous particle size distribution modification, TXRF obtain the same analytical results as ICP-MS and TXRF by acid leaching way but without previous chemical acid manipulation. This fact implies an important improvement for the analysis time, reagents costs and analysis facility and it proves again the versatility of TXRF to solve analytical problems in an easy, quick and accurate way. Additionally and for the direct solid TXRF measurements, a deeper study was done to evaluate the intrinsic analytical parameters of the Zr TXRF analysis of this material. So, the influence of the particle size distributions (modified by means of a high power ultrasound probe) with respect to uncertainty and detection limits for Zr were developed. The main analytical conclusion was the strong correlation between the average particle sizes and the TXRF analytical parameters of Zr measurements, i.e. concentration, accuracy, uncertainty and detection limits.     

Characterization of nuclear materials by total reflection X-ray fluorescence spectrometry

Nuclear energy is one of the available energy options for long term energy security of world. In order to produce electricity using this mode of energy generation in an efficient and safe manner, it is necessary that the materials used for such energy generation comply with the specifications assigned. The major and trace composition of these materials is an important specification for their quality control. Different analytical techniques are used for such quality control. Total reflection X-ray fluorescence (TXRF) is a comparatively new technique having several features well suited for trace and major element determinations in nuclear materials. However, this technique has not been used so far extensively for characterization of nuclear materials. The present paper gives a brief introduction of TXRF, its suitability for nuclear material characterization and some details of the TXRF studies made in our laboratory for the characterization of nuclear materials.     

Trends in total reflection X-ray fluorescence spectrometry for metallic contamination control in semiconductor nanotechnology

The development of transistor manufacturing into the nanoscale regime is accompanied by a continuous awareness concern for contamination control. The ever-increasing demands for analysis sensitivity (in the sub-10⁹ at/cm² regime) combined with the introduction of new materials (i.e. non-silicon based) put severe challenges on the application of analytical techniques for atomic level contamination monitoring. Since many years, total reflection X-ray fluorescence spectrometry (TXRF) has developed as a preferred technique, ideally suitable due to the excellent reflectivity and flatness of the starting Si substrates. Driven by performance enhancement requirements, many new materials are being introduced at the substrate level (Ge, III/V compounds for higher mobility), gate stack (alternative dielectric materials and gate electrodes for capacitance scaling) and interconnect level (low-k and copper for faster switching). This paper reviews some recent developments in the state-of-the-art TXRF developments for semiconductor applications. Among the focus areas are the expansion of the elemental range (through multi-excitation line selection or multi-excitation source to excite low Z as well as high Z elements in one analysis sweep) and dynamic range (by pre-concentration techniques, synchrotron radiation analysis and detector developments). Further, emphasis is also focused towards quantification issues—whereby the three methodologies (micro-droplet, film and bulk type standards) are critically reviewed. Also, a recent development of sweeping TXRF, suitable for fast screening of large surface areas is being discussed. The applications of TXRF in a semiconductor environment are being reviewed. Finally, the performance of TXRF for the various semiconductor applications is assessed with respected to competitive techniques.     

Analytical determination of selenium in medical samples,staple food and dietary supplements by means of total reflection X-ray fluorescence spectroscopy

Selenium is essential for many aspects of human health and, thus, the object of intensive medical research. This demands the use of analytical techniques capable of analysing selenium at low concentrations with high accuracy in widespread matrices and sometimes smallest sample amounts.In connection with the increasing importance of selenium, there is a need for rapid and simple on-site (or near-to-site) selenium analysis in food basics like wheat at processing and production sites, as well as for the analysis of this element in dietary supplements. Common analytical techniques like electrothermal atomic absorption spectroscopy (ETAAS) and inductively-coupled plasma mass spectrometry (ICP-MS) are capable of analysing selenium in medical samples with detection limits in the range from 0.02 to 0.7 μg/l. Since in many cases less complicated and expensive analytical techniques are required, TXRF has been tested regarding its suitability for selenium analysis in different medical, food basics and dietary supplement samples applying most simple sample preparation techniques.The reported results indicate that the accurate analysis of selenium in all sample types is possible. The detection limits of TXRF are in the range from 7 to 12 μg/l for medical samples and 0.1 to 0.2 mg/kg for food basics and dietary supplements. Although this sensitivity is low compared to established techniques, it is sufficient for the physiological concentrations of selenium in the investigated samples.     

现代仪器分析技术在纺织品及皮革分析中的应用

现代分析技术以仪器分析为主,大量先进的现代仪器分析技术已经广泛地应用于纺织品及皮革分析。介绍了气相色谱（GC）、液相色谱（LC）、色谱质谱联用（GC-MS、LC-MS）、原子吸收（AAS）、电感耦合等离子发射光谱（ICP-OES）等现代仪器分析技术在纺织品及皮革分析中的研究进展与应用。     

Optimisation of total-reflection X-ray fluorescence for aerosol analysis

The capabilities of total-reflection X-ray fluorescence (TXRF) analysis were investigated to develop an efficient, simple, rapid and low cost analytical method for aerosols. The technique involves direct impaction of airborne particulate matter on the quartz sample-reflector discs for TXRF. Special attention was paid to bounce-off effects, and hence the aerosol size distributions for the impactor stages; influence of siliconizing the quartz discs on the adhesion of particles; choice of the internal standard; local distribution of the material deposited on the quartz disc; and alternative materials for aerosol collection. Moreover, the proposed method could be used in combination with a one-stage impactor for total aerosol mass collection and analysis.     

Static headspace versus head space solid-phase microextraction (HS-SPME) for the determination of volatile organochlorine compounds in landfill leachates by gas chromatography

The determination of five volatile organochlorine compounds, VOX (chloroform, 1,1,1-trichloroethane, carbon tetrachloride, trichloroethene and tetrachloroethene) in raw landfill leachates and biologically cleansed leachates by GC-MS is investigated. Two extraction and preconcentration procedures were evaluated for recovery of such analies from the samples, including static headspace (HS) and solid phase microextraction by sampling the headspace above the sample (HS-SPME). Optimisation of operating parameters for the best performance of both, sampling and preconcentration techniques was described. Detection limits, time of analysis, precision and linear ranges of both introduction techniques have been established. Application of proposed methods to the determination of the five VOX under study in the above referred samples revealed the absence of such analytes in both leachates. Then both methods were applied to the determination to the five organochlorine compounds under study on spiked leachates samples. While HS-GC-MS offered better analytical precision than HS-SPME-GC-MS, this last technique gave a faster analytical response because no dilution must be done for a reliable VOX determination in landfill leachates. In any case, both sample introduction techniques tested provides excellent recoveries and good analytical precision (ranged from 1 to 3%).     

Analysis of Malodorous Sulfur Gases and Volatile Organometalloid Compounds in Landfill Gas Emissions Using Capillary Gas Chromatography with Programmed Temperature Vaporization Injection and Atomic Emission Detection

Volatile compounds containing Group V and Group VI elements in landfill gases are of concern as a source of toxic pollutants and unpleasant odors. Conventional analytical techniques for these compounds e.g. ICP-MS, ICP-AES are complicated, expensive and time consuming. The use of a simple programmed temperature vaporization injection (PTV) technique coupled to gas chromatography with atomic emission detection (GC-AED) has been successfully demonstrated to identify compounds containing arsenic, antimony, and sulfur in landfill gas. With an adapted PTV injection system (using a combination of a ten-port and a six-port Valco valves), problems associated with AED discharge tube damage due to high carrier gas flow rate during sample loading can be overcome. The gas samples generated from both a laboratory biowaste digester and a domestic landfill site were characterized using these techniques. Large sample gas volumes were adsorbed onto a cooled sorbent trap containing Porapak Q, followed by rapid liberation onto a porous layer open tubular column (PLOT) using programmed thermal desorption. Arsenic and antimony were also detected in the landfill leachate collected from the same landfill site using hydride generation-atomic absorption spectrometry (Hy-AAS). The efficiency of different traps has also been compared.     

Using ICP-OES and SEM-EDX in biosorption studies

We have compared the analytical results obtained by inductively coupled plasma optical emission spectroscopy (ICP-OES) and by scanning electron microscopy with an energy dispersive X-ray analytical system (SEM-EDX) in order to explore the mechanism of metal ions biosorption by biomass using two independent methods. The marine macroalga Enteromorpha sp. was enriched with Cu(II), Mn(II), Zn(II), and Co(II) ions via biosorption, and the biosorption capacity of alga determined from the solution and biomass composition before and after biosorption process was compared. The first technique was used to analyze the composition of the natural and metal-loaded biomass, and additionally the composition of the solution before and after biosorption. The second technique was used to obtain a picture of the surface of natural and metal ion-loaded macroalgae, to map the elements on the cell wall of dry biomass, and to determine their concentration before and after biosorption. ICP-OES showed a better precision and lower detection limit than EDX, but SEM-EDX gave more information regarding the sample composition of Enteromorpha sp. Both techniques confirmed that biosorption is a surface phenomenon, in which alkali and alkaline earth metal ions were exchanged by metal ions from aqueous solution.FigureThe advantages and disadvantages of ICP-OES and SEM-EDX techniques ELECTRONIC SUPPLEMENTARY MATERIAL: The online version of this article (doi:10.1007/s00604-010-0468-0) contains supplementary material, which is available to authorized users.     

Application of X-ray fluorescence analytical techniques in phytoremediation and plant biology studies

Phytoremediation is an emerging technology that employs the use of higher plants for the clean-up of contaminated environments. Progress in the field is however handicapped by limited knowledge of the biological processes involved in plant metal uptake, translocation, tolerance and plant–microbe–soil interactions; therefore a better understanding of the basic biological mechanisms involved in plant/microbe/soil/contaminant interactions would allow further optimization of phytoremediation technologies. In view of the needs of global environmental protection, it is important that in phytoremediation and plant biology studies the analytical procedures for elemental determination in plant tissues and soil should be fast and cheap, with simple sample preparation, and of adequate accuracy and reproducibility. The aim of this study was therefore to present the main characteristics, sample preparation protocols and applications of X-ray fluorescence-based analytical techniques (energy dispersive X-ray fluorescence spectrometry—EDXRF, total reflection X-ray fluorescence spectrometry—TXRF and micro-proton induced X-ray emission—micro-PIXE). Element concentrations in plant leaves from metal polluted and non-polluted sites, as well as standard reference materials, were analyzed by the mentioned techniques, and additionally by instrumental neutron activation analysis (INAA) and atomic absorption spectrometry (AAS). The results were compared and critically evaluated in order to assess the performance and capability of X-ray fluorescence-based techniques in phytoremediation and plant biology studies. It is the EDXRF, which is recommended as suitable to be used in the analyses of a large number of samples, because it is multi-elemental, requires only simple preparation of sample material, and it is analytically comparable to the most frequently used instrumental chemical techniques. The TXRF is compatible to FAAS in sample preparation, but relative to AAS it is fast, sensitive and multi-elemental. The micro-PIXE technique requires rather expensive instrumentation, but offers multi-elemental analysis on the tissue and cellular level.     

Micro-homogeneity studies of boron carbide powders

We have studied the micro-homogeneity of boron carbide powders by inductively coupled plasma optical emission spectrometry (ICP-OES) and total reflection X-ray fluorescence spectrometry (TXRF) using slurry sampling. To get information on the particle size distributions of the powders, the stabilized slurries of boron carbide powders were nebulized, the aerosols were transported into a Batelle impactor and the droplets were collected on the impactor stages bearing TXRF sample holders. In a first series of measurements, parameters of the impaction like the duration of the impaction and the use of glutinous substance on the sample holders were optimized. The different mass size fractions for industrial boron carbide powders were determined by weight measurements of the fractions collected on the different stages. The established particle size distributions were in the range of 0.5 to >16 μm and found similar to those determined by laser diffraction reported elsewhere. Analyses of the mass fractions by slurry sampling TXRF showed that Ca, Ti, Cr, Mn, Fe, Ni and Cu within the measurements errors were homogeneously distributed over the mass fractions between 0.5 and 4 μm and that their concentrations agreed with the bulk composition, as determined with ICP-OES subsequent to digestion. However, light underestimates were found at the 5 (Mn) up to 150 μg g^?1 (Fe) level. Finally, boron carbide powders were washed out with nitric acid with different concentrations and leaching solutions and the residues were analyzed by ICP-OES and TXRF respectively. It is shown that up to 60% of the residual trace impurities in the powder studied can be removed by leaching with 34% (v/v) of nitric acid.

Sample pretreatment strategies for total reflection X-ray fluorescence analysis: A tutorial review

In the last years, there has been a revival of total reflection X-ray fluorescence spectrometry (TXRF), which was firstly applied for analytical purposes in the late 80s. The aim of this work is to discuss and compare the current approaches for sample pretreatment including in situ microdigestion, slurry preparation, acid digestion, extraction, etc. prior to TXRF analysis. Advantages and drawbacks inherent to each of those procedures are considered. A comprehensive revision in the period January 2008–July 2013 about different sample preparation strategies prior to TXRF analysis apart from early pioneering reports dealing with sample pretreatment are included in the review. Non-conventional sample pretreatment approaches such as microflow online preconcentration, lab-on-a-chip, etc., are also discussed.Finally, future prospects in sample preparation prior to TXRF analysis are outlined.     

Application of vapor phase decomposition/total reflection X-ray fluorescence in the silicon semiconductor manufacturing environment

Total reflection X-ray fluorescence (TXRF), in combination with vapor phase decomposition (VPD), provides an efficient method for analyzing trace metal contaminants on silicon wafer surfaces. The progress made in applying these techniques to the analysis of silicon wafers in a wafer fabrication cleanroom environment is reported. Methods of standardization are presented, including the preparation and characterization of VPD standards. While the VPD wafer preparation process increases the sensitivity of the TXRF measurement by at least one order of magnitude, inherent uncertainties associated with the VPD technique itself are apparent. Correlation studies between VPD/TXRF and VPD/inductively coupled plasma mass spectrometry (ICP-MS) are presented.     

A new non-destructive method for chemical analysis of particulate matter filters: the case of manganese air pollution in Vallecamonica (Italy)

Total Reflection X-ray Fluorescence (TXRF) is a well-established technique for chemical analysis, but it is mainly employed for quality control in the electronics semiconductor industry. The capability to analyze liquid and uniformly thin solid samples makes this technique suitable for other applications, and especially in the very critical field of environmental analysis. Comparison with standard methods like inductively coupled plasma (ICP) and atomic absorption spectroscopy (AAS) shows that TXRF is a practical, accurate, and reliable technique in occupational settings. Due to the greater sensitivity necessary in trace heavy metal detection, TXRF is also suitable for environmental chemical analysis. In this paper we show that based on appropriate standards, TXRF can be considered for non-destructive routine quantitative analysis of environmental matrices such as air filters. This work has been developed in the frame of the EU-FP6 PHIME (Public Health Impact of long-term, low-level Mixed element Exposure in susceptible population strata) Integrated Project (www.phime.org). The aim of this work was to investigate Mn air pollution in the area of Vallecamonica (Italy).